TWD225634S - 半導體製造裝置用隔熱組件外罩之部分 - Google Patents

半導體製造裝置用隔熱組件外罩之部分 Download PDF

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Publication number
TWD225634S
TWD225634S TW110306503F TW110306503F TWD225634S TW D225634 S TWD225634 S TW D225634S TW 110306503 F TW110306503 F TW 110306503F TW 110306503 F TW110306503 F TW 110306503F TW D225634 S TWD225634 S TW D225634S
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TW
Taiwan
Prior art keywords
heat
cover
design
manufacturing equipment
semiconductor manufacturing
Prior art date
Application number
TW110306503F
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English (en)
Chinese (zh)
Inventor
岡嶋優作
Original Assignee
日商國際電氣股份有限公司
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Publication date
Application filed by 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司
Publication of TWD225634S publication Critical patent/TWD225634S/zh

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TW110306503F 2021-06-28 2021-11-30 半導體製造裝置用隔熱組件外罩之部分 TWD225634S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-014031 2021-06-28
JP2021014031F JP1706321S (enrdf_load_stackoverflow) 2021-06-28 2021-06-28

Publications (1)

Publication Number Publication Date
TWD225634S true TWD225634S (zh) 2023-06-01

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ID=80218885

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110306503F TWD225634S (zh) 2021-06-28 2021-11-30 半導體製造裝置用隔熱組件外罩之部分

Country Status (3)

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US (1) USD1003243S1 (enrdf_load_stackoverflow)
JP (1) JP1706321S (enrdf_load_stackoverflow)
TW (1) TWD225634S (enrdf_load_stackoverflow)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD390539S (en) * 1996-07-29 1998-02-10 Wakefield Engineering, Inc. Heat sink
USD404369S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Manifold cover for use in a semiconductor wafer heat processing apparatus
US6450346B1 (en) * 2000-06-30 2002-09-17 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing
USD586498S1 (en) * 2007-12-17 2009-02-10 Lighthouse Technology Co., Ltd. Heat dissipating structure of a lamp
USD655801S1 (en) * 2011-06-28 2012-03-13 Cps Products, Inc. Portable submersible condenser/heat exchanger
TWD167985S (zh) * 2013-06-28 2015-05-21 日立國際電氣股份有限公司 反應管之部分
JP1565116S (enrdf_load_stackoverflow) 2016-02-10 2016-12-12
JP1564810S (enrdf_load_stackoverflow) * 2016-02-10 2016-12-05
JP1584146S (enrdf_load_stackoverflow) * 2017-01-31 2017-08-21

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Publication number Publication date
USD1003243S1 (en) 2023-10-31
JP1706321S (enrdf_load_stackoverflow) 2022-01-31

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