TWD209426S - 光罩傳送盒之底座 - Google Patents

光罩傳送盒之底座 Download PDF

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Publication number
TWD209426S
TWD209426S TW108304632F TW108304632F TWD209426S TW D209426 S TWD209426 S TW D209426S TW 108304632 F TW108304632 F TW 108304632F TW 108304632 F TW108304632 F TW 108304632F TW D209426 S TWD209426 S TW D209426S
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TW
Taiwan
Prior art keywords
base
transfer box
mask transfer
designed
case
Prior art date
Application number
TW108304632F
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English (en)
Inventor
莊家和
薛新民
邱銘乾
Original Assignee
家登精密工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 家登精密工業股份有限公司 filed Critical 家登精密工業股份有限公司
Priority to TW108304632F priority Critical patent/TWD209426S/zh
Priority to US29/711,300 priority patent/USD965543S1/en
Publication of TWD209426S publication Critical patent/TWD209426S/zh

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Abstract

【物品用途】;本設計物品係為一種光罩傳送盒之底座，尤其是用於半導體製程中光罩傳送盒之底座，用於保護半導體晶片。;【設計說明】;本案創作光罩傳送盒之底座係為一新穎獨特之設計，藉由獨特地設計的光罩傳送盒之底座，可顯現出先前技藝未曾有過的視覺效果。;圖式所揭露之虛線部分，為本案不主張設計之部分。

Description

光罩傳送盒之底座
本設計物品係為一種光罩傳送盒之底座，尤其是用於半導體製程中光罩傳送盒之底座，用於保護半導體晶片。
本案創作光罩傳送盒之底座係為一新穎獨特之設計，藉由獨特地設計的光罩傳送盒之底座，可顯現出先前技藝未曾有過的視覺效果。
圖式所揭露之虛線部分，為本案不主張設計之部分。
TW108304632F 2019-08-02 2019-08-02 光罩傳送盒之底座 TWD209426S (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW108304632F TWD209426S (zh) 2019-08-02 2019-08-02 光罩傳送盒之底座
US29/711,300 USD965543S1 (en) 2019-08-02 2019-10-30 Base for an ultraviolet light reticle transfer box

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW108304632F TWD209426S (zh) 2019-08-02 2019-08-02 光罩傳送盒之底座

Publications (1)

Publication Number Publication Date
TWD209426S true TWD209426S (zh) 2021-01-21

Family

ID=83440240

Family Applications (1)

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TW108304632F TWD209426S (zh) 2019-08-02 2019-08-02 光罩傳送盒之底座

Country Status (2)

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US (1) USD965543S1 (zh)
TW (1) TWD209426S (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214307S (zh) 2021-07-02 2021-09-21 家登精密工業股份有限公司 光罩盒上蓋支撐件
TWD214306S (zh) 2021-07-02 2021-09-21 家登精密工業股份有限公司 光罩盒下蓋支撐件

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM467088U (zh) 2013-04-12 2013-12-01 Ming-Sheng Chen 光罩撐托結構
TW201524866A (zh) 2013-12-20 2015-07-01 Gudeng Prec Ind Co Ltd 應用於晶圓／光罩載具之塑膠組合物及應用彼之光罩傳送盒
TWM555966U (zh) 2017-10-31 2018-02-21 中勤實業股份有限公司 光罩盒
TW201827919A (zh) 2017-01-26 2018-08-01 家登精密工業股份有限公司 光罩盒
TWI666510B (zh) 2017-01-25 2019-07-21 家登精密工業股份有限公司 極紫外光光罩容器

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US6948619B2 (en) * 2002-07-05 2005-09-27 Taiwan Semiconductor Manufacturing Co., Ltd Reticle pod and reticle with cut areas
US7477358B2 (en) * 2004-09-28 2009-01-13 Nikon Corporation EUV reticle handling system and method
JP4710308B2 (ja) * 2004-10-29 2011-06-29 株式会社ニコン レチクル搬送装置、露光装置、及びレチクルの搬送方法
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TWI414464B (zh) * 2011-01-11 2013-11-11 Gudeng Prec Ind Co Ltd 具有固定結構之極紫外光光罩儲存傳送盒
TWI501910B (zh) * 2011-11-17 2015-10-01 Gudeng Prec Ind Co Ltd 具有排水結構之極紫外光光罩儲存傳送盒
USD712364S1 (en) * 2012-05-09 2014-09-02 Gudeng Precision Industrial Co., Ltd. EUV pod
EP2909110B1 (en) * 2012-10-19 2017-08-30 Entegris, Inc. Reticle pod with cover to baseplate alignment system
USD732482S1 (en) * 2013-03-01 2015-06-23 Randl Industries, Inc. Plaster ring
USD807303S1 (en) * 2016-09-06 2018-01-09 S.J. Electro Systems, Inc. Panel enclosure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM467088U (zh) 2013-04-12 2013-12-01 Ming-Sheng Chen 光罩撐托結構
TW201524866A (zh) 2013-12-20 2015-07-01 Gudeng Prec Ind Co Ltd 應用於晶圓／光罩載具之塑膠組合物及應用彼之光罩傳送盒
TWI666510B (zh) 2017-01-25 2019-07-21 家登精密工業股份有限公司 極紫外光光罩容器
TW201827919A (zh) 2017-01-26 2018-08-01 家登精密工業股份有限公司 光罩盒
TWM555966U (zh) 2017-10-31 2018-02-21 中勤實業股份有限公司 光罩盒

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214307S (zh) 2021-07-02 2021-09-21 家登精密工業股份有限公司 光罩盒上蓋支撐件
TWD214306S (zh) 2021-07-02 2021-09-21 家登精密工業股份有限公司 光罩盒下蓋支撐件

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