TWD209792S - 半導體晶圓架 - Google Patents

半導體晶圓架 Download PDF

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Publication number
TWD209792S
TWD209792S TW108304981F TW108304981F TWD209792S TW D209792 S TWD209792 S TW D209792S TW 108304981 F TW108304981 F TW 108304981F TW 108304981 F TW108304981 F TW 108304981F TW D209792 S TWD209792 S TW D209792S
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TW
Taiwan
Prior art keywords
semiconductor wafer
wafer rack
design
transportable
transportable semiconductor
Prior art date
Application number
TW108304981F
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English (en)
Inventor
麥可Ｗ 佩西
麥可Ｊ 瑟森
亞當Ｆ 柏拓契
勞倫 樂寇帝兒
Original Assignee
美商維高儀器股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 美商維高儀器股份有限公司 filed Critical 美商維高儀器股份有限公司
Publication of TWD209792S publication Critical patent/TWD209792S/zh

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Abstract

【物品用途】;本設計物品係一種可用以置放晶圓的半導體晶圓架。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分。;本設計主要特點在於其外觀輪廓之揭露。

Description

半導體晶圓架
本設計物品係一種可用以置放晶圓的半導體晶圓架。
圖式所揭露之虛線部分，為本案不主張設計之部分。
本設計主要特點在於其外觀輪廓之揭露。
TW108304981F 2019-02-20 2019-08-20 半導體晶圓架 TWD209792S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/680,872 USD908102S1 (en) 2019-02-20 2019-02-20 Transportable semiconductor wafer rack
US29/680,872 2019-02-20

Publications (1)

Publication Number Publication Date
TWD209792S true TWD209792S (zh) 2021-02-11

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ID=69183545

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108304981F TWD209792S (zh) 2019-02-20 2019-08-20 半導體晶圓架

Country Status (3)

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US (1) USD908102S1 (zh)
JP (2) JP1651648S (zh)
TW (1) TWD209792S (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD219121S (zh) 2021-03-09 2022-06-01 日商國際電氣股份有限公司 作業用保護具

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102552458B1 (ko) * 2019-07-31 2023-07-06 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치, 기판 지지구 및 반도체 장치의 제조 방법

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
JP3122364B2 (ja) * 1996-02-06 2001-01-09 東京エレクトロン株式会社 ウエハボート
TW325588B (en) * 1996-02-28 1998-01-21 Asahi Glass Co Ltd Vertical wafer boat
KR19990077350A (ko) * 1996-02-29 1999-10-25 히가시 데쓰로 반도체웨이퍼의 열처리용 보트
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
KR20000002833A (ko) * 1998-06-23 2000-01-15 윤종용 반도체 웨이퍼 보트
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
KR100410982B1 (ko) * 2001-01-18 2003-12-18 삼성전자주식회사 반도체 제조장치용 보트
JP2002324830A (ja) * 2001-02-20 2002-11-08 Mitsubishi Electric Corp 基板熱処理用保持具、基板熱処理装置、半導体装置の製造方法、基板熱処理用保持具の製造方法及び基板熱処理用保持具の構造決定方法
JP4467028B2 (ja) * 2001-05-11 2010-05-26 信越石英株式会社 縦型ウェーハ支持治具
US6811040B2 (en) * 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus
JP4506125B2 (ja) * 2003-07-16 2010-07-21 信越半導体株式会社 熱処理用縦型ボート及びその製造方法
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
KR101075512B1 (ko) * 2005-12-06 2011-10-21 후지쯔 세미컨덕터 가부시키가이샤 반도체 웨이퍼의 수납 케이스 및 반도체 웨이퍼의 수납방법
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD600222S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD616396S1 (en) * 2009-03-12 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
TWD165429S (zh) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD168827S (zh) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD167988S (zh) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 半導體製造裝置用晶舟
KR20160026572A (ko) 2014-09-01 2016-03-09 삼성전자주식회사 기판 처리 장치
JP1563649S (zh) * 2016-02-12 2016-11-21
JP6469046B2 (ja) 2016-07-15 2019-02-13 クアーズテック株式会社 縦型ウエハボート
US11521876B2 (en) 2018-03-07 2022-12-06 Tokyo Electron Limited Horizontal substrate boat
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
CN110246791B (zh) 2019-05-20 2022-10-28 武汉新芯集成电路制造有限公司 一种晶圆传送装置、去除杂质的设备及去除杂质的方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD219121S (zh) 2021-03-09 2022-06-01 日商國際電氣股份有限公司 作業用保護具

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Publication number Publication date
JP1651636S (zh) 2020-01-27
USD908102S1 (en) 2021-01-19
JP1651648S (zh) 2020-01-27

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