US2534846A
(en)
|
1946-06-20 |
1950-12-19 |
Emi Ltd |
Color filter
|
DE1288651B
(de)
|
1963-06-28 |
1969-02-06 |
Siemens Ag |
Anordnung elektrischer Dipole fuer Wellenlaengen unterhalb 1 mm und Verfahren zur Herstellung einer derartigen Anordnung
|
US3539455A
(en)
*
|
1965-10-08 |
1970-11-10 |
Leland C Clark Jr |
Membrane polarographic electrode system and method with electrochemical compensation
|
US3616312A
(en)
|
1966-04-15 |
1971-10-26 |
Ionics |
Hydrazine manufacture
|
US3483349A
(en)
*
|
1968-04-08 |
1969-12-09 |
Sylvania Electric Prod |
Process for assembling an electron tube electrode
|
FR1603131A
(zh)
|
1968-07-05 |
1971-03-22 |
|
|
US3653741A
(en)
|
1970-02-16 |
1972-04-04 |
Alvin M Marks |
Electro-optical dipolar material
|
US3813265A
(en)
|
1970-02-16 |
1974-05-28 |
A Marks |
Electro-optical dipolar material
|
US3725868A
(en)
|
1970-10-19 |
1973-04-03 |
Burroughs Corp |
Small reconfigurable processor for a variety of data processing applications
|
DE2336930A1
(de)
|
1973-07-20 |
1975-02-06 |
Battelle Institut E V |
Infrarot-modulator (ii.)
|
US4099854A
(en)
|
1976-10-12 |
1978-07-11 |
The Unites States Of America As Represented By The Secretary Of The Navy |
Optical notch filter utilizing electric dipole resonance absorption
|
US4196396A
(en)
|
1976-10-15 |
1980-04-01 |
Bell Telephone Laboratories, Incorporated |
Interferometer apparatus using electro-optic material with feedback
|
US4389096A
(en)
|
1977-12-27 |
1983-06-21 |
Matsushita Electric Industrial Co., Ltd. |
Image display apparatus of liquid crystal valve projection type
|
US4445050A
(en)
|
1981-12-15 |
1984-04-24 |
Marks Alvin M |
Device for conversion of light power to electric power
|
US4663083A
(en)
|
1978-05-26 |
1987-05-05 |
Marks Alvin M |
Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics
|
US4228437A
(en)
|
1979-06-26 |
1980-10-14 |
The United States Of America As Represented By The Secretary Of The Navy |
Wideband polarization-transforming electromagnetic mirror
|
NL8001281A
(nl)
|
1980-03-04 |
1981-10-01 |
Philips Nv |
Weergeefinrichting.
|
DE3012253A1
(de)
|
1980-03-28 |
1981-10-15 |
Hoechst Ag, 6000 Frankfurt |
Verfahren zum sichtbarmaschen von ladungsbildern und eine hierfuer geeignete vorichtung
|
US4377324A
(en)
|
1980-08-04 |
1983-03-22 |
Honeywell Inc. |
Graded index Fabry-Perot optical filter device
|
US4441791A
(en)
|
1980-09-02 |
1984-04-10 |
Texas Instruments Incorporated |
Deformable mirror light modulator
|
FR2506026A1
(fr)
|
1981-05-18 |
1982-11-19 |
Radant Etudes |
Procede et dispositif pour l'analyse d'un faisceau de rayonnement d'ondes electromagnetiques hyperfrequence
|
NL8103377A
(nl)
|
1981-07-16 |
1983-02-16 |
Philips Nv |
Weergeefinrichting.
|
US4571603A
(en)
|
1981-11-03 |
1986-02-18 |
Texas Instruments Incorporated |
Deformable mirror electrostatic printer
|
NL8200354A
(nl)
|
1982-02-01 |
1983-09-01 |
Philips Nv |
Passieve weergeefinrichting.
|
US4500171A
(en)
|
1982-06-02 |
1985-02-19 |
Texas Instruments Incorporated |
Process for plastic LCD fill hole sealing
|
US4482213A
(en)
|
1982-11-23 |
1984-11-13 |
Texas Instruments Incorporated |
Perimeter seal reinforcement holes for plastic LCDs
|
US5633652A
(en)
|
1984-02-17 |
1997-05-27 |
Canon Kabushiki Kaisha |
Method for driving optical modulation device
|
DE3427986A1
(de)
|
1984-07-28 |
1986-01-30 |
Deutsche Thomson-Brandt Gmbh, 7730 Villingen-Schwenningen |
Schaltungsanordnung zur ansteuerung von fluessigkristall-anzeigen
|
US4710732A
(en)
|
1984-07-31 |
1987-12-01 |
Texas Instruments Incorporated |
Spatial light modulator and method
|
US4566935A
(en)
|
1984-07-31 |
1986-01-28 |
Texas Instruments Incorporated |
Spatial light modulator and method
|
US5061049A
(en)
|
1984-08-31 |
1991-10-29 |
Texas Instruments Incorporated |
Spatial light modulator and method
|
US4596992A
(en)
|
1984-08-31 |
1986-06-24 |
Texas Instruments Incorporated |
Linear spatial light modulator and printer
|
US4662746A
(en)
|
1985-10-30 |
1987-05-05 |
Texas Instruments Incorporated |
Spatial light modulator and method
|
US5096279A
(en)
|
1984-08-31 |
1992-03-17 |
Texas Instruments Incorporated |
Spatial light modulator and method
|
US4615595A
(en)
|
1984-10-10 |
1986-10-07 |
Texas Instruments Incorporated |
Frame addressed spatial light modulator
|
US4617608A
(en)
|
1984-12-28 |
1986-10-14 |
At&T Bell Laboratories |
Variable gap device and method of manufacture
|
US5172262A
(en)
|
1985-10-30 |
1992-12-15 |
Texas Instruments Incorporated |
Spatial light modulator and method
|
GB2186708B
(en)
|
1985-11-26 |
1990-07-11 |
Sharp Kk |
A variable interferometric device and a process for the production of the same
|
US5835255A
(en)
*
|
1986-04-23 |
1998-11-10 |
Etalon, Inc. |
Visible spectrum modulator arrays
|
GB8610129D0
(en)
|
1986-04-25 |
1986-05-29 |
Secr Defence |
Electro-optical device
|
US4748366A
(en)
|
1986-09-02 |
1988-05-31 |
Taylor George W |
Novel uses of piezoelectric materials for creating optical effects
|
US4786128A
(en)
|
1986-12-02 |
1988-11-22 |
Quantum Diagnostics, Ltd. |
Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction
|
NL8701138A
(nl)
|
1987-05-13 |
1988-12-01 |
Philips Nv |
Electroscopische beeldweergeefinrichting.
|
DE3716485C1
(de)
|
1987-05-16 |
1988-11-24 |
Heraeus Gmbh W C |
Xenon-Kurzbogen-Entladungslampe
|
US4900136A
(en)
|
1987-08-11 |
1990-02-13 |
North American Philips Corporation |
Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel
|
US4956619A
(en)
|
1988-02-19 |
1990-09-11 |
Texas Instruments Incorporated |
Spatial light modulator
|
JPH0242761A
(ja)
|
1988-04-20 |
1990-02-13 |
Matsushita Electric Ind Co Ltd |
アクティブマトリクス基板の製造方法
|
US4856863A
(en)
|
1988-06-22 |
1989-08-15 |
Texas Instruments Incorporated |
Optical fiber interconnection network including spatial light modulator
|
US5028939A
(en)
|
1988-08-23 |
1991-07-02 |
Texas Instruments Incorporated |
Spatial light modulator system
|
JP2700903B2
(ja)
|
1988-09-30 |
1998-01-21 |
シャープ株式会社 |
液晶表示装置
|
US4982184A
(en)
|
1989-01-03 |
1991-01-01 |
General Electric Company |
Electrocrystallochromic display and element
|
US5192946A
(en)
|
1989-02-27 |
1993-03-09 |
Texas Instruments Incorporated |
Digitized color video display system
|
KR100202246B1
(ko)
|
1989-02-27 |
1999-06-15 |
윌리엄 비. 켐플러 |
디지탈화 비디오 시스템을 위한 장치 및 방법
|
US5206629A
(en)
|
1989-02-27 |
1993-04-27 |
Texas Instruments Incorporated |
Spatial light modulator and memory for digitized video display
|
US5079544A
(en)
|
1989-02-27 |
1992-01-07 |
Texas Instruments Incorporated |
Standard independent digitized video system
|
US5287096A
(en)
|
1989-02-27 |
1994-02-15 |
Texas Instruments Incorporated |
Variable luminosity display system
|
US5170156A
(en)
|
1989-02-27 |
1992-12-08 |
Texas Instruments Incorporated |
Multi-frequency two dimensional display system
|
US5272473A
(en)
|
1989-02-27 |
1993-12-21 |
Texas Instruments Incorporated |
Reduced-speckle display system
|
US5214420A
(en)
|
1989-02-27 |
1993-05-25 |
Texas Instruments Incorporated |
Spatial light modulator projection system with random polarity light
|
US5446479A
(en)
|
1989-02-27 |
1995-08-29 |
Texas Instruments Incorporated |
Multi-dimensional array video processor system
|
US5214419A
(en)
|
1989-02-27 |
1993-05-25 |
Texas Instruments Incorporated |
Planarized true three dimensional display
|
US5162787A
(en)
|
1989-02-27 |
1992-11-10 |
Texas Instruments Incorporated |
Apparatus and method for digitized video system utilizing a moving display surface
|
US4900395A
(en)
|
1989-04-07 |
1990-02-13 |
Fsi International, Inc. |
HF gas etching of wafers in an acid processor
|
US5022745A
(en)
|
1989-09-07 |
1991-06-11 |
Massachusetts Institute Of Technology |
Electrostatically deformable single crystal dielectrically coated mirror
|
US4954789A
(en)
|
1989-09-28 |
1990-09-04 |
Texas Instruments Incorporated |
Spatial light modulator
|
US5381253A
(en)
|
1991-11-14 |
1995-01-10 |
Board Of Regents Of University Of Colorado |
Chiral smectic liquid crystal optical modulators having variable retardation
|
US5124834A
(en)
|
1989-11-16 |
1992-06-23 |
General Electric Company |
Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same
|
US5037173A
(en)
|
1989-11-22 |
1991-08-06 |
Texas Instruments Incorporated |
Optical interconnection network
|
JP2910114B2
(ja)
|
1990-01-20 |
1999-06-23 |
ソニー株式会社 |
電子機器
|
US5500635A
(en)
|
1990-02-20 |
1996-03-19 |
Mott; Jonathan C. |
Products incorporating piezoelectric material
|
CH682523A5
(fr)
|
1990-04-20 |
1993-09-30 |
Suisse Electronique Microtech |
Dispositif de modulation de lumière à adressage matriciel.
|
GB9012099D0
(en)
|
1990-05-31 |
1990-07-18 |
Kodak Ltd |
Optical article for multicolour imaging
|
US5142405A
(en)
|
1990-06-29 |
1992-08-25 |
Texas Instruments Incorporated |
Bistable dmd addressing circuit and method
|
US5018256A
(en)
|
1990-06-29 |
1991-05-28 |
Texas Instruments Incorporated |
Architecture and process for integrating DMD with control circuit substrates
|
US5216537A
(en)
|
1990-06-29 |
1993-06-01 |
Texas Instruments Incorporated |
Architecture and process for integrating DMD with control circuit substrates
|
US5083857A
(en)
|
1990-06-29 |
1992-01-28 |
Texas Instruments Incorporated |
Multi-level deformable mirror device
|
US5099353A
(en)
|
1990-06-29 |
1992-03-24 |
Texas Instruments Incorporated |
Architecture and process for integrating DMD with control circuit substrates
|
DE69113150T2
(de)
|
1990-06-29 |
1996-04-04 |
Texas Instruments Inc |
Deformierbare Spiegelvorrichtung mit aktualisiertem Raster.
|
US5153771A
(en)
|
1990-07-18 |
1992-10-06 |
Northrop Corporation |
Coherent light modulation and detector
|
US5526688A
(en)
|
1990-10-12 |
1996-06-18 |
Texas Instruments Incorporated |
Digital flexure beam accelerometer and method
|
US5192395A
(en)
|
1990-10-12 |
1993-03-09 |
Texas Instruments Incorporated |
Method of making a digital flexure beam accelerometer
|
US5044736A
(en)
|
1990-11-06 |
1991-09-03 |
Motorola, Inc. |
Configurable optical filter or display
|
US5602671A
(en)
|
1990-11-13 |
1997-02-11 |
Texas Instruments Incorporated |
Low surface energy passivation layer for micromechanical devices
|
US5331454A
(en)
|
1990-11-13 |
1994-07-19 |
Texas Instruments Incorporated |
Low reset voltage process for DMD
|
FR2669466B1
(fr)
|
1990-11-16 |
1997-11-07 |
Michel Haond |
Procede de gravure de couches de circuit integre a profondeur fixee et circuit integre correspondant.
|
US5233459A
(en)
|
1991-03-06 |
1993-08-03 |
Massachusetts Institute Of Technology |
Electric display device
|
US5136669A
(en)
|
1991-03-15 |
1992-08-04 |
Sperry Marine Inc. |
Variable ratio fiber optic coupler optical signal processing element
|
CA2063744C
(en)
|
1991-04-01 |
2002-10-08 |
Paul M. Urbanus |
Digital micromirror device architecture and timing for use in a pulse-width modulated display system
|
US5142414A
(en)
|
1991-04-22 |
1992-08-25 |
Koehler Dale R |
Electrically actuatable temporal tristimulus-color device
|
US5226099A
(en)
|
1991-04-26 |
1993-07-06 |
Texas Instruments Incorporated |
Digital micromirror shutter device
|
FR2679057B1
(fr)
|
1991-07-11 |
1995-10-20 |
Morin Francois |
Structure d'ecran a cristal liquide, a matrice active et a haute definition.
|
US5179274A
(en)
|
1991-07-12 |
1993-01-12 |
Texas Instruments Incorporated |
Method for controlling operation of optical systems and devices
|
US5168406A
(en)
|
1991-07-31 |
1992-12-01 |
Texas Instruments Incorporated |
Color deformable mirror device and method for manufacture
|
US5254980A
(en)
|
1991-09-06 |
1993-10-19 |
Texas Instruments Incorporated |
DMD display system controller
|
US5358601A
(en)
|
1991-09-24 |
1994-10-25 |
Micron Technology, Inc. |
Process for isotropically etching semiconductor devices
|
US5563398A
(en)
|
1991-10-31 |
1996-10-08 |
Texas Instruments Incorporated |
Spatial light modulator scanning system
|
CA2081753C
(en)
|
1991-11-22 |
2002-08-06 |
Jeffrey B. Sampsell |
Dmd scanner
|
CH681047A5
(en)
|
1991-11-25 |
1992-12-31 |
Landis & Gyr Betriebs Ag |
Measuring parameter, esp. pressure difference, using Fabry-Perot detector - controlling optical length of detector according to output parameter to determine working point on graph
|
US5233385A
(en)
|
1991-12-18 |
1993-08-03 |
Texas Instruments Incorporated |
White light enhanced color field sequential projection
|
US5233456A
(en)
|
1991-12-20 |
1993-08-03 |
Texas Instruments Incorporated |
Resonant mirror and method of manufacture
|
US5228013A
(en)
|
1992-01-10 |
1993-07-13 |
Bik Russell J |
Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays
|
CA2087625C
(en)
|
1992-01-23 |
2006-12-12 |
William E. Nelson |
Non-systolic time delay and integration printing
|
US5296950A
(en)
|
1992-01-31 |
1994-03-22 |
Texas Instruments Incorporated |
Optical signal free-space conversion board
|
US5231532A
(en)
|
1992-02-05 |
1993-07-27 |
Texas Instruments Incorporated |
Switchable resonant filter for optical radiation
|
US5212582A
(en)
|
1992-03-04 |
1993-05-18 |
Texas Instruments Incorporated |
Electrostatically controlled beam steering device and method
|
EP0562424B1
(en)
|
1992-03-25 |
1997-05-28 |
Texas Instruments Incorporated |
Embedded optical calibration system
|
US5312513A
(en)
|
1992-04-03 |
1994-05-17 |
Texas Instruments Incorporated |
Methods of forming multiple phase light modulators
|
US5401983A
(en)
|
1992-04-08 |
1995-03-28 |
Georgia Tech Research Corporation |
Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices
|
US5311360A
(en)
|
1992-04-28 |
1994-05-10 |
The Board Of Trustees Of The Leland Stanford, Junior University |
Method and apparatus for modulating a light beam
|
TW245772B
(zh)
|
1992-05-19 |
1995-04-21 |
Akzo Nv |
|
JPH0651250A
(ja)
|
1992-05-20 |
1994-02-25 |
Texas Instr Inc <Ti> |
モノリシックな空間的光変調器およびメモリのパッケージ
|
US5638084A
(en)
|
1992-05-22 |
1997-06-10 |
Dielectric Systems International, Inc. |
Lighting-independent color video display
|
JPH06214169A
(ja)
|
1992-06-08 |
1994-08-05 |
Texas Instr Inc <Ti> |
制御可能な光学的周期的表面フィルタ
|
US5347377A
(en)
|
1992-06-17 |
1994-09-13 |
Eastman Kodak Company |
Planar waveguide liquid crystal variable retarder
|
US5818095A
(en)
|
1992-08-11 |
1998-10-06 |
Texas Instruments Incorporated |
High-yield spatial light modulator with light blocking layer
|
US5345328A
(en)
|
1992-08-12 |
1994-09-06 |
Sandia Corporation |
Tandem resonator reflectance modulator
|
US5293272A
(en)
|
1992-08-24 |
1994-03-08 |
Physical Optics Corporation |
High finesse holographic fabry-perot etalon and method of fabricating
|
US5327286A
(en)
|
1992-08-31 |
1994-07-05 |
Texas Instruments Incorporated |
Real time optical correlation system
|
US5325116A
(en)
|
1992-09-18 |
1994-06-28 |
Texas Instruments Incorporated |
Device for writing to and reading from optical storage media
|
US5296775A
(en)
|
1992-09-24 |
1994-03-22 |
International Business Machines Corporation |
Cooling microfan arrangements and process
|
US5659374A
(en)
|
1992-10-23 |
1997-08-19 |
Texas Instruments Incorporated |
Method of repairing defective pixels
|
DE69405420T2
(de)
|
1993-01-11 |
1998-03-12 |
Texas Instruments Inc |
Pixelkontrollschaltung für räumlichen Lichtmodulator
|
US6674562B1
(en)
|
1994-05-05 |
2004-01-06 |
Iridigm Display Corporation |
Interferometric modulation of radiation
|
US5461411A
(en)
|
1993-03-29 |
1995-10-24 |
Texas Instruments Incorporated |
Process and architecture for digital micromirror printer
|
DE4317274A1
(de)
|
1993-05-25 |
1994-12-01 |
Bosch Gmbh Robert |
Verfahren zur Herstellung oberflächen-mikromechanischer Strukturen
|
US5559358A
(en)
|
1993-05-25 |
1996-09-24 |
Honeywell Inc. |
Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
|
JP3524122B2
(ja)
|
1993-05-25 |
2004-05-10 |
キヤノン株式会社 |
表示制御装置
|
US5324683A
(en)
|
1993-06-02 |
1994-06-28 |
Motorola, Inc. |
Method of forming a semiconductor structure having an air region
|
US5489952A
(en)
|
1993-07-14 |
1996-02-06 |
Texas Instruments Incorporated |
Method and device for multi-format television
|
US5365283A
(en)
|
1993-07-19 |
1994-11-15 |
Texas Instruments Incorporated |
Color phase control for projection display using spatial light modulator
|
US5673139A
(en)
|
1993-07-19 |
1997-09-30 |
Medcom, Inc. |
Microelectromechanical television scanning device and method for making the same
|
US5526172A
(en)
|
1993-07-27 |
1996-06-11 |
Texas Instruments Incorporated |
Microminiature, monolithic, variable electrical signal processor and apparatus including same
|
US5581272A
(en)
|
1993-08-25 |
1996-12-03 |
Texas Instruments Incorporated |
Signal generator for controlling a spatial light modulator
|
US5552925A
(en)
|
1993-09-07 |
1996-09-03 |
John M. Baker |
Electro-micro-mechanical shutters on transparent substrates
|
FR2710161B1
(fr)
|
1993-09-13 |
1995-11-24 |
Suisse Electronique Microtech |
Réseau miniature d'obturateurs de lumière.
|
US5457493A
(en)
|
1993-09-15 |
1995-10-10 |
Texas Instruments Incorporated |
Digital micro-mirror based image simulation system
|
US5629790A
(en)
|
1993-10-18 |
1997-05-13 |
Neukermans; Armand P. |
Micromachined torsional scanner
|
US5497197A
(en)
|
1993-11-04 |
1996-03-05 |
Texas Instruments Incorporated |
System and method for packaging data into video processor
|
US5526051A
(en)
|
1993-10-27 |
1996-06-11 |
Texas Instruments Incorporated |
Digital television system
|
US5459602A
(en)
|
1993-10-29 |
1995-10-17 |
Texas Instruments |
Micro-mechanical optical shutter
|
US5452024A
(en)
|
1993-11-01 |
1995-09-19 |
Texas Instruments Incorporated |
DMD display system
|
DE4498480C2
(de)
|
1993-11-05 |
1998-06-04 |
Mitsubishi Motors Corp |
Gangänderungssteuerungsverfahren für ein Automatikgetriebe
|
US5517347A
(en)
|
1993-12-01 |
1996-05-14 |
Texas Instruments Incorporated |
Direct view deformable mirror device
|
CA2137059C
(en)
|
1993-12-03 |
2004-11-23 |
Texas Instruments Incorporated |
Dmd architecture to improve horizontal resolution
|
US5583688A
(en)
|
1993-12-21 |
1996-12-10 |
Texas Instruments Incorporated |
Multi-level digital micromirror device
|
US5448314A
(en)
|
1994-01-07 |
1995-09-05 |
Texas Instruments |
Method and apparatus for sequential color imaging
|
US5500761A
(en)
|
1994-01-27 |
1996-03-19 |
At&T Corp. |
Micromechanical modulator
|
US5444566A
(en)
|
1994-03-07 |
1995-08-22 |
Texas Instruments Incorporated |
Optimized electronic operation of digital micromirror devices
|
JPH07253594A
(ja)
|
1994-03-15 |
1995-10-03 |
Fujitsu Ltd |
表示装置
|
US5526327A
(en)
|
1994-03-15 |
1996-06-11 |
Cordova, Jr.; David J. |
Spatial displacement time display
|
EP0674208A1
(en)
|
1994-03-22 |
1995-09-27 |
Shinto Paint Co., Ltd. |
Method for manufacturing of color filter and liquid crystal display
|
US5665997A
(en)
|
1994-03-31 |
1997-09-09 |
Texas Instruments Incorporated |
Grated landing area to eliminate sticking of micro-mechanical devices
|
US6680792B2
(en)
|
1994-05-05 |
2004-01-20 |
Iridigm Display Corporation |
Interferometric modulation of radiation
|
US6040937A
(en)
|
1994-05-05 |
2000-03-21 |
Etalon, Inc. |
Interferometric modulation
|
US20010003487A1
(en)
|
1996-11-05 |
2001-06-14 |
Mark W. Miles |
Visible spectrum modulator arrays
|
US7460291B2
(en)
|
1994-05-05 |
2008-12-02 |
Idc, Llc |
Separable modulator
|
US7297471B1
(en)
|
2003-04-15 |
2007-11-20 |
Idc, Llc |
Method for manufacturing an array of interferometric modulators
|
US6710908B2
(en)
|
1994-05-05 |
2004-03-23 |
Iridigm Display Corporation |
Controlling micro-electro-mechanical cavities
|
US7550794B2
(en)
|
2002-09-20 |
2009-06-23 |
Idc, Llc |
Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
|
US7123216B1
(en)
|
1994-05-05 |
2006-10-17 |
Idc, Llc |
Photonic MEMS and structures
|
EP0686934B1
(en)
|
1994-05-17 |
2001-09-26 |
Texas Instruments Incorporated |
Display device with pointer position detection
|
KR0135391B1
(ko)
|
1994-05-28 |
1998-04-22 |
김광호 |
자기정렬된 액정표시장치용 박막트랜지스터 및 제조방법
|
US5497172A
(en)
|
1994-06-13 |
1996-03-05 |
Texas Instruments Incorporated |
Pulse width modulation for spatial light modulator with split reset addressing
|
US5673106A
(en)
|
1994-06-17 |
1997-09-30 |
Texas Instruments Incorporated |
Printing system with self-monitoring and adjustment
|
US5454906A
(en)
|
1994-06-21 |
1995-10-03 |
Texas Instruments Inc. |
Method of providing sacrificial spacer for micro-mechanical devices
|
US5499062A
(en)
|
1994-06-23 |
1996-03-12 |
Texas Instruments Incorporated |
Multiplexed memory timing with block reset and secondary memory
|
JPH0822024A
(ja)
|
1994-07-05 |
1996-01-23 |
Mitsubishi Electric Corp |
アクティブマトリクス基板およびその製法
|
US5485304A
(en)
|
1994-07-29 |
1996-01-16 |
Texas Instruments, Inc. |
Support posts for micro-mechanical devices
|
US5636052A
(en)
|
1994-07-29 |
1997-06-03 |
Lucent Technologies Inc. |
Direct view display based on a micromechanical modulation
|
DE69517985T2
(de)
*
|
1994-09-02 |
2001-02-22 |
Rad Hassan Dabbaj |
Reflektiver lichtventilmodulator
|
US5703710A
(en)
|
1994-09-09 |
1997-12-30 |
Deacon Research |
Method for manipulating optical energy using poled structure
|
US6053617A
(en)
|
1994-09-23 |
2000-04-25 |
Texas Instruments Incorporated |
Manufacture method for micromechanical devices
|
US5619059A
(en)
|
1994-09-28 |
1997-04-08 |
National Research Council Of Canada |
Color deformable mirror device having optical thin film interference color coatings
|
US6560018B1
(en)
|
1994-10-27 |
2003-05-06 |
Massachusetts Institute Of Technology |
Illumination system for transmissive light valve displays
|
US5650881A
(en)
|
1994-11-02 |
1997-07-22 |
Texas Instruments Incorporated |
Support post architecture for micromechanical devices
|
US5552924A
(en)
|
1994-11-14 |
1996-09-03 |
Texas Instruments Incorporated |
Micromechanical device having an improved beam
|
US5474865A
(en)
|
1994-11-21 |
1995-12-12 |
Sematech, Inc. |
Globally planarized binary optical mask using buried absorbers
|
US5610624A
(en)
|
1994-11-30 |
1997-03-11 |
Texas Instruments Incorporated |
Spatial light modulator with reduced possibility of an on state defect
|
US5726480A
(en)
|
1995-01-27 |
1998-03-10 |
The Regents Of The University Of California |
Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
|
US5567334A
(en)
|
1995-02-27 |
1996-10-22 |
Texas Instruments Incorporated |
Method for creating a digital micromirror device using an aluminum hard mask
|
US5610438A
(en)
|
1995-03-08 |
1997-03-11 |
Texas Instruments Incorporated |
Micro-mechanical device with non-evaporable getter
|
US5636185A
(en)
|
1995-03-10 |
1997-06-03 |
Boit Incorporated |
Dynamically changing liquid crystal display timekeeping apparatus
|
US5535047A
(en)
|
1995-04-18 |
1996-07-09 |
Texas Instruments Incorporated |
Active yoke hidden hinge digital micromirror device
|
US5784190A
(en)
|
1995-04-27 |
1998-07-21 |
John M. Baker |
Electro-micro-mechanical shutters on transparent substrates
|
US5641391A
(en)
|
1995-05-15 |
1997-06-24 |
Hunter; Ian W. |
Three dimensional microfabrication by localized electrodeposition and etching
|
US6969635B2
(en)
|
2000-12-07 |
2005-11-29 |
Reflectivity, Inc. |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
|
US6849471B2
(en)
|
2003-03-28 |
2005-02-01 |
Reflectivity, Inc. |
Barrier layers for microelectromechanical systems
|
JP3489273B2
(ja)
|
1995-06-27 |
2004-01-19 |
株式会社デンソー |
半導体力学量センサの製造方法
|
US5739945A
(en)
|
1995-09-29 |
1998-04-14 |
Tayebati; Parviz |
Electrically tunable optical filter utilizing a deformable multi-layer mirror
|
US6324192B1
(en)
|
1995-09-29 |
2001-11-27 |
Coretek, Inc. |
Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
|
GB9522135D0
(en)
|
1995-10-30 |
1996-01-03 |
John Mcgavigan Holdings Limite |
Display panels
|
US5825528A
(en)
|
1995-12-26 |
1998-10-20 |
Lucent Technologies Inc. |
Phase-mismatched fabry-perot cavity micromechanical modulator
|
JP3799092B2
(ja)
|
1995-12-29 |
2006-07-19 |
アジレント・テクノロジーズ・インク |
光変調装置及びディスプレイ装置
|
US5638946A
(en)
|
1996-01-11 |
1997-06-17 |
Northeastern University |
Micromechanical switch with insulated switch contact
|
US5967163A
(en)
|
1996-01-30 |
1999-10-19 |
Abbott Laboratories |
Actuator and method
|
US5751469A
(en)
|
1996-02-01 |
1998-05-12 |
Lucent Technologies Inc. |
Method and apparatus for an improved micromechanical modulator
|
US6582921B2
(en)
|
1996-07-29 |
2003-06-24 |
Nanosphere, Inc. |
Nanoparticles having oligonucleotides attached thereto and uses thereof
|
US5710656A
(en)
|
1996-07-30 |
1998-01-20 |
Lucent Technologies Inc. |
Micromechanical optical modulator having a reduced-mass composite membrane
|
US5793504A
(en)
|
1996-08-07 |
1998-08-11 |
Northrop Grumman Corporation |
Hybrid angular/spatial holographic multiplexer
|
US5838484A
(en)
|
1996-08-19 |
1998-11-17 |
Lucent Technologies Inc. |
Micromechanical optical modulator with linear operating characteristic
|
US5912758A
(en)
|
1996-09-11 |
1999-06-15 |
Texas Instruments Incorporated |
Bipolar reset for spatial light modulators
|
US5884083A
(en)
|
1996-09-20 |
1999-03-16 |
Royce; Robert |
Computer system to compile non-incremental computer source code to execute within an incremental type computer system
|
US5771116A
(en)
|
1996-10-21 |
1998-06-23 |
Texas Instruments Incorporated |
Multiple bias level reset waveform for enhanced DMD control
|
EP1376684B1
(en)
|
1997-01-21 |
2008-11-26 |
Georgia Tech Research Corporation |
Fabrication of a semiconductor device with air gaps for ultra-low capacitance interconnections
|
DE69806846T2
(de)
|
1997-05-08 |
2002-12-12 |
Texas Instruments Inc., Dallas |
Verbesserungen für räumliche Lichtmodulatoren
|
GB9709659D0
(en)
|
1997-05-13 |
1997-07-02 |
Surface Tech Sys Ltd |
Method and apparatus for etching a workpiece
|
US6480177B2
(en)
|
1997-06-04 |
2002-11-12 |
Texas Instruments Incorporated |
Blocked stepped address voltage for micromechanical devices
|
US5808780A
(en)
|
1997-06-09 |
1998-09-15 |
Texas Instruments Incorporated |
Non-contacting micromechanical optical switch
|
US5867302A
(en)
|
1997-08-07 |
1999-02-02 |
Sandia Corporation |
Bistable microelectromechanical actuator
|
US6031653A
(en)
|
1997-08-28 |
2000-02-29 |
California Institute Of Technology |
Low-cost thin-metal-film interference filters
|
US5822170A
(en)
|
1997-10-09 |
1998-10-13 |
Honeywell Inc. |
Hydrophobic coating for reducing humidity effect in electrostatic actuators
|
US5972193A
(en)
|
1997-10-10 |
1999-10-26 |
Industrial Technology Research Institute |
Method of manufacturing a planar coil using a transparency substrate
|
CN1283369A
(zh)
|
1997-10-31 |
2001-02-07 |
大宇电子株式会社 |
光学投影系统中的薄膜驱动的反光镜组的制造方法
|
US6028690A
(en)
|
1997-11-26 |
2000-02-22 |
Texas Instruments Incorporated |
Reduced micromirror mirror gaps for improved contrast ratio
|
US6180428B1
(en)
|
1997-12-12 |
2001-01-30 |
Xerox Corporation |
Monolithic scanning light emitting devices using micromachining
|
KR100253378B1
(ko)
|
1997-12-15 |
2000-04-15 |
김영환 |
주문형반도체의외부표시장치
|
JPH11211999A
(ja)
|
1998-01-28 |
1999-08-06 |
Teijin Ltd |
光変調素子および表示装置
|
US6016693A
(en)
|
1998-02-09 |
2000-01-25 |
The Regents Of The University Of California |
Microfabrication of cantilevers using sacrificial templates
|
US6610440B1
(en)
|
1998-03-10 |
2003-08-26 |
Bipolar Technologies, Inc |
Microscopic batteries for MEMS systems
|
US6195196B1
(en)
|
1998-03-13 |
2001-02-27 |
Fuji Photo Film Co., Ltd. |
Array-type exposing device and flat type display incorporating light modulator and driving method thereof
|
WO1999052006A2
(en)
|
1998-04-08 |
1999-10-14 |
Etalon, Inc. |
Interferometric modulation of radiation
|
EP0951068A1
(en)
|
1998-04-17 |
1999-10-20 |
Interuniversitair Micro-Elektronica Centrum Vzw |
Method of fabrication of a microstructure having an inside cavity
|
US5943158A
(en)
|
1998-05-05 |
1999-08-24 |
Lucent Technologies Inc. |
Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method
|
US6160833A
(en)
|
1998-05-06 |
2000-12-12 |
Xerox Corporation |
Blue vertical cavity surface emitting laser
|
US6166422A
(en)
|
1998-05-13 |
2000-12-26 |
Lsi Logic Corporation |
Inductor with cobalt/nickel core for integrated circuit structure with high inductance and high Q-factor
|
US6282010B1
(en)
|
1998-05-14 |
2001-08-28 |
Texas Instruments Incorporated |
Anti-reflective coatings for spatial light modulators
|
US6323982B1
(en)
|
1998-05-22 |
2001-11-27 |
Texas Instruments Incorporated |
Yield superstructure for digital micromirror device
|
US6147790A
(en)
|
1998-06-02 |
2000-11-14 |
Texas Instruments Incorporated |
Spring-ring micromechanical device
|
US6295154B1
(en)
|
1998-06-05 |
2001-09-25 |
Texas Instruments Incorporated |
Optical switching apparatus
|
US6496122B2
(en)
|
1998-06-26 |
2002-12-17 |
Sharp Laboratories Of America, Inc. |
Image display and remote control system capable of displaying two distinct images
|
US6395618B2
(en)
|
1998-07-10 |
2002-05-28 |
Stmicroelectronics S.R.L. |
Method for manufacturing integrated structures including removing a sacrificial region
|
US5976902A
(en)
|
1998-08-03 |
1999-11-02 |
Industrial Technology Research Institute |
Method of fabricating a fully self-aligned TFT-LCD
|
US6057903A
(en)
|
1998-08-18 |
2000-05-02 |
International Business Machines Corporation |
Liquid crystal display device employing a guard plane between a layer for measuring touch position and common electrode layer
|
US6710539B2
(en)
|
1998-09-02 |
2004-03-23 |
Micron Technology, Inc. |
Field emission devices having structure for reduced emitter tip to gate spacing
|
US6113239A
(en)
|
1998-09-04 |
2000-09-05 |
Sharp Laboratories Of America, Inc. |
Projection display system for reflective light valves
|
DE19938072A1
(de)
|
1998-09-09 |
2000-03-16 |
Siemens Ag |
Verfahren zum selbstjustierenden Herstellen von zusätzlichen Strukturen auf Substraten mit vorhandenen ersten Strukturen
|
US6249039B1
(en)
|
1998-09-10 |
2001-06-19 |
Bourns, Inc. |
Integrated inductive components and method of fabricating such components
|
JP4074714B2
(ja)
|
1998-09-25 |
2008-04-09 |
富士フイルム株式会社 |
アレイ型光変調素子及び平面ディスプレイの駆動方法
|
US6323834B1
(en)
|
1998-10-08 |
2001-11-27 |
International Business Machines Corporation |
Micromechanical displays and fabrication method
|
JP3919954B2
(ja)
|
1998-10-16 |
2007-05-30 |
富士フイルム株式会社 |
アレイ型光変調素子及び平面ディスプレイの駆動方法
|
US6115326A
(en)
|
1998-10-22 |
2000-09-05 |
Integrated Medical Systems, Inc. |
Ultrasonic micro-machined selectable transducer array
|
KR100281241B1
(ko)
|
1998-11-19 |
2001-06-01 |
하대규 |
파라데이 상자의 윗면의 격자면을 변화시켜 플라즈마 식각을하는 방법
|
US6391675B1
(en)
|
1998-11-25 |
2002-05-21 |
Raytheon Company |
Method and apparatus for switching high frequency signals
|
US6194323B1
(en)
|
1998-12-16 |
2001-02-27 |
Lucent Technologies Inc. |
Deep sub-micron metal etch with in-situ hard mask etch
|
US6284560B1
(en)
|
1998-12-18 |
2001-09-04 |
Eastman Kodak Company |
Method for producing co-planar surface structures
|
US6335831B2
(en)
|
1998-12-18 |
2002-01-01 |
Eastman Kodak Company |
Multilevel mechanical grating device
|
US6215221B1
(en)
|
1998-12-29 |
2001-04-10 |
Honeywell International Inc. |
Electrostatic/pneumatic actuators for active surfaces
|
JP4511739B2
(ja)
|
1999-01-15 |
2010-07-28 |
ザ リージェンツ オブ ザ ユニヴァーシティ オブ カリフォルニア |
マイクロ電子機械システムを形成するための多結晶シリコンゲルマニウム膜
|
JP2000214804A
(ja)
|
1999-01-20 |
2000-08-04 |
Fuji Photo Film Co Ltd |
光変調素子及び露光装置並びに平面表示装置
|
US6537427B1
(en)
|
1999-02-04 |
2003-03-25 |
Micron Technology, Inc. |
Deposition of smooth aluminum films
|
JP2000267140A
(ja)
|
1999-03-16 |
2000-09-29 |
Fujitsu Ltd |
液晶表示装置の製造方法
|
US6606175B1
(en)
|
1999-03-16 |
2003-08-12 |
Sharp Laboratories Of America, Inc. |
Multi-segment light-emitting diode
|
US6713235B1
(en)
|
1999-03-30 |
2004-03-30 |
Citizen Watch Co., Ltd. |
Method for fabricating thin-film substrate and thin-film substrate fabricated by the method
|
US6358854B1
(en)
|
1999-04-21 |
2002-03-19 |
Sandia Corporation |
Method to fabricate layered material compositions
|
JP3592136B2
(ja)
|
1999-06-04 |
2004-11-24 |
キヤノン株式会社 |
液体吐出ヘッドおよびその製造方法と微小電気機械装置の製造方法
|
US6201633B1
(en)
|
1999-06-07 |
2001-03-13 |
Xerox Corporation |
Micro-electromechanical based bistable color display sheets
|
US6359673B1
(en)
|
1999-06-21 |
2002-03-19 |
Eastman Kodak Company |
Sheet having a layer with different light modulating materials
|
JP2001001300A
(ja)
|
1999-06-22 |
2001-01-09 |
Sony Corp |
微細梁構造およびその製造方法
|
US6862029B1
(en)
|
1999-07-27 |
2005-03-01 |
Hewlett-Packard Development Company, L.P. |
Color display system
|
US6525310B2
(en)
|
1999-08-05 |
2003-02-25 |
Microvision, Inc. |
Frequency tunable resonant scanner
|
US6674563B2
(en)
|
2000-04-13 |
2004-01-06 |
Lightconnect, Inc. |
Method and apparatus for device linearization
|
KR100307490B1
(ko)
|
1999-08-31 |
2001-11-01 |
한신혁 |
반도체 장치의 기생 용량 감소 방법
|
KR100333482B1
(ko)
|
1999-09-15 |
2002-04-25 |
오길록 |
초고속 반도체 광변조기 및 그 제조방법
|
WO2003007049A1
(en)
|
1999-10-05 |
2003-01-23 |
Iridigm Display Corporation |
Photonic mems and structures
|
US6351329B1
(en)
|
1999-10-08 |
2002-02-26 |
Lucent Technologies Inc. |
Optical attenuator
|
US7041224B2
(en)
|
1999-10-26 |
2006-05-09 |
Reflectivity, Inc. |
Method for vapor phase etching of silicon
|
US6960305B2
(en)
|
1999-10-26 |
2005-11-01 |
Reflectivity, Inc |
Methods for forming and releasing microelectromechanical structures
|
US6535318B1
(en)
*
|
1999-11-12 |
2003-03-18 |
Jds Uniphase Corporation |
Integrated optoelectronic devices having pop-up mirrors therein and methods of forming and operating same
|
US6549338B1
(en)
|
1999-11-12 |
2003-04-15 |
Texas Instruments Incorporated |
Bandpass filter to reduce thermal impact of dichroic light shift
|
US6552840B2
(en)
|
1999-12-03 |
2003-04-22 |
Texas Instruments Incorporated |
Electrostatic efficiency of micromechanical devices
|
US6674090B1
(en)
|
1999-12-27 |
2004-01-06 |
Xerox Corporation |
Structure and method for planar lateral oxidation in active
|
US6548908B2
(en)
|
1999-12-27 |
2003-04-15 |
Xerox Corporation |
Structure and method for planar lateral oxidation in passive devices
|
US6545335B1
(en)
|
1999-12-27 |
2003-04-08 |
Xerox Corporation |
Structure and method for electrical isolation of optoelectronic integrated circuits
|
US6466358B2
(en)
|
1999-12-30 |
2002-10-15 |
Texas Instruments Incorporated |
Analog pulse width modulation cell for digital micromechanical device
|
US20010040675A1
(en)
|
2000-01-28 |
2001-11-15 |
True Randall J. |
Method for forming a micromechanical device
|
US20020071169A1
(en)
|
2000-02-01 |
2002-06-13 |
Bowers John Edward |
Micro-electro-mechanical-system (MEMS) mirror device
|
US6407851B1
(en)
|
2000-08-01 |
2002-06-18 |
Mohammed N. Islam |
Micromechanical optical switch
|
US6531945B1
(en)
|
2000-03-10 |
2003-03-11 |
Micron Technology, Inc. |
Integrated circuit inductor with a magnetic core
|
US6329297B1
(en)
|
2000-04-21 |
2001-12-11 |
Applied Materials, Inc. |
Dilute remote plasma clean
|
US7008812B1
(en)
|
2000-05-30 |
2006-03-07 |
Ic Mechanics, Inc. |
Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation
|
US6452465B1
(en)
|
2000-06-27 |
2002-09-17 |
M-Squared Filters, Llc |
High quality-factor tunable resonator
|
US6473274B1
(en)
|
2000-06-28 |
2002-10-29 |
Texas Instruments Incorporated |
Symmetrical microactuator structure for use in mass data storage devices, or the like
|
US6736987B1
(en)
|
2000-07-12 |
2004-05-18 |
Techbank Corporation |
Silicon etching apparatus using XeF2
|
CA2352729A1
(en)
|
2000-07-13 |
2002-01-13 |
Creoscitex Corporation Ltd. |
Blazed micro-mechanical light modulator and array thereof
|
US6456420B1
(en)
|
2000-07-27 |
2002-09-24 |
Mcnc |
Microelectromechanical elevating structures
|
US6853129B1
(en)
|
2000-07-28 |
2005-02-08 |
Candescent Technologies Corporation |
Protected substrate structure for a field emission display device
|
US6778155B2
(en)
|
2000-07-31 |
2004-08-17 |
Texas Instruments Incorporated |
Display operation with inserted block clears
|
US7083997B2
(en)
|
2000-08-03 |
2006-08-01 |
Analog Devices, Inc. |
Bonded wafer optical MEMS process
|
US6392233B1
(en)
|
2000-08-10 |
2002-05-21 |
Sarnoff Corporation |
Optomechanical radiant energy detector
|
US6635919B1
(en)
*
|
2000-08-17 |
2003-10-21 |
Texas Instruments Incorporated |
High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications
|
JP4392970B2
(ja)
|
2000-08-21 |
2010-01-06 |
キヤノン株式会社 |
干渉性変調素子を用いる表示素子
|
US6376787B1
(en)
|
2000-08-24 |
2002-04-23 |
Texas Instruments Incorporated |
Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer
|
TWI226103B
(en)
|
2000-08-31 |
2005-01-01 |
Georgia Tech Res Inst |
Fabrication of semiconductor devices with air gaps for ultra low capacitance interconnections and methods of making same
|
US6643069B2
(en)
|
2000-08-31 |
2003-11-04 |
Texas Instruments Incorporated |
SLM-base color projection display having multiple SLM's and multiple projection lenses
|
JP4304852B2
(ja)
|
2000-09-04 |
2009-07-29 |
コニカミノルタホールディングス株式会社 |
非平面液晶表示素子及びその製造方法
|
US6466354B1
(en)
|
2000-09-19 |
2002-10-15 |
Silicon Light Machines |
Method and apparatus for interferometric modulation of light
|
US6522801B1
(en)
|
2000-10-10 |
2003-02-18 |
Agere Systems Inc. |
Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
|
US7268081B2
(en)
|
2000-11-02 |
2007-09-11 |
California Institute Of Technology |
Wafer-level transfer of membranes with gas-phase etching and wet etching methods
|
US6859218B1
(en)
|
2000-11-07 |
2005-02-22 |
Hewlett-Packard Development Company, L.P. |
Electronic display devices and methods
|
DE10055421A1
(de)
|
2000-11-09 |
2002-05-29 |
Bosch Gmbh Robert |
Verfahren zur Erzeugung einer mikromechanischen Struktur und mikromechanische Struktur
|
US6406975B1
(en)
|
2000-11-27 |
2002-06-18 |
Chartered Semiconductor Manufacturing Inc. |
Method for fabricating an air gap shallow trench isolation (STI) structure
|
US6906847B2
(en)
|
2000-12-07 |
2005-06-14 |
Reflectivity, Inc |
Spatial light modulators with light blocking/absorbing areas
|
DE10063991B4
(de)
|
2000-12-21 |
2005-06-02 |
Infineon Technologies Ag |
Verfahren zur Herstellung von mikromechanischen Bauelementen
|
US6775174B2
(en)
|
2000-12-28 |
2004-08-10 |
Texas Instruments Incorporated |
Memory architecture for micromirror cell
|
US6625047B2
(en)
|
2000-12-31 |
2003-09-23 |
Texas Instruments Incorporated |
Micromechanical memory element
|
JP2002207182A
(ja)
|
2001-01-10 |
2002-07-26 |
Sony Corp |
光学多層構造体およびその製造方法、光スイッチング素子、並びに画像表示装置
|
US6947195B2
(en)
|
2001-01-18 |
2005-09-20 |
Ricoh Company, Ltd. |
Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator
|
WO2002061488A1
(en)
|
2001-01-30 |
2002-08-08 |
Matsushita Electric Industrial Co., Ltd. |
Variable mirror and information apparatus comprising variable mirror
|
FR2820513B1
(fr)
|
2001-02-05 |
2004-05-21 |
Centre Nat Rech Scient |
Dispositif optoelectronique a filtrage de longueur d'onde par couplage de cavites
|
JP3858606B2
(ja)
|
2001-02-14 |
2006-12-20 |
セイコーエプソン株式会社 |
干渉フィルタの製造方法、干渉フィルタ、波長可変干渉フィルタの製造方法及び波長可変干渉フィルタ
|
US6620712B2
(en)
|
2001-02-14 |
2003-09-16 |
Intpax, Inc. |
Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications
|
JP2002270575A
(ja)
|
2001-03-13 |
2002-09-20 |
Seiko Epson Corp |
エッチング方法、この方法により製造されたことを特徴とする半導体装置およびエッチング装置
|
JP3888075B2
(ja)
|
2001-03-23 |
2007-02-28 |
セイコーエプソン株式会社 |
光スイッチング素子、光スイッチングデバイス、および画像表示装置
|
US6661561B2
(en)
|
2001-03-26 |
2003-12-09 |
Creo Inc. |
High frequency deformable mirror device
|
US6630786B2
(en)
|
2001-03-30 |
2003-10-07 |
Candescent Technologies Corporation |
Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance
|
US6756317B2
(en)
|
2001-04-23 |
2004-06-29 |
Memx, Inc. |
Method for making a microstructure by surface micromachining
|
US6600587B2
(en)
|
2001-04-23 |
2003-07-29 |
Memx, Inc. |
Surface micromachined optical system with reinforced mirror microstructure
|
US6657832B2
(en)
|
2001-04-26 |
2003-12-02 |
Texas Instruments Incorporated |
Mechanically assisted restoring force support for micromachined membranes
|
US6602791B2
(en)
|
2001-04-27 |
2003-08-05 |
Dalsa Semiconductor Inc. |
Manufacture of integrated fluidic devices
|
US6465355B1
(en)
|
2001-04-27 |
2002-10-15 |
Hewlett-Packard Company |
Method of fabricating suspended microstructures
|
JP2002328313A
(ja)
|
2001-05-01 |
2002-11-15 |
Sony Corp |
光スイッチング素子およびその製造方法、並びに画像表示装置
|
US6808276B2
(en)
|
2001-05-08 |
2004-10-26 |
Axsun Technologies, Inc. |
Suspended high reflectivity coating on release structure and fabrication process therefor
|
US7116287B2
(en)
|
2001-05-09 |
2006-10-03 |
Eastman Kodak Company |
Drive for cholesteric liquid crystal displays
|
US6743570B2
(en)
|
2001-05-25 |
2004-06-01 |
Cornell Research Foundation, Inc. |
Method of using heat-depolymerizable polycarbonate sacrificial layer to create nano-fluidic devices
|
KR100421217B1
(ko)
|
2001-05-30 |
2004-03-02 |
삼성전자주식회사 |
점착 방지 미세 구조물 제조 방법
|
JP2002357777A
(ja)
|
2001-05-31 |
2002-12-13 |
Seiko Epson Corp |
光変調装置及びその製造方法
|
JP2003001598A
(ja)
|
2001-06-21 |
2003-01-08 |
Sony Corp |
Si膜のエッチング方法
|
US7005314B2
(en)
|
2001-06-27 |
2006-02-28 |
Intel Corporation |
Sacrificial layer technique to make gaps in MEMS applications
|
US6822628B2
(en)
|
2001-06-28 |
2004-11-23 |
Candescent Intellectual Property Services, Inc. |
Methods and systems for compensating row-to-row brightness variations of a field emission display
|
JP4032216B2
(ja)
|
2001-07-12 |
2008-01-16 |
ソニー株式会社 |
光学多層構造体およびその製造方法、並びに光スイッチング素子および画像表示装置
|
US6862022B2
(en)
|
2001-07-20 |
2005-03-01 |
Hewlett-Packard Development Company, L.P. |
Method and system for automatically selecting a vertical refresh rate for a video display monitor
|
JP2003059905A
(ja)
|
2001-07-31 |
2003-02-28 |
Applied Materials Inc |
エッチング方法、キャパシタの製造方法、および半導体装置
|
US6589625B1
(en)
|
2001-08-01 |
2003-07-08 |
Iridigm Display Corporation |
Hermetic seal and method to create the same
|
US6600201B2
(en)
|
2001-08-03 |
2003-07-29 |
Hewlett-Packard Development Company, L.P. |
Systems with high density packing of micromachines
|
US6632698B2
(en)
|
2001-08-07 |
2003-10-14 |
Hewlett-Packard Development Company, L.P. |
Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
|
US6577785B1
(en)
|
2001-08-09 |
2003-06-10 |
Sandia Corporation |
Compound semiconductor optical waveguide switch
|
US6717488B2
(en)
|
2001-09-13 |
2004-04-06 |
Nth Tech Corporation |
Resonator with a member having an embedded charge and a method of making thereof
|
US6930364B2
(en)
|
2001-09-13 |
2005-08-16 |
Silicon Light Machines Corporation |
Microelectronic mechanical system and methods
|
US6842009B2
(en)
|
2001-09-13 |
2005-01-11 |
Nth Tech Corporation |
Biohazard sensing system and methods thereof
|
US6590157B2
(en)
|
2001-09-21 |
2003-07-08 |
Eastman Kodak Company |
Sealing structure for highly moisture-sensitive electronic device element and method for fabrication
|
US6866669B2
(en)
|
2001-10-12 |
2005-03-15 |
Cordis Corporation |
Locking handle deployment mechanism for medical device and method
|
US6870581B2
(en)
|
2001-10-30 |
2005-03-22 |
Sharp Laboratories Of America, Inc. |
Single panel color video projection display using reflective banded color falling-raster illumination
|
US6717496B2
(en)
|
2001-11-13 |
2004-04-06 |
The Board Of Trustees Of The University Of Illinois |
Electromagnetic energy controlled low actuation voltage microelectromechanical switch
|
US6782166B1
(en)
|
2001-12-21 |
2004-08-24 |
United States Of America As Represented By The Secretary Of The Air Force |
Optically transparent electrically conductive charge sheet poling electrodes to maximize performance of electro-optic devices
|
US6915046B2
(en)
|
2002-01-22 |
2005-07-05 |
Agere Sysems, Inc. |
Optical systems comprising curved MEMs mirrors and methods for making same
|
US6608268B1
(en)
|
2002-02-05 |
2003-08-19 |
Memtronics, A Division Of Cogent Solutions, Inc. |
Proximity micro-electro-mechanical system
|
US6794119B2
(en)
|
2002-02-12 |
2004-09-21 |
Iridigm Display Corporation |
Method for fabricating a structure for a microelectromechanical systems (MEMS) device
|
JP3558066B2
(ja)
|
2002-02-19 |
2004-08-25 |
ソニー株式会社 |
Mems素子とその製造方法、光変調素子、glvデバイスとその製造方法、及びレーザディスプレイ
|
US6574033B1
(en)
|
2002-02-27 |
2003-06-03 |
Iridigm Display Corporation |
Microelectromechanical systems device and method for fabricating same
|
US7145143B2
(en)
|
2002-03-18 |
2006-12-05 |
Honeywell International Inc. |
Tunable sensor
|
US6965468B2
(en)
|
2003-07-03 |
2005-11-15 |
Reflectivity, Inc |
Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
|
US7027200B2
(en)
|
2002-03-22 |
2006-04-11 |
Reflectivity, Inc |
Etching method used in fabrications of microstructures
|
US7029829B2
(en)
|
2002-04-18 |
2006-04-18 |
The Regents Of The University Of Michigan |
Low temperature method for forming a microcavity on a substrate and article having same
|
US6954297B2
(en)
|
2002-04-30 |
2005-10-11 |
Hewlett-Packard Development Company, L.P. |
Micro-mirror device including dielectrophoretic liquid
|
US6972882B2
(en)
|
2002-04-30 |
2005-12-06 |
Hewlett-Packard Development Company, L.P. |
Micro-mirror device with light angle amplification
|
US20030202264A1
(en)
|
2002-04-30 |
2003-10-30 |
Weber Timothy L. |
Micro-mirror device
|
US20040212026A1
(en)
|
2002-05-07 |
2004-10-28 |
Hewlett-Packard Company |
MEMS device having time-varying control
|
US6791441B2
(en)
*
|
2002-05-07 |
2004-09-14 |
Raytheon Company |
Micro-electro-mechanical switch, and methods of making and using it
|
US6806110B2
(en)
|
2002-05-16 |
2004-10-19 |
Agilent Technologies, Inc. |
Monolithic multi-wavelength vertical-cavity surface emitting laser array and method of manufacture therefor
|
US6953702B2
(en)
|
2002-05-16 |
2005-10-11 |
Agilent Technologies, Inc. |
Fixed wavelength vertical cavity optical devices and method of manufacture therefor
|
US6678085B2
(en)
|
2002-06-12 |
2004-01-13 |
Eastman Kodak Company |
High-contrast display system with scanned conformal grating device
|
US20040001258A1
(en)
|
2002-06-28 |
2004-01-01 |
Mandeep Singh |
Solid state etalons with low thermally-induced optical path length change
|
DE10228946B4
(de)
|
2002-06-28 |
2004-08-26 |
Universität Bremen |
Optischer Modulator, Display, Verwendung eines optischen Modulators und Verfahren zur Herstellung eines optischen Modulators
|
US6741377B2
(en)
|
2002-07-02 |
2004-05-25 |
Iridigm Display Corporation |
Device having a light-absorbing mask and a method for fabricating same
|
US7071289B2
(en)
|
2002-07-11 |
2006-07-04 |
The University Of Connecticut |
Polymers comprising thieno [3,4-b]thiophene and methods of making and using the same
|
JP3648499B2
(ja)
|
2002-07-19 |
2005-05-18 |
株式会社東芝 |
半導体装置の製造方法、及び、半導体装置
|
US20040058531A1
(en)
*
|
2002-08-08 |
2004-03-25 |
United Microelectronics Corp. |
Method for preventing metal extrusion in a semiconductor structure.
|
US6674033B1
(en)
*
|
2002-08-21 |
2004-01-06 |
Ming-Shan Wang |
Press button type safety switch
|
JP2004102022A
(ja)
*
|
2002-09-11 |
2004-04-02 |
Ricoh Co Ltd |
画像形成装置
|
JP2004106074A
(ja)
|
2002-09-13 |
2004-04-08 |
Sony Corp |
中空構造体の製造方法、及びmems素子の製造方法
|
TW544787B
(en)
|
2002-09-18 |
2003-08-01 |
Promos Technologies Inc |
Method of forming self-aligned contact structure with locally etched gate conductive layer
|
KR100512960B1
(ko)
|
2002-09-26 |
2005-09-07 |
삼성전자주식회사 |
플렉서블 mems 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 mems 무선 마이크로폰
|
JP2004133281A
(ja)
|
2002-10-11 |
2004-04-30 |
Seiko Epson Corp |
微小電気機械デバイスの製造方法、プロジェクタ
|
KR100454136B1
(ko)
|
2002-10-23 |
2004-10-26 |
삼성전자주식회사 |
플로팅 게이트의 전하 손실을 막을 수 있는 비휘발성메모리 장치 및 그 제조방법
|
US6747785B2
(en)
|
2002-10-24 |
2004-06-08 |
Hewlett-Packard Development Company, L.P. |
MEMS-actuated color light modulator and methods
|
US6666561B1
(en)
|
2002-10-28 |
2003-12-23 |
Hewlett-Packard Development Company, L.P. |
Continuously variable analog micro-mirror device
|
US7370185B2
(en)
|
2003-04-30 |
2008-05-06 |
Hewlett-Packard Development Company, L.P. |
Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
|
US6741503B1
(en)
|
2002-12-04 |
2004-05-25 |
Texas Instruments Incorporated |
SLM display data address mapping for four bank frame buffer
|
US6944008B2
(en)
|
2002-12-18 |
2005-09-13 |
Lucent Technologies Inc. |
Charge dissipation in electrostatically driven devices
|
TWI289708B
(en)
|
2002-12-25 |
2007-11-11 |
Qualcomm Mems Technologies Inc |
Optical interference type color display
|
US6872654B2
(en)
|
2002-12-26 |
2005-03-29 |
Intel Corporation |
Method of fabricating a bismaleimide (BMI) ASA sacrifical material for an integrated circuit air gap dielectric
|
TW594155B
(en)
|
2002-12-27 |
2004-06-21 |
Prime View Int Corp Ltd |
Optical interference type color display and optical interference modulator
|
TW559686B
(en)
|
2002-12-27 |
2003-11-01 |
Prime View Int Co Ltd |
Optical interference type panel and the manufacturing method thereof
|
JP2004212656A
(ja)
|
2002-12-27 |
2004-07-29 |
Fuji Photo Film Co Ltd |
光変調素子アレイ及び平面ディスプレイ
|
US6808953B2
(en)
|
2002-12-31 |
2004-10-26 |
Robert Bosch Gmbh |
Gap tuning for surface micromachined structures in an epitaxial reactor
|
TW200413810A
(en)
|
2003-01-29 |
2004-08-01 |
Prime View Int Co Ltd |
Light interference display panel and its manufacturing method
|
TW557395B
(en)
|
2003-01-29 |
2003-10-11 |
Yen Sun Technology Corp |
Optical interference type reflection panel and the manufacturing method thereof
|
US7205675B2
(en)
|
2003-01-29 |
2007-04-17 |
Hewlett-Packard Development Company, L.P. |
Micro-fabricated device with thermoelectric device and method of making
|
US20040147056A1
(en)
|
2003-01-29 |
2004-07-29 |
Mckinnell James C. |
Micro-fabricated device and method of making
|
US20040157426A1
(en)
|
2003-02-07 |
2004-08-12 |
Luc Ouellet |
Fabrication of advanced silicon-based MEMS devices
|
US6903487B2
(en)
|
2003-02-14 |
2005-06-07 |
Hewlett-Packard Development Company, L.P. |
Micro-mirror device with increased mirror tilt
|
US7027202B1
(en)
|
2003-02-28 |
2006-04-11 |
Silicon Light Machines Corp |
Silicon substrate as a light modulator sacrificial layer
|
TW200417806A
(en)
|
2003-03-05 |
2004-09-16 |
Prime View Int Corp Ltd |
A structure of a light-incidence electrode of an optical interference display plate
|
US6844953B2
(en)
|
2003-03-12 |
2005-01-18 |
Hewlett-Packard Development Company, L.P. |
Micro-mirror device including dielectrophoretic liquid
|
TWI405196B
(zh)
|
2003-03-13 |
2013-08-11 |
Lg Electronics Inc |
光學記錄媒體及其缺陷區域管理方法及其裝置
|
US6720267B1
(en)
|
2003-03-19 |
2004-04-13 |
United Microelectronics Corp. |
Method for forming a cantilever beam model micro-electromechanical system
|
US6913942B2
(en)
|
2003-03-28 |
2005-07-05 |
Reflectvity, Inc |
Sacrificial layers for use in fabrications of microelectromechanical devices
|
US7128843B2
(en)
|
2003-04-04 |
2006-10-31 |
Hrl Laboratories, Llc |
Process for fabricating monolithic membrane substrate structures with well-controlled air gaps
|
TWI224235B
(en)
|
2003-04-21 |
2004-11-21 |
Prime View Int Co Ltd |
A method for fabricating an interference display cell
|
TW594360B
(en)
|
2003-04-21 |
2004-06-21 |
Prime View Int Corp Ltd |
A method for fabricating an interference display cell
|
TW567355B
(en)
|
2003-04-21 |
2003-12-21 |
Prime View Int Co Ltd |
An interference display cell and fabrication method thereof
|
TWI226504B
(en)
|
2003-04-21 |
2005-01-11 |
Prime View Int Co Ltd |
A structure of an interference display cell
|
US7358966B2
(en)
|
2003-04-30 |
2008-04-15 |
Hewlett-Packard Development Company L.P. |
Selective update of micro-electromechanical device
|
US6829132B2
(en)
|
2003-04-30 |
2004-12-07 |
Hewlett-Packard Development Company, L.P. |
Charge control of micro-electromechanical device
|
US7400489B2
(en)
|
2003-04-30 |
2008-07-15 |
Hewlett-Packard Development Company, L.P. |
System and a method of driving a parallel-plate variable micro-electromechanical capacitor
|
US6853476B2
(en)
|
2003-04-30 |
2005-02-08 |
Hewlett-Packard Development Company, L.P. |
Charge control circuit for a micro-electromechanical device
|
US6741384B1
(en)
|
2003-04-30 |
2004-05-25 |
Hewlett-Packard Development Company, L.P. |
Control of MEMS and light modulator arrays
|
US7072093B2
(en)
|
2003-04-30 |
2006-07-04 |
Hewlett-Packard Development Company, L.P. |
Optical interference pixel display with charge control
|
US6819469B1
(en)
|
2003-05-05 |
2004-11-16 |
Igor M. Koba |
High-resolution spatial light modulator for 3-dimensional holographic display
|
US7218499B2
(en)
|
2003-05-14 |
2007-05-15 |
Hewlett-Packard Development Company, L.P. |
Charge control circuit
|
TW570896B
(en)
|
2003-05-26 |
2004-01-11 |
Prime View Int Co Ltd |
A method for fabricating an interference display cell
|
TW591716B
(en)
*
|
2003-05-26 |
2004-06-11 |
Prime View Int Co Ltd |
A structure of a structure release and manufacturing the same
|
US6917459B2
(en)
|
2003-06-03 |
2005-07-12 |
Hewlett-Packard Development Company, L.P. |
MEMS device and method of forming MEMS device
|
US6811267B1
(en)
|
2003-06-09 |
2004-11-02 |
Hewlett-Packard Development Company, L.P. |
Display system with nonvisible data projection
|
US7221495B2
(en)
|
2003-06-24 |
2007-05-22 |
Idc Llc |
Thin film precursor stack for MEMS manufacturing
|
JP2005051007A
(ja)
|
2003-07-28 |
2005-02-24 |
Tokyo Electron Ltd |
半導体チップの製造方法
|
US7190380B2
(en)
|
2003-09-26 |
2007-03-13 |
Hewlett-Packard Development Company, L.P. |
Generating and displaying spatially offset sub-frames
|
US7173314B2
(en)
|
2003-08-13 |
2007-02-06 |
Hewlett-Packard Development Company, L.P. |
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|
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(en)
|
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|
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(en)
|
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|
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|
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|
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(en)
|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|