MY146154A - Radio frequency mems switch - Google Patents

Radio frequency mems switch

Info

Publication number
MY146154A
MY146154A MYPI20071873A MYPI20071873A MY146154A MY 146154 A MY146154 A MY 146154A MY PI20071873 A MYPI20071873 A MY PI20071873A MY PI20071873 A MYPI20071873 A MY PI20071873A MY 146154 A MY146154 A MY 146154A
Authority
MY
Malaysia
Prior art keywords
mems switch
radio frequency
switch
surface
process
Prior art date
Application number
MYPI20071873A
Inventor
Suraya Sulaiman
Mohd Ismahadi Syoni
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI20071873A priority Critical patent/MY146154A/en
Publication of MY146154A publication Critical patent/MY146154A/en

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0036Switches making use of microelectromechanical systems [MEMS]
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics

Abstract

THERE IS DISCLOSED A METHOD OF FABRICATING RADIO FREQUENCY SURFACE MICROELECTROMECHANICAL (MEMS) SWITCH. THE METHOD UTILIZES FOUR MASKS, EACH CONFIGURED THROUGH PHOTOLITHOGRAPHY PROCESS AT DIFFERENT STAGES THAT RESULTED IN SUBSTANTIALLY PLANAR SILICON DIOXIDE, CRITICAL IN PROVIDING BETTER MECHANICAL PERFORMANCE OF THE RF MEMS SWITCH. THE STEPS INCLUDE, AMONG OTHERS, DEPOSITING SILICON ON GLASS LIQUID TO FILL SMALL HOLES FOR A SMOOTH SILICON OXIDE SURFACE, EMPLOYING BACK ETCH PROCESS AND PERFORMING WET ETCHING BY USING CHEMICAL SOLUTION CALLED PAD ETCH. AN RF MEMS SWITCH THAT COMPRISE OF A LOWER ELECTRODE (30) FORMED ON THE SURFACE OF A SILICON SUBSTRATE (31), AN ALUMINUM MEMBRANE (32) SUSPENDED OVER THE ELECTRODE AND A DIELECTRIC LAYER (33) COVERING THE LOWER ELECTRODE FABRICATED THROUGH THE PROCESS IS ALSO DISCLOSED.
MYPI20071873A 2007-10-31 2007-10-31 Radio frequency mems switch MY146154A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI20071873A MY146154A (en) 2007-10-31 2007-10-31 Radio frequency mems switch

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI20071873A MY146154A (en) 2007-10-31 2007-10-31 Radio frequency mems switch
PCT/MY2008/000122 WO2009057988A2 (en) 2007-10-31 2008-10-22 Radio frequency mems switch

Publications (1)

Publication Number Publication Date
MY146154A true MY146154A (en) 2012-06-29

Family

ID=40591676

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20071873A MY146154A (en) 2007-10-31 2007-10-31 Radio frequency mems switch

Country Status (2)

Country Link
MY (1) MY146154A (en)
WO (1) WO2009057988A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102205942B (en) * 2011-05-13 2015-11-04 上海集成电路研发中心有限公司 MEMS sacrificial layer structure making process
EP2725595A1 (en) * 2012-10-25 2014-04-30 Delfmems MEMS fixed capacitor comprising a gas-containing gap and process for manufacturing said capacitor
CN103345057B (en) * 2013-05-31 2016-06-01 华中科技大学 A kind of miniature bridge architecture and its preparation method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6621387B1 (en) * 2001-02-23 2003-09-16 Analatom Incorporated Micro-electro-mechanical systems switch
KR100893893B1 (en) * 2002-12-02 2009-04-20 삼성전자주식회사 Stiction free ?? ???? switch and method thereof
KR20050068584A (en) * 2003-12-30 2005-07-05 매그나칩 반도체 유한회사 Method of switch in radio frequency integrated circuits
US7265647B2 (en) * 2004-03-12 2007-09-04 The Regents Of The University Of California High isolation tunable MEMS capacitive switch

Also Published As

Publication number Publication date
WO2009057988A3 (en) 2009-07-16
WO2009057988A2 (en) 2009-05-07

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