JP2004354977A - 光学干渉型ディスプレイセルの製造方法 - Google Patents
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Abstract
【解決手段】第一電極および犠牲層を透明基板の上に順番に形成し、少なくとも2個の開口部を第一電極および犠牲層に形成して光学干渉型ディスプレイセルの位置を定める。第二電極を犠牲層および支持体上に形成する。最後に、リモートプラズマエッチング法により犠牲層を除去する。
【選択図】図3A
Description
本発明のさらなる他の目的は、二フッ化キセノンの代わりにフッ素基または塩素基を有するエッチング剤を使用して実施でき、それによって製造コストを低減し、加工装置の再編成および統合から生じる困難を回避できる、光学干渉型ディスプレイセル構造物のための構造物リリースエッチング法を提供することである。
109、301 基板
110、302 第一電極
111、306 犠牲層
112、308 開口部
114 電極
116、316 空洞
200 従来の光学干渉型ディスプレイセル
202 分離構造体
304 第二電極
310 材料層
314 孔
Claims (15)
- 光学干渉型ディスプレイセルを基板上に製造する方法であって、該方法が:
第一電極を前記基板上に形成すること;
犠牲層を第一電極上に形成すること;
少なくとも2個の開口部を前記犠牲層および第一電極中に形成して、光学干渉型ディスプレイセルの位置を定めること;
耐熱絶縁無機支持体を前記各開口部中に形成すること;
第二電極を前記犠牲層および各開口部の耐熱絶縁無機支持体の上に形成すること;そして
前記犠牲層をリモートプラズマエッチング法により除去すること;
を含む、前記方法。 - 第二電極が変形可能な電極である、請求項1に記載の光学干渉型ディスプレイセルの製造方法。
- 第二電極が、その下に犠牲層を露出させている少なくとも1個の孔をさらに含む、請求項1に記載の光学干渉型ディスプレイセルの製造方法。
- リモートプラズマエッチング法において生成されるリモートプラズマの先駆体が、フッ素基または塩素基を有するエッチング試薬である、請求項1に記載の光学干渉型ディスプレイセルの製造方法。
- リモートプラズマエッチング法において生成されるリモートプラズマの先駆体が、CF4、BCl3、NF3、SF6およびこれらの任意の組み合わせからなる群から選択される、請求項1に記載の光学干渉型ディスプレイセルの製造方法。
- 犠牲層が、誘電材料、金属材料およびシリコン材料からなる群から選択される材料で作製される、請求項1に記載の光学干渉型ディスプレイセルの製造方法。
- 耐熱絶縁無機支持体が、ケイ酸塩または誘電材料で作製される、請求項1に記載の光学干渉型ディスプレイセルの製造方法。
- ケイ酸塩が、スピン−オン−ガラス、ホスホシリケートガラス(PSG)、ボロホスホシリケートガラス(BPSG)および酸化ケイ素からなる群から選択される、請求項7に記載の光学干渉型ディスプレイセルの製造方法。
- 誘電材料が、酸化ケイ素、窒化ケイ素、シリコンオキシナイトライド、および金属酸化物からなる群から選択される、請求項7に記載の光学干渉型ディスプレイセルの製造方法。
- 耐熱絶縁無機支持体を形成するステップが、
耐熱絶縁無機材料層を開口部内および犠牲層上に形成すること、そして
犠牲層上の前記耐熱絶縁無機材料層の一部を除去すること、
をさらに含む、請求項1に記載の光学干渉型ディスプレイセルの製造方法。 - 耐熱絶縁無機材料層が、スピンコーティング法により形成される、請求項10に記載の光学干渉型ディスプレイセルの製造方法。
- 耐熱絶縁無機材料層が、化学蒸着(CVD)法により形成される、請求項10に記載の光学干渉型ディスプレイセルの製造方法。
- 犠牲層上の耐熱絶縁無機材料層の一部が、フォトリソグラフィエッチング法により除去される、請求項10に記載の光学干渉型ディスプレイセルの製造方法。
- 犠牲層上の耐熱絶縁無機材料層の一部が、化学機械研磨法により除去される、請求項10に記載の光学干渉型ディスプレイセルの製造方法。
- リモートプラズマエッチング法が、約250℃〜約500℃の温度において実施される、請求項1に記載の光学干渉型ディスプレイセルの製造方法。
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TW092114188A TW570896B (en) | 2003-05-26 | 2003-05-26 | A method for fabricating an interference display cell |
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JP2006215520A (ja) * | 2005-02-04 | 2006-08-17 | Qualcomm Mems Technologies Inc | 光干渉式カラーディスプレイの製造方法 |
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JP2009543121A (ja) * | 2006-06-30 | 2009-12-03 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | 空隙制御を行うmems装置を製造する方法 |
JP2012006142A (ja) * | 2006-06-30 | 2012-01-12 | Qualcomm Mems Technologies Inc | 空隙制御を行うmems装置を製造する方法 |
KR101443303B1 (ko) * | 2006-06-30 | 2014-09-22 | 퀄컴 엠이엠에스 테크놀로지스, 인크. | 공기 간극 제어를 제공하는 mems 장치의 제조 방법 |
JP2009018387A (ja) * | 2007-07-12 | 2009-01-29 | Hitachi Ltd | 微小電気機械システム素子の製造方法 |
JP4607153B2 (ja) * | 2007-07-12 | 2011-01-05 | 株式会社日立製作所 | 微小電気機械システム素子の製造方法 |
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CN106707500A (zh) * | 2017-02-16 | 2017-05-24 | 华南师范大学 | 一种制备电润湿显示支撑板的方法 |
Also Published As
Publication number | Publication date |
---|---|
KR100659687B1 (ko) | 2006-12-21 |
US20060257070A1 (en) | 2006-11-16 |
TW200426108A (en) | 2004-12-01 |
US7706044B2 (en) | 2010-04-27 |
US7078293B2 (en) | 2006-07-18 |
KR20040101899A (ko) | 2004-12-03 |
US20050003667A1 (en) | 2005-01-06 |
TW570896B (en) | 2004-01-11 |
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