TW546426B - Method for producing silicon single crystal - Google Patents

Method for producing silicon single crystal Download PDF

Info

Publication number
TW546426B
TW546426B TW090104216A TW90104216A TW546426B TW 546426 B TW546426 B TW 546426B TW 090104216 A TW090104216 A TW 090104216A TW 90104216 A TW90104216 A TW 90104216A TW 546426 B TW546426 B TW 546426B
Authority
TW
Taiwan
Prior art keywords
seed
tip
silicon
crystal
single crystal
Prior art date
Application number
TW090104216A
Other languages
English (en)
Chinese (zh)
Inventor
Koji Kitagawa
Susumu Sonokawa
Original Assignee
Shinetsu Handotai Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Handotai Kk filed Critical Shinetsu Handotai Kk
Application granted granted Critical
Publication of TW546426B publication Critical patent/TW546426B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/36—Single-crystal growth by pulling from a melt, e.g. Czochralski method characterised by the seed, e.g. its crystallographic orientation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
TW090104216A 2000-02-25 2001-02-23 Method for producing silicon single crystal TW546426B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000049553 2000-02-25

Publications (1)

Publication Number Publication Date
TW546426B true TW546426B (en) 2003-08-11

Family

ID=18571477

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090104216A TW546426B (en) 2000-02-25 2001-02-23 Method for producing silicon single crystal

Country Status (7)

Country Link
US (1) US6506251B1 (fr)
EP (1) EP1193332B1 (fr)
JP (1) JP4165068B2 (fr)
KR (1) KR100799362B1 (fr)
DE (1) DE60138443D1 (fr)
TW (1) TW546426B (fr)
WO (1) WO2001063026A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003192488A (ja) 2001-12-20 2003-07-09 Wacker Nsce Corp シリコン単結晶製造用種結晶及びシリコン単結晶の製造方法
EP1498517B1 (fr) * 2002-04-24 2016-08-31 Shin-Etsu Handotai Co., Ltd. Procédé de production de silicium monocristallin, silicium monocristallin et plaquette de silicium
JP2007223814A (ja) * 2004-02-09 2007-09-06 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 単結晶半導体の製造方法
US7396406B2 (en) 2004-02-09 2008-07-08 Sumco Techxiv Corporation Single crystal semiconductor manufacturing apparatus and method
WO2007120871A2 (fr) * 2006-04-13 2007-10-25 Cabot Corporation Production de silicium selon un procédé en boucle fermée
CN101148777B (zh) * 2007-07-19 2011-03-23 任丙彦 直拉法生长掺镓硅单晶的方法和装置
JP5083001B2 (ja) * 2008-04-08 2012-11-28 株式会社Ｓｕｍｃｏ シリコン単結晶の引上げ方法
JP4862884B2 (ja) * 2008-05-21 2012-01-25 信越半導体株式会社 シリコン単結晶の製造方法
JP5125983B2 (ja) * 2008-10-20 2013-01-23 信越半導体株式会社 シリコン単結晶の製造方法
KR101022918B1 (ko) 2009-02-18 2011-03-16 주식회사 엘지실트론 무네킹 공정을 이용한 단결정 제조 방법
JP5491483B2 (ja) * 2011-11-15 2014-05-14 株式会社タムラ製作所 β−Ｇａ２Ｏ３系単結晶の成長方法
JP5660020B2 (ja) 2011-12-16 2015-01-28 信越半導体株式会社 シリコン単結晶の製造方法
JP5805527B2 (ja) * 2011-12-28 2015-11-04 グローバルウェーハズ・ジャパン株式会社 シリコン単結晶の製造方法
JP5756075B2 (ja) 2012-11-07 2015-07-29 株式会社タムラ製作所 β−Ｇａ２Ｏ３系単結晶の育成方法
CN113073387A (zh) * 2019-08-21 2021-07-06 眉山博雅新材料有限公司 无需退火的氧化物晶体生长方法及设备
CN115110146A (zh) * 2022-06-30 2022-09-27 西安奕斯伟材料科技有限公司 籽晶及拉晶方法、装置
EP4428272A1 (fr) * 2023-03-10 2024-09-11 Siltronic AG Procédé pour le tirage d'un lingot monocristallin en matériau semi-conducteur et plaquette en matériau semi-conducteur

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04104988A (ja) 1990-08-20 1992-04-07 Fujitsu Ltd 単結晶成長方法
JPH04139092A (ja) 1990-09-28 1992-05-13 Fujitsu Ltd シリコン単結晶の製造方法と種結晶
JP2937115B2 (ja) * 1996-03-15 1999-08-23 住友金属工業株式会社 単結晶引き上げ方法
JP3387364B2 (ja) 1997-05-21 2003-03-17 信越半導体株式会社 シリコン種結晶およびその製造方法、並びにこれらの種結晶を用いてシリコン単結晶を製造する方法
US5885344A (en) * 1997-08-08 1999-03-23 Memc Electronic Materials, Inc. Non-dash neck method for single crystal silicon growth
US5932002A (en) * 1997-08-28 1999-08-03 Sumitomo Sitix Corporation Seed crystals for pulling a single crystal and methods using the same
JP3267225B2 (ja) * 1997-12-26 2002-03-18 住友金属工業株式会社 単結晶引き上げ方法、及び単結晶引き上げ装置
JP3402210B2 (ja) * 1997-12-27 2003-05-06 信越半導体株式会社 シリコン単結晶の製造方法
JP3440819B2 (ja) 1998-04-07 2003-08-25 信越半導体株式会社 シリコン単結晶の製造方法
JP3065076B1 (ja) * 1999-05-13 2000-07-12 住友金属工業株式会社 単結晶引き上げ方法及び単結晶引き上げ装置

Also Published As

Publication number Publication date
WO2001063026A1 (fr) 2001-08-30
US6506251B1 (en) 2003-01-14
KR20020006710A (ko) 2002-01-24
KR100799362B1 (ko) 2008-01-30
JP4165068B2 (ja) 2008-10-15
EP1193332B1 (fr) 2009-04-22
EP1193332A4 (fr) 2007-10-31
EP1193332A1 (fr) 2002-04-03
DE60138443D1 (de) 2009-06-04

Similar Documents

Publication Publication Date Title
TW546426B (en) Method for producing silicon single crystal
KR101790904B1 (ko) SiC 단결정 및 그 제조 방법
JP5821958B2 (ja) ＳｉＣ単結晶及びその製造方法
US5911822A (en) Method of manufacturing silicon monocrystal, and seed crystal used in the method
JP5839117B2 (ja) ＳｉＣ単結晶及びその製造方法
WO2003089697A1 (fr) Procede de production de silicium monocristallin, procede de production de tranches de silicium monocristallin, cristal germe destine a la production de silicium monocristallin, lingot de silicium monocristallin, et tranche de silicium monocristallin
TW200914651A (en) Seed crystal for pulling silicon single crystal and method for manufacturing silicon single crystal using the same
JP5660020B2 (ja) シリコン単結晶の製造方法
TW442843B (en) Method of producing a silicon monocrystal
US6056818A (en) Method of manufacturing a silicon monocrystal, and method of holding the same
TW403935B (en) Method for producing silicon single crystal
JP3402210B2 (ja) シリコン単結晶の製造方法
JP2000128691A (ja) シリコン種結晶およびシリコン単結晶の製造方法
JP4215249B2 (ja) シリコン種結晶およびシリコン単結晶の製造方法
JPH10324594A (ja) シリコン種結晶およびその製造方法、並びにこれらの種結晶を用いてシリコン単結晶を製造する方法
JP2000154091A (ja) シリコン単結晶の製造方法および種ホルダ
JP3770287B2 (ja) シリコン単結晶の製造方法
JP3927314B2 (ja) シリコン種結晶およびシリコン単結晶の製造方法
JP3395626B2 (ja) シリコン単結晶の製造方法および種結晶
JPH11209197A (ja) シリコン単結晶の製造方法
JPH11292689A (ja) シリコン単結晶の製造方法および種結晶ならびに種結晶保持具
JP2010030817A (ja) シリコン単結晶の製造方法
JP2019043818A (ja) ＳｉＣ単結晶の製造方法
JPH11217297A (ja) シリコン種結晶の処理方法およびシリコン種結晶ならびにシリコン単結晶の製造方法
JP2010042977A (ja) シリコン単結晶の製造方法

Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees