TW445496B - Wafer mapping system - Google Patents

Wafer mapping system Download PDF

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Publication number
TW445496B
TW445496B TW088117810A TW88117810A TW445496B TW 445496 B TW445496 B TW 445496B TW 088117810 A TW088117810 A TW 088117810A TW 88117810 A TW88117810 A TW 88117810A TW 445496 B TW445496 B TW 445496B
Authority
TW
Taiwan
Prior art keywords
receiver
door panel
wafer
workpiece
transmitter
Prior art date
Application number
TW088117810A
Other languages
English (en)
Chinese (zh)
Inventor
Frederick T Rosenquist
Bruce Richardson
William J Fosnight
Anthony C Bonora
Original Assignee
Asyst Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Technologies filed Critical Asyst Technologies
Application granted granted Critical
Publication of TW445496B publication Critical patent/TW445496B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H10P72/0608—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW088117810A 1998-10-15 1999-12-16 Wafer mapping system TW445496B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/173,710 US6188323B1 (en) 1998-10-15 1998-10-15 Wafer mapping system

Publications (1)

Publication Number Publication Date
TW445496B true TW445496B (en) 2001-07-11

Family

ID=22633178

Family Applications (1)

Application Number Title Priority Date Filing Date
TW088117810A TW445496B (en) 1998-10-15 1999-12-16 Wafer mapping system

Country Status (6)

Country Link
US (1) US6188323B1 (https=)
EP (1) EP1121672A4 (https=)
JP (1) JP4616477B2 (https=)
KR (1) KR100589753B1 (https=)
TW (1) TW445496B (https=)
WO (1) WO2000022589A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI425590B (zh) * 2007-12-20 2014-02-01 大日本網屏製造股份有限公司 基板處理裝置及其基板搬送方法
TWI812466B (zh) * 2017-11-06 2023-08-11 日商昕芙旎雅股份有限公司 對照方法，設備前端模組

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI425590B (zh) * 2007-12-20 2014-02-01 大日本網屏製造股份有限公司 基板處理裝置及其基板搬送方法
TWI812466B (zh) * 2017-11-06 2023-08-11 日商昕芙旎雅股份有限公司 對照方法，設備前端模組

Also Published As

Publication number Publication date
KR20010085928A (ko) 2001-09-07
WO2000022589A9 (en) 2000-09-21
EP1121672A1 (en) 2001-08-08
WO2000022589A1 (en) 2000-04-20
KR100589753B1 (ko) 2006-06-15
US6188323B1 (en) 2001-02-13
JP4616477B2 (ja) 2011-01-19
EP1121672A4 (en) 2009-05-06
JP2002527897A (ja) 2002-08-27

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