TW441119B - Dark current reducing guard ring - Google Patents
Dark current reducing guard ring Download PDFInfo
- Publication number
- TW441119B TW441119B TW087111407A TW87111407A TW441119B TW 441119 B TW441119 B TW 441119B TW 087111407 A TW087111407 A TW 087111407A TW 87111407 A TW87111407 A TW 87111407A TW 441119 B TW441119 B TW 441119B
- Authority
- TW
- Taiwan
- Prior art keywords
- region
- substrate
- heavily doped
- patent application
- photodiode
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 238000009413 insulation Methods 0.000 claims description 13
- 238000002955 isolation Methods 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000004044 response Effects 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 2
- 230000002079 cooperative effect Effects 0.000 claims 3
- 238000010292 electrical insulation Methods 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 230000005693 optoelectronics Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 108091008695 photoreceptors Proteins 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 240000000731 Fagus sylvatica Species 0.000 description 1
- 235000010099 Fagus sylvatica Nutrition 0.000 description 1
- 208000035480 Ring chromosome 8 syndrome Diseases 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000000700 radioactive tracer Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000008521 reorganization Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/28—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors
- H10F30/2823—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors the devices being conductor-insulator-semiconductor devices, e.g. diodes or charge-coupled devices [CCD]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/15—Charge-coupled device [CCD] image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/807—Pixel isolation structures
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/941,800 US5859450A (en) | 1997-09-30 | 1997-09-30 | Dark current reducing guard ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW441119B true TW441119B (en) | 2001-06-16 |
Family
ID=25477082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW087111407A TW441119B (en) | 1997-09-30 | 1998-07-14 | Dark current reducing guard ring |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5859450A (enExample) |
| EP (1) | EP1034570B1 (enExample) |
| JP (1) | JP4309574B2 (enExample) |
| KR (1) | KR100371457B1 (enExample) |
| AU (1) | AU8291798A (enExample) |
| DE (1) | DE69833760T2 (enExample) |
| RU (1) | RU2178600C1 (enExample) |
| TW (1) | TW441119B (enExample) |
| WO (1) | WO1999017380A1 (enExample) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100253372B1 (ko) | 1997-12-08 | 2000-04-15 | 김영환 | 반도체 소자 및 그 제조방법 |
| TW396645B (en) * | 1998-06-16 | 2000-07-01 | United Microelectronics Corp | Manufacturing method of CMOS sensor devices |
| US6545711B1 (en) * | 1998-11-02 | 2003-04-08 | Agilent Technologies, Inc. | Photo diode pixel sensor array having a guard ring |
| US6073343A (en) * | 1998-12-22 | 2000-06-13 | General Electric Company | Method of providing a variable guard ring width between detectors on a substrate |
| US6147366A (en) * | 1999-02-08 | 2000-11-14 | Intel Corporation | On chip CMOS optical element |
| US6310366B1 (en) * | 1999-06-16 | 2001-10-30 | Micron Technology, Inc. | Retrograde well structure for a CMOS imager |
| US6445014B1 (en) * | 1999-06-16 | 2002-09-03 | Micron Technology Inc. | Retrograde well structure for a CMOS imager |
| US6512401B2 (en) * | 1999-09-10 | 2003-01-28 | Intel Corporation | Output buffer for high and low voltage bus |
| US7133074B1 (en) | 1999-09-28 | 2006-11-07 | Zoran Corporation | Image sensor circuits including sampling circuits used therein for performing correlated double sampling |
| US6465862B1 (en) * | 1999-10-05 | 2002-10-15 | Brannon Harris | Method and apparatus for implementing efficient CMOS photo sensors |
| US6194258B1 (en) | 2000-01-18 | 2001-02-27 | Taiwan Semiconductor Manufacturing Company | Method of forming an image sensor cell and a CMOS logic circuit device |
| US6627475B1 (en) | 2000-01-18 | 2003-09-30 | Taiwan Semiconductor Manufacturing Company | Buried photodiode structure for CMOS image sensor |
| DE10003472C1 (de) | 2000-01-27 | 2001-04-26 | Infineon Technologies Ag | Zufallszahlengenerator |
| US6309905B1 (en) | 2000-01-31 | 2001-10-30 | Taiwan Semiconductor Manufacturing Company | Stripe photodiode element with high quantum efficiency for an image sensor cell |
| EP1208599A1 (en) | 2000-03-09 | 2002-05-29 | Koninklijke Philips Electronics N.V. | Solid state imaging sensor in a submicron technology and method of manufacturing and use of a solid state imaging sensor |
| US6365926B1 (en) | 2000-09-20 | 2002-04-02 | Eastman Kodak Company | CMOS active pixel with scavenging diode |
| KR20020096336A (ko) * | 2001-06-19 | 2002-12-31 | 삼성전자 주식회사 | 씨모스형 촬상 장치 |
| US20030049925A1 (en) * | 2001-09-10 | 2003-03-13 | Layman Paul Arthur | High-density inter-die interconnect structure |
| KR100454074B1 (ko) * | 2001-12-26 | 2004-10-26 | 동부전자 주식회사 | 반도체 소자의 이미지 센서 제조 방법 |
| US6534356B1 (en) | 2002-04-09 | 2003-03-18 | Taiwan Semiconductor Manufacturing Company | Method of reducing dark current for an image sensor device via use of a polysilicon pad |
| AU2002354316A1 (en) * | 2002-11-05 | 2004-06-07 | Akademia Gorniczo-Hutnicza | Monolithic active pixel dosimeter |
| US6818930B2 (en) * | 2002-11-12 | 2004-11-16 | Micron Technology, Inc. | Gated isolation structure for imagers |
| KR100907884B1 (ko) * | 2002-12-31 | 2009-07-15 | 동부일렉트로닉스 주식회사 | 반도체 포토 다이오드 및 이의 제조 방법 |
| US6897082B2 (en) * | 2003-06-16 | 2005-05-24 | Micron Technology, Inc. | Method of forming well for CMOS imager |
| KR100535924B1 (ko) * | 2003-09-22 | 2005-12-09 | 동부아남반도체 주식회사 | 시모스 이미지 센서 및 그 제조방법 |
| US7180049B2 (en) * | 2004-11-08 | 2007-02-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor with optical guard rings and method for forming the same |
| US7348651B2 (en) * | 2004-12-09 | 2008-03-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Pinned photodiode fabricated with shallow trench isolation |
| US7342268B2 (en) * | 2004-12-23 | 2008-03-11 | International Business Machines Corporation | CMOS imager with Cu wiring and method of eliminating high reflectivity interfaces therefrom |
| US7564083B2 (en) * | 2005-02-25 | 2009-07-21 | United Microelectronics Corp. | Active pixel sensor |
| EP1921685A4 (en) * | 2005-08-31 | 2014-12-17 | Fujitsu Semiconductor Ltd | PHOTODIODE, SOLID IMAGING DEVICE, AND METHOD FOR MANUFACTURING SAME |
| US8259293B2 (en) * | 2007-03-15 | 2012-09-04 | Johns Hopkins University | Deep submicron and nano CMOS single photon photodetector pixel with event based circuits for readout data-rate reduction communication system |
| US7598575B1 (en) | 2007-09-12 | 2009-10-06 | National Semiconductor Corporation | Semiconductor die with reduced RF attenuation |
| US8188578B2 (en) * | 2008-05-29 | 2012-05-29 | Mediatek Inc. | Seal ring structure for integrated circuits |
| US8815634B2 (en) * | 2008-10-31 | 2014-08-26 | Varian Semiconductor Equipment Associates, Inc. | Dark currents and reducing defects in image sensors and photovoltaic junctions |
| US8138531B2 (en) * | 2009-09-17 | 2012-03-20 | International Business Machines Corporation | Structures, design structures and methods of fabricating global shutter pixel sensor cells |
| US9171726B2 (en) * | 2009-11-06 | 2015-10-27 | Infineon Technologies Ag | Low noise semiconductor devices |
| JP5631668B2 (ja) * | 2010-09-02 | 2014-11-26 | Ｎｔｔエレクトロニクス株式会社 | アバランシ・フォトダイオード |
| KR101804268B1 (ko) | 2010-11-02 | 2018-01-11 | 삼성전자주식회사 | 후면수광 이미지 센서에서 노이즈 차단을 위한 깊은 가드링 구조 및 잡음방지영역을 갖는 이미지센서 및 그 제조방법 |
| RU2497319C1 (ru) * | 2012-02-28 | 2013-10-27 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "Высшая школа экономики" | Печатная плата для бортовой радиоэлектронной аппаратуры космических аппаратов |
| KR102678796B1 (ko) * | 2023-01-13 | 2024-06-26 | 주식회사 트루픽셀 | 단일 광자 검출기, 전자 장치, 및 라이다 장치 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS526097A (en) * | 1975-07-03 | 1977-01-18 | Moririka:Kk | Planar type photodiode |
| US4096622A (en) * | 1975-07-31 | 1978-06-27 | General Motors Corporation | Ion implanted Schottky barrier diode |
| US4137109A (en) * | 1976-04-12 | 1979-01-30 | Texas Instruments Incorporated | Selective diffusion and etching method for isolation of integrated logic circuit |
| US4261095A (en) * | 1978-12-11 | 1981-04-14 | International Business Machines Corporation | Self aligned schottky guard ring |
| US4414737A (en) * | 1981-01-30 | 1983-11-15 | Tokyo Shibaura Denki Kabushiki Kaisha | Production of Schottky barrier diode |
| US4691435A (en) * | 1981-05-13 | 1987-09-08 | International Business Machines Corporation | Method for making Schottky diode having limited area self-aligned guard ring |
| JPS58115873A (ja) * | 1981-12-28 | 1983-07-09 | Fujitsu Ltd | 半導体受光素子 |
| US4507853A (en) * | 1982-08-23 | 1985-04-02 | Texas Instruments Incorporated | Metallization process for integrated circuits |
| US4549914A (en) * | 1984-04-09 | 1985-10-29 | At&T Bell Laboratories | Integrated circuit contact technique |
| JPS6191973A (ja) * | 1984-10-11 | 1986-05-10 | Kanegafuchi Chem Ind Co Ltd | 耐熱性薄膜光電変換素子およびその製法 |
| US4656732A (en) * | 1984-09-26 | 1987-04-14 | Texas Instruments Incorporated | Integrated circuit fabrication process |
| US4722910A (en) * | 1986-05-27 | 1988-02-02 | Analog Devices, Inc. | Partially self-aligned metal contact process |
| US5221856A (en) * | 1989-04-05 | 1993-06-22 | U.S. Philips Corp. | Bipolar transistor with floating guard region under extrinsic base |
| JPH036860A (ja) * | 1989-06-02 | 1991-01-14 | Nec Corp | 固体撮像素子 |
| JP2661341B2 (ja) * | 1990-07-24 | 1997-10-08 | 三菱電機株式会社 | 半導体受光素子 |
| JPH0582823A (ja) * | 1991-09-20 | 1993-04-02 | Sharp Corp | フオトトランジスタ |
| JPH0677452A (ja) * | 1992-06-26 | 1994-03-18 | Nikon Corp | 固体撮像装置 |
| RU2071146C1 (ru) * | 1992-10-27 | 1996-12-27 | Воронежское высшее военное авиационное инженерное училище | Интегральная схема |
| US5438217A (en) * | 1994-04-29 | 1995-08-01 | General Electric Company | Planar avalanche photodiode array with sidewall segment |
| US5614744A (en) * | 1995-08-04 | 1997-03-25 | National Semiconductor Corporation | CMOS-based, low leakage active pixel array with anti-blooming isolation |
| US5841158A (en) * | 1996-03-01 | 1998-11-24 | Foveonics, Inc. | Low-stress photodiode with reduced junction leakage |
| JPH09321332A (ja) * | 1996-05-31 | 1997-12-12 | Oki Electric Ind Co Ltd | 半導体受光素子の製造方法 |
| JP2996943B2 (ja) * | 1998-03-09 | 2000-01-11 | 株式会社東芝 | 半導体受光装置及びその製造方法 |
-
1997
- 1997-09-30 US US08/941,800 patent/US5859450A/en not_active Expired - Fee Related
-
1998
- 1998-07-06 DE DE69833760T patent/DE69833760T2/de not_active Expired - Fee Related
- 1998-07-06 EP EP98933209A patent/EP1034570B1/en not_active Expired - Lifetime
- 1998-07-06 WO PCT/US1998/014024 patent/WO1999017380A1/en not_active Ceased
- 1998-07-06 AU AU82917/98A patent/AU8291798A/en not_active Abandoned
- 1998-07-06 RU RU2000111514/28A patent/RU2178600C1/ru not_active IP Right Cessation
- 1998-07-06 KR KR10-2000-7003432A patent/KR100371457B1/ko not_active Expired - Fee Related
- 1998-07-06 JP JP2000514343A patent/JP4309574B2/ja not_active Expired - Fee Related
- 1998-07-14 TW TW087111407A patent/TW441119B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR100371457B1 (ko) | 2003-02-07 |
| RU2178600C1 (ru) | 2002-01-20 |
| DE69833760D1 (de) | 2006-05-04 |
| WO1999017380A1 (en) | 1999-04-08 |
| HK1029439A1 (en) | 2001-03-30 |
| DE69833760T2 (de) | 2006-09-07 |
| JP2001518719A (ja) | 2001-10-16 |
| EP1034570A1 (en) | 2000-09-13 |
| EP1034570A4 (en) | 2002-09-25 |
| US5859450A (en) | 1999-01-12 |
| AU8291798A (en) | 1999-04-23 |
| KR20010030818A (ko) | 2001-04-16 |
| EP1034570B1 (en) | 2006-03-08 |
| JP4309574B2 (ja) | 2009-08-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |