TW202313432A - 基板保持裝置 - Google Patents

基板保持裝置 Download PDF

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Publication number
TW202313432A
TW202313432A TW110145090A TW110145090A TW202313432A TW 202313432 A TW202313432 A TW 202313432A TW 110145090 A TW110145090 A TW 110145090A TW 110145090 A TW110145090 A TW 110145090A TW 202313432 A TW202313432 A TW 202313432A
Authority
TW
Taiwan
Prior art keywords
substrate
suction
air supply
holding
holding surface
Prior art date
Application number
TW110145090A
Other languages
English (en)
Chinese (zh)
Inventor
橫山雅樹
Original Assignee
日商中外爐工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商中外爐工業股份有限公司 filed Critical 日商中外爐工業股份有限公司
Publication of TW202313432A publication Critical patent/TW202313432A/zh

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
TW110145090A 2021-09-15 2021-12-02 基板保持裝置 TW202313432A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021150138A JP2022171524A (ja) 2021-09-15 2021-09-15 基板保持装置
JP2021-150138 2021-09-15

Publications (1)

Publication Number Publication Date
TW202313432A true TW202313432A (zh) 2023-04-01

Family

ID=83946204

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110145090A TW202313432A (zh) 2021-09-15 2021-12-02 基板保持裝置

Country Status (3)

Country Link
JP (1) JP2022171524A (ja)
CN (1) CN115810556A (ja)
TW (1) TW202313432A (ja)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4090313B2 (ja) * 2002-09-11 2008-05-28 大日本スクリーン製造株式会社 基板保持装置および基板処理装置
JP2006229029A (ja) * 2005-02-18 2006-08-31 Nikon Corp ステージ装置、露光装置及びデバイスの製造方法
JP2016111093A (ja) * 2014-12-03 2016-06-20 サムコ株式会社 基板保持装置

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Publication number Publication date
JP2022171524A (ja) 2022-11-11
CN115810556A (zh) 2023-03-17

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