TW201614846A - Source/drain contacts for non-planar transistors - Google Patents

Source/drain contacts for non-planar transistors

Info

Publication number
TW201614846A
TW201614846A TW104131438A TW104131438A TW201614846A TW 201614846 A TW201614846 A TW 201614846A TW 104131438 A TW104131438 A TW 104131438A TW 104131438 A TW104131438 A TW 104131438A TW 201614846 A TW201614846 A TW 201614846A
Authority
TW
Taiwan
Prior art keywords
source
planar transistors
drain contacts
titanium
drain
Prior art date
Application number
TW104131438A
Other languages
English (en)
Other versions
TWI595662B (zh
Inventor
Sameer S Pradhan
Subhash M Joshi
Jin-Sung Chun
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of TW201614846A publication Critical patent/TW201614846A/zh
Application granted granted Critical
Publication of TWI595662B publication Critical patent/TWI595662B/zh

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    • H—ELECTRICITY
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    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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    • H01L21/02532—Silicon, silicon germanium, germanium
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/6656—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using multiple spacer layers, e.g. multiple sidewall spacers
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    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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    • H01L29/66409—Unipolar field-effect transistors
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    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
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    • H01L29/66409—Unipolar field-effect transistors
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    • H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
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    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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    • H01L29/7851—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET with the body tied to the substrate
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides
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    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
    • H01L21/76834—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers formation of thin insulating films on the sidewalls or on top of conductors
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    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
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    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
    • H01L21/76855—After-treatment introducing at least one additional element into the layer
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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
TW104131438A 2011-10-01 2012-09-27 用於非平面電晶體之源極／汲極接點（二） TWI595662B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2011/054479 WO2013048524A1 (en) 2011-10-01 2011-10-01 Source/drain contacts for non-planar transistors

Publications (2)

Publication Number Publication Date
TW201614846A true TW201614846A (en) 2016-04-16
TWI595662B TWI595662B (zh) 2017-08-11

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TW106117658A TWI661561B (zh) 2011-10-01 2012-09-27 用於非平面電晶體之源極／汲極接點（三）
TW101135607A TWI512987B (zh) 2011-10-01 2012-09-27 用於非平面電晶體之源極／汲極接點
TW108108918A TWI701767B (zh) 2011-10-01 2012-09-27 用於非平面電晶體之源極/汲極接點（四）
TW104131438A TWI595662B (zh) 2011-10-01 2012-09-27 用於非平面電晶體之源極／汲極接點（二）

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TW106117658A TWI661561B (zh) 2011-10-01 2012-09-27 用於非平面電晶體之源極／汲極接點（三）
TW101135607A TWI512987B (zh) 2011-10-01 2012-09-27 用於非平面電晶體之源極／汲極接點
TW108108918A TWI701767B (zh) 2011-10-01 2012-09-27 用於非平面電晶體之源極/汲極接點（四）

Country Status (5)

Country Link
US (7) US8981435B2 (zh)
CN (1) CN103918083A (zh)
DE (1) DE112011105702T5 (zh)
TW (4) TWI661561B (zh)
WO (1) WO2013048524A1 (zh)

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DE112011105702T5 (de) 2011-10-01 2014-07-17 Intel Corporation Source-/Drain-Kontakte für nicht planare Transistoren
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US9564363B1 (en) * 2015-08-19 2017-02-07 Taiwan Semiconductor Manufacturing Company, Ltd. Method of forming butted contact
US10510851B2 (en) * 2016-11-29 2019-12-17 Taiwan Semiconductor Manufacturing Company, Ltd. Low resistance contact method and structure
US10084065B1 (en) 2017-03-13 2018-09-25 International Business Machines Corporation Reducing resistance of bottom source/drain in vertical channel devices
US10804148B2 (en) * 2017-08-25 2020-10-13 International Business Machines Corporation Buried contact to provide reduced VFET feature-to-feature tolerance requirements
JP2019050255A (ja) 2017-09-08 2019-03-28 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
US10347720B2 (en) 2017-10-30 2019-07-09 Taiwan Semiconductor Manufacturing Co., Ltd. Doping for semiconductor device with conductive feature
US10559686B2 (en) * 2018-06-26 2020-02-11 Globalfoundries Inc. Methods of forming gate contact over active region for vertical FinFET, and structures formed thereby
US11450673B2 (en) * 2020-07-31 2022-09-20 Taiwan Semiconductor Manufacturing Co., Ltd. Connection between source/drain and gate

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