TW201228914A - Substrate transfer apparatus and substrate transfer method - Google Patents

Substrate transfer apparatus and substrate transfer method Download PDF

Info

Publication number
TW201228914A
TW201228914A TW100129360A TW100129360A TW201228914A TW 201228914 A TW201228914 A TW 201228914A TW 100129360 A TW100129360 A TW 100129360A TW 100129360 A TW100129360 A TW 100129360A TW 201228914 A TW201228914 A TW 201228914A
Authority
TW
Taiwan
Prior art keywords
substrate
roller
unit
transfer
wheel
Prior art date
Application number
TW100129360A
Other languages
English (en)
Chinese (zh)
Inventor
Yasutaka Soma
Naoki Imoto
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW201228914A publication Critical patent/TW201228914A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW100129360A 2010-09-09 2011-08-17 Substrate transfer apparatus and substrate transfer method TW201228914A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010201539A JP5224612B2 (ja) 2010-09-09 2010-09-09 基板受渡装置及び基板受渡方法

Publications (1)

Publication Number Publication Date
TW201228914A true TW201228914A (en) 2012-07-16

Family

ID=46005562

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100129360A TW201228914A (en) 2010-09-09 2011-08-17 Substrate transfer apparatus and substrate transfer method

Country Status (4)

Country Link
JP (1) JP5224612B2 (ja)
KR (1) KR20120026457A (ja)
CN (1) CN102442542A (ja)
TW (1) TW201228914A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3823012A4 (en) * 2018-07-12 2022-03-23 Ebara Corporation SUBSTRATE CONVEYING DEVICE AND SUBSTRATE PROCESSING DEVICE WITH A SUBSTRATE CONVEYING DEVICE

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101268368B1 (ko) 2012-12-06 2013-05-28 신철근 롤러 컨베이어용 말림 방지가이드
CN107499853A (zh) * 2017-09-20 2017-12-22 武汉华星光电技术有限公司 输送辊及基板输送装置、基板清洗机
CN114655706B (zh) * 2022-05-05 2024-04-05 华玻视讯(珠海)科技有限公司 玻璃烤炉高速节能式烘烤传送装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4158961B2 (ja) * 2002-04-01 2008-10-01 株式会社日立プラントテクノロジー ガラス基板の枚葉搬送装置
JP2008004898A (ja) * 2006-06-26 2008-01-10 Future Vision:Kk 基板搬送装置、基板搬送方法および基板処理システム
JP5152469B2 (ja) * 2007-04-11 2013-02-27 株式会社Ｉｈｉ 基板搬送装置
JP4976188B2 (ja) * 2007-04-16 2012-07-18 芝浦メカトロニクス株式会社 基板の処理装置
JP2009176858A (ja) * 2008-01-23 2009-08-06 Toppan Printing Co Ltd 基板受渡装置
CN201538552U (zh) * 2009-09-25 2010-08-04 北京京城清达电子设备有限公司 传输线宽度调整装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3823012A4 (en) * 2018-07-12 2022-03-23 Ebara Corporation SUBSTRATE CONVEYING DEVICE AND SUBSTRATE PROCESSING DEVICE WITH A SUBSTRATE CONVEYING DEVICE

Also Published As

Publication number Publication date
JP5224612B2 (ja) 2013-07-03
CN102442542A (zh) 2012-05-09
JP2012056706A (ja) 2012-03-22
KR20120026457A (ko) 2012-03-19

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