TWI334846B - Substrate buffer device, method of buffering substrate, substrate processing apparatus and computer readable storage medium - Google Patents

Description

334846 IX. Description of the Invention: [Technical Field] The present invention relates to a method for temporarily displaying a substrate such as a glass substrate of a transport line, e (FPD), for use in a flat display and a substrate buffering method; Such a substrate buffer, a substrate buffer device computer readable memory medium for performing such a substrate buffering method and a board processing device; and a 愔 „ 矛 矛 式 及 及 电脑 电脑 电脑 电脑 电脑 电脑Prior art] The use of optical remnant technology

In the manufacture of FpD, it is used for the FPD for the Fonda..........(The formation of the circuit pattern on the slope board is carried out in the order of the column: the formation of the glass pattern in the glass According to the corresponding circuit pattern; agent resistance = ': =, the case: the use of anti-liquid ==; Reason: County, such as miscellaneous, 右 right eclipse - ^, in the production line, usually in the processing unit failure When the element is stopped to remove the fault, the sample is provided with the buffer. The glass substrate before the treatment is temporarily evaded from the conveyor line by the buffer device. As is generally known, buffers are provided. The frame (or buffer =), "provided adjacent to the transport line" can accommodate the glass substrate in a plurality of stages; and the glass substrate on the transport line is carried into the buffer frame (see, for example, F. 1, 2) The buffer device can be accessed at a position of a random height of the crucible by the lifting and lowering of the transport arm, whereby a plurality of glass substrates accommodated in the buffer frame can be re-sent to the transport line in the desired order. However, in recent years, FPD has grown to such a large size that it has one side. A large glass substrate of 2 m or more has appeared in the world. Due to the increase in the size of the glass substrate, the handling property is deteriorated. The above-mentioned conventional buffer device for transporting by the wheel arm considers that the safety surface is not suitable for large throwing. The treatment of the glass substrate. Moreover, due to the swaying device, such as the fan swaying, the glass substrate is lifted and lowered by the transport arm, and once the glass substrate is large, it is easy to make the swell of the stalk送 送 送 送 送 送 送 送 ί ί ί 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 一旦 进度 进度 进度2004-304003\报[The content of the invention] & the object of the object to be solved, for the purpose of providing the following: · The productivity can be improved, and U can avoid the scattering of particles, the order of re-entry The substrate of Wei Wei is expected to be used for such a substrate processing device; and the media. The control program of the soil ', 'crush method' and the computer readable record & Device for feeding the wheel In order to solve the above problem, the substrate of the present invention in which the transfer line is transported in one direction is temporarily provided with a scaffolding portion, which is provided so as to be movable up and down, and can be placed on the transport line. ςThe upper and lower sections can enter and exit the conveying line and the lifting mechanism, so that the shed: the mounting table of the board and the entering and exiting the conveying line; and each of the mounting stages of the plurality of mounting stages has The conveyor belt mechanism for entering and exiting can be used as a line for conveying the substrate in the conveying direction as a part of the money, and the substrate conveyed by the conveying line is placed on the plurality of mounting platforms. In this state, the elevator burdock 5H substrate is escaping from the transport line together with the mounting table. The present invention provides a substrate buffering device for unilaterally feeding the wheel. The substrate is temporarily evaded from the transport line, and is characterized in that it has: 、, and can be set up to be movable up and down, and has a plurality of upper and lower sections that can enter and exit the transport line, and the substrate transported by the transport line The mounting platform; , 'going, arranging, lifting the scaffolding portion, and allowing any one of the plurality of mounting stations to enter and exit the wheel feeding line; and Ding <Shi Jiang; 1 system for controlling The lifting of the scaffolding portion by the lifting mechanism is used to convey the substrate in the conveying direction, and the mechanism can be used as a part of the conveying line, so that the substrate is self-contained. When the line is avoided, the substrate transported by the transport line is placed on the plurality of mounts Δ" on the mount of the transport line, and the state is lowered by the elevating mechanism. (4) in a state in which the substrate is placed on the mounting table of the transport line, the control mounting table and the substrate are transported to a predetermined distance between the substrate and the substrate. 'With the lifting mechanism to make the shed The lifting and lowering of the frame. It is advisable to have a detecting unit on the day of the hair, and the control unit is transported by the mounting platform of the conveying line toward the conveying direction _ the position of the lining _ conveying line. Controlling the lifting of the scaffolding portion by the elevator & according to the detection signal of the detecting portion. At this time, the control mechanism should control the lowering of the scaffolding portion by the lifting mechanism. When the substrate that the transport line avoids enters and exits the round feed line again, the substrate that is evaded starts to enter and exit sequentially. In the above invention, the start point of the scaffolding portion to be carried out by the elevating mechanism is to be used. The lifting of the frame is over, and the _ delivery is sent 7

= the time at which the board is placed in the A 2 lift in and out of the round feed line and is placed at the time when the scaffolding unit T is fed out of the round feed line. Time) is short. The operation time of the political and 7th sea transport line (tact should be included at this time: out of the: the part of the conveyor line - the part is adjacent to the input, the speed side is set, and the drive is the same. Second round:: The round belt feeding mechanism of the loading platform should be constructed by connecting the source. / The belt mechanism that is carried in and out of the 5 Hai conveyor line and the driving wheel and the pulley It is advisable to roll the conveyor line as the uppermost stage of the loading line. It is advisable to enter and exit the belt feeding mechanism in a normal manner, and to record the substrate cushioning device for each mounting table other than the upper section. Substrate buffering device, scaffolding section, setting: ΐ lifting, and... The wheel of the conveying substrate is reversed by the day/, and there are several sections of the upper and lower sides which can enter the single direction and the line and can be transported through the conveying line. The substrate is placed on the substrate, and the substrate is transferred to the substrate, and the substrate is circumvented, and the line is circumvented. The feature is ': so that the substrate fed by the conveyor line is temporarily rotated from the wheel to the money delivery wheel. The substrate that is delivered is placed in the plurality of mounting stations 1334846 on the mounting platform of the far conveyor line In this state, the 'shelf frame portion is raised and lowered by the elevating mechanism, and the substrate and the mounting table are escaping from the transport line. The lifting and lowering of the scaffolding portion by the elevating mechanism during the substrate avoidance is performed on the substrate. The invention is carried out in a state of being placed in and out of the mounting table of the transport line, and the mounting table is at a predetermined distance from the substrate transported by the transport line. Further, the present invention provides a substrate processing apparatus. The method includes: a conveying line ‘unidirectional conveying substrate; a processing unit, applying a predetermined process to the substrate conveyed by the conveying line; and a device “setting the processing unit to the upstream of the conveying line in the conveying direction The substrate conveyed by the wire feeding line is characterized in that: the buffer device is provided with: a wire and the conveyor side of the plate side is moved up and down to make any one of the plurality of mounting platforms; the scaffolding The lifting and lowering of the part; and the conveying belt_, transporting the substrate in the conveying direction, the conveying conveyance of the substrate is carried by the lifting and lowering of the scaffolding portion, so that the substrate is loaded with the "borrowing_lifting mechanism 2"; the mounting table and the mounting table The loss When the line is placed, the control is controlled by the rising distance between the next substrate, and the present invention provides a shed; the part is lifted and lowered. The action on the computer is characterized by: The substrate buffering method is implemented. The computer control processing device is implemented by the computer control processing device, and the control method of the computer is controlled by the method of the buffering method. The 域 il 二 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该When the transporting and transporting of each of the mounting stages to and from the transport line is constituted by a belt mechanism as a part of the transport line of the transport line, it is possible to read and avoid the plurality of substrates in a manner of "waiting" in this manner. The present invention relates to an embodiment of the present invention with reference to the accompanying drawings. The ΐ-1 is equipped with an embodiment of the substrate buffer device according to the present invention, and the single 7L is made of an anti-drug film for an FPD-shaped glass plate (hereinafter simply referred to as "substrate"). A schematic plan view of the anti-money agent coating development processing system for developing and treating the anti-surplus film after the exposure treatment. The anti-money agent coating and developing treatment apparatus (substrate processing apparatus) 100 is provided with: 11 cassette stations 1' in which cassettes C containing a plurality of substrates G are placed; and processing station 2, which applies resist coating and development to the substrate g And a series of processing; and the interface station 4, the substrate G is transferred between the exposure devices 9 for performing exposure processing on the substrate G; 10 i 1334846 The cassette station 1 and the interface station 4 are respectively disposed in the processing station to resist The etchant coating development treatment system 1 〇〇 on both sides. Further, the direction orthogonal to the X direction on the plane of Fig. 1 is the rectangular MX direction, so that the cassette station 1 is provided with: the mounting table 12' is juxtaposed in the Y direction, and the transport device 11 can be placed between the processing station 2 and the processing station 2 In the case of sending = moving and horizontally rotating, the box = station shifting processing station 2 includes the conveying lines A, B' of the two rows of substrates G which are parallel to the cassette station 1 . The 1 lion is extended to the direction of the X. The lion is transported from the box station (10). The station is located on the conveyor line A. Each of them is added with a person. The excimer UV _ element has: thermal unit (PH) 23, point attachment WA two standard scrub, Yin Zao 70 (SCR) 22, pre-flush unit Βυΐ % % (AD) 24, cooling unit (COL) 25, slow CDP) 37. 7 parts early (COLDSi, buffer unit (Bup) on the conveyor line B, self-intermediate interface 4 such as the human r- a development unit (10) v) 3G, force side to the E box station 1 side, in order: 32 The buffer unit handles the early A (HT) 3 b cooling unit (C〇L) 】, the signal has 38). Further, in the cooling unit (COL) 32 and the cassette station board, the substrate containing the anti-small coating application and development is subjected to a series of substrates 2i to perform the organic/inclusion of the substrate G. Tg (SCR) 22 performs the cleaning of the substrate G at 1334846 and the drying process. The preheating unit (PH) 23 performs the twisting treatment of the substrate G, the adhesion unit (AD) 24 performs the hydrophobic treatment of the substrate G, and the cooling unit (c〇L) 25 cools the substrate G. A resist coating unit (CT) 26 supplies a resist liquid on the substrate G to form a resist film, and the reduced-pressure drying unit (Dp) 27 decompresses the volatile component contained in the resist film on the substrate G under reduced pressure. Evaporation causes the resist film to dry. The heat treatment of the substrate G is performed by heat treatment of a single π (HT) 28, and the cooling unit (c〇L) 29 cools the substrate 相同 in the same manner as the cooling unit (COL) 25. A developing unit (DEV) 30 successively performs application of the developer on the substrate G, rinsing of the substrate G, and drying of the substrate G. The heat treatment unit, the heating unit, and the heat treatment of the substrate G are performed in the same manner, and the cooling unit (COL) 32 cools the substrate G in the same manner as the cooling units (C0L) 25 and 29. ^The unit is located on the downstream side of the X direction, for example, the anti-main cloth early (CT) 26, the decompression drying unit (Dp) 27, the heating position occurs, the rib wire correction temporarily = 4 ~ ^ TdevTso line B avoids i will be explained in detail later when J station 1 occurs, so that _G temporarily inputs i =:=^^) 36, 37, 38. (10)) 44' is provided with a buffer _ box for accommodating the substrate G, and the substrate substrate 43 is received by the substrate G, which is transported by the transport line A, and is transported to the rotary table. The following arm 43 can be used to get on and off the machine, and the water is lost. The transferable substrate is disposed adjacent to the 12th turn arm 43; and the peripheral light device fEE^Cf unit (10) v) 30 is disposed adjacent to each other; the anti-drug coating development process | = exposure machine (T1TLER). The user interface _, connected by: the various parts of the device 100 or the various regions of the genre development processing to make the operation of each part or each unit, the keyboard of the brother's wheel operation, etc., or the memory unit 103, stored Recording 匕 display, etc., and Gong Yin W 2 2 conditions I material, etc. is to control the crying 1G1 step by step (4) Bay now ^ money agent coating development processing device] = ^ control then, should be required to f kinds of processing exist. Call out the random formula, so that the steps (4), 丨2 refer to the self-memory part: the second is made of anti-coating and developing treatment device ' 2 S; pass; can also be used online from other devices, === placed In the development processing apparatus 100, first, the conveyance arm 11a is transported to the substrate G' by the transport apparatus 11 t'tti ί' to perform the removal treatment of the organic substance by the excimer-clearing unit (e-uv) 21. The end of the excimer UV irradiation unit (e is transported on the substrate G recording line A which is organically removed, and the material is removed, and is washed and dried in the early morning 70 (SCR) 22 . Washing #Unit (SCR) 22 miscellaneous washing treatment and drying treatment ^Substrate G is transported on the transport line A, and is preheated by it (PH) 23 to be applied to the surface of the surface. The heat-treated substrate G of pH 23 is transported on the transport line A, and is hydrophobized by the adhesion unit (Α〇) %. Hydrophobization by the junction 13 1334846 attached unit (AD) 24

It is transported and cooled by the cooling unit (C0L). .························································································ Exposure to decompression and venting, so that 1 is known to be dried by the anti-money film. ', ^ G ί 减 drying unit (DP) 27 is applied to the substrate treatment of the anti-film drying treatment, t is applied to the heat treatment unit (HT) to be heated to the lower (OTL) 29 cooled substrate G is transported to the rotary table (10) 44 by the transfer arm 43 of the transport station 4 on the transport line A. The ΓΪ ri transport arm 43 is transported to the peripheral exposure of the external device block 90. (The upper 7 side exposure device (EE) is applied to remove the exposure process other than the anti-film. Then, the substrate G is transported by the transport arm 43. The exposure surface is applied with a predetermined pattern of exposure processing. Also, sometimes, two = y. The end of the processing of the substrate g is completed by the carrier (the titler), the Ke Qian (τ_) Β上字字(TITLER) is filled in. The substrate of the information is placed on the transport line =========================================================================================== 14 1334846 Next, the conveyance is temporarily stopped, the substrate is tilted at a predetermined angle to allow the sputum liquid to flow down, and the rinsing liquid is supplied onto the substrate G in this state to wash off the developing solution, and thereafter, the base is restored to the horizontal posture, and then the side is The substrate G is blown and sent to the substrate at the same time. The coating process and the rinsing treatment by the developing unit (DEV) 30 are carried out on the conveying line B after the drying process is completed. : heat treatment '^ yuan (HT) 31 is applied by heat treatment to remove the resist The film contains a fraction. In addition, in the developing unit (10) V) 30 and the heat treatment unit, the decolorization treatment of the hydrazine developing solution is irradiated with a single line of uv irradiation, and the substrate G of the heat treatment county of the early 兀 (HT) 31 is added. , suitable, cooled by cooling unit (C0L) 32. A few fruits B were transported by the inspection of the cold base fG, which was transported on the conveyor line, and the 35 inspection. By the inspection of the substrate G, the transport arm 11a, which is provided in the g-box station, is placed on the mounting table 12, and the buffer unit (BU. 37, %) is explained in detail. With the relief Yuan (Qing) 36 complete _ the structure of the foot) Shu Mingzhi _ material (foot) 36 (substrate map = 彳 $ (Caf) 36 of the other? Bu Mu section map, 兀冲早兀 (BUF) 36 is available: 01 5f =================================================================================================================== When the conveyor belt of the side transportable substrate enters and exits the Wei 8th, the conveyor belt mechanism ϋ 15 1334846 5〇f can be driven to be used as the general conveyance of one of the line A of the transfer line A, and then =. Or as the loading section 5a of the loading section 5a in and out of the ^7A _G is the most convenient to contact the airflow. Figure 5 is set in the buffer unit (7) ^ Hongzhi's platform & conveyor belt mechanism, as shown in Figure 5 The molecular polyethylene bismuth material forms the bearing 52 of the side wall of 5la, 51b to the side of the rotatable square, and the value of ^7卩$ in the Y direction is determined by the latter. The motor 53 of the moving source is driven and ^=2, 2 ί, and 5 lb, for example; ^丁;:Transmission: Here, all the roller motor 53 can be connected to the roller members 51a, and the training is performed. One = the roller member 51a of the center portion rotates the roller member S1a so that the force transmitting belt 54 allows all the roller members 51a, 51b to be aligned, and can be conveyed in a manner similar to the belt mechanism described later. Compared with the durability, q = the roller members 51b are alternately arranged in the χ direction. The roller members 51a, 51b respectively include: a small-controlled rotary pumping 51c extending in the Y direction;

The large-diameter abutting portion 5Id is provided at a plurality of intervals in the Y-direction of the rotating shaft 51c. B 俾 the abutting portion 5Id is abutted against the substrate G to support the substrate G, and the support force for the substrate G is provided. The γ direction is largely uniformly dispersed, and is configured such that the roller member 51a and the roller member 51b' abutting portion 51d have different positions in the Y direction. ~ Fig. 6 is a plan view of the mounting tables 5b to 5f provided in the buffer unit (BUF) 36. As shown in FIG. 6, the conveyor belt mechanisms 50b to 50f which are not mounted on the mounting tables 5b to 5f include a driving pulley 55a provided at, for example, a central portion in the X direction, and 16 1334846 driven pulleys 55b, which are respectively disposed in, for example, a weir direction. Both ends; and the wheel belt 55c' are hung between the active pulley and the driven pulleys; the apple is formed in a slightly cylindrical shape extending in the Y direction, and is arranged in the direction of the shed The bearing of the side wall is allowed to be rotatably supported by a rotatable square door band T5b', for example, vacantly spaced apart in the Υ direction. The γ square is corresponding to the driven pulley 55b, and is formed in a thin strip shape. The belt feeding mechanisms 5〇b to 5〇f along the pulley 3 are respectively used for the active movement to rotate. Accompanied by this, each conveyor belt 55c and each conveyor belt 55 / It is configured to transport the substrate G in the X direction. The delivery is therefore with the conveyor belt machine ~ roller i II, :== lifting the extreme scales of her 5 ridges placed on the lower side of the _ section. >ΐ^1ϊίϊ61 ' is disposed at a substantially central portion of the bottom surface of the scaffolding portion 5; and the surrounding "dry mechanism 62" is provided in a plurality of cylinder mechanisms 61 provided on the bottom surface of the scaffolding portion 5, and the mechanism 61 and the ball screw mechanism 62 are lowered. Simultaneous expansion and contraction so that the scaffolding portion 5 is lifted separately; the opposite side wall rsi η ~ transported the substrate G of the transport inlet 71 and the delivery outlet 72. With the system (foot) % of the conveyor belt mechanism Jia ~ 50f 7γ 1J34846 rhyme The line portion has, for example, the roller member 51a of the central portion of the belt pulley g of the driving pulley mechanism in the X direction of the belt mechanism; and, when the belt feeding mechanism 5〇b~5〇f is conveyed by the line A, The mounting portion of the mounting portion &~5f access portion 53a is provided with a hole-shaped engaging portion, and the mounting portion, for example, the engaging line A, which is engageable in the circumferential direction, is engaged with the locking portion 53b. , in and out of the transport 53 ^ (#e, s 7 leave and move, so that the card 1 &,,, & _ ^ 53 due to the sliding mechanism 73 from the scaffolding section 5 line a of the mounting table to make 51σ5 ° / ^! And the engagement with 53b is released, and the connection of the ingress and egress 53 is removed. The one of the 19 mechanisms*~5〇f and the motor are 5~f to realize the individual drive of ^53 The connection between the number of belt conveyors 50a and the engaging portions of the respective twisting shafts may be performed by the magnetic member 51& or the driving pulley 55a by the motor 53. (Normal or normal conveying) The working time of the substrate G conveyed by the conveying speed line A of the speed) a to the line A (from the conveyance 〇 to the predetermined position: without the delivery of the conveying line A) - the scaffolding portion 5 of the substrate structure 6 In view of the fact that it is not disintegrated by the elevator, it can be set to be faster than the production schedule balance of the auxiliary belt conveyors 8a, 8b. The wheel belt mechanism by the motor 53 ^^~ The working time of the wire A, the turning time of the scaffolding portion 5 by the lifting mechanism 夕, and the driving time of the plate G, and the driving source are directed between the substrates G in the X direction. Pulleys such as motors (not shown) The belt is delivered with the type of fuel (4) into the roller conveyor mode or the belt conveyor mechanism 8a, 8b is used as the wheel (send the line \^!^ mode) 'the two auxiliary transmission 18 1334846

The base ί ί ^^ substrate G transport speed is higher than the transport line A

The two H transmission speeds are set, for example, to the carriages of the belt conveyors* to 50f, the transmission lines A, the loading stations 5a to the delivery line A, the IS$^, and the mounting stations 5a from the inlet and outlet lines A. 5f is transmitted to the base L of the conveying line A quickly, and the operation of the conveying line A can be shortened. The lifting and lowering of the scaffolding portion 5 by the motor, the movement by the sliding mechanism 73, and the operation of the conveyor belt mechanism gamma ~5Gf, i ===!a, 8b, respectively, are accepted by the steps from the steps Control _ 104 (control mechanism) control. From the A-type loading port of the self-inlet and take-out line, the type of the load, the direction of the delivery, or the direction of the transport, for example, the upstream side of the auxiliary conveyor belt mechanism 8a in the X direction, and the number of the substrate to be transported! Senser 105 (detection unit) === "upper Γ" end and downstream side, each side side line 1 ii: detector (10) and third sense 11 (10) respectively - base 1 = and the third ❹m tear, can be closed as the side of the memory of the memory controller 104, once in the buffer unit (BUF) 36 direction = unit, such as anti-butter coating unit (CT) 26, decompression Drying unit (10) = ^ heat treatment unit (HT) 28 or cooling unit (c〇L) 29 failure = the X direction of the conveyor line A of the early element (foot) 36 is lower (four), the stop rim belt structure 50a stops,基板The substrate G that is transported by the transport line A is placed on the mounting table 5a of the incoming and outgoing transport line A. Here, the unit controller 1〇4 is connected. Detection from the second sensor 1〇6 The signal 'even if the motor 53 is oscillated, that is, the action of the belt mechanism 50a is decelerated. If the sensor from the third sensor 1〇7 is received, even if the motor 53 is driven, the belt mechanism 50a is activated. By the control of this, the substrate G is placed on the mounting table 5a. Further, the unit controller 19 1334846 is placed on the mounting table 5a in this state, and the first measurement is performed. The substrate G is conveyed by the transport line A, that is, the transport line d. 105 detects that the substrate G approaches the mounting table 5a to a predetermined distance, and even if the scaffolding portion 5 sent by the field is raised, the mounting table is placed. 5b~5f in and out of the wheel feeding line ^^ structure 6 to cancel the failure of the unit on the side of the swimming side, the conveying line A is repaired, and the substrate G following the substrate G is placed on the unit where the A ^ is transported one by one. Control H 1G4 and substrate G are placed on the mounting table 5 & ^ here, from the second sensor 106 and the third sensor 1 〇 7 signal control 41 ', check also, according to the drive, make The substrate G is placed on the mounting table 5b to 5 " the distance from the mounting table 5a to the i-th sensor 105 of the line A of the motor 53, and the conveying speed of the conveyance or the scaffolding portion by the lifting mechanism 6 is performed. 7 ==:=匕=^6 action. ^ Figure 9 is used to explain the belt unit with normal buffer unit (BUF) 36 or one anti-development processing device* _ line ^; part f set &

Part of it (see Figure 2). % of the money-paying unit is used as the conveyor line A. The unit on the downstream side of the X-direction (Gu) 36 is faulty in one day, and the auxiliary conveyor belt mechanism on the downstream side is seven. First, the direction-oriented X-direction upstream side conveyor line A is The feeding port 71 of the mounting table 5a is placed on the substrate G of the initial stage of the loading and unloading, and passes through the frame 7 (Fig. 8(a)). X, here, the conveyor belt mechanism 50a Stop (refer to A, the most slavish transmission line of the rotation right in the substrate canister - 20 1334846 Once the detection of the delivery line A is delivered - A cup _ - = the connection of the feeding mechanism 50 read motor 53 For example, if the mounting table 5b enters and exits the transport line A, the motor 53 is connected to any of the lift belt mechanisms 50b, so that the scaffold portion 5 is raised, and the motor 5 is transported by the motor 53 to make it H. The board & is placed in the escaping and is kept. Also, since the lifting mechanism 6 is placed in the shed, the substrate returned from the slinger line is placed on the in and out conveyor line: = system =; when the operation of the heart = C failure, the JJ of the transport line A is placed on the mounting table 5c, 5d... and is protected by J, day =, =, g4.. Negotiable and more transport line A Punching unit (the number of substrates G and B_ = °, should be established to send the same number of wheel mounting table f J) 5aH = the downstream side of the can

Box Station】丄=When the redundant element fails, the E-transport=transmission=substrate G is all used to make the buffer barrier release, and here, it is accepted from the step-by-step to the conveyor line. The substrate q is circumvented first, and (3, the descent 104 is, for example, the movement of the motor 53, the _= wheel mechanism 5Ga to Xie, which is driven by the sliding mechanism 73 by the sliding mechanism 73, and

The leader of the substrate G is again reorganized/configured from the I station 1 to the delivery line A unit controller 104. First, the u 铋, " u u mechanism 6 lowers the scaffolding portion 5 to mount the a 5 structure 8b is driven and driven by the elevating conveyor mechanism 50a to cause the HI to feed the line A, and the motor 53 sends the substrate from the σ σ 5a to the downstream side of the frame 7 from the frame 7 Send (refer to Figure 9 U)). The unit control unit l〇4 lowering mechanism 6 causes the scaffolding unit 5 to place the #5b in and out of the rounding line 8 to drive the mechanism 50b such as the wheeling, so that the substrate & The downstream ί is sent (refer to Figure 9 (b)). Similarly, the unit controller is sent to the transport line A in the order of the substrate ^, ·, ^, which is the first to be evaded (see corp. (C)). In this way, the so-called first-in first-out of the substrate G is performed, and the substrate G at the substrate G in the resist coating and developing device 100 can be suppressed, and the substrate Gi placed on the mounting table 5a' 5b.. G2=^ After ίΐ, ί, the unit controller 1〇4 causes the scaffolding unit 5 to lift the wire Α by the lifting mechanism 6 to drive the belt mechanism* to drive the C5a 人-person as the conveying line A- Part (see Figure 2). K-mount 5a The substrate avoidance and buffer unit (BUF) 36 for feeding the buffer unit (BUF) 36 is preferably set to the point at which the lifting of the portion 5 is started, and is sent to the scaffolding A which is inserted later. The substrate 0 is placed on the in and out transport:: any of the cattle soil gauze 'conveyor line' is lifted by the scaffolding unit 5 of the lifting mechanism 6. ^The other mounting stations 5a to 5f of the feeding line A in the ports 5a to 5f are placed in the entrance and exit, and the working time of the conveying line A is shorter than the time when the board G is at the time of the delivery. The substrate (3) can be stored, and _ ga can be sent to the transport line A. For example, the buffer unit (Bl^^ other substrate G is stored in the wheel and the failure occurs intermittently, the downstream side The units 5c and 5d.·. are placed on the substrates G3 and G, respectively. As shown in (a), before the mounting table, the first sensor 105 detects the conveying line f and the f3 unit controller 1〇4. When the substrate G3 is oriented to the substrate G, the elevating mechanism 6 lowers the scaffold portion 5, and temporarily stops the operation of the substrate G to be placed on the mounting table 5a (Yuan set = In and out of the conveyor line A, i〇4 with the lifting mechanism 6 to make the scaffolding part 5 ^ 1 =; ^, unit control, avoidance, and the mounting table & in and out of the round line A line = set two, 22 1334846 on the substrate G3 (Refer to Fig. 10 (c)). Thereafter, the lower substrate G/ is transported by the first delivery line A. (Refer to Fig. 51, the detector 104 can lower the scaffold portion 5 by the elevating mechanism 6 to make it empty ^ ))' The unit control unit 2 sends the substrate A to the mounting table 5b (see Fig. 5, the inlet and outlet unit controller 104 can send G4, G5, ..., 2) to the conveying line A. Ground, ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, ': Ϊ^Ϊ: ί ^ Explain that Fig. 12 which constitutes the buffer unit (clear) 36 is a cross-sectional view showing an important part of the plan view of the modification of the conveyor belt mechanism. The same reference numeral = each of the mounting stations Sa to Sf is used instead of the conveyor belt mechanism s〇a to 5〇f (the conveyor belt mechanism 5〇g can be set in the reference rr. The conveyor belt mechanism 5叱, and Position a: The drive of the drive section 11G of the central 4 drive unit 11Gg/χ 2, the postal code: the unpowered roller section 111, the drive roller section = χ 2 ί, the drive roller section 113. The non-powered roller portion 114. The driving roller portion 110, 112, 113 is provided with a driving roller portion 112, which is rolled by the 槿# 51h AY ^ two cows. (4) i ί v The drive roller has a locking portion 53b and is rotatable between all the roller members. The motor 53 drives the roller member 51b of the roller unit 110. The u overdrive force is transmitted. The belt 54 rotates all of the roller members 51b. The power roller portions 111 and 114 respectively include: a rotary roller 115' abutting the substrate G' is conveyed in a rotatable manner with the screw support portion 116 of the roller member 51b. No power roller ιΐ5. 23 1334846 The thermodynamic roller 115 is formed in a γ-direction by a short ultra-high-molecular-weight polyethylene material so as to correspond to the γ-direction position of the abutting portion 51d of the roller member 5ib, and arranged in two disks. More specifically, the 'powerless rollers 115 are arranged in a staggered manner, and are arranged one by one in the γ direction position equal to the 抵ίΐ 抵 abutting portion 51d, and the γ direction position between the i joint portions 51d, and two directions in the χ direction, And arranged. The support portion 116 includes: =7 'fixed to the side wall of the scaffolding portion 5 facing in the γ direction; and the rotating Ϊ 'transmission collar 118 is fixed to the base material 117, and the non-powered roller is rotatably mounted U5. L;, L-shaped m formed as a thin wall extending in the γ direction, the =L bearing member 119a is provided in the door member Ic-ino 与 position of the roller member. The bearing member 119b is disposed on the bearing member 119a η pulse The members 119a and 119b are formed in a slanting direction, and the bottom surface portion is formed by a non-illustrated screw-spinning yoke 119a' (10) on the top surface == two sides: the member 119a has 1, the bearing member 11 % = bearing type ampere roller part m is installed at both ends of the x direction: it can be unloaded by disassembly or adjustment. The driving force conveys the vibration of the mechanism, and the number of the mechanism is less than that of the above-mentioned conveyor belt mechanism 5 (four), and the number of the roller (four) you w (the roller member 51a) is small, but the setting of the ^^ wheel 51b 115 supports the unpowered roller 115. The bearing members 119a and 11% of the heat-powered roller are supported, and since the wall is thin and convex, the mounting stages 5a to 5f ensure excellent strength. When the structure is 5〇a, it is possible to reduce the weight and cost of the conveyor belt machine without using the substrate G. In addition, (4) The above-mentioned conveyor belt mechanism of the whole financial position is shorter than "; 24 丄:): 4040, and dust and the like are not easily attached. Fig.; Buffer roller of a modified example of the connection portion of 53 m has a buffer roller (2) through the motor. In this way, the rotation axis of the center of the shaft of the bow is set to ^^53a; 3^ abuts the roller member 5=*合# Since the _roller impacts, the abutting end portion is suppressed and the abutment of the roller members 51a, 5, and the main member 4 is suppressed. If the motor 53 is driven in the state of the buffer roller 121, the axis direction of 55a - The axis of the end can be smoothly rotated, the rotation of the card holder Qiuzi 121, the rotation of the motor 53 = the material is easy to get. The heart is attached to one of the plural rounds of the line type. This is not 3:: 'PDC board' special The substrate is a buffer for a large other substrate. The glass substrate can also be widely applied to a semiconductor wafer, etc. [Simple description of the drawing] A schematic plan view of the processing system, and the pure _ reduction of the resist after the treatment The task and exposure of the substrate buffer device according to the present invention are buffered early, and the buffer unit is flushed. A cross-sectional view of the side of the element. A cross-sectional view of the side of the important part of the punching unit. A cross-sectional view of the other side of the punching machine. Figure 5 is a plan view of the mounting table of the buffer unit. Figure 7 is a plan view of the buffer single map. The connection between the belt feeding mechanism and the motor is shown in Fig. 8. The figure 8 is used to explain the J 9 system for explaining the slow return. Figure 10 is a diagram for explaining the substrate avoidance and delivery operation of the slow element. Figure 7 is a diagram showing the substrate avoidance and delivery operation of the conveyor. Fig. 平面图 is a cross-sectional view showing an important part of the conveyor belt unit y column f. A diagram showing a modification of the connection portion of the motor. [Description of main component symbols] 1 to 匣 box station (processing unit) 2 to Station 4 to interface station (processing unit) 5 to rack portion 'mounting table 5a, 5b, 5c, 5d, 5e, 5f 6 to lifting mechanism 7 to frame 8a, 8b to auxiliary conveyor mechanism 9 to exposure device 10~ Guide 11~rounding device unit)

Ua~transport arm 12~mounting table~~excimer UV irradiation unit (Bu 22~ scrubbing unit (SCR) 23~preheating unit (PH) 24~adhesive unit (AD) 26 1334846 25~cooling unit (COL 26 to anti-small agent coating unit (CT) (processing unit) 27 to decompression drying unit (DP) (processing unit) 28, 31 to heat treatment unit (HT) (processing unit) 29, 32 to cooling unit ( COL) (processing unit) '30 to developing unit (DEV) (processing unit) 35 to inspection unit (IP) (inspection unit) (processing unit) 36, 37, 38 to buffer unit (BUF) (substrate buffer unit) 43 〜Transport arm 44 to rotary table (RS) 50a, 50b, 50c, 50d, 50e, 50f, 50g to conveyor mechanism 51a, 51b to roller member 51c to small-diameter rotary shaft 51d to large-diameter abutment portion 52 - Bearing 53 - Motor (drive source) 53a - Engagement portion 53b - ^^ Stop portion 54 - Driving force transmission belt φ 55a - Drive pulley 55b - Drive pulley 55c - Conveyor belt 56 - Bearing - 57 - Separation plate 61 ~Cylinder mechanism 62~Ball screw mechanism 71~Feeding port 72~Sending port 73~Sliding mechanism 27 1334846 90~External device Block 100 to resist coating development processing device (substrate processing device) 101 to step controller 102 to user interface 103 to memory unit 104 to unit controller (control mechanism) 105 to first sensor (detection unit) 106 to second sensor 107 to third sensor 110, 112, 113 to drive roller portion 111, 114 to unpowered roller portion 115 to non-power roller 116 to support portion 117 to base material 118 to shaft Rings 119a, 119b - bearing member 120 - opening 121 - buffer roller A, B - conveying line G (Gi, G2 - G /, G2 ...) - substrate C - box EE - peripheral exposure device TITLER - printing exposure machine 28

Claims (1)

X. The scope of application for patents: 1·--------------------------------------------------------------- The base section 2 that can be transported by the conveyor line can enter and exit the conveyor line; the lower part of the loading platform can be used. The tape feeding mechanism Ugj7, at the time of the line, 'transports the substrate in the conveying direction, and causes the substrate to be from the Si:; the portion of the line: the substrate placed on the plurality of mounting tables* to be conveyed by the 5 liter conveying line, The lifting mechanism causes the 降^down table to evade in this state. .k々 The substrate is aligned with the mounting table from the 2. _ i has a scaffolding type substrate buffering device for making the green line toward the detailed line _, which is characterized by the early direction of the J-direction transmission line The temporary wood portion of the substrate to be transported is arranged to be movable up and down, and the base portion of the wheel that can be transported can enter and exit the line of the conveyor line to reduce the frame material, and the column of the column is lowered and lowered; r_, The gantry-axis axis is raised to the scaffolding portion, and each of the mounting stages has a substrate for feeding in and out of the plurality of mounting stages from the conveying line, and the substrate to be fed by the reading reel is The lifting mechanism causes the mounting table to be lifted and lowered, and the conveying line is evaded in this state; (1), the substrate and the conveyor belt mechanism used therein can be used as the "feeding wire portion = conveying direction conveying substrate conveying line" The mounting stage is in a state in which the substrate is placed on the mounting table of the conveying line, and the control system is formed between the carrier and the substrate. If the distance is from %, the scaffolding unit is lifted and lowered by the lifting mechanism. In the substrate buffering device of the second item, the side of the bean is disposed at a position upstream of the loading platform of the conveying line toward the upstream direction of the conveying direction, and is used for detecting the detecting portion of the substrate conveyed by the conveying line. The signal is controlled by the lifting mechanism 4. The substrate buffering device according to claim 2 or 3, the control mechanism controls the substrate to be retracted by the lifting mechanism, and the substrate is started to be re-entered. In order to enter and exit. 铷 踝 踝 , , , 5 5 5 5 5 5 5 5 5 5 5 5 5 5 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如^=Set' where: The lifting and lowering of the scaffolding section ends, due to the details: 2: the beginning of the descent is stable, and after the transfer edge, the substrate transported by the z + transmission line is placed on the line. The loading port is hunted by the lifting mechanism, and the other mounting base of the rounding line is selected to be 4, and the time at which the conveying line is placed at the end of the feeding line is the base of the auxiliary item ί Inspection, shooting more included. Rare assisted transport ▼ mechanism, used as the loss, 匕 3. ΐ? lose ΐ 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置The substrate buffering device of the conveyor belt is placed on the +: when the loading platform enters and exits the conveyor line: the peak source is driven, and the wheel of the mounting table is reversed (4) = the substrate buffering device of the item. In the case of the organization's lepton transport method and the belt transport method, 9. For the substrate cushioning of any of the igqxsdw to the third of the scope of the application of the patent scope, 1334846 - the section of the upper section is placed基板, the substrate buffering device of the ninth patent scope of the wheel feeding line which is in and out of the wheel, wherein: the wheel feeding mechanism of the upper stage is the roller feeding and the other loading The conveyor belt mechanism is provided with a π.=buffering method, using a substrate buffering device, and the four-plate cushioning device is further configured to be movable up and down to have a plurality of upper and lower sections, and the substrate is transported by the transport line. Substrate conveyed by the wire For lifting and lowering the scaffolding portion, so as to enter and exit the conveying line; and any of the seven rows of the mounting table has a L-base method for entering and leaving the conveying line, and the rib is made by the conveying line The substrate to be transferred temporarily from the conveyor belt mechanism can be used as part of the conveyor line, and the σ substrate conveying line is evaded, which is characterized in that the substrate conveyed by the conveying line is placed on the plurality of substrates. In this state, the lifting mechanism causes the frame portion to be raised and lowered, so that the substrate and the mounting table are escaping from the conveying line, and the substrate is evaded (4) when the lifting line is conveyed by the line of the wire. When the navigation between the substrates is turned, the heart is moving. 12. The substrate processing device, 'contains ·· τ transport line, transports the substrate in one direction; the processing unit applies a predetermined process to the substrate transported by the transport line and the buffer device is set to close to the processing area In the upstream of the transport direction of the transport line, when the processing unit fails, the substrate transported by the transport line is temporarily evaded from the transport line; and the buffer device includes: a scaffold portion Set the Jin A, 7 θ line and can place the sub-multiple sub-section of the sub-segment of the board that can be transported into and out of the substrate transported by the conveyor-blowing association; the feeder line moves the J scaffolding section to make the plural When the lifting platform controls the lifting and lowering of the scaffolding portion by the lifting mechanism, the substrate J is transported in the conveying direction as a part of the conveying line; The substrate conveyed by the transport line is placed on the scaffolding portion to be lifted and lowered. In this state, the lifting mechanism (4) I, the Ganji and the mounting table are escaping from the transport line; the state, and the loading On the loading and unloading platform of the conveyor line Bian-like manufactured from occasion to be delivered under - the predetermined distance between the substrate into two kinds of α scaffolding lifting mechanism so that the lift portion. The memory medium of the sales, the memory is controlled by the computer on the operation of the process of Shen Shenhai control f'j program, so that the computer control processing fruit, the implementation of the scope of the patent scope of the 11th substrate buffer method table仃 put in the eleventh: