JP2002329761A - Transfer apparatus, cleaning apparatus and development apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transfer apparatus which can protect raising dust and carry out easily such as maintenance. SOLUTION: The transfer apparatus is constructed so that a first gear 52 and a second gear 55 are located in a clearance and a drive force of a motor 44 is transmitted to a transfer roller 43 by attraction of permanent magnets 48, 49 deposited on the gears 52, 55 respectively, thereby, the raising dust can be protected without the gears contacted each other. Moreover, the transfer apparatus is constructed so that a shaft component 53 can be easily removed together with a bearing 45 and the first gear 52, etc., by locating a cutout portion 41a on a holding component 41, thereby, maintenance of, e.g. the bearing 45, the first gear 52, or mechanisms under the apparatus can be easily made.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a liquid crystal display (LC) in a liquid crystal manufacturing process.
The present invention relates to a transport device for transporting a glass substrate used in D) and the like, a cleaning device for cleaning a substrate, and a developing device for performing a developing process.

[0002]

2. Description of the Related Art In a process of manufacturing an LCD, a photolithography technique similar to that used for manufacturing a semiconductor device is used to form an ITO (Indium Tin Oxide) thin film and an electrode pattern on a glass substrate for an LCD. Used. In the photolithography technique, a photoresist is applied to a glass substrate, exposed, and further developed.

Conventionally, a series of processes such as resist coating, exposure and development have been performed by a coating and developing system which performs various processes such as coating, developing and baking. For example, a transfer arm that holds a glass substrate by vacuum suction is used, or a glass substrate is placed on a plurality of transfer rollers having a rotation axis, and a roller transfer that transfers the substrate by rotation of the transfer roller is used. Or

Therefore, as such a roller conveying device,
For example, Japanese Patent Application Laid-Open No. H11-2088839 discloses that the rotation of a drive shaft is transmitted to a roller shaft of a conveying roller via a permanent magnet which is close to and opposed to a non-contact state. Also, a transport device that can simplify a complicated configuration such as a contact portion between a belt and a pulley and that can prevent dust generation is disclosed.

[0005]

However, in the transfer device disclosed in the above publication, the roller shafts 31 at both ends of the transfer roller 30 are only inserted through the support frame member 20 through the bearing 21. Since the transport roller 30 cannot be removed, it is difficult to maintain the bearing 21, the transport roller 30, the permanent magnet 33, and the like, or to maintain machinery below the transport roller 30.

In view of the circumstances described above, it is an object of the present invention to provide a transporting device that can prevent dust generation and can easily perform maintenance and the like, and also provides cleaning using the transporting device. An apparatus and a developing device are provided.

[0007]

In order to achieve the above object, a first aspect of the present invention relates to at least one pair of a shaft member provided on a rotatable shaft member for supporting both ends of a substrate and transporting the substrate by rotation. And a holding portion having a notch at the upper end thereof, the holding portion detachably supporting the shaft member at the notch portion, and a first magnet connected to the shaft member and having a first magnet disposed on a surface thereof. A first gear, a second gear provided with a gap with respect to the first gear, and a second magnet arranged to face a surface shape of the first gear; A drive unit for rotating the gear.

According to such a configuration, the first gear and the second gear are arranged with a gap therebetween, and the attraction between the first magnet and the second magnet provided in each gear. Since the driving force of the driving unit is transmitted to the pair of rollers by the force, the gears do not come into contact with each other and dust generation can be prevented.

Further, since the shaft member is removably supported by the notch, the shaft member can be easily removed at the time of maintenance, and the maintenance can be easily performed.

According to one embodiment of the present invention, at least one of the first gear and the second gear has the magnet arranged in a spiral.

According to such a configuration, for example, in the transfer device described in the above-mentioned publication, since the permanent magnets are simply arranged side by side in the rotation direction, the magnitude of the wave is increased or decreased by the attraction force of the permanent magnets during rotation. ), The smoothness of the rotation operation of the transport roller cannot be obtained, which may adversely affect the transport of the substrate. However, in the present embodiment, the first magnet and the second gear in the first gear are used. By arranging the second magnet in a spiral shape in the above, the rotation operation between the gears can be made smooth. Therefore, the substrate can be transported without adversely affecting the substrate.

According to one aspect of the present invention, the surface of the first gear has a substantially saddle shape, and the surface of the second gear corresponds to the substantially saddle shape of the first gear. It is a curved surface.

[0013] According to such a configuration, the facing area between the surface of the first gear and the surface of the second gear can be increased, and the power of the drive unit can be transmitted reliably. ,
According to one embodiment of the present invention, there is provided a means arranged near the first gear for detecting that the first gear is arranged at a predetermined position.

According to one embodiment of the present invention, the detecting means is an optical sensor including a pair of a light emitting unit and a light receiving unit.

According to one embodiment of the present invention, the detecting means is a magnetic sensor for detecting a magnetic field generated by the first magnet.

According to such a configuration, it is possible to confirm that the first gear is disposed at the normal position, and that the first gear is not disposed at the predetermined normal position and the gear section does not function. The situation can be prevented.

According to one embodiment of the present invention, when the first gear is arranged at a predetermined position, the movable unit is provided with a movable part which is attracted to a position near the first magnet, and the movable part is By being attracted to a position near the first magnet, a switch for confirming that the first gear is located at a normal position is connected.

According to such a configuration, it is possible to confirm that the first gear is located at the normal position with a simple configuration utilizing the magnetic force of the first magnet.

According to a second aspect of the present invention, there is provided at least one pair of rollers provided on a rotatable shaft member, supporting both ends of the substrate and transporting the substrate by rotation, and a notch at an upper end, A holding portion that detachably supports the shaft member at the notch portion, a first gear connected to the shaft member and having a first magnet disposed on a surface thereof, and a first gear. A transfer device provided with a gap, a second gear in which a second magnet is arranged to face the surface shape of the first gear, and a drive unit for rotating and driving the second gear; A brush disposed on the substrate conveyed by the pair of rollers, for cleaning the substrate while rotating with respect to the substrate, a means for supplying a cleaning liquid onto the substrate cleaned by the brush, Means to blow air on To Bei.

According to such a configuration, the shaft member can be detachably and easily removed together with the first gear and the pair of rollers by providing the notch in the holding member. The bearing portion of the member, the first gear,
Alternatively, maintenance of the machinery under the apparatus can be easily performed. In particular, the present cleaning apparatus is more effective because a cleaning liquid or the like used for the cleaning process may adhere to the transport apparatus and requires periodic maintenance.

According to one aspect of the present invention, the brush,
The apparatus further includes moving means for relatively moving the cleaning liquid supply means and the drying means with respect to the transport direction of the substrate, and means for varying the moving speed of the moving means.

According to such a configuration, since the moving speed of the brush, the cleaning liquid supply means and the drying means is variable, even when the transfer speed of the substrate by the transfer device is set to a constant speed. In addition, the cleaning speed can be determined by determining the moving speed according to the processing content of various types of substrates.

According to a third aspect of the present invention, there is provided at least one pair of rollers provided on a rotatable shaft member, supporting both ends of the substrate and transporting the substrate by rotation, and a notch at the upper end, A holding portion that detachably supports the shaft member at the notch portion, a first gear connected to the shaft member and having a first magnet disposed on a surface thereof, and a first gear. A transfer device provided with a gap, a second gear in which a second magnet is arranged to face the surface shape of the first gear, and a drive unit for rotating and driving the second gear; A means for supplying a developer onto the substrate, the means being arranged on an upper part of the substrate conveyed by the pair of rollers, respectively;
The apparatus further includes means for supplying a rinsing liquid onto the substrate to which the developer has been supplied, and means for blowing air onto the substrate to dry the substrate.

According to such a configuration, the shaft member can be easily removed together with the first gear, the pair of rollers and the like by providing the notch portion in the holding member. And maintenance of the first gear can be easily performed. In particular, the present developing apparatus is more effective because a developer or the like used in the developing process may adhere to the transporting apparatus and requires regular maintenance.

According to one embodiment of the present invention, a moving means for relatively moving the developing solution supply means, the rinsing liquid supply means and the drying means with respect to the substrate transport direction, and a movement of the moving means Means for varying the speed.

According to such a configuration, since the moving speeds of the developer supply means, the rinsing liquid supply means and the drying means are variable, the transfer speed of the substrate by the transfer device is set to a constant speed. Even in this case, the developing speed can be determined by setting the moving speed according to the processing content of various types of substrates.

Further features and advantages of the present invention will become more apparent by referring to the accompanying drawings and the description of the embodiments of the present invention.

[0028]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an LC to which the transfer apparatus of the present invention is applied.
FIG. 2 is a plan view showing a coating and developing processing system for the D substrate, FIG. 2 is a front view thereof, and FIG. 3 is a rear view thereof.

The coating and developing system 1 includes a cassette station 2 on which a cassette C for accommodating a plurality of glass substrates G is mounted, and a plurality of processing units for performing a series of processes including resist coating and developing on the substrates G. And an interface unit 4 for transferring the substrate G between the exposure unit 32 and the cassette station 2 and the interface unit 4 at both ends of the processing unit 3, respectively. I have.

The cassette station 2 has a transport mechanism 10 for transporting the LCD substrate between the cassette C and the processing section 3. And cassette station 2
, A cassette C is loaded and unloaded. The transport mechanism 10 includes a transport arm 11 that can move on a transport path 12 provided along the direction in which the cassettes are arranged. The transport arm 11 transports the substrate G between the cassette C and the processing unit 3. Done.

The processing section 3 has a direction (X direction) perpendicular to the arrangement direction (Y direction) of the cassettes C in the cassette station 2.
Main transport section 3a extending in the direction
Along the line, there is provided an upstream section 3b in which the respective processing units including the resist coating processing unit (CT) are arranged side by side, and a downstream section 3c in which the respective processing units including the development processing unit (DEV) 18 are arranged side by side. I have.

The main transfer section 3a is provided with a transfer path 31 extending in the X direction, and a transfer shuttle 23 configured to be movable along the transfer path 31 and to transfer the glass substrate G in the X direction. ing. The transport shuttle 23 holds and transports the substrate G by, for example, support pins. The substrate G is disposed between the processing unit 3 and the interface unit 4 at the end of the main transport unit 3a on the interface unit 4 side.
Is provided.

In the upstream section 3b, a scrubber cleaning processing unit (SCR) 20 for cleaning the substrate G is provided at the end of the cassette station 2 side, and the substrate G is disposed above the scrubber cleaning processing unit (SCR) 20. Excimer UV processing unit (e-
UV) 19 is provided. The scrubber cleaning unit (SCR) 20 is provided with a roller transfer type transfer device 50 according to the present invention, which will be described later.

Scrubber cleaning unit (SCR) 20
Next to the heat treatment system blocks 24 and 2 in which units for performing thermal treatment on the glass substrate G are stacked in multiple stages.
5 are arranged. These heat treatment system blocks 24 and 2
5, the vertical transfer unit 5 is disposed, and the transfer arm 5a is movable in the Z direction and the horizontal direction, and is rotatable in the θ direction. The substrate G is transported by accessing the heat treatment system unit. The vertical transport unit 7 in the processing section 3 has the same configuration as the vertical transport unit 5.

As shown in FIG. 2, the heat treatment system block 24
Has two stages of baking units (BEKE) for performing a heat treatment before applying a resist to the substrate G, and adhesion units (AD) for performing a hydrophobic treatment with an HMDS gas are sequentially stacked from the bottom. On the other hand, the heat treatment system block 25
, A cooling unit (C for cooling the substrate G)
OL) are stacked in two stages, and adhesion units (AD) are stacked in order from the bottom.

A resist processing block 15 extends in the X direction adjacent to the heat treatment system block 25. The resist processing block 15 includes a resist coating unit (CT) for applying a resist to the substrate G and a reduced-pressure drying unit (V) for drying the applied resist under reduced pressure.
D) and an edge remover (ER) for removing the resist at the peripheral edge of the substrate G are provided integrally. The resist processing block 15 is provided with a sub arm (not shown) that moves from the resist coating processing unit (CT) to the edge remover (ER).
The substrate G is transported in the resist processing block 15 by the sub arm.

A multi-stage heat treatment system block 26 is provided adjacent to the resist processing block 15. The heat treatment system block 26 includes a prebaking unit (PREBAK) for performing a heat treatment after applying a resist to the substrate G.
E) are stacked in three layers.

In the downstream section 3c, as shown in FIG.
9, a cooling unit (COL), a post-exposure baking unit (PEBAKE) for performing a heat treatment after exposure and before a development process.
Are stacked in two stages from the bottom. .

A development processing unit (DEV) 18 for performing development processing is provided adjacent to the heat treatment system block 29 and extends in the X direction. Heat treatment system blocks 28 and 27 are disposed adjacent to the development processing unit (DEV) 18, and have the same configuration as the vertical transport unit 5 between these heat treatment system blocks 28 and 27. 28 and 2
In FIG. 7, a vertical transfer unit 6 accessible to each heat treatment system unit is provided. An i-line processing unit (i) is provided on the end of the development processing unit (DEV) 18.
-UV) 33 is provided. Development processing unit (D
The EV 18 is provided with a transport device 51 having the same configuration as the roller transport type transport device 50.

In the heat treatment system block 28, a cooling unit (COL) and a post-baking unit (POBAKE) for performing a heat treatment after development on the substrate G are stacked in two stages from the bottom. On the other hand, in the heat treatment system block 27, similarly, a cooling unit (COL) and a post-baking unit (POBAKE) are stacked in two stages from the bottom.

The interface unit 4 includes a titler and a peripheral exposure unit (Title / EE) 2 on the front side.
2, and an extension cooling unit (EXTCOL) 35 is provided adjacent to the vertical transport unit 7.
A buffer cassette 34 is disposed on the back side, and the titler and the peripheral exposure unit (Titl)
er / EE) 22, an extension cooling unit (EXTCOL) 35, and a vertical transport unit 8 for transferring a substrate G between the buffer cassette 34 and the adjacent exposure device 32. The vertical transport unit 8 has the same configuration as the vertical transport unit 5.

FIGS. 4 and 5 are a plan view and a side view, respectively, of the transfer devices 50 and 51 according to the first embodiment. The transport device 50 in the scrubber cleaning processing unit (SCR) 20 and the transport device 51 in the development processing unit (DEV) are different from each other in length in the longitudinal direction.
Its configuration is the same.

A motor 44 is attached to the side of the gantry 60 of the transfer devices 50 and 51, and the shaft 44 can be rotated by the motor 44 in the transfer direction (X
Direction). On the left and right of the upper part of the gantry 60, holding members 41 extend in the transport direction, and between these holding members 41, a notch 41 formed at the upper end is provided.
a, a plurality of shaft members 53 supported by a pair of bearings 45 are laid over the shaft members 53. A pair of conveyance rollers 43 that support both ends of the glass substrate G and convey by rotation are attached to the shaft members 53. ing.

Each of the pair of transport rollers 43 has a projection 4
3a is provided, and the glass substrate G is placed on the projection 43a. Further, an O-ring (not shown) is attached to the convex portion 43a along the mounting surface of the substrate G so as to absorb an impact when the substrate G is transported.

In order to prevent the substrate G from being bent when the glass substrate G is transported, a support roller 64 for supporting the back side of the substrate G is provided between the pair of transport rollers 43.
Is provided.

Referring to FIG. 5, the transfer devices 50, 51
A plurality of transfer pins 46 for transferring the substrate G to the outside as described above are arranged at both ends of the transfer pin 46. As shown in FIG.
Is driven up and down integrally from the back surface side of the substrate G via the connecting member 47 by the up and down driving of the driving unit 58.

As shown in FIG. 6, the bearing 45 is removably fitted together with the shaft member 53 into the groove 41b in the notch 41a. At one end of the shaft member 53,
A substantially saddle-shaped first gear 52 is provided. As shown in FIG. 7, a plurality of permanent magnets 48 are provided on the surface of the substantially saddle-shaped portion of the first gear 52. Axial direction (Y
Direction) spirally. A gap is provided between the first gear 52 and the shaft 54 having a circular cross section corresponding to the substantially saddle shape. FIG.
As shown in FIG.
A plurality of permanent magnets 49 as the first gear 52
Are helically arranged at positions and sizes corresponding to the plurality of permanent magnets 48 in FIG. With such a configuration, the second gear 55 is rotated by the driving of the motor 44 and the magnet 4
8 and the magnet 49 are attracted to rotate the first gear 52, so that the substrate G is transferred.

As described above, the first gear 52 and the second gear 55 are arranged with a gap therebetween, and each gear 52
And 55, the driving force of the motor 44 is transmitted to the transport roller 43 by the attraction force of the permanent magnets 48 and 49, so that the gears do not come into contact with each other and dust generation is prevented. be able to.

In addition, by making the surface shape of the first gear 52 of this embodiment substantially a saddle shape, the area of the surface of the second gear 55 and the surface shape of the first gear 52 facing each other is increased. And the power of the motor 44 can be reliably transmitted.

Further, in the transfer device described in the above-mentioned publication, since the permanent magnets are simply arranged side by side in the rotation direction, a large or small "wave" is generated in the attraction force of the permanent magnets during rotation. However, in this embodiment, the permanent magnet 48 of the first gear and the permanent magnet 49 of the second gear 55 are formed in a spiral shape. , It is possible to smoothly rotate the gears.

In this embodiment, the notch 41a is provided in the holding member 41 so that the shaft member 53 can be easily removed together with the bearing 45, the first gear 52, the transport roller 43 and the support roller 64. For example, maintenance of the bearing 45, the first gear 52, or a transfer device including the transfer pin 46 can be easily performed. In particular, the transfer devices 50, 5
When 1 is applied to the scrubber cleaning processing unit (SCR) 20 and the developing processing unit (DEV) 18, the cleaning liquid used for the cleaning processing, the developing liquid used for the developing processing, etc. may be adhered, More effective because maintenance is required.

FIGS. 9 and 10 are front views showing another embodiment of the first gear and the second gear. As shown in FIG. 9, the first gear 91 is configured by arranging a magnet 93 with its N-pole and S-pole alternately with no gap. As shown in FIG. 10, the second gear 92 has a magnet 94 spirally arranged on the shaft member 54 without any gap. Even with such a configuration, the rotation operation between the gears can be made smooth.

Next, the configuration of the scrubber cleaning processing unit (SCR) 20 and the development processing unit (DEV) 18 using the above-described transport devices 50 and 51 will be described.

FIG. 11 is a side view of the scrubber cleaning processing unit (SCR) 20. FIGS. 12, 13 and 14 are views taken along lines AA, BB and CC in FIG. 11, respectively. It is sectional drawing. An outer cover 71 is provided on the upper portion of the transfer device 50. The outer cover 71 has a roll brush 72, a high-pressure rinsing nozzle 74, and an air knife 75 in order from the upstream side where the glass substrate G is transferred. Attached through. The processing space including the roll brush 72, the high-pressure rinsing nozzle 74, and the air knife 75 is covered with an inner cover 76.

The roll brush 72 is configured, for example, so as to rotate and contact the substrate G while supplying a cleaning liquid to the substrate G to remove relatively large dust and dirt. The high-pressure rinsing nozzle 74 is configured, for example, such that minute dust and the like on the substrate G are removed by ejecting a high-pressure cleaning liquid from micro holes (not shown) provided in the nozzle.
The air knife 75 is configured to immediately dry the substrate G by blowing high-pressure air to the substrate G.

In the present embodiment, it is also possible to perform the cleaning process using a cleaning liquid subjected to ultrasonic vibration instead of the high-pressure rinsing nozzle 74.

As shown in FIG. 12 to FIG.
1 is configured to be movable by a roller 81 along a rail 82 extending in the direction of the substrate G. As this moving mechanism, for example, although not shown, a belt drive by a motor may be used, or a linear motor type moving mechanism such as a voice coil motor (VCM) may be used. The number of rotations of the motor or the frequency of the coil of the linear motor is variably controlled, and is configured to move at a variable speed relative to the transport direction of the substrate G.

FIG. 15 shows the developing unit (DEV).
18 is a side view, and FIGS. 16, 17 and 18 are cross-sectional views taken along lines AA, BB, and CC in FIG. 15, respectively. 15 to 18, FIG.
1 to 14 are denoted by the same reference numerals.

A developing solution nozzle 83, a rinsing nozzle 84, and an air knife 75 are attached to the outer cover 71 of the developing unit (DEV) 18 in order from the upstream side where the glass substrate G is conveyed via an attaching member 77. Have been. These developer nozzle 83 and rinse nozzle 84
The processing space including the air knife 75 is covered with an inner cover 76.

The developing solution nozzle 83 is a nozzle for supplying a developing solution to the surface of the substrate G and performing a developing process. The rinsing nozzle 84 is a nozzle for supplying a rinsing liquid to the substrate G and washing away the developing solution on the substrate G. Air knife 7
5 is the same as the air knife 75 in the scrubber cleaning unit (SCR) 20.

As shown in FIGS. 16 to 18, similarly to the scrubber cleaning unit (SCR) 20, the outer cover 71 has a roller 8 along a rail 82 extending in the direction of the substrate G.
The moving mechanism is, for example, a motor driven belt drive (not shown), or a linear motor type moving mechanism such as a voice coil motor (VCM). May be used. The number of rotations of the motor or the frequency of the coil of the linear motor is variably controlled, and is configured to move at a variable speed relative to the transport direction of the substrate G.

In the processing steps of the coating and developing system 1 configured as described above, first, the substrate G in the cassette C is transported to the upstream section 3b in the processing section 3. In the upstream section 3b, an excimer UV processing unit (e-UV) 1
At 9, a surface modification / organic matter removal treatment is performed.

Next, a scrubber cleaning processing unit (SCR)
In 20, while the substrate G is transported substantially horizontally by the transport device 50, a cleaning process is first performed by the roll brush 72, followed by high-pressure cleaning by a high-pressure rinse 74, and finally, a drying process by an air knife 75. .
Here, since the outer cover 71 is relatively movable with respect to the direction of transport of the substrate G, and the moving speed is variable, the transport speed of the substrate G by the transport device 50 is determined to be constant. Even in this case, the moving speed can be determined according to the processing contents of various types of substrates G and the processing can be performed.

Subsequently, at the lowermost part of the heat treatment system block 24, the substrate G is transferred by the transfer arm 5a of the vertical transfer unit.
The heating process is performed in the baking unit (BEKE) of the heat treatment system block 24, the hydrophobic treatment is performed in the adhesion unit (AD), and the cooling process is performed in the cooling unit (COL) of the heat treatment system block 25. Done.

Next, the substrate G is transferred from the transfer arm 5a to the transfer shuttle 23. Then, after being conveyed to a resist coating unit (CT) and subjected to a resist coating process, a reduced pressure drying process is performed by a reduced pressure drying unit (VD), and a resist removal process of a substrate periphery is sequentially performed by an edge remover (ER). Done.

Next, the substrate G is transferred from the transfer shuttle 23 to the transfer arm of the vertical transfer unit 7, and is transferred to the pre-baking unit (PREB) in the heat treatment system block 26.
After the heat treatment in AKE), the cooling process is performed in the cooling unit (COL) in the heat treatment system block 29. Subsequently, the substrate G is cooled by an extension cooling unit (EXTCOL) 35 and exposed by an exposure device.

Next, the substrate G is transferred to the vertical transport units 8 and 7
Is transferred to the post-exposure baking unit (PEBAKE) of the heat treatment system block 29 via the transfer arm, where the heat treatment is performed, and then the cooling process is performed in the cooling unit (COL). Then, the substrate G is transferred to the transfer pin 46 of the transfer device 51 at the lowermost stage of the heat treatment system block 29 via the transfer arm of the vertical transfer unit 7.

Then, the substrate G is provided with a development processing unit (DE
In (V), while the substrate G is transported substantially horizontally by the transport device 51, first, a developer is supplied to the substrate G by the developer nozzle 83, a rinsing process is performed by the rinse nozzle 84, and finally, the air knife 75 is supplied. Is performed. Also here, the outer cover 71 is relatively movable with respect to the direction of transport of the substrate G, and the moving speed is variable. Even if various kinds of substrates G
The moving speed can be determined according to the processing contents of the above.

Next, the substrate G is transferred from the lowermost stage in the heat treatment system block 28 by the transfer arm 6a of the vertical transfer unit 6, and is subjected to heat treatment in the post baking unit (POBAKE) in the heat treatment system block 28 or 27. The cooling process is performed in a cooling unit (COL). Then, the substrate G is transferred to the transport mechanism 10 and stored in the cassette C.

Next, another embodiment of the transfer devices 50 and 51 will be described with reference to FIGS. 19 and 20. In addition,
19 and 20, the same components as those of the transport devices 50 and 51 in the above embodiment are denoted by the same reference numerals.

FIG. 19 is a plan view showing the vicinity of the first gear 52, and FIG. 20 is a sectional view thereof. In the present embodiment, the movable portion 6 is provided on the support 69 fixed to the side surface of the holding member 41.
A movable member 67 is provided at one end with a member 6 made of iron as a magnetic material, for example.
5 is fixed.

Now, for example, for maintenance, the shaft member 5
When the holding member 3 is not attached to the holding member 41, the holding member 41 is urged to a position shown by a broken line in FIG. 19 by an elastic body such as a spring (not shown). When mounted, the permanent magnet 4 of the first gear 52
The iron member 65 is attracted by the suction force of No. 8 and is disposed at a position where the iron member 65 does not contact the predetermined first gear 52. As a result, the movable portion 67 rotates, for example, to display on the operating display or the like that the shaft member 53 is mounted on the holding member 41 and the first gear 52 is disposed at a predetermined position. The other end 6 of the movable part 67 is connected to the switch S.
7a comes into contact and the switch is turned on.

With such a configuration, for example, if the first gear 52 is arranged at a predetermined position when the maintenance is completed and the shaft member 53 is mounted on the holding member 41, the switch S is connected, and If the gear 52 is not located at a predetermined position, the switch S is not connected and a warning can be issued. Therefore, it is possible to prevent a situation in which the first gear is not located at the predetermined normal position and the gear section does not function.

FIG. 21 is provided with an optical sensor R having a light emitting unit and a light receiving unit such as a photodiode, for example, in place of the switch S. If a predetermined amount of light received by the light receiving unit is obtained, it is assumed that the first gear 52 is arranged at a predetermined position.
Is determined not to be located at a predetermined position, and a warning can be issued.

When the first gear 52 is placed at a predetermined position instead of the optical sensor R, the permanent magnet 48
A magnetic sensor for detecting a magnetic field due to
It is also possible to determine whether or not the gear 52 is located at a predetermined position.

The present invention is not limited to the embodiment described above, and various modifications are possible.
In the above-described embodiment, the first gear 52 has a substantially saddle-shaped shape. However, the first gear may be formed in a cylindrical shape, similarly to the second gear, to form a gear with a simple configuration.

[0078]

As described above, according to the present invention,
By providing the removable shaft member with a gear transmitted by the attractive force of the permanent magnet, dust generation can be prevented, and maintenance and the like can be performed easily.

[Brief description of the drawings]

FIG. 1 is a plan view showing the overall configuration of a coating and developing system to which the present invention is applied.

FIG. 2 is a front view of the coating and developing system shown in FIG.

FIG. 3 is a rear view of the coating and developing system shown in FIG. 1;

FIG. 4 is a plan view of the transport device according to the first embodiment of the present invention.

FIG. 5 is a side view of the transport device shown in FIG.

FIG. 6 is an enlarged perspective view showing a holding member and a gear portion of the transport device.

FIG. 7 is a schematic diagram showing a first gear unit of the transport device.

FIG. 8 is a schematic diagram showing a second gear unit of the transport device.

FIG. 9 is a schematic view showing another embodiment of the first gear.

FIG. 10 is a schematic view showing another embodiment of the second gear.

FIG. 11 is a side view of the cleaning unit according to the embodiment.

FIG. 12 is a sectional view taken along line AA in FIG.

13 is a sectional view taken along line BB in FIG.

FIG. 14 is a sectional view taken along the line CC in FIG. 11;

FIG. 15 is a side view of the developing unit according to the embodiment.

16 is a sectional view taken along the line AA in FIG.

17 is a sectional view taken along the line BB in FIG.

18 is a cross-sectional view taken along the line CC in FIG.

FIG. 19 is a plan view illustrating a detection unit in a transport device according to another embodiment.

20 is a side view of the detection means shown in FIG.

FIG. 21 is a plan view showing a case where an optical sensor is used as the detection means.

[Explanation of symbols]

 G ... Glass substrate S ... Switch R ... Optical sensor 18 ... Development processing unit 20 ... Scrubber cleaning processing unit 41 ... Holding member 41a ... Notch portion 43 ... Transport roller 44 ... Motor 48, 49 ... Permanent magnet 50.51 ... Transport device 52 first gear 53 shaft member 55 second gear 67 movable part 71 outer cover 72 roll brush 74 high-pressure rinsing nozzle 75 air knife 81 roller 82 rail 83 developer nozzle 84 rinsing nozzle

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B65G 49/06 B65G 49/06 Z 5F046 G03F 7/30 501 G03F 7/30 501 H01L 21/027 H01L 21 / 304 644E 21/304 644 644F 651G 651 651L 21/30 569D F-term (reference) 2H096 AA27 GA17 GA21 3B116 AA02 AB14 BA02 BA03 BB90 CC01 CC03 3B201 AA02 AB14 BA02 BA03 BB90 BB92 BB98 CC01 CC013 LA01 LA04 MA23 MA24 MA26 PA06 5F046 LA11

Claims (11)

[Claims] An at least one pair of rollers provided on a rotatable shaft member for supporting both ends of a substrate and transporting the substrate by rotation, and a notch at an upper end, wherein the notch forms the shaft. A holding portion that removably supports the member, a first gear connected to the shaft member and having a first magnet disposed on a surface thereof, provided with a gap with respect to the first gear, A transport device comprising: a second gear in which a second magnet is arranged to face the surface shape of the first gear; and a drive unit that drives the second gear to rotate. 2. The transfer apparatus according to claim 1, wherein at least one of the first gear and the second gear has the magnet arranged spirally. 3. The transfer device according to claim 1, wherein the surface of the first gear has a substantially saddle shape, and the surface of the second gear has a substantially saddle shape of the first gear. A transfer device characterized by a corresponding curved surface. 4. The transfer device according to claim 1, wherein the transfer device is arranged near the first gear, and the first gear is arranged at a predetermined position. A transport device comprising: means for detecting. 5. The transport device according to claim 4, wherein the detection unit is an optical sensor including a pair of a light emitting unit and a light receiving unit. 6. The transfer device according to claim 4, wherein the detection unit is a magnetic sensor that detects a magnetic field generated by the first magnet. 7. The transfer device according to claim 4, further comprising: a movable portion that is attracted to a position near the first magnet when the first gear is arranged at a predetermined position, Is attracted to a position near the first magnet, thereby connecting a switch for confirming that the first gear is disposed at a normal position. 8. A rotatable shaft member, having at least one pair of rollers for supporting both ends of the substrate and transporting the substrate by rotation, and a notch at an upper end, wherein the notch forms the shaft. A holding portion for detachably supporting the member,
A first gear connected to the shaft member and having a first magnet disposed on a surface thereof, provided with a gap with respect to the first gear, facing a surface shape of the first gear; A transfer device including a second gear on which a second magnet is disposed, and a driving unit configured to rotationally drive the second gear; and a transfer device disposed on an upper portion of the substrate transferred by the pair of rollers. Cleaning comprising: a brush for cleaning a substrate while rotating the substrate; a unit for supplying a cleaning liquid onto the substrate cleaned by the brush; and a unit for blowing air on the substrate to dry the substrate. apparatus. 9. The transfer device according to claim 8, wherein the brush, the cleaning liquid supply unit, and the drying unit move relative to the substrate transfer direction, and the moving speed of the movement unit is A cleaning device, further comprising means for making the cleaning device variable. 10. A rotatable shaft member, having at least one pair of rollers for supporting both ends of a substrate and transporting the substrate by rotation, and a notch at an upper end, wherein the notch forms the shaft. A holding portion that detachably supports the member, a first gear connected to the shaft member and having a first magnet disposed on a surface thereof, provided with a gap with respect to the first gear, The second gear is opposed to the surface shape of the first gear.
A second gear on which a magnet is disposed, and a transfer device including a drive unit for rotating and driving the second gear; and a transfer device disposed on an upper portion of the substrate transferred by the pair of rollers. A developing device, further comprising: means for supplying a developing solution; means for supplying a rinsing liquid onto the substrate to which the developing solution has been supplied; and means for blowing air on the substrate to dry it. 11. The developing device according to claim 10, wherein: a moving unit that relatively moves the developing solution supply unit, the rinsing liquid supply unit, and the drying unit with respect to a substrate transport direction; Means for making the moving speed of the developing device variable.