KR100874819B1 - A conveyor apparatus for an etching of flat panel display - Google Patents

A conveyor apparatus for an etching of flat panel display Download PDF

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KR100874819B1
KR100874819B1 KR1020070099179A KR20070099179A KR100874819B1 KR 100874819 B1 KR100874819 B1 KR 100874819B1 KR 1020070099179 A KR1020070099179 A KR 1020070099179A KR 20070099179 A KR20070099179 A KR 20070099179A KR 100874819 B1 KR100874819 B1 KR 100874819B1
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driven
magnets
flat panel
panel display
driving
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KR1020070099179A
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Korean (ko)
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박선규
신정호
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박선규
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67063Apparatus for fluid treatment for etching
    • H01L21/67075Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The conveyor system for the flat panel display etching processing is provided to improve the operational efficiency and to prevent the mechanical defect like the abrasion of gear by preventing etchant from being emitted to the drive motor etc. The conveyor system for the flat panel display etching processing comprises the drive motor(10), a plurality of driving magnets, a plurality of transferring rollers, a plurality of reactor stones, the chamber(50). The driving magnet is separately installed in the axis member(11) rotated with the drive motor to coaxial in the longitudinal direction. The transferring roller is arranged in the direction which is orthogonal in the axis member. The reactor stone is installed at one end of the transferring roller in the respective coaxial. The transferring roller is accepted in the chamber and isolates the non-driving magnet from the driving magnet. The driving magnet and non-driving magnet are arranged along columnar circumference.

Description

평판디스플레이 에칭가공용 컨베이어장치{A conveyor apparatus for an etching of Flat Panel Display}A conveyor apparatus for an etching of Flat Panel Display}

본 발명은 평판디스플레이 에칭가공용 컨베이어장치에 관한 것으로, 보다 상세하게는 에칭작업의 정밀성이 향상되면서도 작동을 원활하게 하고, 에칭액으로 인한 주변기기의 오염을 방지하여 기기의 작동효율이 저하되는 것을 방지하는 평판디스플레이 에칭가공용 컨베이어장치에 관한 것이다. The present invention relates to a flatbed display etching processing conveyor, and more particularly, smooth operation while improving the precision of the etching operation, and prevents the contamination of peripheral devices due to the etching solution to prevent the operation efficiency of the device is lowered The present invention relates to a conveyor apparatus for display etching processing.

종래에는 TV나 컴퓨터 모니터 등의 표시부로 브라운관이 거의 대부분을 차지했으나, 최근 들어, 반도체 기술의 발달에 따라 공간을 적게 차지하면서도 무게가 가벼운 평판디스플레이의 사용이 급증할 뿐만 아니라 대부분을 차지하고 있다. 이러한 평판디스플레이는 LCD(Liquid Crystal Display)나 PDP(Plasma Display Panel), OLED(Organic Light Emitting Diodes) 등 여러 종류가 있으며, 이중 LCD는 전력소모와 부피가 작아서 많이 사용되고 있다. Conventionally, CRTs occupy almost all of the display parts of TVs and computer monitors, but in recent years, the use of light weight flat panel displays, which occupy less space and occupy most of them, has taken up most of the space due to the development of semiconductor technology. Such flat panel displays include various types such as liquid crystal displays (LCDs), plasma display panels (PDPs), and organic light emitting diodes (OLEDs). Dual LCDs are widely used due to their low power consumption and small volume.

한편, 상기와 같은 평판디스플레이를 제작할 때, 특히, LCD를 제작함에 있어 서, 기판에 패턴을 형성하기 위해 여러 공정을 거치게 되는데, 이때, 컨베이어에 의해 이송되면서 에칭 공정 등이 이루어지게 된다. 그런데, 이러한 컨베이어는 구동모터의 축과 이송롤러가 직접 연결되어, 기어간의 직접적인 접촉으로 마모되고, 기판에 에칭액을 분사하는 과정에서 구동모터 기타 주변장치가 오염되거나 손상되는 문제가 있다. 또한, 이에 따라, 구동모터가 제대로 작동되지 않아서 생산량에 차질을 빚게 되는 문제가 있다. 그리고 한편, 충분한 에칭액의 도포를 위해서 기판을 왕복운동시키면서 에칭액을 분사하게 되며, 이때, 구동모터를 정역회전시키게 되는데, 이는 이송롤러에 올려진 기판에 의해 구동모터에 과부하가 걸리게 되는 문제가 있다. 또한, 구동모터의 정역회전에 의해 기판이 방향전환지점에서 일정시간 체류하게 되므로, 에칭액이 기판의 일정부분에만 집중적으로 도포되어 기판의 품질이 떨어지는 문제가 있다. On the other hand, when manufacturing the flat panel display as described above, in particular, in manufacturing the LCD, it goes through a number of processes to form a pattern on the substrate, in this case, the etching process is carried out while being carried by the conveyor. However, such a conveyor is directly connected to the shaft of the drive motor and the transfer roller, worn by direct contact between the gears, there is a problem that the drive motor and other peripheral devices are contaminated or damaged in the process of spraying the etching solution to the substrate. In addition, according to this, there is a problem that the drive motor does not operate properly, which causes a problem in the production. On the other hand, the etching liquid is injected while reciprocating the substrate for the application of sufficient etching liquid, and at this time, the driving motor is rotated forward and backward, which causes a problem that the driving motor is overloaded by the substrate mounted on the feed roller. In addition, since the substrate stays at the turning point for a predetermined time due to the forward and reverse rotation of the driving motor, the etching solution is concentrated on only a portion of the substrate, thereby degrading the quality of the substrate.

본 발명은 전술한 바와 같은 문제점을 해결하기 위한 것으로, 평판디스플레이에 에칭액을 좀 더 균일하게 처리하면서도 작동을 원활하게 하고, 에칭액으로 인한 주변기기의 오염을 방지하고, 이로 인해 기기의 작동효율이 저하되는 것이 방지되며, 작업의 정밀성이 향상되는 평판디스플레이 에칭가공용 컨베이어장치를 제공하는 것이다.The present invention is to solve the problems as described above, the operation of the etching liquid on the flat panel display more uniformly to facilitate the operation, to prevent contamination of the peripheral device due to the etching liquid, thereby reducing the operating efficiency of the device It is to provide a conveyor apparatus for flat-panel display etching which is prevented, and the working precision is improved.

본 발명의 특징에 따르면, 평판디스플레이패널에 에칭가공을 하기 위한 컨베이어장치에 있어서, 구동모터(10)와, 이 구동모터(10)에 의해 회전되는 축부재(11)에 길이방향을 따라 동축으로 이격 설치된 복수개의 구동자석(21)과, 상기 축부재(11)에 직교되는 방향으로 배치된 복수개의 이송롤러(40)와, 이 이송롤러(40)의 일단부에 각각 동축으로 설치되고 상기 구동자석(20)과 근접 배치된 복수개의 피동자석(31)과, 상기 피동자석(31)을 구동자석(21)과 격리시키며 상기 이송롤러(40)가 내부에 수납되는 챔버(50)를 포함하며, 상기 구동자석(21)과 피동자석(31) 각각의 외주면에는 서로 다른 극성이 원주방향을 따라 교대로 배열되어, 구동자석(21)의 회전에 따라 상기 구동자석(21)과 피동자석(31)간의 인력과 척력에 의해 이송롤러(40)가 회전되며, 상기 챔버(50)에는 에칭액을 분사하는 다수개의 분사노즐(61)이 설치된 것을 특징으로 하는 평판디스플레이 에칭가공용 컨베이어장치가 제공된다. According to a feature of the present invention, in a conveyor apparatus for etching a flat panel display panel, the drive motor 10 and the shaft member 11 rotated by the drive motor 10 are coaxially along the longitudinal direction. A plurality of driving magnets 21 spaced apart from each other, a plurality of feed rollers 40 disposed in a direction orthogonal to the shaft member 11, and one end of the feed rollers 40, respectively, coaxially and driven And a plurality of driven magnets 31 arranged in close proximity to the magnet 20, and a chamber 50 separating the driven magnets 31 from the driving magnets 21 and storing the transfer roller 40 therein. The outer circumferential surfaces of each of the driving magnets 21 and the driven magnets 31 are alternately arranged along the circumferential direction, and the driving magnets 21 and the driven magnets 31 are rotated according to the rotation of the driving magnets 21. Feed roller 40 is rotated by the attraction force and repulsion between the), the chamber 50 is etched There is provided a flat panel display etching processing conveyor device, characterized in that a plurality of injection nozzles 61 for injecting a liquid are provided.

본 발명의 다른 특징에 따르면, 상기 이송롤러(40)는 회전가능하게 설치되는 롤러축(41)과, 이 롤러축(41)의 외주면을 감싸며 평판디스플레이패널의 직립상태의 하단부가 안착되는 안착홈(43)이 원주방향을 따라 형성된 완충부재(42)로 이루어지고, 상기 롤러축(41)에는 상기 피동체(30)가 축결합되며, 상기 피동체(30)와 완충부재(42)는 서로 접근 또는 후퇴되도록 형성되고, 서로 대향하는 상기 완충부재(42) 또는 피동체(30)의 일측면에는 상기 롤러축(41)과 동축적으로 탄성부재(46)가 배치되며, 이 탄성부재(46)의 전방에 배치되며 이 탄성부재(46)에 의해 가압되는 제1마찰판(47)이 구비되고, 이 제1마찰판(47)에 대향하여 상기 피동체(30)또는 완충부재(42)의 타측면에 제2마찰판(48)이 장착되며, 상기 롤러축(41)에 나사결합되어 피동체(30)와 이송롤러(40)의 간격을 조절하는 조절너트(49)가 구비된 것을 특징으로 하는 평판디스플레이 에칭가공용 컨베이어장치가 제공된다. According to another feature of the invention, the feed roller 40 is a roller shaft 41 rotatably installed, and a seating groove in which the lower end of the upright state of the flat panel display panel is wrapped around the roller shaft 41. 43 is formed of a buffer member 42 formed along the circumferential direction, the driven member 30 is axially coupled to the roller shaft 41, the driven member 30 and the buffer member 42 are mutually It is formed to approach or retreat, the elastic member 46 is disposed coaxially with the roller shaft 41 on one side of the buffer member 42 or the driven member 30 facing each other, the elastic member 46 The first friction plate 47 is provided in front of the) and is pressed by the elastic member 46, the other of the driven member 30 or the shock absorbing member 42 to face the first friction plate 47 The second friction plate 48 is mounted on the side, and screwed to the roller shaft 41 to adjust the distance between the driven member 30 and the feed roller 40 Is provided with a flat panel display etching processing conveyor device, it characterized in that the control provided with a nut (49).

본 발명의 또 다른 특징에 따르면, 상기 피동자석(31)의 외주면에는 수지층(32)이 형성되어, 피동자석(31)이 에칭액에 의해 손상되는 것이 방지되는 것을 특징으로 하는 평판디스플레이 에칭가공용 컨베이어장치가 제공된다.According to another feature of the present invention, the resin layer 32 is formed on the outer circumferential surface of the driven magnet 31, the flat display etching processing conveyor, characterized in that the driven magnet 31 is prevented from being damaged by the etching liquid An apparatus is provided.

본 발명의 또 다른 특징에 따르면, 상기 챔버(50)의 상면판의 저면에는 상기 완충부재(42)의 안착홈(43)과 대응되는 위치에 상기 평판디스플레이패널의 직립상 태의 상단부를 가이드하는 가이드홈 또는 가이드부재(51)가 설치된 것을 특징으로 하는 평판디스플레이 에칭가공용 컨베이어장치가 제공된다. According to another feature of the invention, a guide for guiding the upper end of the upright state of the flat panel display panel at a position corresponding to the seating groove 43 of the buffer member 42 on the bottom surface of the upper plate of the chamber 50 Provided is a conveyor apparatus for flat panel display etching, characterized in that a groove or guide member 51 is provided.

본 발명의 또 다른 특징에 따르면, 상기 챔버(50)의 측면판의 내주면에는 상기 축부재(11)의 방향을 따라 다수개의 분사노즐(61)이 형성된 노즐부(60)가 하나 이상 설치된 것을 특징으로 하는 평판디스플레이 에칭가공용 컨베이어장치가 제공된다.According to another feature of the invention, the inner peripheral surface of the side plate of the chamber 50 is characterized in that at least one nozzle unit 60 having a plurality of injection nozzles 61 are formed along the direction of the shaft member (11). Provided is a conveyor apparatus for flat panel etching processing.

이상에서와 같이 본 발명에 의하면, 챔버(50) 내부에 구비된 이송롤러(40)의 피동체(30)가 챔버(50) 외부에 구비된 구동모터(10)에 의해 구동되는 구동체(20)와 자석의 인력과 척력에 의한 회전력에 의해 회전되도록 구성되어, LCD패널(4)을 이송시키면서 챔버(50) 내부에서 분사노즐(61)을 통해 에칭액을 분사하더라도, 에칭액이 구동모터(10) 등으로 분사되지 않게되어, 구동모터(10)의 손상이 방지됨은 물론 종래처럼 기어의 마모와 같은 기계적 결함이 방지되어, 작동효율이 향상되는 효과가 있다. As described above, according to the present invention, the driving body 20 driven by the drive motor 10 provided in the chamber 50, the driven body 30 of the feed roller 40 provided outside the chamber 50 ) And the magnet are rotated by the rotational force by the attraction force and the repulsive force, even if the etching liquid is injected through the injection nozzle 61 inside the chamber 50 while transferring the LCD panel 4, the etching liquid is driven by the driving motor 10. It is not sprayed, etc., the damage of the drive motor 10 is prevented, as well as mechanical defects such as wear of the gear is prevented as in the prior art, there is an effect that the operating efficiency is improved.

또한, 상기와 같은 구성에 의해, 구동모터(10)를 역회전시키더라도 피동체(30)와 완충부재(42)의 제1 및 제2마찰판(47, 48)의 마찰에 의해 완충부재(42)가 일정시간 정지됨이 없이 방향전환되어, 구동모터(10)에 과부하가 걸리는 것이 방지되는 효과가 있을 뿐만 아니라 기판에 보다 균일하게 에칭액이 도포되는 효과가 있 다. 한편, 피동자석(31)의 외주면에 수지층(32)을 형성함으로써, 에칭액이 분사되더라도 피동자석(31)의 손상이 방지되는 효과가 있으며, 이에 따라, 작동이 원활하게 이루어지게 된다. 그리고, 이송롤러(40)와 챔버(50) 상면판의 저면에 각각 안착홈(43)과 가이드부재(51)를 형성 또는 설치함으로써, LCD패널(4)을 직립된 상태로 안정되게 이송시키면서 에칭가공을 할 수 있는 효과가 있다. In addition, according to the above configuration, even when the driving motor 10 is rotated in reverse, the shock absorbing member 42 is caused by friction between the driven member 30 and the first and second friction plates 47 and 48 of the shock absorbing member 42. ) Is switched without stopping for a certain time, the effect is not only prevented from overloading the drive motor 10, but also the effect that the etching solution is more uniformly applied to the substrate. On the other hand, by forming the resin layer 32 on the outer circumferential surface of the driven magnet 31, even if the etching liquid is injected, there is an effect that the damage of the driven magnet 31 is prevented, thereby operating smoothly. Then, by forming or installing the mounting groove 43 and the guide member 51 on the bottom surface of the feed roller 40 and the chamber 50 upper plate, the LCD panel 4 is stably transferred and etched in an upright state. There is an effect that can be processed.

상술한 본 발명의 목적, 특징들 및 장점은 다음의 상세한 설명을 통하여 보다 분명해질 것이다. 이하, 본 발명의 바람직한 실시예를 첨부한 도면에 의거하여 설명하면 다음과 같다.The objects, features and advantages of the present invention described above will become more apparent from the following detailed description. Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

도 1은 본 발명에 따른 평판디스플레이 에칭가공용 컨베이어장치의 바람직한 일실시예를 도시한 평면도이고, 도 2는 상기 실시예의 측면도이며, 도 3은 상기 실시예 중 피동체의 구성을 보인 단면도이다. 도시된 바와 같이, 본 발명 컨베이어장치는 구동모터(10)에 의해 회전되는 축부재(11)의 외주면에 다수개 설치되는 구동체(20)와, 상기 축부재(11)와 직교되는 방향으로 배치되는 이송롤러(40)와, 이 이송롤러(40)의 일단부에 결합되며 상기 구동체(20)의 상부에 배치되는 피동체(30)와, 이 피동체(30)와 이송롤러(40)가 내부 저면부에 수납되도록 형성된 챔버(50)와, 이 챔버(50)의 내부 측면부에 다수개 설치된 분사노즐(61)을 포함하여 구성된다. 1 is a plan view showing a preferred embodiment of a flat panel display etching processing conveyor apparatus according to the present invention, Figure 2 is a side view of the embodiment, Figure 3 is a cross-sectional view showing the configuration of the driven body of the embodiment. As shown, the conveyor apparatus of the present invention is disposed in the direction orthogonal to the drive body 20 and a plurality of the drive body 20 is installed on the outer peripheral surface of the shaft member 11 that is rotated by the drive motor (10) The feed roller 40, the driven body 30 is coupled to one end of the feed roller 40 and disposed above the drive body 20, the driven body 30 and the feed roller 40 Is configured to include a chamber 50 formed to be accommodated in the inner bottom portion, and a plurality of injection nozzles 61 provided in the inner side portion of the chamber 50.

이때, 도 1에 도시된 바와 같이, 4개의 수직프레임(2)이 상부에서 볼 때, 직 사각형의 꼭지점에 위치되도록 설치되고, 직사각의 테두리 형상인 수평프레임(3)이 각 수직프레임(2)의 중간부를 연결하도록 구성된 지지대(1)가 구비되며, 이러한 지지대(1)에 상기 컨베이어가 설치된다. 한편, 이하에서는 평판디스플레이패널로 LCD패널(4)을 일례로 예시하였으며, 이에 한정되는 것은 아니다.At this time, as shown in Figure 1, when the four vertical frame (2) is viewed from the top, it is installed to be located at the vertex of the rectangular, the horizontal frame (3) of the rectangular border shape each vertical frame (2) A support 1 is provided which is configured to connect an intermediate part of the conveyor 1. Meanwhile, hereinafter, the LCD panel 4 is exemplified as a flat panel display panel, but is not limited thereto.

상기 다수개의 구동체(20)는 원통 형상으로 이루어지고, 외주면에는 구동자석(21)이 N극과 S극의 극성이 교대로 원주방향을 따라 형성되는데, 본 실시예에서는 도 2에 도시된 바와 같이, 축부재(11)에 대해서 소정각도 기울어진 형태의 구동자석(21)을 예시하였다. 그리고, 일방향으로 긴 축부재(11)의 양단부가 길이가 상대적으로 짧으며 서로 마주보는 수평프레임(3)에 각각 결합된다. 이때, 상기 축부재(11)의 일단부에는 축부재(11)를 길이방향을 중심으로 자전시키도록 구동모터(10)가 풀리와 벨트 등에 의해 축결합된다. 한편, 상기 다수개의 구동체(20)는 원주방향으로 회전되도록 그 중심이 상기 축부재(11)에 소정간격 이격되어 결합된다. The plurality of driving bodies 20 are formed in a cylindrical shape, and the driving magnets 21 are alternately formed along the circumferential direction on the outer circumferential surface of the N pole and the S pole, as shown in FIG. Likewise, the driving magnet 21 is inclined at a predetermined angle with respect to the shaft member 11. Then, both ends of the shaft member 11 long in one direction are relatively short in length and are respectively coupled to the horizontal frames 3 facing each other. At this time, the driving motor 10 is axially coupled to the one end of the shaft member 11 by the pulley and the belt to rotate the shaft member 11 around the longitudinal direction. On the other hand, the plurality of drive body 20 is coupled to the center of the shaft member 11 at a predetermined interval so as to rotate in the circumferential direction.

상기 이송롤러(40)는 상기 축부재(11)와 직교되도록 배치되는 롤러축(41)과, 이 롤러축(41)의 외주면에 형성된 합성수지재의 완충부재(42)를 포함하여 이루어져서, 롤러축(41)의 양단이 챔버(50) 저면에 지지부재(44)에 회전가능하게 결합된다. 이때, 이 완충부재(42)는 LCD패널(4)의 저면이 안착되는 안착홈(43)이 원주방향을 따라 형성되고, 이 안착홈(43)과 대응되는 챔버(50)의 상면판의 저면에는 LCD패널(4)의 상부가 가이드되는 가이드홈이 형성되거나 또는 탄성재의 가이드부재(51)가 소정간격 이격 설치되어, LCD패널(4)이 이송될 때 유동이 방지되며 위치의 이탈 이 방지된다. The feed roller 40 comprises a roller shaft 41 disposed to be orthogonal to the shaft member 11, and a buffer member 42 of synthetic resin material formed on the outer circumferential surface of the roller shaft 41, Both ends of 41 are rotatably coupled to the support member 44 at the bottom of the chamber 50. At this time, the buffer member 42 is formed with a seating groove 43 in which the bottom of the LCD panel 4 is seated in the circumferential direction, and the bottom of the top plate of the chamber 50 corresponding to the seating groove 43. There is formed a guide groove for guiding the upper portion of the LCD panel 4 or the guide member 51 of the elastic material is installed at a predetermined interval, the flow is prevented when the LCD panel 4 is transferred and the deviation of the position is prevented .

그리고, 상기 롤러축(41)에는 원통 형상의 피동체(30)가 축결합되어, 완충부재(42) 방향으로 전진 및 후퇴되도록 구성된다. 또한, 상기 피동체(30)는 구동체(20)의 상부에 위치되며, 구동체(20)와 소정간격 이격되도록 설치된다. 이때, 이 피동체(30)의 외주면에는 피동자석(31)이 N극과 S극의 극성이 교대로 원주방향을 따라 형성되는데, 본 실시예에서는 도 2에 도시된 바와 같이, 롤러축(41)에 대해서 소정각도 기울어진 형태이며, 상기 구동자석(21)과 대응되는 형태로 이루어진 것을 예시하였다. 또한, 이 피동자석(31)의 외주면에는 PVC와 같은 합성수지를 코팅한 수지층(32)이 형성되어, 챔버(50) 상부에서 분사되는 에칭액에 의해 피동자석(31)이 손상되는 것을 방지하도록 하였다. A cylindrical driven member 30 is axially coupled to the roller shaft 41 to move forward and backward in the direction of the buffer member 42. In addition, the driven member 30 is positioned above the driving body 20 and is installed to be spaced apart from the driving body 20 by a predetermined interval. At this time, on the outer circumferential surface of the driven body 30, the driven magnets 31 are alternately formed along the circumferential direction of the polarity of the N pole and the S pole. In this embodiment, as shown in FIG. 2, the roller shaft 41 It is an example in which the predetermined angle is inclined with respect to the), and made in a form corresponding to the driving magnet (21). In addition, a resin layer 32 coated with a synthetic resin such as PVC is formed on the outer circumferential surface of the driven magnet 31 to prevent the driven magnet 31 from being damaged by the etching liquid sprayed from the chamber 50. .

한편, 상기 완충부재(42)의 피동체(30)에 면하는 부위에는 테이퍼진 오목부(45)가 형성되고, 이 오목부(45)에는 탄성부재(46)가 삽입설치된다. 이 탄성부재(46)는 바람직하게는 원뿔대 형상의 코일스프링으로 이루어져서, 일반적인 원통형 코일스프링에 비해 그 간격조절에 따른 탄성력의 조절이 우수하다. 그리고, 이 탄성부재(46)의 전방에는 상기 오목부(45)의 입구를 덮도록 배치되는 제1마찰판(47)이 구비된다. 이 제1마찰판(47)은 상기 탄성부재(46)에 의해 전방으로 탄성가압된다. 또한, 상기 제1마찰판(47)에 대향하는 피동체(30)의 일측면에는 상기 제1마찰판(47)과 마찰접촉되는 제2마찰판(48)이 장착된다. 상기 제1마찰판(47)과 제2마찰판(48)의 성형재료로는 예를 들면, 내마모성 등의 기계적 특성이 우수한 테프론수지나 PEEK수지 등을 사용할 수 있다. 한편, 완충부재(42)의 피동체(30)와 접하 는 면과 반대쪽 면에는 조절너트(49)가 롤러축(41)에 나사결합되어 완충부재(42)의 롤러축(41) 상에서의 위치를 규제한다. On the other hand, a tapered recess 45 is formed in a portion of the buffer member 42 that faces the driven member 30, and an elastic member 46 is inserted into the recess 45. As shown in FIG. The elastic member 46 is preferably made of a truncated coil spring, it is superior in the control of the elastic force according to the spacing control compared to the general cylindrical coil spring. In addition, the front of the elastic member 46 is provided with a first friction plate 47 disposed to cover the inlet of the recess 45. The first friction plate 47 is elastically pressed forward by the elastic member 46. In addition, a second friction plate 48 in frictional contact with the first friction plate 47 is mounted on one side surface of the driven body 30 opposite to the first friction plate 47. As the molding material of the first friction plate 47 and the second friction plate 48, for example, Teflon resin or PEEK resin having excellent mechanical properties such as wear resistance can be used. On the other hand, the adjusting nut 49 is screwed to the roller shaft 41 on the surface opposite to the surface in contact with the driven member 30 of the shock absorbing member 42, and thus the position on the roller shaft 41 of the shock absorbing member 42. Regulate it.

상기 챔버(50)의 저면판은 상기 구동체(20)와 피동체(30) 사이를 통과하며 상기 이송롤러(40)의 하부에 형성된다. 그리고, 각 측면판은 상기 수직프레임(2)을 연결하여 형성된다. 또한, 상기 챔버(50)의 측면판에는 상기 롤러축(41)과 직교되는 방향을 따라 다수개의 노즐부(60)가 형성되고, 이 각 노즐부(60)에는 길이방향을 따라 다수개의 분사노즐(61)이 소정간격 이격되어 형성된다. 한편, 도시하진 않았지만, 상기 이송롤러(40)의 길이방향과 나란한 챔버(50)의 측면판에는 개구부가 형성되어, LCD패널(4)이 챔버(50) 내부로 유입되어 배출될 수 있도록 구성된다. 그리고, 상기 노즐부(60)는 챔버(50) 상면판의 저면에 설치될 수도 있다. The bottom plate of the chamber 50 passes between the driving body 20 and the driven body 30 and is formed under the transfer roller 40. And, each side plate is formed by connecting the vertical frame (2). In addition, a plurality of nozzle parts 60 are formed in the side plate of the chamber 50 in a direction orthogonal to the roller shaft 41, and each nozzle part 60 has a plurality of injection nozzles along the longitudinal direction. 61 is formed at predetermined intervals. On the other hand, although not shown, an opening is formed in the side plate of the chamber 50 parallel to the longitudinal direction of the transfer roller 40, the LCD panel 4 is configured to be introduced into the chamber 50 to be discharged. . The nozzle unit 60 may be installed on the bottom surface of the upper surface plate of the chamber 50.

이와 같이 구성된 본 발명 컨베이어에 의해 LCD패널(4)에 에칭작업을 하는 과정을 설명하면, 다음과 같다.Referring to the process of etching the LCD panel 4 by the conveyor of the present invention configured as described above is as follows.

상기 구동모터(10)에 의해 축부재(11)와 구동체(20)가 회전되면, 이 구동체(20)의 구동자석(21)과 피동체(30)의 피동자석(31)이 상호 인력과 척력이 작용하게 되어 피동체(30)가 회전된다. 이때, 이 피동체(30)와 이송롤러(40)는 제1 및 제2마찰판(47, 48)이 마찰접촉되어, 구동모터(10)의 구동력에 의해 이송롤러(40)를 회전시키게 된다. 이에 따라, LCD패널(4)이 직립한 상태로 이송롤러(40)를 통해 이송되어 챔버(50) 내부로 유입되게 되며, 분사노즐(61)을 통해 에칭액을 분사시키게 된다. 이때, LCD패널(4)을 이송시키면서 에칭액을 분사하게 되므로, 에칭액이 LCD패널(4)에 좀 더 균일하게 도포된다. When the shaft member 11 and the driving body 20 are rotated by the driving motor 10, the driving magnet 21 of the driving body 20 and the driven magnet 31 of the driven body 30 are mutually attracted. The repulsive force acts and the driven body 30 is rotated. At this time, the driven body 30 and the feed roller 40 are in frictional contact with the first and second friction plates 47 and 48, thereby rotating the feed roller 40 by the driving force of the drive motor 10. Accordingly, the LCD panel 4 is conveyed through the transfer roller 40 in an upright state to be introduced into the chamber 50, and the etching liquid is injected through the injection nozzle 61. At this time, the etching solution is sprayed while the LCD panel 4 is transferred, so that the etching solution is more uniformly applied to the LCD panel 4.

또한, 구동모터(10)를 정역회전시켜서 LCD패널(4)을 챔버(50) 내부에서 왕복이동시키면서 에칭하게 되는데, 이때, 상기 구동모터(10)를 역회전시키게 되면, 제1 및 제2마찰판(47, 48)의 마찰에 의해 완충부재(42)가 정방향으로 서서히 감속되면서 어느 순간 역방향으로 서서히 가속되게 된다. 따라서, 구동모터(10)에 과부하가 걸리지 않게 되는 장점이 있다. 따라서, 상기와 같이 구동모터(10)를 역회전시키더라도 LCD패널(4)이 방향전환지점에 일정시간 체류함이 없이 바로 방향을 전환하게 되므로, 에칭액이 LCD패널(4)의 일정부분에 집중됨이 없이 균일하게 도포되어, 제품의 품질이 우수한 장점이 있다. 한편, 본 실시예에서는 구동체(20)와 피동체(30)의 외주면에 구동자석(21)과 피동자석(31)이 형성되어 별체인 것으로 예시하였으나, 구동자석(21) 및 피동자석(31)이 각각 구동체(20) 및 피동체(30)와 일체로 형성될 수 있음은 물론이다. In addition, by rotating the driving motor 10 forward and backward, the LCD panel 4 is etched while reciprocating in the chamber 50. At this time, when the driving motor 10 is reversed, the first and second friction plates are rotated. The shock absorbing member 42 is slowly decelerated in the forward direction by the friction of the 47 and 48, and is accelerated gradually in the reverse direction at any moment. Therefore, there is an advantage that the driving motor 10 is not overloaded. Therefore, even when the driving motor 10 is rotated in reverse as described above, since the LCD panel 4 immediately changes direction without staying at the turning point for a predetermined time, the etchant concentrates on a predetermined portion of the LCD panel 4. Without uniformly applied, there is an advantage of excellent product quality. Meanwhile, in the present embodiment, the driving magnets 21 and the driven magnets 31 are formed on the outer circumferential surfaces of the driving body 20 and the driven body 30, and thus, the driving magnets 21 and the driving magnets 31 are illustrated as separate bodies. ) May be formed integrally with the driving body 20 and the driven body 30, respectively.

이상에서 설명한 본 발명은 전술한 실시예 및 첨부된 도면에 의해 한정되는 것이 아니고, 본 발명의 기술적 사상을 벗어나지 않는 범위 내에서 여러 가지 치환, 변형 및 변경이 가능함은 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 명백할 것이다.The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and various substitutions, modifications, and changes are possible within the scope without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.

도 1은 본 발명에 따른 컨베이어의 일실시예를 도시한 정면도1 is a front view showing one embodiment of a conveyor according to the present invention;

도 2는 상기 실시예의 측면도2 is a side view of the embodiment

도 3은 상기 실시예 중 구동체와 피동체의 관계를 보인 사시도3 is a perspective view showing a relationship between a driving body and a driven body in the above embodiment;

도 4는 상기 실시예 중 이송롤러와 피동체의 구조를 보인 단면도Figure 4 is a cross-sectional view showing the structure of the transfer roller and the driven body in the embodiment

Claims (4)

평판디스플레이패널에 에칭가공을 하기 위한 컨베이어장치에 있어서, 구동모터(10)와, 이 구동모터(10)에 의해 회전되는 축부재(11)에 길이방향을 따라 동축으로 이격 설치된 복수개의 구동자석(21)과, 상기 축부재(11)에 직교되는 방향으로 배치된 복수개의 이송롤러(40)와, 이 이송롤러(40)의 일단부에 각각 동축으로 설치되고 상기 구동자석(20)과 근접 배치된 복수개의 피동자석(31)과, 상기 피동자석(31)을 구동자석(21)과 격리시키며 상기 이송롤러(40)가 내부에 수납되는 챔버(50)를 포함하며, 상기 구동자석(21)과 피동자석(31) 각각의 외주면에는 서로 다른 극성이 원주방향을 따라 교대로 배열되어, 구동자석(21)의 회전에 따라 상기 구동자석(21)과 피동자석(31)간의 인력과 척력에 의해 이송롤러(40)가 회전되고, 상기 챔버(50)에는 에칭액을 분사하는 다수개의 분사노즐(61)이 설치되며, 상기 이송롤러(40)는 회전가능하게 설치되는 롤러축(41)과, 이 롤러축(41)의 외주면을 감싸며 상기 평판디스플레이패널의 직립상태의 하단부가 안착되는 안착홈(43)이 원주방향을 따라 형성된 완충부재(42)로 이루어지고, 상기 롤러축(41)에는 상기 피동체(30)가 축결합되며, 상기 피동체(30)와 완충부재(42)는 서로 접근 또는 후퇴되도록 형성되고, 서로 대향하는 상기 완충부재(42) 또는 피동체(30)의 일측면에는 상기 롤러축(41)과 동축적으로 탄성부재(46)가 배치되며, 이 탄성부재(46)의 전방에 배치되며 이 탄성부재(46)에 의해 가압되는 제1마찰판(47)이 구비되고, 이 제1마찰판(47)에 대향하여 상기 피동체(30)또는 완충부재(42)의 타측면에 제2마찰판(48)이 장착되며, 상기 롤러축(41)에 나사결합되어 피동체(30)와 이송롤러(40)의 간격을 조절하는 조절너트(49)가 구비된 것을 특징으로 하는 평판디스플레이 에칭가공용 컨베이어장치.In the conveyor apparatus for etching the flat panel display panel, a plurality of driving magnets are coaxially spaced apart along the longitudinal direction of the drive motor (10) and the shaft member (11) rotated by the drive motor ( 21, a plurality of feed rollers 40 arranged in a direction orthogonal to the shaft member 11, and one end of the feed rollers 40 are coaxially disposed, and are arranged in close proximity to the driving magnet 20. And a plurality of driven magnets 31 and a chamber 50 separating the driven magnets 31 from the driving magnets 21 and storing the transfer roller 40 therein, wherein the driving magnets 21 are provided. Different polarities are alternately arranged along the circumferential direction on the outer circumferential surface of each of the driving magnets 31 and the driven magnets 31, and by the attraction force and the repulsive force between the driving magnets 21 and the driven magnets 31 as the driving magnets 21 rotate. The feed roller 40 is rotated, and the chamber 50 is a plurality of spraying the etching liquid A sanozzle 61 is installed, and the feed roller 40 surrounds the roller shaft 41 rotatably installed and the outer circumferential surface of the roller shaft 41, and the lower end of the flat display panel is mounted thereon. The seating groove 43 is formed of a buffer member 42 formed along the circumferential direction, the driven member 30 is axially coupled to the roller shaft 41, and the driven member 30 and the buffer member 42 are axially coupled to the roller shaft 41. Is formed to approach or retreat with each other, the elastic member 46 is disposed coaxially with the roller shaft 41 on one side of the buffer member 42 or the driven member 30 facing each other, the elastic member A first friction plate 47 disposed in front of the 46 and pressed by the elastic member 46 is provided, and the driven member 30 or the shock absorbing member 42 faces the first friction plate 47. The second friction plate 48 is mounted on the other side of the screw, and screwed to the roller shaft 41 to adjust the distance between the driven member 30 and the feed roller 40. A flat panel display etching processing conveyor device, characterized in that the control provided with a nut (49). 삭제delete 제1항에 있어서, 상기 피동자석(31)의 외주면에는 수지층(32)이 형성되어, 피동자석(31)이 에칭액에 의해 손상되는 것이 방지되는 것을 특징으로 하는 평판디스플레이 에칭가공용 컨베이어장치.The flat panel display etching processing apparatus according to claim 1, wherein a resin layer (32) is formed on the outer circumferential surface of the driven magnet (31) to prevent the driven magnet (31) from being damaged by the etching solution. 제1항에 있어서, 상기 챔버(50)의 상면판의 저면에는 상기 완충부재(42)의 안착홈(43)과 대응되는 위치에 상기 평판디스플레이패널의 직립상태의 상단부를 가이드하는 가이드홈 또는 가이드부재(51)가 설치된 것을 특징으로 하는 평판디스플레이 에칭가공용 컨베이어장치.The guide groove or guide for guiding the upper end of the upright state of the flat panel display panel at a position corresponding to a seating groove 43 of the buffer member 42 on the bottom surface of the upper plate of the chamber 50. Flat panel display etching processing, characterized in that the member 51 is installed.
KR1020070099179A 2007-10-02 2007-10-02 A conveyor apparatus for an etching of flat panel display KR100874819B1 (en)

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KR20200113113A (en) * 2019-03-22 2020-10-06 주식회사 티케이씨 Non Contact Vertical Typed Processing System For Board
KR20200113114A (en) * 2019-03-22 2020-10-06 주식회사 티케이씨 Driving Apparatus For Non Contact Vertical Typed Developing System For Board

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JP2002329761A (en) 2001-04-27 2002-11-15 Tokyo Electron Ltd Transfer apparatus, cleaning apparatus and development apparatus

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JP2002329761A (en) 2001-04-27 2002-11-15 Tokyo Electron Ltd Transfer apparatus, cleaning apparatus and development apparatus

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Publication number Priority date Publication date Assignee Title
KR20200113113A (en) * 2019-03-22 2020-10-06 주식회사 티케이씨 Non Contact Vertical Typed Processing System For Board
KR20200113114A (en) * 2019-03-22 2020-10-06 주식회사 티케이씨 Driving Apparatus For Non Contact Vertical Typed Developing System For Board
KR102172662B1 (en) * 2019-03-22 2020-11-03 주식회사 티케이씨 Non Contact Vertical Typed Processing System For Board
KR102172665B1 (en) * 2019-03-22 2020-11-03 주식회사 티케이씨 Driving Apparatus For Non Contact Vertical Typed Developing System For Board

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