KR20110063016A - Apparatus for conveying substrate - Google Patents

Apparatus for conveying substrate Download PDF

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Publication number
KR20110063016A
KR20110063016A KR1020090119935A KR20090119935A KR20110063016A KR 20110063016 A KR20110063016 A KR 20110063016A KR 1020090119935 A KR1020090119935 A KR 1020090119935A KR 20090119935 A KR20090119935 A KR 20090119935A KR 20110063016 A KR20110063016 A KR 20110063016A
Authority
KR
South Korea
Prior art keywords
substrate
shaft
transfer
side roller
rollers
Prior art date
Application number
KR1020090119935A
Other languages
Korean (ko)
Inventor
정지용
Original Assignee
세메스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세메스 주식회사 filed Critical 세메스 주식회사
Priority to KR1020090119935A priority Critical patent/KR20110063016A/en
Publication of KR20110063016A publication Critical patent/KR20110063016A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B65G13/06—Roller driving means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
    • B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
    • B65G21/2045—Mechanical means for guiding or retaining the load on the load-carrying surface
    • B65G21/2063—Mechanical means for guiding or retaining the load on the load-carrying surface comprising elements not movable in the direction of load-transport
    • B65G21/2072—Laterial guidance means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically

Abstract

PURPOSE: A substrate transfer apparatus is provided to stably transfer substrates through side rollers even if transfer shafts are installed at high inclination to the ground. CONSTITUTION: A substrate transfer apparatus comprises a plurality of cylindrical side rollers(150a,150b) and a plurality of transfer shafts(110). The transfer shafts are arranged at an angle over the threshold to the ground and have a plurality of rollers(120) which contact the bottom of a substrate(G) and rotate. The side rollers are rotated as contacting the side of the substrate to transfer the substrate in the specific direction and prevent the separation of the substrate.

Description

Apparatus for conveying substrate

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus capable of safely transferring substrates used in a semiconductor manufacturing process, a flat panel display (FPD) manufacturing process, and the like.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. This information processing apparatus has a display device for displaying the operated information. Until now, a cathode ray tube monitor has been mainly used as a display device, but recently, with the rapid development of semiconductor technology, the use of a flat display device that is light and occupies a small space is rapidly increasing. As a display device, what is currently attracting attention is a flat panel display device such as a liquid crystal display device, an organic EL display device, a plasma display device and the like.

Such a flat panel display apparatus includes a multilayer thin film and a wiring pattern on a substrate. In order to form a thin film and / or a pattern on a substrate, various manufacturing processes such as deposition, baking, etching, cleaning, and drying are required. Each process is mainly performed in the process chamber 100. In order to perform the required series of processes, the substrates must be transferred to the fixed chamber, and a substrate transfer device is installed between the chambers of each process.

Such a substrate transfer device has a plurality of rollers fixedly installed in contact with the lower surface of the substrate, and a plurality of transfer shafts that rotate to transfer the substrate in a specific direction, and rotate in contact with the side of the substrate so that the substrate does not deviate from the specific direction. It may include a plurality of side rollers.

The plurality of transfer shafts are disposed to be inclined so that one end is positioned higher than the other end. In general, the transfer shaft is arranged to achieve a low inclination of about 5 degrees with the ground. By the way, when the substrate is transferred using the low-tilt substrate transfer apparatus, the substrate or the transfer shaft may sag, which may reduce the stability of the substrate processing process.

The problem to be solved of the present invention is to provide a substrate transfer apparatus that can improve the stability of the substrate processing process.

The problem to be solved of the present invention is not limited to the above-mentioned problem, another task that is not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a substrate transfer apparatus according to an embodiment of the present invention is disposed to be inclined to form an angle greater than or equal to a threshold relative to the ground, and a plurality of transfer shafts are installed in which a plurality of rollers are rotated in contact with the bottom of the substrate. ; And a plurality of cylindrical side rollers including a groove formed along an outer circumferential surface to rotate the substrate in contact with the side surface of the substrate, thereby transferring the substrate in a specific direction and preventing the substrate from being separated.

According to the substrate transfer apparatus according to an embodiment of the present invention, the transfer shaft is to make a high slope with the ground, it is possible to minimize the deflection of the substrate during substrate transfer.

In addition, by providing a side roller having a V-shaped groove formed along the outer circumferential surface, the substrate can be safely transported even if the transfer shaft is inclined with the ground.

The effects of the present invention are not limited to the above-mentioned effects, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

Specific details of other embodiments are included in the detailed description and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. As used herein, “comprises” and / or “comprising” refers to the presence of one or more other components, steps, operations and / or elements. Or does not exclude additions. “And / or” includes each and all combinations of one or more of the items mentioned.

Although the first, second, etc. are used to describe various elements, components and / or sections, these elements, components and / or sections are of course not limited by these terms. These terms are only used to distinguish one element, component or section from another element, component or section. Therefore, the first device, the first component, or the first section mentioned below may be a second device, a second component, or a second section within the technical spirit of the present invention.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used in a sense that can be commonly understood by those skilled in the art. In addition, the terms defined in the commonly used dictionaries are not ideally or excessively interpreted unless they are specifically defined clearly.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a plan view schematically showing a part of a substrate transfer apparatus according to an embodiment of the present invention, Figure 2 is a view showing an inclined state of the transfer shaft 110 in the substrate transfer apparatus according to an embodiment of the present invention Drawing.

The substrate transfer apparatus according to an embodiment of the present invention includes a process chamber 100, a transfer shaft 110, and side rollers 150a and 150b.

The plurality of transfer shafts 110 are disposed at predetermined intervals in the process chamber 100. Each transfer shaft 110 is provided with a plurality of rollers 120 that rotate in contact with the bottom surface of the substrate G. The transfer shaft 110 may naturally rotate as the substrate G moves. When the conveying shaft 110 is rotated, the roller 120 fixed to the conveying shaft 110 is also rotated so that the substrate G placed on the upper portion of the roller 120 is conveyed in one direction. The transfer shaft 110 may be supported by the support device 130 so as to smoothly and stably rotate.

On the other hand, as shown in Figure 2, the plurality of conveying shaft 110 is disposed inclined so that one end is located higher than the other end. Here, the transfer shaft 110 may be inclined at a threshold value, for example, 5 degrees or more based on the ground. In the following description, a case in which the feed shaft 110 forms an inclination of 75 degrees with respect to the ground will be described as an example.

In order to transfer the substrate G in one direction even when the conveying shaft 110 is inclined with respect to the ground, a plurality of side rollers 150a and 150b are provided on both sides of the substrate G. In the following description, the side rollers provided near the ground among the plurality of side rollers 150a and 150b will be referred to as the first side roller 150a, and the side rollers provided far from the ground will be referred to as the second side roller 150b. It will be called.

The first side roller 150a rotates in contact with one side surface of the substrate G, thereby transferring the substrate G in one direction. To this end, the first side roller 150a is connected to the shaft 160a which is rotated by a driving unit (not shown). Therefore, when the shaft 160a is rotated by the drive unit, the rotational force of the drive unit is transmitted to the shaft 160a, and the shaft 160a rotates. When the shaft 160a is rotated, the first side roller 150a fixed to the shaft 160a is also rotated so that the substrate G in contact with the first side roller 150a is transferred in one direction.

Although not clearly illustrated in FIG. 1 and FIG. 2 about the rotation method of the shaft 160a, pulleys are provided at both ends of the plurality of shafts 160a, and the plurality of pulleys may be interconnected by chains or belts. Can be. At least one pulley among the plurality of pulleys may receive a rotational force from a driving unit (eg, a motor). As another example, magnetic pulleys may be provided at both ends of the plurality of shafts 160a, and the plurality of magnetic pulleys may be interconnected by magnetic force.

The second side roller 150b rotates in a state of being in contact with the other side surface of the substrate G, thereby guiding the substrate G not to be separated from the conveying direction. The second side roller 150b does not rotate by a separate driving unit, but may naturally rotate according to the movement of the substrate G. The second side roller 150b may be supported by the support member 160b.

Next, the side rollers 150a and 150b according to embodiments of the present invention will be described in detail. As described above, the side rollers 150a and 150b according to the present invention include a first side roller 150a and a second side roller 150b, and the first side roller 150a and the second side roller 150b. ) Are different in that they are provided in the shaft 160a and the support member 160b, respectively, and the basic structure is the same. Therefore, in the following description, the first side roller 150a will be described with reference to FIGS. 3 and 4, and the description of the second side roller 150b will be omitted.

First, Figure 3 is an exploded perspective view for explaining the first side roller 150a according to an embodiment of the present invention.

The first side roller 150a is formed in a cylindrical shape having a V-shaped groove 151a formed along an outer circumferential surface thereof. The groove 151a formed along the outer circumferential surface of the first side roller 150a rotates in contact with one side surface of the substrate G, thereby moving the substrate G in one direction.

The hole 151a is formed in the center of the first side roller 150a. The fixing member coupling part 162a formed at the end of the shaft 160a may be inserted into the hole 151a. The fixing member coupling part 162a may be provided with a fixing member coupling groove 164a that may be screwed with the fixing member 156a such as a bolt.

With the fixing member coupling part 162a of the shaft 160 inserted into the hole 152a of the first side roller 150a, the fixing member 156a such as a bolt is inserted into the fixing member coupling groove 164a. By combining, the 1st side roller 150a can be installed in the shaft 160a. At this time, before inserting the fixing member 150a into the fixing member coupling groove 164a, the packing 154a made of rubber or the like may be used. The packing 154a may prevent the chemical liquid, which processes the substrate G, from penetrating into the first side roller 150a.

Meanwhile, in FIG. 3, the first side roller 150a is fixed to the shaft 160a using the fixing member 156a formed of bolts, but the present invention is not limited thereto. For example, according to another embodiment of the present invention, the fixing member may be formed by other fastening means.

Next, FIG. 4 is an exploded perspective view for explaining the first side roller 150a according to another embodiment of the present invention. Referring to FIG. 4, it can be seen that the V-shaped groove formed along the outer circumferential surface of the first side roller 150a is further provided with a contact member 158a for increasing friction with the substrate G. The contact member 158a may be made of rubber or a material corresponding thereto that is easily deformed by the load of the substrate G in order to increase frictional resistance with the substrate G.

3 and 4 illustrate a case where a V-shaped groove is formed along the outer circumferential surface of the first side roller 150a, the shape of the groove formed along the outer circumferential surface of the first side roller 150a may be variously modified. Of course.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains have various permutations, modifications, and modifications without departing from the spirit or essential features of the present invention. It is to be understood that modifications may be made and other embodiments may be embodied. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

1 is a plan view schematically showing a part of a substrate transfer apparatus according to an embodiment of the present invention.

2 is a view showing an inclined state of the transfer shaft in the substrate transfer apparatus according to an embodiment of the present invention.

3 is an exploded perspective view for explaining a side roller according to an embodiment of the present invention.

4 is an exploded perspective view for explaining a side roller according to another embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

100: process chamber

110: feed shaft

120: roller

130: support device

150a, 150b: side roller

151a, 151b: home

152a: hall

154a, 154b: packing

156a, 156b: fixing member

160a: shaft

160b: support member

162a: fixing member coupling portion

164a: fixing member coupling groove

Claims (6)

A plurality of transfer shafts disposed inclined to form an angle greater than or equal to a threshold with respect to the ground, and having a plurality of rollers rotating in contact with the bottom surface of the substrate; And A substrate transfer comprising a plurality of cylindrical side rollers comprising a groove formed along an outer circumferential surface to rotate the substrate in contact with a side surface of the substrate, thereby transferring the substrate in a specific direction and preventing departure of the substrate; Device. The method of claim 1, A groove formed along the outer circumferential surface of the cylinder is V-shaped, substrate transfer apparatus. The method of claim 1, The plurality of side rollers, A plurality of first side rollers installed on a shaft that rotates by a rotation force transmitted from a driving unit and rotating in a state of being in contact with one side of the substrate, thereby transferring the substrate in the specific direction; And A plurality of second side rollers which are installed on a supporting member which rotates as the substrate is transferred in the specific direction, and rotates in contact with the other side of the substrate, thereby guiding the plurality of second side rollers to prevent the substrate from being separated from the specific direction. Substrate transfer apparatus, including. The method of claim 2, The first side roller includes a hole into which the fixing member coupling portion formed at the end of the shaft is inserted, The holding member coupling portion inserted into the hole is coupled to the holding member for fixing the first side roller to the shaft. The method of claim 2, The second side roller includes a hole into which a fixing member coupling portion formed at an end of the supporting member is inserted, and the fixing member coupling portion inserted into the hole is a fixing member for fixing the second side roller to the supporting member. And a substrate transfer device. The method of claim 1, A groove formed along the outer circumferential surface of the cylinder is provided with a contact member for increasing friction with the substrate.
KR1020090119935A 2009-12-04 2009-12-04 Apparatus for conveying substrate KR20110063016A (en)

Priority Applications (1)

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KR1020090119935A KR20110063016A (en) 2009-12-04 2009-12-04 Apparatus for conveying substrate

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KR1020090119935A KR20110063016A (en) 2009-12-04 2009-12-04 Apparatus for conveying substrate

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KR20110063016A true KR20110063016A (en) 2011-06-10

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140072988A (en) * 2012-12-05 2014-06-16 삼성디스플레이 주식회사 Substrate transferring device
CN104495379A (en) * 2014-12-25 2015-04-08 中国建材国际工程集团有限公司 Glass conveying and turning machine
CN108002035A (en) * 2017-11-29 2018-05-08 安徽蓝博玻璃有限公司 Automatic aligning frame is used in a kind of original sheet glass conveying
CN108033271A (en) * 2018-01-15 2018-05-15 中国建材国际工程集团有限公司 A kind of device that conveying is tilted for glass

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140072988A (en) * 2012-12-05 2014-06-16 삼성디스플레이 주식회사 Substrate transferring device
US9123761B2 (en) 2012-12-05 2015-09-01 Samsung Display Co., Ltd. Substrate transferring device
CN104495379A (en) * 2014-12-25 2015-04-08 中国建材国际工程集团有限公司 Glass conveying and turning machine
CN108002035A (en) * 2017-11-29 2018-05-08 安徽蓝博玻璃有限公司 Automatic aligning frame is used in a kind of original sheet glass conveying
CN108002035B (en) * 2017-11-29 2019-08-30 安徽蓝博玻璃有限公司 A kind of original sheet glass conveying automatic aligning frame
CN108033271A (en) * 2018-01-15 2018-05-15 中国建材国际工程集团有限公司 A kind of device that conveying is tilted for glass

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