KR20110058012A - Shaft apparatus for conveying substrate - Google Patents

Shaft apparatus for conveying substrate Download PDF

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Publication number
KR20110058012A
KR20110058012A KR1020090114664A KR20090114664A KR20110058012A KR 20110058012 A KR20110058012 A KR 20110058012A KR 1020090114664 A KR1020090114664 A KR 1020090114664A KR 20090114664 A KR20090114664 A KR 20090114664A KR 20110058012 A KR20110058012 A KR 20110058012A
Authority
KR
South Korea
Prior art keywords
substrate
conveying
conveying roller
shaft
conveying shaft
Prior art date
Application number
KR1020090114664A
Other languages
Korean (ko)
Inventor
최홍림
Original Assignee
세메스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세메스 주식회사 filed Critical 세메스 주식회사
Priority to KR1020090114664A priority Critical patent/KR20110058012A/en
Publication of KR20110058012A publication Critical patent/KR20110058012A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B65G13/06—Roller driving means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/10—Arrangements of rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Abstract

A conveying shaft device is provided.

A conveying shaft device according to an embodiment of the present invention comprises a conveying shaft arranged in a direction perpendicular to the conveying direction of the substrate; And a conveying roller portion inserted into and fixed to the conveying shaft, wherein the conveying roller portion includes a main conveying roller located on the conveying shaft; And a substrate contact portion having a concave-convex structure, attached to an outer rotational surface of the main conveying roller and in contact with the substrate to convey the substrate.

Main conveying roller

Description

Shaft apparatus for conveying substrate

The present invention relates to a conveying shaft device, and more particularly, to a conveying shaft device that can increase the transfer resistance of the substrate by increasing the frictional resistance with the substrate.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. This information processing apparatus has a display device for displaying the operated information. Until now, a cathode ray tube monitor has been mainly used as a display device, but recently, with the rapid development of semiconductor technology, the use of a flat display device that is light and occupies a small space is rapidly increasing.

As a display device, what is currently attracting attention is a flat panel display device such as a liquid crystal display device, an organic EL display device, a plasma display device and the like.

Such a flat panel display apparatus includes a multilayer thin film and a wiring pattern on a substrate. In order to form a thin film and / or a pattern on a substrate, various manufacturing processes such as deposition, baking, etching, cleaning, and drying are required. Each process is mainly performed in the process chamber. In order to perform the required series of processes, the substrates must be transferred to the fixed chamber, and a substrate transfer device is installed between the chambers of each process. In the substrate transfer apparatus, a plurality of rollers transfer the substrate in a predetermined direction by rotation.

However, when the substrate is transported using such a substrate transport apparatus, the substrate slides on the rollers, which makes it difficult to control the position of the substrate and increases the process defects.

Therefore, there is a need for a conveyance shaft device capable of increasing the contact force with the substrate to increase the transfer efficiency of the substrate.

The problem to be solved of the present invention is to provide a conveying shaft device that can improve the conveying roller to reduce the slip phenomenon during substrate conveyance, and can effectively convey the substrate.

The objects of the present invention are not limited to the above-mentioned objects, and other objects that are not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a conveying shaft device according to an embodiment of the present invention is a conveying shaft arranged in a direction perpendicular to the conveying direction of the substrate; And a conveying roller portion inserted into and fixed to the conveying shaft, wherein the conveying roller portion includes a main conveying roller located on the conveying shaft; And a substrate contact portion having a concave-convex structure, attached to an outer rotational surface of the main conveying roller and in contact with the substrate to convey the substrate.

According to one embodiment of the present invention, it is possible to improve the transfer roller to reduce the slip phenomenon during substrate transfer and to effectively transfer the substrate.

In addition, it is possible to improve the efficiency of the process performed in the process chamber by improving the reliability of substrate transfer.

The effects of the present invention are not limited to the above-mentioned effects, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

Specific details of other embodiments are included in the detailed description and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

When an element is referred to as being "connected to" or "coupled to" with another element, it may be directly connected to or coupled with another element or through another element in between. This includes all cases. On the other hand, when one device is referred to as "directly connected to" or "directly coupled to" with another device indicates that no other device is intervened. Like reference numerals refer to like elements throughout. “And / or” includes each and all combinations of one or more of the items mentioned.

Although the first, second, etc. are used to describe various elements, components and / or sections, these elements, components and / or sections are of course not limited by these terms. These terms are only used to distinguish one element, component or section from another element, component or section. Therefore, the first device, the first component, or the first section mentioned below may be a second device, a second component, or a second section within the technical spirit of the present invention.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. As used herein, “comprises” and / or “comprising” refers to the presence of one or more other components, steps, operations and / or elements. Or does not exclude additions.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used in a sense that can be commonly understood by those skilled in the art. In addition, the terms defined in the commonly used dictionaries are not ideally or excessively interpreted unless they are specifically defined clearly.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing a substrate transfer apparatus for manufacturing a substrate according to an embodiment of the present invention.

In general, the substrate transport apparatus 1 includes a plurality of shafts 20 arranged at predetermined intervals in the process chamber and a plurality of rollers 30 for supporting and transporting the substrate 10 on each shaft 20. ). When the driving unit 50 is operated, the rotational force of the driving unit 50 is transmitted to the plurality of shafts 20 so that each shaft 20 rotates. When the shaft 20 is rotated, the roller 30 fixed to the shaft 20 is also rotated so that the substrate 10 placed on the upper portion of the roller 30 is transferred in one direction. The shaft 20 may be supported by the support device 40 to smoothly and stably rotate. 1 shows a state in which all of the plurality of shafts 20 are horizontally disposed in the process chamber, the plurality of shafts 20 may be disposed to be inclined such that one end is positioned at a height higher than the other end.

As shown in FIG. 1, in the belt driven transfer device, a pulley 52 is connected to an end of each shaft 20, and each pulley 52 is connected to a belt 53 so that the drive motor 51 is connected. The rotational force of the to each shaft 20 will be transmitted.

On the other hand, although not shown, the magnetic transfer device for transmitting the rotational force by using a magnetic force so that particles are not generated by the mechanical friction, and the outer magnet pulley which is rotationally driven by the drive unit on the wall of the chamber, and It may include an inner magnet pulley magnetically connected to the outer magnet pulley.

2 shows a perspective view of a conveying shaft device according to an embodiment of the invention. Referring to FIG. 2, the conveying shaft device according to the exemplary embodiment may include a conveying shaft 100, a conveying roller part 200, a conveying roller 30, and bearing parts 41 and 42. .

The conveying shaft 100 may be arranged in parallel in the direction perpendicular to the conveying direction of the substrate. The conveying shaft 100 may be fixedly coupled to the plurality of conveying rollers 30 spaced apart from each other in the longitudinal direction. Therefore, the conveyance roller 30 can be rotated with the rotation of the conveyance shaft 100, and a board | substrate can be conveyed.

The conveying roller unit 200 may be positioned at the end of the conveying shaft 100, and may contact the upper and lower edge portions of the substrate to convey the substrate. A process by a predetermined substrate processing apparatus may not be performed at upper and lower edge portions of the substrate. It is necessary to relatively accurately convey and position the substrate by the relatively high friction or adhesion to the substrate edge.

The conveying roller unit 200 is attached to the main conveying roller 210 located at the end of the conveying shaft 100 and the outer rotating surface of the main conveying roller 210 and contacts the substrate to convey the substrate. It may include.

The main conveying roller 210 may be located at one end of the ends of the conveying shaft or at both ends. The main conveying roller 210 may further include a side roller (not shown) to prevent the inclined substrate from flowing down when the substrate is inclined.

The substrate contact portion 220 is a portion in contact with the substrate, and increases the adhesion to the substrate so that slip does not occur, while the rotational force of the conveying shaft 100 is transmitted to the substrate as it is to provide a friction force for transferring the substrate. . In order to increase the frictional force with the substrate 10, the substrate contact portion 220 may be made of a material such as rubber, cloth, and the like having a relatively low elastic modulus than a material such as metal or plastic, and may have an uneven structure. . The concave-convex structure of the substrate contact portion 220 will be described later with reference to FIGS. 3 to 6.

The conveying rollers 30 may be spaced apart at predetermined intervals of the conveying shaft 100. The conveying roller 30 is fixedly attached to the conveying shaft 100 and rotated together with the rotation of the conveying shaft 100 to convey the substrate.

The bearing parts 41 and 42 support the ends of the conveying shaft 100 such that the conveying shaft 100 is rotatable. The bearing parts 41 and 42 are fixed to the through holes by inserting the bearings 41a and 42a and the bearings 41a and 42b so that the conveying shaft 100 is rotated with the friction force minimized. ) May include support members 41b and 42b.

As described above, according to the embodiment of the present invention, the substrate contact portion 220 of the conveying roller portion 200 is formed to have an uneven structure, thereby increasing the frictional resistance between the substrate contact portion 220 and the substrate, thereby increasing the friction between the substrate and the main body. By reducing the slip between the conveying rollers 210, it is possible to increase the stationary precision of the substrate and the conveying force of the substrate, and to make the transfer position control of the substrate relatively efficient.

On the other hand, Figure 2 shows the conveying roller portion 200 is located at the end of the conveying shaft 100, the conveying roller 30 is located between the conveying roller portion 200, the conveying roller portion 200 May be formed at the position of the conveying roller 30 as well as the end of the conveying shaft 100. That is, only the plurality of conveying rollers 200 may be located on the conveying shaft 100.

3 is a view showing an example of a conveying roller unit in the conveying shaft device according to an embodiment of the present invention. Referring to FIG. 3, the conveying roller part 300 may include a main conveying roller 210 and a substrate contacting part 220.

The main conveying roller 210 may include a through hole 230 for providing a space into which the conveying shaft 100 is fitted and a fixing groove 215 for providing a space in which the substrate contact portion 220 to be described later is mounted.

The substrate contact portion 220 may include a predetermined internal protrusion 223 fitted into the fixing groove 215 of the main conveying roller 210, and a contact surface 227 making surface contact with the substrate.

A plurality of external protrusions 225 may be formed in a line on the contact surface 227. The plurality of outer protrusions 225 may have a columnar shape including a surface contacting the substrate, and the plurality of outer protrusions 225 may have the same shape. On the other hand, although not shown in the drawings, the plurality of outer protrusions 225 are the same in height, but may have different shapes.

The substrate contact portion 220 surrounds the outer circumferential surface of the main conveying roller 210 and allows the contact surface 227 to face the outside. Therefore, the frictional resistance with the substrate is increased by the contact surface 227 on which the external protrusions 2250 are formed, thereby reducing the sliding of the substrate during transfer. The substrate contact portion 220 may be made of rubber or a material corresponding thereto that is easily deformed by the load of the substrate in order to increase frictional resistance with the substrate.

4 is a view showing an example of a conveying roller unit in the conveying shaft device according to another embodiment of the present invention. Referring to FIG. 4, the conveying roller part 400 may include a main conveying roller 210 and a substrate contacting part 420. Since the main conveying roller 210 shown in FIG. 4 is the same as the main conveying roller 210 shown in FIG. 3, the substrate contact portion 420 will be described here.

The substrate contact portion 420 may include a predetermined internal protrusion 223 fitted into the fixing groove 215 of the main transport roller 210, and a contact surface 427 making surface contact with the substrate.

A plurality of grooves 425 may be formed in a line on the contact surface 427. At this time, the plurality of grooves 425 may all have an 'X' shape, as shown in FIG. On the other hand, although not shown in the drawing, the plurality of grooves 425 may all have a circular or polygonal shape. As another example, the plurality of grooves 425 may have the same height, but may have different shapes. As such, the plurality of grooves 425 formed in the contact surface 427 may increase frictional resistance with the substrate. Therefore, the frictional force given to the substrate may be increased as compared with the case of using the main conveying roller 210 made of metal or plastic.

By applying the elastic modulus of the substrate contact portion 420 as described above with a material smaller than the elastic modulus of the main conveying roller 210, the contact force with the substrate can be increased to increase the friction force provided to the substrate. Therefore, in the transfer of the substrate, efficient transfer and control of the substrate can be performed.

3 and 4, the conveying roller unit in the conveying shaft device according to the embodiments of the present invention has been described. However, the conveying roller unit according to the embodiment of the present invention is not limited to those shown in FIGS. 3 and 4, and may be modified in various forms. Specifically, FIGS. 3 and 4 show that the outer protrusions 225 or the grooves 425 formed on the contact surfaces 227 and 427 of the substrate contact portions 220 and 420 are lined up along the outer circumferential surfaces of the contact surfaces 227 and 427. Although the arrangement is illustrated, as illustrated in FIG. 5 or 6, the external protrusions 225 or the grooves 425 may be arranged in a matrix along the outer circumferential surfaces of the contact surfaces 227 and 427. In addition, the outer protrusion 225 or the groove 425 may be regularly arranged on the contact surface 227, 427, as shown in Figures 3 to 6, and may be arranged irregularly, although not shown in the figure. .

3 and 4 illustrate a case in which the cross section of the fixing groove formed along the outer circumferential surface of the main conveying roller has a shape of '└┘', the cross section of the fixing groove may be a 'V' type or a semi-circular shape. . In addition, an inner protrusion which is seated in the fixing groove and is formed along the inner surface of the substrate contact portion may have a shape corresponding to the fixing groove. For example, when the cross section of the fixing groove formed along the outer circumferential surface of the main conveying roller is 'V' type, the cross section of the inner protrusion formed along the inner surface of the substrate contact portion may also be 'V' type.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains have various permutations, modifications, and modifications without departing from the spirit or essential features of the present invention. It is to be understood that modifications may be made and other embodiments may be embodied. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

1 is a perspective view showing a substrate transfer apparatus for manufacturing a substrate according to an embodiment of the present invention.

2 is a perspective view of a conveying shaft device according to an embodiment of the present invention.

3 is a view showing an example of the conveying roller unit in the conveying shaft device according to an embodiment of the present invention.

4 is a view showing an example of the conveying roller unit in the conveying shaft device according to another embodiment of the present invention.

5 is a view showing a plurality of protrusions arranged in a matrix on the contact surface in the conveying roller unit according to an embodiment of the present invention.

6 is a view showing a plurality of grooves arranged in a matrix on the contact surface in the conveying roller unit according to another embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

100: conveying shaft

200, 300, 400: conveying roller part

210: main conveying roller

220, 420: surface contact

225: outside projection

425: home

227, 427: contact surface

Claims (6)

A conveying shaft arranged in a direction perpendicular to the conveying direction of the substrate; And Includes a conveying roller portion is fitted to the conveying shaft, The conveying roller part A main conveying roller located on the conveying shaft; And And a substrate contact portion having a concave-convex structure, which is attached to an outer rotational surface of the main conveying roller and is in contact with the substrate to convey the substrate. The method of claim 1, And the substrate contact portion forms the uneven structure by a plurality of external protrusions formed on an outer surface. 3. The method of claim 2, And said plurality of outer protrusions are columnar including a surface in contact with the substrate. The method of claim 3, wherein The height of the plurality of outer projections are the same, but the shape of each of the outer projections is a different columnar shape, the conveying shaft device. The method of claim 1, And the substrate contact portion forms the uneven structure by a plurality of grooves formed in an outer surface. The method of claim 5, And the plurality of grooves are 'X' shaped, circular, or polygonal.
KR1020090114664A 2009-11-25 2009-11-25 Shaft apparatus for conveying substrate KR20110058012A (en)

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Application Number Priority Date Filing Date Title
KR1020090114664A KR20110058012A (en) 2009-11-25 2009-11-25 Shaft apparatus for conveying substrate

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KR1020090114664A KR20110058012A (en) 2009-11-25 2009-11-25 Shaft apparatus for conveying substrate

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2583917A1 (en) * 2011-10-20 2013-04-24 Gintech Energy Corporation Substrate transmission apparatus
KR101284248B1 (en) * 2012-10-29 2013-07-09 창성 주식회사 Substrate carrier for o-rings
CN107408523A (en) * 2014-12-18 2017-11-28 韩华 Q Cells有限公司 In line wet type table device and method for the wet-chemical treatment of semiconductor wafer
WO2020042391A1 (en) * 2018-08-27 2020-03-05 惠科股份有限公司 O-ring and transmission device
KR20220030656A (en) * 2020-09-03 2022-03-11 주식회사 지아이텍 roller of conveyor for transferring display panel

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2583917A1 (en) * 2011-10-20 2013-04-24 Gintech Energy Corporation Substrate transmission apparatus
KR101284248B1 (en) * 2012-10-29 2013-07-09 창성 주식회사 Substrate carrier for o-rings
CN107408523A (en) * 2014-12-18 2017-11-28 韩华 Q Cells有限公司 In line wet type table device and method for the wet-chemical treatment of semiconductor wafer
US11183408B2 (en) 2014-12-18 2021-11-23 Hanwha Q Cells Gmbh In-line wet bench device and method for the wet-chemical treatment of semiconductor wafers
WO2020042391A1 (en) * 2018-08-27 2020-03-05 惠科股份有限公司 O-ring and transmission device
KR20220030656A (en) * 2020-09-03 2022-03-11 주식회사 지아이텍 roller of conveyor for transferring display panel

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