KR100587847B1 - Substrate transporting apparatus - Google Patents

Abstract

When the amount of protrusion of the cylinder increases, when the magnet disc rotates, the magnet rotates together with the transfer shaft by a magnetic force acting between the magnet discs, and the transfer shaft is supported in a state inclined at a predetermined angle in the X-Y plane. The substrate is loaded in the X direction by the small conveying roller of the conveying shaft by the rotation of the conveying shaft. When the amount of protrusion of the cylinder is reduced, the magnet disc installed at one end of the conveying shaft moves in a direction away from the inclined wall, so that no magnetic force is applied between the magnet discs. Further, the transfer shaft shifts to a state parallel to the X-Y plane in a state in which the conveyance shaft is inclined at a predetermined angle. In this case, the top part of the outer peripheral surface of the small conveying roller of a conveyance shaft is located below the top part of the outer peripheral surface of a large conveying roller. As a result, the substrate is supported by the large conveying roller.

Carrier Shaft, Cylinder, Motor, Belt, Magnet Disc

Description

Substrate Transfer Equipment {SUBSTRATE TRANSPORTING APPARATUS}

1 is a schematic plan view of a substrate processing apparatus including a substrate transfer apparatus according to a first embodiment of the present invention.

2 is a cross-sectional view of the substrate transport apparatus.

3 is a cross-sectional view taken along the line A-A of the substrate transport apparatus of FIG.

4 is a cross-sectional view taken along the line A-A of the substrate transfer device of FIG.

FIG. 5 is a sectional view taken along the line B-B of the substrate transfer device of FIG.

6 is a diagram showing the internal structure of a magnet disc.

Fig. 7 (a) is a view showing a state in which the rotational force of the magnet disc is transmitted to the magnet disc, and (b) is a view showing a state in which the rotational force of the magnet disc is not transmitted to the magnet disc.

8 is a perspective view for explaining the operation of the substrate transport apparatus of FIGS.

9 is a cross sectional view of the substrate transport apparatus.

FIG. 10 is a cross-sectional view taken along the line A-A of the substrate transport apparatus of FIG.

FIG. 11 is a sectional view taken along the line A-A of the substrate transport apparatus of FIG.

12 is a cross-sectional view taken along the line B-B of the substrate transfer device of FIG.

FIG. 13 is a sectional view taken along the line B-B of the substrate transport apparatus of FIG.

Fig. 14 (a) is a view showing a state in which the rotational force of the magnet disc is transmitted to the magnet disc, and (b) is a view showing a state in which the rotational force of the magnet disc is not transmitted to the magnet disc.

15 is a cross sectional view of the substrate transport apparatus.

FIG. 16 is a cross-sectional view taken along the line A-A of the substrate transport apparatus of FIG.

FIG. 17 is a sectional view taken along the line A-A of the substrate transport apparatus of FIG.

18 is a view showing an example of a substrate processing apparatus for reducing the overall length of the substrate processing apparatus to reduce space.

FIG. 19 is a cross sectional view of the substrate transport apparatus of FIG. 18; FIG.

20 is a cross-sectional view taken along the line A-A of the substrate transport apparatus of FIG.

The present invention relates to a substrate transport apparatus for transporting a substrate.

Background Art A substrate processing apparatus is used to perform various processes on substrates such as glass substrates for liquid crystal display devices, glass substrates for photomasks, glass substrates for optical disks, semiconductor wafers, and the like. Since such a substrate processing apparatus is mainly used in a clean room, the installation space is reduced.

Fig. 18 is a diagram showing an example of a substrate processing apparatus which shortens the overall length of the substrate processing apparatus and aims to reduce space (see Japanese Patent Laid-Open No. 2000-31239).

In the substrate processing apparatus 900 shown in FIG. 18, the conveyance path 151 and the conveyance path 152 which are parallel to each other, and the inversion path 153 which combine these are formed.

In the substrate processing apparatus 900, the board | substrates stored in the cassette C of the indexer part 111 are extracted one by one, and the substantially U-shape of the conveyance path 151, the inversion path 153, and the conveyance path 152 is carried out. The processing is carried out while being conveyed in the order of, and stored in the cassette C of the indexer unit 111 again.

In the conveying path 151 of the substrate processing apparatus 900 of FIG. 18, the conveyor 112, the ultraviolet irradiation part 113, the ozone ashing part 114, and the brush washing part 115 are arrange | positioned in order, and the substrate processing is carried out. The ultraviolet irradiation part 119, the air knife part 118, and the water washing part 117 are arrange | positioned in the conveyance path 152 of the apparatus 900 in order.

In the inversion path 153 of the substrate processing apparatus 900, the substrate conveying apparatus 800, the chemical liquid processing part 810 which performs chemical liquid processing, and the substrate conveying apparatus 801 are arrange | positioned in order. In the chemical liquid processing unit 810, the processing is performed with the substrate inclined at a predetermined angle in order to uniformize the surface treatment of the substrate.

FIG. 19 is a cross sectional view of the substrate transport apparatus 801 of FIG. 18, and FIG. 20 is a cross-sectional view taken along the line A-A of the substrate transport apparatus 801 of FIG.

19 and 20, two directions orthogonal to each other in the horizontal plane are X and Y directions, and the vertical direction is Z direction. As shown in FIG. 19, a board | substrate is carried in the Y direction at the board | substrate delivery opening 310 of the conveyance chamber 300, and it is carried out to the X direction from the board | substrate carrying out port 320. As shown in FIG.

In the conveyance chamber 300 of the board | substrate conveying apparatus 801 of FIG. 19, the some conveyance shaft 80a and the some conveyance shaft 80b are arrange | positioned along X direction at predetermined intervals L10, respectively. The some conveyance shaft 80c is arrange | positioned along the Y direction in the predetermined space | interval L10 between the conveyance shaft 80a and the conveyance shaft 80b. The some conveyance shaft 80d is arrange | positioned along the Y direction between the conveyance shafts 80a and 80b.

A plurality of rollers P110 are provided on each of the conveying shafts 80a and 80b, a plurality of rollers P210 are provided on each of the conveying shafts 80c, and a plurality of rollers P211 are provided on each of the conveying shafts 80d. It is installed.

Moreover, the shaft of the motor M10 provided outside the conveyance chamber 300 is connected to the transmission mechanism G1 through the side wall of the conveyance chamber 300, and is connected to the some conveyance shaft 80a by the transmission mechanism G1. Rotational force is transmitted. Similarly, the shaft of the motor M20 provided outside the conveyance chamber 300 is connected to the transmission mechanism G2 through the side wall of the conveyance chamber 300, and is connected to the plurality of conveyance shafts 80b by the transmission mechanism G2. Rotational force is transmitted. Thereby, the some roller P110 rotates with some conveyance shaft 80a, 80b.

In addition, the motor M30 provided outside the conveyance chamber 300 is connected to the transmission mechanism G3 through the side wall of the conveyance chamber 300, and the rotational force is transmitted to the plurality of conveyance shafts 80c by the transmission mechanism G3. do. Thereby, the some roller P210 rotates with the some conveyance shaft 80c.

As shown in FIG. 20, the conveyance shafts 80a and 80b are provided in a state inclined with respect to the horizontal plane. The conveyance shafts 80c and 80d are supported by the plurality of support members 96 above the fixing table 90. Fixing table 90 is driven in the vertical direction by the cylinder (95).

As shown in FIG. 20, the board | substrate 200 carried in by the board | substrate carrying-in opening 310 of FIG. 19 is supported by the roller P110 in the inclined posture. The rollers P110 of the conveyance shafts 80a and 80b are rotated through the delivery mechanisms G1 and G2 by the motors M10 and M20 provided outside the conveyance chamber 300 so that the substrate 200 is conveyed in the Y direction.

Subsequently, when the substrate 200 is conveyed to a predetermined position, the motor M10 and the motor M20 stop the rotation operation. Thereby, rotation of the some roller P110 stops and the board | substrate 200 stops.

Subsequently, the fixing table 90 is lifted in the Z direction by the cylinder 95. As a result, the rollers P210 of the plurality of conveying shafts 80c and the rollers P211 of the plurality of conveying shafts 80d that are supported by the plurality of supporting members 96 move upward than the plurality of rollers P110. . Therefore, the substrate 200 is separated from the roller P110 and is supported by the rollers P210 and 211 and lifted upward.

Moreover, when the conveyance shafts 80c and 80d are moved upward, the gears (not shown) of the motor M30 and the transmission mechanism G3 of FIG. 19, and the gears (not shown) provided in the conveyance shaft 80c are Interlock with each other. Thereby, the rotational force of the motor M30 is transmitted to the some roller P210, and the roller P210 rotates. As a result, the board | substrate 200 supported by the rollers P210 and 211 is carried out by the board | substrate export opening 320 in the direction of the arrow X. As shown in FIG.

Thus, in the board | substrate conveying apparatus 801, the board | substrate 200 carried in the X direction in the inclined posture can be carried out to a Y direction in a horizontal position.

However, in the conventional substrate transfer apparatus 801, the shafts of the motors M10, M20, and M30 provided outside the transfer chamber 300 are transferred to the inside of the transfer chamber 300 through holes provided in the side walls of the transfer chamber 300. Since it is connected to the mechanisms G1, G2, and G3, there exists a possibility that the atmosphere containing a process liquid may leak to the exterior through the hole of a side wall.

In addition, in order to prevent the wear powder of the gears of the transmission mechanisms G1, G2, and G3 from spreading in the transfer chamber 300, a fence 250 is provided in the transmission mechanisms G1, G2, and G3 to provide a substrate 200. ), It needs to be isolated. However, as mentioned above, when the conveyance shaft 80c raises, the lower part of the fence of the delivery mechanism G3 must be opened so that a driving force may be transmitted to the conveyance shaft 80c. Thereby, the wear powder which arises when the gears of the transmission mechanism G3 mesh with each other may spread | diffuse from the opening part, and may adhere to the surface of the board | substrate 200. FIG. In addition, vibration may occur when the gears of the transmission mechanism G3 mesh with each other. As a result, uniform processing of the substrate 200 is hindered.

Moreover, it is necessary to provide in the conveyance chamber 300 the accommodating part 260 (pad) which accommodates a lubricant for the gears of the transmission mechanisms G1, G2, and G3 mentioned above. Moreover, it is also necessary to supply a lubrication agent in the accommodating part 260. It is difficult to supply lubricant during the drive of the delivery mechanism G3. As a result, the structure of the conveyance chamber 300 becomes complicated, and the number of parts increases, thereby reducing the space saving and the low cost of the substrate transport apparatus 801.

In the conventional substrate transfer apparatus 801, when the substrate 200 is supported in an inclined posture, as shown in Fig. 20, the substrate 200 is spaced at an interval L10 between the transfer shafts 80a and 80b. Not supported Therefore, the large diameter of the board | substrate 200 causes curvature by the weight of the board | substrate 200 itself, and there exists a possibility that it may be damaged by excessive load being applied to the board | substrate 200. FIG.

Moreover, the roller P211 of the some conveyance shaft 80d is located under the some conveyance shaft 80a, 80b at the time of conveyance to an inclined attitude | position, and the some conveyance shaft 80a at the time of conveyance to a horizontal attitude | position 80b). Therefore, it is necessary to provide the conveyance shaft 80d and the roller P211 so that it may not interfere with some conveyance shaft 80a, 80b. Therefore, it is difficult to transmit rotational force to all the rollers P211, and the conveyance force of the board | substrate 200 falls. As a result, the conveyance defect of the board | substrate 200 arises. Moreover, since the board | substrate 200 must be conveyed so that it may not contact with the delivery mechanism G1 of FIG. 20, it is necessary to set the stroke amount of the cylinder 95 large, and it is difficult to reduce space in the up-down direction.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transport apparatus which can prevent leakage of atmosphere, can change the attitude of the substrate with a simple structure without disturbing the uniform processing of the substrate, and can save space and reduce cost. .

Another object of the present invention is to provide a substrate conveying apparatus which can be reliably conveyed without deforming and breaking a substrate with a simple structure.

The substrate transfer apparatus which concerns on 1st invention is a substrate transfer apparatus which conveys a board | substrate, The conveyance chamber which has a wall part, The 1st roller member rotatably installed in a conveyance chamber, and supporting a board | substrate, State changing means for changing the first roller member into a first state and a second state by moving or inclining the roller member of 1, rotation driving means provided outside the conveying chamber to generate rotational force, and rotation driving A transmission means for transmitting the rotational force generated by the means to the first roller member by a magnetic force, the transmission means being arranged to face the wall portion outside the transport chamber and rotating by the rotational force generated by the rotational drive means. A first transfer member and a second transfer member rotatably installed together with the first roller member in the transfer chamber, wherein the first transfer member is provided when the first roller member is in the first state; My There is a second transmission member at a first position at which the rotational force is transmitted between the second transmission member, and the first transmission member and the second transmission member when the first roller member is in the second state. There is a second transmission member at a second position where the rotational force is not transmitted between and.

In this substrate transfer apparatus, when the first roller member is in the first state, the second transfer member is in the first position and between the first transfer member and the second transfer member. The rotational force generated by the rotational drive means is transmitted. In addition, when the first roller member is in the second state, the second transmission member is in the second position, and is generated by the rotation driving means between the first transmission member and the second transmission member. The torque is not transmitted.

In this case, since it is not necessary to drill a hole in the side wall in order to transmit the rotational force of the rotation driving means to the first transfer member and the second transfer member, the atmosphere containing the processing liquid is prevented from leaking outside the transfer chamber.

In addition, since the rotary drive means and the first transfer member are provided outside the transfer chamber, the wear powder generated in the rotary drive means and the first transfer member is prevented from adhering to the substrate. In addition, vibration of the first transfer member and the second transfer member does not occur. Moreover, it is not necessary to supply lubricant between the first transfer member and the second transfer member. Thus, uniform processing of the substrate is not disturbed.

In addition, since the rotary drive means and the first transmission member are provided outside the transport chamber, there is no need to install a receiver for accommodating the lubricant in the transport chamber, and no supply of lubricant to the transport chamber is required. Therefore, the number of parts can be reduced and the structure in the conveyance chamber can be simplified. Therefore, the posture of the substrate can be changed with a simple structure, and the miniaturization and space saving of the substrate transport apparatus can be realized.

The second transmission member may face the first transmission member through the wall portion at the first position and may be separated from the first transmission member as compared with the first position at the second position.

In this case, the second transmission member is opposed to the first transmission member via the wall portion at the first position, whereby the rotational force generated by the rotation driving means is transmitted. In addition, the rotational force generated by the rotation driving means is not transmitted by falling from the first transmission member in comparison with the first position in the second position.

The substrate transfer apparatus further includes a second roller member rotatably provided in the transfer chamber and supporting the substrate, wherein the substrate is placed on the first roller member when the first roller member is in the first state. The first roller member and the second roller member may be provided so that the substrate is supported on the second roller member when the first roller member is in the second state.

In this case, the substrate is supported on the first roller member when the first roller member is in the first state, and the substrate is the second roller member when the first roller member is in the second state. Is supported on. Thereby, a board | substrate can be easily received and conveyed from a 1st roller member to a 2nd roller member.

In the substrate transport apparatus, the first state is a state in which the first roller member makes a first angle with respect to the horizontal plane, and the second state is a second state in which the first roller member is different from the first angle with respect to the horizontal plane. It may be in a state of forming an angle of.

In this case, in the first state, the first roller member makes a first angle with respect to the horizontal plane, and the substrate is supported by the first roller member. At this time, since the second transmission member is opposed to the first transmission member through the wall portion at the first position, the rotational force generated by the rotation driving means is transmitted to the first roller member and the substrate is moved by the first roller member. This is returned.

On the other hand, in the second state, the plurality of first roller members make a second angle with respect to the horizontal plane, and the substrate is supported by the second roller member. At this time, since the second transmission member is separated from the first transmission member in the second position compared to the first position, the rotational force generated by the rotation driving means is not transmitted to the first roller member.

The substrate transport apparatus may be provided so that the first roller member and the second roller member cross each other.

In this case, since the first roller member and the second roller member are provided to intersect with each other, the substrate can be transferred from the first roller to the second roller while the conveying direction is changed.

In the substrate transfer apparatus, the first roller member and the second roller member may be provided substantially parallel to each other.

In this case, since the 1st roller member and the 2nd roller member are provided in substantially parallel with each other, it can receive and convey a board | substrate from a 1st roller member to a 2nd roller member, maintaining the conveyance direction of a board | substrate.

The first transmission member has a first surface facing the wall portion and a first rotation axis, and incorporates a plurality of first magnets disposed along a circumference around the first rotation axis, and the second The transmission member may include a plurality of second magnets arranged along a circumference having a second surface and a second rotational axis opposite to the wall portion and centered on the second rotational axis.

In this case, a 1st magnet is built in the 1st transmission member along the circumference centering on a 1st rotation axis, and a 2nd transmission member has the 2nd along the circumference centered on a 2nd rotation axis. Since the magnet is built in, the rotational force can be transmitted by the magnetic force of the plurality of magnets. As a result, it is possible to reliably transmit the rotational force of the first transmission member to the second transmission member.

The plurality of first magnets are arranged at equal intervals so that the N poles and the S poles are alternately formed on the first surface, and the plurality of second magnets are alternately formed with the N poles and the S poles on the second surface. The plurality of first magnets may be arranged at the same interval.

In this case, attraction force drawn by different polarities is generated between the first magnet and the second magnet, and the rotational force can be efficiently transmitted from the first transmission member to the second transmission member.

In the substrate transfer apparatus, the plurality of first magnets of the first transfer member may be embedded in the nonmagnetic member, and the plurality of second magnets of the second transfer member may be embedded in the nonmagnetic member.

In this case, since the first transfer member and the second transfer member incorporate the first magnet and the second magnet in the nonmagnetic member, the rotational force of the first transfer member can be efficiently transmitted to the second transfer member. .

At least the outer peripheral surface of the nonmagnetic member of the second transmission member may be made of resin.

In this case, corrosion of the second transfer member by the treatment liquid is prevented.

The substrate transfer apparatus which concerns on 2nd invention is a board | substrate conveyance apparatus which conveys a board | substrate, Comprising: A plurality of 1st rotation shafts rotatably provided and supporting a board | substrate, and a plurality of 1st rotation shafts are provided concentrically. A first roller, a plurality of second rotational shafts rotatably provided to support the substrate, and a second roller provided concentrically with the plurality of second rotational shafts, and the plurality of first rotational shafts includes a plurality of Are installed to intersect with the plurality of second rotation shafts above the second rotation shaft, the diameter of the first roller is smaller than the diameter of the second roller, and the plurality of first rotation shafts and the plurality of second rotation shafts. And a state changing means for changing the positional relationship between the plurality of first rotary shafts and the plurality of second rotary shafts to the first state or the second state by relatively inclining or moving the plurality of The first and second axis of rotation are the first phase The top of the first roller is located above the top of the second roller when in the second position, and the top of the second roller is located above the top of the first roller when in the second state. The first rotating shaft and the plurality of second rotating shafts are arranged.

In this substrate conveyance apparatus, the position of the some 1st rotation shaft and the some 2nd rotation shaft provided so that they may mutually cross | intersect by moving the some 1st rotation shaft and the 2nd 2nd rotation shaft relatively. The relationship is changed to the first state or the second state by the state changing means.

In this case, in the first state, the tops of the plurality of first rollers are located above the tops of the second rollers. As a result, the substrate is supported by the plurality of first rollers. In the second state, the top portions of the plurality of second rollers are located above the top portions of the first roller. As a result, the substrate is supported by the plurality of second rollers. As a result, the warping of the substrate due to its own weight is prevented, and at the same time, the excessive load on the substrate is prevented.

Moreover, since rotational force is transmitted to a some 1st roller or a some 2nd roller, the conveyance defect of a board | substrate can be prevented. Therefore, the direction of conveyance of a board | substrate can be switched while changing into the 1st state and 2nd state of a predetermined angle, without deforming and breaking a board | substrate.

In addition, it is possible to reduce the amount of stroke in the vertical direction when the substrate is changed to the first state and the second state, and the space can be reduced.

In the substrate transfer apparatus, the angle formed by the plurality of first rotation shafts with respect to the horizontal plane in the first state may be different from the angle formed by the plurality of second rotation shafts with respect to the horizontal plane in the second state.

In this case, since the angle formed by the first rotational axis with respect to the horizontal plane in the first state and the angle formed by the plurality of second rotational axes with respect to the horizontal plane in the second state are different, the angle of inclination of the substrate with respect to the horizontal plane is changed. The substrate can be conveyed by the first roller and the second roller.

In the substrate transfer apparatus, the angle formed by the plurality of first rotation shafts with respect to the horizontal plane in the first state and the angle formed by the plurality of second rotation shafts with respect to the horizontal plane in the second state may be the same.

In this case, since the angle formed by the plurality of first rotational axes with respect to the horizontal plane in the first state and the angle formed by the plurality of second rotational axes with respect to the horizontal plane in the second state are the same, the inclination angle of the substrate with respect to the horizontal plane is A board | substrate can be conveyed by a 1st roller and a 2nd roller, holding.

The substrate conveying apparatus further includes a conveying chamber having a wall, a rotating driving means provided outside the conveying chamber to generate a rotating force, and a transmitting means for transmitting the rotating force generated by the rotating driving means to the first rotating shaft by magnetic force. , The first rotating shaft, the first roller, the second rotating shaft, and the second roller are provided in the conveying chamber, and the transmission means is disposed to face the wall portion outside the conveying chamber and is adapted to the rotational force generated by the rotating driving means. A first transmission member that is rotated by the first transmission member and a second transmission member that is rotatably installed together with the first rotation shaft in the transport chamber, wherein the plurality of first and second rotation shafts are in a first state. The second transmission member is in a first position at which the rotational force is transmitted between the first transmission member and the second transmission member, and the plurality of first and second rotation shafts are in a second state. To the first transfer member and the second transfer Or it may have the transfer member of the second position of the second rotational force that is passed in between the members.

In this case, since it is not necessary to drill a hole in the side wall in order to transmit the rotational force of the rotation driving means to the first transfer member and the second transfer member, the atmosphere containing the processing liquid is prevented from leaking outside the transfer chamber.

In addition, since the rotary drive means and the first transfer member are provided outside the transport chamber, the wear powder generated in the rotary drive means and the first transfer member is prevented from adhering to the substrate. In addition, vibration of the first transfer member and the second transfer member does not occur. Moreover, it is not necessary to supply lubricant between the first transfer member and the second transfer member. Thus, uniform processing of the substrate is not disturbed.

In addition, since the rotation driving means and the first transmission member are provided outside the transport chamber, there is no need to install a receiver for accommodating lubricant in the transport, and no supply of lubricant to the transport chamber is required. Therefore, the number of parts can be reduced and the structure in the conveyance chamber can be simplified. Therefore, the posture of the substrate can be changed with a simple structure, and the miniaturization and space saving of the substrate transport apparatus can be realized.

The board | substrate conveying apparatus which concerns on 3rd invention is a board | substrate conveying apparatus which conveys a board | substrate, The 1st rotating shaft rotatably provided and supporting a board | substrate, and the 1st concentrically provided in the some 1st rotating shaft Rollers, a plurality of second rotating shafts rotatably provided to support the substrate, and a second roller provided concentrically with the plurality of second rotating shafts, wherein the plurality of first rotating shafts includes a plurality of first rotating shafts. The positional relationship between the plurality of first rotational shafts and the plurality of second rotational shafts is provided in substantially parallel to the two rotational shafts, and is relatively inclined or moved by the plurality of first rotational shafts and the plurality of second rotational shafts. To a first state or a second state, the state changing means further comprising: a top portion of the first roller having a plurality of first and second rotating shafts in a first state; Above the top of the roller And, the second to relatively move or incline the axis of rotation and a plurality of second rotation shafts of the plurality of the first in a state in which the top portion of the roller to a second position located above the top of the rollers of the first.

In this substrate transport apparatus, a plurality of first rotation shafts and a plurality of second rotation shafts are relatively moved or inclined by relatively moving or tilting the plurality of first rotation shafts and the plurality of second rotation shafts. The positional relationship is changed to the first state or the second state by the state changing means.

In this case, in the first state, the tops of the plurality of first rollers are located above the tops of the second rollers. As a result, the substrate is supported by the plurality of first rollers. In the second state, the top portions of the plurality of second rollers are located above the top portions of the first roller. As a result, the substrate is supported by the plurality of second rollers. As a result, the warping of the substrate due to its own weight is prevented, and at the same time, the excessive load on the substrate is prevented.

Moreover, since rotational force is transmitted to a some 1st roller or a some 2nd roller, the conveyance defect of a board | substrate can be prevented. Therefore, the substrate can be changed into the first state and the second state without deforming and breaking the substrate.

In the substrate transfer apparatus, the angle formed by the plurality of first rotation shafts with respect to the horizontal plane in the first state may be different from the angle formed by the plurality of second rotation shafts with respect to the horizontal plane in the second state.

In this case, since the angle formed by the first rotational axis with respect to the horizontal plane in the first state and the angle formed by the plurality of second rotational axes with respect to the horizontal plane in the second state are different, the angle of inclination of the substrate with respect to the horizontal plane is changed. The substrate can be conveyed by the first roller and the second roller.

In the substrate transfer apparatus, the angle formed by the plurality of first rotation shafts with respect to the horizontal plane in the first state and the angle formed by the plurality of second rotation shafts with respect to the horizontal plane in the second state may be the same.

In this case, since the angle formed by the plurality of first rotational axes with respect to the horizontal plane in the first state and the angle formed by the plurality of second rotational axes with respect to the horizontal plane in the second state are the same, the inclination angle of the substrate with respect to the horizontal plane is A board | substrate can be conveyed by a 1st roller and a 2nd roller, holding.

The substrate conveying apparatus further includes a conveying chamber having a wall, a rotating driving means provided outside the conveying chamber to generate a rotating force, and a transmitting means for transmitting the rotating force generated by the rotating driving means to the first rotating shaft by magnetic force. , The first rotating shaft, the first roller, the second rotating shaft, and the second roller are provided in the conveying chamber, and the transmission means is disposed to face the wall portion outside the conveying chamber and is adapted to the rotational force generated by the rotating driving means. A first transmission member that is rotated by the first transmission member and a second transmission member that is rotatably installed together with the first rotation shaft in the transport chamber, wherein the plurality of first and second rotation shafts are in a first state. The second transmission member is in a first position at which the rotational force is transmitted between the first transmission member and the second transmission member, and the plurality of first and second rotation shafts are in a second state. To the first transfer member and the second transfer Or it may have the transfer member of the second position of the second rotational force that is passed in between the members.

In this case, since it is not necessary to drill a hole in the side wall in order to transmit the rotational force of the rotation driving means to the first transfer member and the second transfer member, the atmosphere containing the processing liquid is prevented from leaking outside the transfer chamber.

In addition, since the rotary drive means and the first transfer member are provided outside the transport chamber, the wear powder generated in the rotary drive means and the first transfer member is prevented from adhering to the substrate. In addition, vibration of the first transfer member and the second transfer member does not occur. Moreover, it is not necessary to supply lubricant between the first transfer member and the second transfer member. Thus, uniform processing of the substrate is not disturbed.

In addition, since the rotation driving means and the first transmission member are provided outside the transport chamber, there is no need to install a receiver for accommodating lubricant in the transport, and no supply of lubricant to the transport chamber is required. Therefore, the number of parts can be reduced and the structure in the conveyance chamber can be simplified. Therefore, the posture of the substrate can be changed with a simple structure, and the size and space saving of the substrate transfer device can be realized.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described, referring drawings.

(1st embodiment)

1 is a schematic plan view of a substrate processing apparatus including a substrate transfer apparatus according to a first embodiment of the present invention.

The substrate processing apparatus 500 shown in FIG. 1 is a device for processing substrates such as a glass substrate for a liquid crystal display device, a glass substrate for a photomask, a glass substrate for an optical disk, a semiconductor wafer, and the like.

The substrate treating apparatus 500 includes an indexer 60, a conveyor 61, 69, an ultraviolet (UV) irradiation unit 62, a chemical liquid treatment unit 63, 64, a primary washing unit 65, a secondary washing unit ( 66, 67, the air knife part 68, and the board | substrate conveying apparatus 100,101.

In the substrate processing apparatus 500 of FIG. 1, the conveyance path 154 and the conveyance path 156 which are parallel to each other, and the inversion path 155 which combine this are formed. The conveyance paths 154 and 156 and the inversion path 155 are substantially orthogonal.

In the conveyance path 154 of the substrate processing apparatus 500, the conveyor 61, the ultraviolet (UV) irradiation part 62, and the chemical liquid processing parts 63 and 64 are provided in order. In the inversion path 155 of the substrate processing apparatus 500, the substrate conveyance apparatus 100, the primary washing | cleaning part 65, and the substrate conveyance apparatus 100 are provided in order. In the conveyance path 156 of the board | substrate conveying apparatus 500, the secondary water washing parts 66 and 67, the air knife part 68, and the conveyor 69 are provided in order.

First, the cassette C in which the plurality of substrates 200 are stored is loaded into the indexer unit 60 of the substrate processing apparatus 500. The board | substrate 200 accommodated in the cassette C is extracted one by one by a conveyer (not shown), and is carried in to the conveyor 61. FIG. Here, in the conveyance path 154, the board | substrate 200 is processed in the inclined attitude | inclined by a predetermined angle in a horizontal plane in order to make substrate processing uniform.

At the time of carrying in to the conveyor 61, the attitude | position of the board | substrate 200 is changed into the attitude | position (Hereinafter, it is called a gradient attitude | position) inclined by a predetermined angle from a horizontal attitude | position. The inclined posture 200 is conveyed to the ultraviolet (UV) irradiation part 62 by the conveyor 61. Ultraviolet (UV) irradiation unit 62 irradiates ultraviolet rays to the substrate 200. As a result, organic matter and oil adhered to the surface of the substrate 200 are decomposed to improve the wettability of the substrate 200. Thereafter, the chemical liquid processing units 63 and 64 perform chemical liquid treatment such as etching on the substrate 200.

Subsequently, the primary washing process is performed on the substrate 200 in the transfer path 155. In the board | substrate conveying apparatus 100, while changing the conveyance direction of the board | substrate 200, the board | substrate 200 which was conveyed in inclined posture is changed into a horizontal posture. And the board | substrate 200 is conveyed to the primary water washing part 65. The water washing process is performed on the surface of the board | substrate 200 by the horizontal posture in the primary water washing part 65. FIG. The primary flushing treatment is performed to prevent the surface of the substrate 200 from drying and from depositing and adhering impurities. Therefore, also in the board | substrate conveying apparatus 100 and 101 in this embodiment, pure water is sprayed with respect to the board | substrate 200 while conveying the board | substrate 200. As shown in FIG.

Next, the substrate 200 is conveyed to the substrate transfer device 101. In this embodiment, the board | substrate 200 is processed in inclined posture in the conveyance path 156. As shown in FIG. Therefore, in the board | substrate conveying apparatus 101, while changing the conveyance direction of the board | substrate 200, the board | substrate 200 which was conveyed in the horizontal posture is changed to the inclined posture. And the board | substrate 200 is conveyed to the secondary water washing parts 66 and 67.

Subsequently, the surface of the substrate 200 is washed with pure water in the secondary washing parts 66 and 67. Moreover, the board | substrate 200 is conveyed to the air knife part 68. FIG. Curtain air is sprayed on the substrate 200 by the air knife unit 68. Then, the board | substrate 200 is conveyed by the conveyor 69, and the board | substrate 200 is accommodated in the cassette C by a conveyer (not shown). The cassette C containing the plurality of processed substrates 200 is taken out from the indexer unit 60.

Next, the details of the substrate transfer apparatuses 100 and 101 will be described. In addition, the substrate transfer apparatus 100 and the substrate transfer apparatus 101 have substantially the same structure. Hereinafter, the board | substrate carrying apparatus 100 is demonstrated.

2 is a cross-sectional view of the substrate transport apparatus 100. In Fig. 2, two directions perpendicular to each other in the horizontal plane are referred to as the X and Y directions, and the vertical direction is referred to as the Z direction.

The substrate transfer apparatus 100 shown in FIG. 2 has a transfer chamber 30. The conveyance chamber 30 is formed by a pair of side wall 30a, 30c parallel to a Y direction, and a pair of side wall 30b, 30d parallel to a X direction. The board | substrate delivery opening 33 is provided in the side wall 30a of the conveyance chamber 30, and the board | substrate carrying out opening 34 is provided in the side wall 30b of the conveyance chamber 30. As shown in FIG.

The substrate conveying apparatus 100 changes the direction of the substrate 200 carried in the X direction into the conveyance chamber 30 at the substrate loading opening 33 and takes out the substrate 200 in the Y direction from the substrate discharging opening 34. do.

In the conveyance chamber 30, the some conveyance shaft 10 is arrange | positioned along the Y direction, and the some conveyance shaft 20 is arrange | positioned along the X direction. Each of the conveyance shafts 10 is provided with a plurality of small conveying rollers 11 at substantially equal intervals. On each of the conveyance shafts 20, a plurality of large conveying rollers 21 are arranged at equal intervals.

One end vicinity of the some conveyance shaft 10 is rotatably supported by the support member 12a, and the other end vicinity of the some conveyance shaft 10 is rotatably supported by the support member 15a, At one end of the conveyance shaft 10 of the magnet disc 8a is provided.

One end vicinity of the plurality of transport shafts 20 is rotatably supported by the support member 12b, and the other end vicinity of the plurality of transport shafts 20 is rotatably supported by the support member 15b, and a plurality of At one end of the conveyance shaft 20, a magnet disc 8b is provided, respectively.

In the space surrounded by the side wall 30d and the main wall 31 of the transfer chamber 30, a motor M1, a belt B1, and a plurality of magnet discs 7a for rotationally driving the plurality of transfer shafts 10 are provided. It is installed. Each magnet original plate 7a is arrange | positioned so that the magnet original plate 8a may be opposed through the side wall 30d. The belt B1 is interposed between the shaft of the motor M1 and the plurality of magnet discs 7a, and the plurality of magnet discs 7a rotate in the same direction as the shaft of the motor M1 rotates. do.

The magnet original plate 8a rotates by rotating the magnet original plate 7a. Thereby, the conveyance shaft 10 rotates with the small conveyance roller 11. As a result, it becomes possible to convey the board | substrate 200 supported on the small conveyance roller 11 to an X direction. Details of the structures of the magnet master plate 7a and the magnet master plate 8a will be described later.

In the space surrounded by the side wall 30c and the main wall 32 of the transfer chamber 30, a motor M2, a belt B2, and a plurality of magnet discs 7b for rotationally driving the plurality of transfer shafts 20 are provided. It is installed. Each magnet disc 7b is arranged to face the magnet disc 8b via the side wall 30c. The belt B2 is interposed between the shaft of the motor M2 and the plurality of magnet discs 7b, and the plurality of magnet discs 7b rotate in the same direction as the shaft of the motor M2 rotates. do.

The magnet original plate 8b rotates by rotating the magnet original plate 7b. Thereby, the conveyance shaft 20 rotates with the large conveyance roller 21. As shown in FIG. As a result, it becomes possible to convey the board | substrate 200 supported on the large conveyance roller 21 to a Y direction. The detailed description of the structure of the magnet original plate 7b and the magnet original plate 8b is mentioned later.

3 and 4 are cross-sectional views taken along line A-A of the substrate transport apparatus 100 of FIG. 3 shows a state in which the substrate 200 is supported in an inclined position, and FIG. 4 shows a state in which the substrate 200 is supported in a horizontal position.

One end vicinity of the conveyance shaft 10 is rotatably supported above the support stand 13 by the support member 12a. The other end of the conveyance shaft 10 is rotatably supported above the support stand 13 by the support member 15a.

Moreover, one end of the support stand 13 is supported by 13 A of support shafts so that rotation is possible. The other end of the support stand 13 is supported by the cylinder 16 so that it can operate up and down. The front end of the piston 16a of this cylinder 16 is provided on the lower surface of the support base 13.

As shown in Fig. 3, when the amount of protrusion of the piston 16a of the cylinder 16 increases, the support 13 rotates in the direction of the arrow R10 around the support shaft 13A. As a result, the carrier shaft 10 is inclined. In this state, the top of the small conveying roller 11 of the conveying shaft 10 is located above the top of the large conveying roller 21 of the conveying shaft 20. Therefore, the board | substrate 200 is supported by the small conveyance roller 11 in inclined position.

3, the inclined wall 30e which inclines slightly in the vertical direction is provided in one part of the side wall 30d of the conveyance chamber 30. As shown in FIG. The magnet disc 8a opposes in parallel to the inner surface of the inclined wall 30e. The magnet disc 7a is provided on the shaft 76a so as to face the outer surface of the inclined wall 30e in parallel. Thereby, the magnet original plate 8a opposes the magnet original plate 7a via the inclined wall 30e. Therefore, when the magnet disc 7a rotates with the shaft 76a by the belt B1, the magnet disc 8a is conveyed by the magnetic force which acts between the magnet disc 7a and the magnet disc 8a. Rotate with 10.

As shown in Fig. 4, when the amount of protrusion of the piston 16a of the cylinder 16 decreases, the support 13 rotates in the direction of the arrow R11 around the support shaft 13A. Thereby, the conveyance shaft 10 becomes a horizontal posture. In this state, the top of the large conveying roller 21 of the substrate 200 is located above the top of the small conveying roller 11 of the conveying shaft 10. Therefore, the board | substrate 200 is supported by the large conveying roller 21 in a horizontal position.

In this case, the magnet disc 8a provided at one end of the conveyance shaft 10 moves in the direction away from the inclined wall 30e. As a result, the distance between the magnet master plate 7a and the magnet master plate 8a becomes large, and the magnetic force does not act between the magnet master plate 7a and the magnet master plate 8a. Therefore, even when the magnet disc 7a is rotated by the belt B1, the magnet disc 8a does not rotate. As a result, the conveyance shaft 10 and the small conveyance roller 11 do not rotate.

5 is a cross-sectional view taken along the line B-B of the substrate transfer device 100 of FIG.

One end of the conveyance shaft 20 is rotatably supported above the support 13B by the support member 12b, and the other end of the conveyance shaft 20 is supported by the support member 15b of the support 13B. It is rotatably supported upwards. The support base 13B is fixed to the side walls 30a and 30c in a horizontal state. Thereby, the conveyance shaft 20b is in a horizontal state.

The magnet disc 8b opposes in parallel to the inner surface of the side wall 30c. In addition, the magnet disc 7b is provided on the shaft 76b so as to face the outer surface of the side wall 30c in parallel. Thereby, the magnet disc 8b opposes the magnet disc 7b in parallel through the side wall 30c. Therefore, when the magnet disc 7b rotates with the shaft 76b by the belt B2, the magnet disc 8b is conveyed by the magnetic force which acts between the magnet disc 7b and the magnet disc 8b. It rotates with the shaft 20b.

Next, the structure of the magnet original plate 7a and the magnet original plate 8a is demonstrated based on FIG. 6 is a diagram showing the internal structure of a magnet disc. Fig. 6 (a) is a cross sectional view of the magnet disc, Fig. 6 (b) is a sectional view taken along line DD of the magnet disc of Fig. 6 (a), and Fig. 6 (c) is a view of the opposing magnet disc with the inclined wall 30e interposed therebetween. Side view.

As shown in Figs. 6 (a) and 6 (b), inside the magnet disc 7a, the magnet 71 has an S side on one side and an N side on the other side, and an N pole on one side. Magnets 72 having an S pole on the side are alternately provided in a circle. The structure of the magnet disc 8a is the same as that of the magnet disc 7a.

As shown in Fig. 6B, the magnet disc 7a is fixed to the end face of the rotation shaft 10 by bolts 77a.

In the embodiment of the present invention, the magnet disc 7a is formed of a nonmagnetic material. For example, fluorine resins such as PTFE (tetrafluoroethylene) and PCTFE (trifluoroethylene), resins such as PCV (polyvinyl chloride), or metals or alloys of nonmagnetic materials such as titanium, aluminum and stainless steel can be used. In addition, the metal and alloy of the said nonmagnetic material are not limited to this as an example, You may use another nonmagnetic material.

As shown in Fig. 6C, the magnet disc 7a faces one surface of the inclined wall 30e, and the magnet disc 8a faces the other surface of the inclined wall 30e.

In this case, the rotational motion by the motor M1 of FIG. 2 is transmitted to the shaft 76a through the belt B1, and the magnet disc 7a rotates. The magnet 71 in the magnet disc 7a and the magnet 82 in the magnet disc 8a are attracted by the magnet, and the magnet 72 and the magnet disc 8a in the magnet disc 7a are attracted by the magnet. The magnet 81 inside of is attracted by the magnet. Thereby, the magnet original plate 8a rotates with the conveyance shaft 10.

In addition, the portion sandwiched between the magnet disc 7a and the magnet disc 8a of the inclined wall 30e is used to provide a strong magnetic force between the magnet disc 7a and the magnet disc 8a. The thickness is thinner than the side wall 30d.

Next, transmission and interruption of the rotational force between the magnet master plate 7a and the magnet master plate 8a will be described.

FIG. 7 (a) is a view showing a state in which the rotational force of the magnet disc 7a is transmitted to the magnet disc 8a, and FIG. 7 (b) is not transmitted to the magnet disc 8a. It is a figure which shows the state which does not.

As shown in Fig. 3, in the state in which the carrier shaft 10 is inclined, as shown in Fig. 7 (a), the distance between the magnet disc 7a and the magnet disc 8a is the magnet disc 7a. Distance between the magnet 71 of the magnet disc 7 and the magnet 82 of the magnet disc 8a and the magnet 81 of the magnet disc 7a and the magnet disc 8a of the magnet disc 7a. Since the force is shorter than the limit distance at which the attraction force acts, the rotational force of the magnet master plate 7a is reliably transmitted to the magnet master plate 8a.

As shown in Fig. 4, in the state where the conveying shaft 10 is horizontal, the distance between the magnet disc 7a and the magnet disc 8a is the magnet 71 and the magnet disc of the magnet disc 7a. The limit distance that the attraction force acts between the magnet 82 of 8a) and the limit where the attraction force acts between the magnet 72 of the magnet disc 7a and the magnet 81 of the magnet disc 8a. Since it is longer than the distance, the rotational force of the magnet master plate 7a is not transmitted to the magnet master plate 8a.

As described above, in the embodiment according to the present invention, unlike the conventional substrate transport apparatus, the motor M1 and M2 and the belts B1 and B2 do not need to be changed from inclined posture to horizontal posture. Can be simplified and space saving and cost reduction can be realized.

8 is a perspective view for explaining the operation of the substrate transport apparatus 100 of FIGS.

8 (a) shows a state in which the conveyance shaft 10 is inclined, FIG. 8 (b) shows a state in which the conveyance shaft 10 is inclined, and FIG. 8 (c) shows that the conveyance shaft 10 is horizontal. Indicates the state.

As shown in Fig. 8A, when the protrusion amount of the piston 16a of the cylinder 16 is maximum, the plurality of carrier shafts 10 are supported in an inclined state by an angle θ than the X-Y plane (horizontal plane). In this case, the some conveyance shaft 10 rotates, and the board | substrate 200 is carried in the X direction by the small conveyance roller 11 of the conveyance shaft 10. As shown in FIG. 8, illustration of the small conveying roller 11 is abbreviate | omitted.

When the board | substrate 200 is conveyed to a predetermined position, as shown in FIG.8 (b), the protrusion amount of the piston 16a of the cylinder 16 will gradually decrease, and the some conveyance shaft 10 will incline by the angle (theta). The state shifts from the state parallel to the XY plane.

As shown in Fig. 8C, when the amount of protrusion of the piston 16a of the cylinder 16 becomes minimum, the plurality of transport shafts 10 are in a state parallel to the X-Y plane. Thereby, the top part of the outer peripheral surface of the small conveyance roller 11 of the conveyance shaft 10 is located below the top part of the outer peripheral surface of the large conveyance roller 21. As shown in FIG. As a result, the substrate 200 supported by the small conveying roller 11 of the conveying shaft 10 is supported by the large conveying roller 21. Therefore, the large size conveyance roller 21 rotates and the board | substrate 200 is carried out to a Y direction.

In the substrate conveyance apparatus 100 which concerns on this embodiment, since it is not necessary to drill a hole in the side walls 30a-30d, in order to transmit the rotational force of the motors M1 and M2 to the conveyance shafts 10 and 20, a process liquid is removed. The containing atmosphere is prevented from leaking outside the conveyance chamber 30.

Moreover, in the substrate processing apparatus 100 which concerns on this embodiment, since the transmission mechanism for transmitting the rotational force of the motors M1 and M2 to the conveyance shafts 10 and 20 is provided outside the conveyance chamber 30, it conveys. Abrasion powder generated in the mechanism is prevented from adhering to the substrate 200. In addition, when the attitude | position of the board | substrate 200 is changed by the board | substrate conveying apparatus 100, the vibration by the magnet disc 7a, 7b, 8a, 8b does not generate | occur | produce either. Therefore, uniform processing of the substrate 200 is not disturbed.

In addition, since the transmission mechanism for transmitting the rotational force of the motors M1 and M2 to the transfer shafts 10 and 20 is provided outside the transfer chamber 30, there is no need to install a receiver for accommodating lubricant in the transfer chamber 30. No supply of lubricant to the transfer chamber 30 is required. Therefore, the number of parts can be reduced and the structure in the conveyance chamber 30 can be simplified. Therefore, the size and space saving of the substrate transfer device 100 can be realized.

In the inclined posture, the entire area of the substrate 200 is supported by the small conveying roller 11, and in the horizontal posture, the entire area of the substrate 200 is supported by the large conveying roller 21. As a result, warpage due to its own weight is prevented from occurring in the substrate 200, and at the same time, excessive excessive load is prevented from being applied to the substrate 200.

Moreover, since the rotational force is transmitted to all the small conveying rollers 11 and the large conveying rollers 21, the conveyance defect of the board | substrate 200 can be prevented. Therefore, the substrate 200 can be changed from an inclined posture of a predetermined angle θ to a horizontal posture without changing or breaking the substrate 200, and the conveyance direction of the substrate 200 can be changed from the X direction to the Y direction.

In the board | substrate conveying apparatus 100 which concerns on this embodiment, the conveyance direction of the board | substrate 200 can be changed from an X direction to a Y direction, without applying an excessive load partially to the board | substrate 200. FIG. In addition, the stroke amount of the cylinder 95 when the substrate 200 is changed from the inclined position to the horizontal position can be reduced. Therefore, the space reduction of the board | substrate conveyance apparatus 100 can be realized.

In this embodiment, the conveyance shaft 10 corresponds to a plurality of first conveyance shafts, the small conveying roller 11 corresponds to the first roller, and the conveying shaft 10 and the small conveying roller 11 Corresponds to the first roller member, the conveying shaft 20 corresponds to the plurality of second conveying shafts, the large conveying roller 21 corresponds to the second roller, and the conveying shaft 20 and the large conveying The roller 21 corresponds to the second roller member, the side walls 30a to 30d correspond to the wall portion, the motors M1 and M2 and the belts B1 and B2 correspond to the rotation driving means, and the magnet disc ( 7a, 7b, 8a, 8b correspond to the transfer means, the magnet discs 7a, 7b correspond to the first transfer means, the magnet discs 8a, 8b correspond to the second transfer member, magnets The 71 and 81 and the magnets 72 and 82 correspond to the plurality of first magnets and the plurality of second magnets, and the cylinder 16 and the piston 16a correspond to the state changing means.

(2nd embodiment)

The board | substrate carrying apparatus which concerns on 2nd Embodiment changes a conveyance direction of the board | substrate carried in a horizontal posture, and carries out a board | substrate in a horizontal posture. Hereinafter, the board | substrate conveyance apparatus 100a of the substrate processing apparatus which concerns on 2nd Embodiment is demonstrated.

9 is a cross sectional view of the substrate transfer apparatus 100a. In Fig. 9, two directions perpendicular to each other in the horizontal plane are referred to as the X and Y directions, and the vertical direction is referred to as the Z direction.

The substrate conveyance apparatus 100a shown in FIG. 9 has a conveyance chamber 30. As shown in FIG. The transfer chamber 30 is formed by a pair of side walls 30a and 30c parallel to the Y direction and a pair of side walls 30b and 30d parallel to the X direction. The board | substrate delivery opening 33 is provided in the side wall 30a of the conveyance chamber 30, and the board | substrate carrying out opening 34 is provided in the side wall 30b of the conveyance chamber 30. As shown in FIG.

The substrate conveying apparatus 100a changes the direction of the substrate 200 carried in the X direction into the conveyance chamber 30 at the substrate loading opening 33 and takes out the substrate 200 in the Y direction from the substrate discharging opening 34. do.

In the conveyance chamber 30, the some conveyance shaft 10 is arrange | positioned along the Y direction, and the some conveyance shaft 20 is arrange | positioned along the X direction. On each of the conveyance shafts 10, a plurality of small conveying rollers 11 are arranged at substantially equal intervals. Each of the conveyance shafts 20 is provided with a plurality of large conveying rollers 21 at equal intervals.

One end of the plurality of transport shafts 10 is rotatably supported by the side wall 30d, and the other end of the plurality of transport shafts 10 is rotatably supported by the side wall 30b, and the plurality of transport shafts 10 At one end, a magnet disc 8a is provided.

One end vicinity of the some conveyance shaft 20 is rotatably supported by the support member 12c, and the other end vicinity of the some conveyance shaft 20 is rotatably supported by the support member 15c, and is supported. The member 12c and the support member 15c are supported by the support member 12d and the support member 15d. The magnet master plate 8b is provided in the one end of several conveyance shaft 20, respectively.

In the space surrounded by the side wall 30d and the main wall 31 of the transfer chamber 30, a motor M1, a belt B1, and a plurality of magnet discs 7a for rotationally driving the plurality of transfer shafts 10 are provided. It is installed. Each magnet disk 7a is arrange | positioned so as to oppose the magnet disk 8a through the side wall 30d. The belt B1 is interposed between the shaft of the motor M1 and the plurality of magnet discs 7a, and the plurality of magnet discs 7a rotate in the same direction as the shaft of the motor M1 rotates. do.

The magnet original plate 8a rotates by rotating the magnet original plate 7a. Thereby, the conveyance shaft 10 rotates with the small conveyance roller 11. As a result, it becomes possible to convey the board | substrate 200 supported on the small conveyance roller 11 to an X direction.

In the space surrounded by the side wall 30c and the main wall 32 of the transfer chamber 30, a motor M2, a belt B2, and a plurality of magnet discs 7b for rotationally driving the plurality of transfer shafts 20 are provided. It is installed. Each magnet disc 7b is arranged to face the magnet disc 8b via the side wall 30c. The belt B2 is interposed between the shaft of the motor M2 and the plurality of magnet discs 7b, and the plurality of magnet discs 7b rotate in the same direction as the shaft of the motor M2 rotates. do.

The magnet original plate 8b rotates by rotating the magnet original plate 7b. Thereby, the conveyance shaft 20 rotates with the small conveyance roller 21. As shown in FIG. As a result, it becomes possible to convey the board | substrate 200 supported on the large conveyance roller 21 to a Y direction.

10 and 11 are cross-sectional views taken along line C-C of the substrate transfer device 100a of FIG. 10 shows a state in which the substrate 200 is supported by the small conveying roller 11, and FIG. 11 shows a state in which the substrate 200 is supported by the large conveying roller 21. As shown in FIG.

The conveyance shaft 20 is supported by the supporting member 15c. One end vicinity of the support member 15c is rotatably supported above the support 13 by the support member 12d. The other end of the support member 15c is rotatably supported above the support 13 by the support member 15d.

Moreover, one end of the support stand 13 is rotatably supported by the support shaft 13A. The other end of the support stand 13 is supported by the cylinder 16 so that it can operate up and down. The front end of the piston 16a of this cylinder 16 is provided on the lower surface of the support base 13.

As shown in Fig. 10, when the amount of protrusion of the piston 16a of the cylinder 16 decreases, the support 13 rotates in the direction of the arrow R11 around the support shaft 13A. As a result, the supporting member 15c is inclined. In this state, the top of the small conveying roller 11 of the conveying shaft 10 is located above the top of the large conveying roller 21 of the conveying shaft 20. Therefore, the board | substrate 200 is supported by the small conveyance roller 11 in a horizontal position.

As shown in FIG. 10, the magnet master plate 8a faces in parallel with the inner surface of the side wall 30d of the transfer chamber 30. In addition, the magnet disc 7a is provided on the shaft 76a so as to face the outer surface of the side wall 30d in parallel. Thereby, the magnet disk 8a opposes the magnet disk 7a through the side wall 30d. Therefore, when the magnet disc 7a rotates with the shaft 76a by the belt B1, the magnet disc 8a is conveyed by the magnet which acts between the magnet disc 7a and the magnet disc 8a. Rotate with the shaft 10.

As shown in FIG. 11, when the protrusion amount of the piston 16a of the cylinder 16 increases, the support stand 13 rotates around the support shaft 13A in the direction of the arrow R10. As a result, the supporting member 15c becomes horizontal. In this state, the top of the large conveying roller 21 of the substrate 200 is located above the top of the small conveying roller 11 of the conveying shaft 10. Therefore, the board | substrate 200 is supported by the large conveying roller 21 in a horizontal position.

12 and 13 are cross-sectional views taken along the line D-D of the substrate transfer device 100a of FIG. 12 shows a state where the substrate 200 is supported by the small conveying roller 11, and FIG. 13 shows a state where the substrate 200 is supported by the large conveying roller 21. As shown in FIG.

One end vicinity of the conveyance shaft 20 is rotatably supported above the support 13B by the support member 12c, and the other end vicinity of the conveyance shaft 20 is supported by the support member 15c of the support 13B. It is rotatably supported upwards. The cylinder 16 is provided below the support stand 13b.

The magnet disc 8b opposes in parallel to the inner surface of the side wall 30c. In addition, the magnet disc 7b is provided on the shaft 76b so as to face the outer surface of the side wall 30c in parallel.

As shown in FIG. 12, when the protrusion amount of the piston 16a of the cylinder 16 decreases, the distance between the magnet disc 7b and the magnet disc 8b becomes large, and the magnet disc 7b and the magnet disc ( The magnetic force will not act between 8b). Therefore, even when the magnet disc 7b is rotated by the belt B2, the magnet disc 8b does not rotate. As a result, the conveyance shaft 20 and the large conveying roller 21 do not rotate.

On the other hand, as shown in FIG. 13, when the protrusion amount of the piston 16a of the cylinder 16 increases, the magnet disc 8b opposes the magnet disc 7b in parallel through the side wall 30c. Therefore, when the magnet disc 7b rotates with the shaft 76b by the belt B2, the magnet disc 8a is conveyed by the magnetic force which acts between the magnet disc 7b and the magnet disc 8b. It rotates with the shaft 20 and the large conveying roller 21.

The internal structure of the magnet original plates 7a, 7b, 8a, 8b according to the present embodiment is the same as the magnet original plates 7a, 7b, 8a, 8b according to the first embodiment.

Next, transmission and interruption of the rotational force between the magnet master plate 7b and the magnet master plate 8b of the substrate transfer device 100a according to the present embodiment will be described.

Fig. 14 (a) is a view showing a state where the rotational force of the magnet disc 7b is transmitted to the magnet disc 8b, and Fig. 14 (b) is not a transfer force of the magnet disc 7b to the magnet disc 8b. It is a figure which shows the state which does not.

As shown in Fig. 10 and Fig. 12, in the state in which the supporting member 15c is inclined, as shown in Fig. 14A, the magnet disc 7b and the magnet disc 8b are arranged to be shifted in the vertical direction. Therefore, the distance between the magnet disc 7b and the magnet disc 8b is limited to the attraction force between the magnet 71 of the magnet disc 7b and the magnet 82 of the magnet disc 8b. Since the distance and the distance between the magnet 72 of the magnet disc 7b and the magnet 81 of the magnet disc 8b are longer than the limit distance at which the attraction force acts, the rotation force of the magnet disc 7b is the magnet disc 8b. Is not delivered).

As shown in Fig. 11 and Fig. 13, in the state where the supporting member 15c is horizontal, as shown in Fig. 14B, the magnet disc 7b and the magnet disc 8b are arranged at positions that can be opposed to each other. . Therefore, the distance between the magnet disc 7b and the magnet disc 8b is the limit that the attraction force acts between the magnet 71 of the magnet disc 7b and the magnet 82 of the magnet disc 8b. Since the distance between the magnet and the magnet 72 of the magnet disc 7b and the magnet 81 of the magnet disc 8b is shorter than the limit of the attraction force, the rotational force of the magnet disc 7b is reduced by the magnet disc ( Surely delivered to 8b).

In the substrate conveyance apparatus 100a which concerns on this embodiment, since it is not necessary to drill a hole in the side walls 30a-30d, in order to transmit the rotational force of the motors M1 and M2 to the conveyance shafts 10 and 20, a process liquid is removed. The containing atmosphere is prevented from leaking outside the conveyance chamber 30.

Moreover, in the board | substrate conveying apparatus 100a which concerns on this embodiment, since the transmission mechanism for transmitting the rotational force of the motors M1 and M2 to the conveyance shafts 10 and 20 is provided outside the conveyance chamber 30, a conveyance mechanism Abrasion powder generated from the is prevented from being attached to the substrate 200. Moreover, when the attitude | position of the board | substrate 200 is changed by the board | substrate conveying apparatus 100a, the vibration by the magnet disc 7a, 7b, 8a, 8b does not generate | occur | produce either. Therefore, uniform processing of the substrate 200 is not disturbed.

Moreover, since the transmission mechanism for transmitting the rotational force of the motors M1 and M2 to the transmission shafts 10 and 20 is provided outside the conveyance chamber 30, it is not necessary to install the receiver which accommodates a lubricant in the conveyance chamber 30. No supply of lubricant to the transfer chamber 30 is required. Therefore, the number of parts can be reduced and the structure in the conveyance chamber 30 can be simplified. In addition, the stroke amount of the cylinder 95 when the substrate 200 is changed from the inclined position to the horizontal position can be reduced. Therefore, the size and space saving of the substrate transfer device 100 can be realized.

In the horizontal posture, the entire area of the substrate 200 is supported by the small conveying roller 11 or the large conveying roller 21. As a result, warpage due to its own weight is prevented from occurring in the substrate 200, and at the same time, excessive excessive load is prevented from being applied to the substrate 200.

Moreover, since the rotational force is transmitted to all the small conveying rollers 11 and the large conveying rollers 21, the conveyance defect of the board | substrate 200 can be prevented. Therefore, the conveyance direction of a board | substrate can be redirected from an X direction to a Y direction, without deforming and damaging the board | substrate 200. FIG.

In this embodiment, the conveyance shaft 10 corresponds to a plurality of 1st conveyance shafts or 2nd conveyance shaft, and the small conveyance roller 11 corresponds to a 1st roller or a 2nd roller, and conveys The shaft 10 and the small conveyance roller 11 correspond to the 1st roller member, the conveyance shaft 20 corresponds to the some 2nd conveyance shaft or the 1st conveyance shaft, and the large conveyance roller 21 Is equivalent to the second roller, the conveying shaft 20 and the large conveying roller 21 correspond to the second roller member, the side walls 30a to 30d correspond to the wall portion, and the motors M1 and M2 and The belts B1 and B2 correspond to the rotary drive means, the magnet discs 7a, 7b, 8a, 8b correspond to the transfer means, the magnet discs 7a, 7b correspond to the first transfer member, and the magnets The discs 8a and 8b correspond to the second transmission member, the magnets 71 and 81 and the magnets 72 and 82 correspond to the plurality of first magnets and the plurality of second magnets, and the cylinder 16 Piston 16a corresponds to state change means. The.

(Third embodiment)

The board | substrate conveying apparatus which concerns on 3rd Embodiment changes a posture of the board | substrate carried in in a horizontal position, and carries out a board | substrate in inclined position. Hereinafter, the board | substrate conveyance apparatus 100b of the substrate processing apparatus which concerns on 3rd Embodiment is demonstrated.

15 is a cross sectional view of the substrate transfer device 100b. In Fig. 15, two directions perpendicular to each other in the horizontal plane are referred to as X and Y directions, and the vertical direction is referred to as Z direction.

The substrate transfer apparatus 100b shown in FIG. 15 has a transfer chamber 30. The transfer chamber 30 is formed by a pair of side walls 30a and 30c parallel to the Y direction and a pair of side walls 30b and 30d parallel to the X direction. The board | substrate delivery opening 33 is provided in the side wall 30a of the conveyance chamber 30, and the board | substrate carrying out hole 34 is provided in the side wall 30c of the conveyance chamber 30. As shown in FIG.

The substrate conveying apparatus 100b changes the posture of the substrate 200 carried in the horizontal posture into the conveyance chamber 30 at the substrate loading opening 33 and takes out the substrate 200 in an inclined position from the substrate discharging opening 34. do.

In the conveyance chamber 30, the some conveyance shaft 10b is arrange | positioned along the Y direction, and the some conveyance shaft 20b is also arrange | positioned along the Y direction. On each of the conveyance shafts 10b, a plurality of conveying rollers 11b are arranged at substantially equal intervals. Each of the conveyance shafts 20b is provided with a plurality of conveying rollers 21b at equal intervals.

One end vicinity of the some conveyance shaft 10b is rotatably supported by the support member 12f, and the other end vicinity of the some conveyance shaft 10b is rotatably supported by the support member 15f, The magnet master plate 8a is provided in the end of the conveyance shaft 10b, respectively.

One end vicinity of the some conveyance shaft 20b is rotatably supported by the support member 12g, and the other end vicinity of the some conveyance shaft 20b is rotatably supported by the support member 15g, The magnet original plate 8b is provided in the other end of the conveyance shaft 20b, respectively.

In the space surrounded by the side wall 30d and the main wall 31 of the transfer chamber 30, a motor M1, a belt B1, and a plurality of magnet discs 7a for rotationally driving the plurality of transfer shafts 10b are provided. It is installed. Each magnet disk 7a is arrange | positioned so as to oppose the magnet disk 8a through the side wall 30d. The belt B1 is interposed between the shaft of the motor M1 and the plurality of magnet discs 7a, and the plurality of magnet discs 7a rotate in the same direction as the shaft of the motor M1 rotates. do.

The magnet original plate 8a rotates by rotating the magnet original plate 7a. Thereby, the conveyance shaft 10b rotates with the conveyance roller 11b. As a result, it becomes possible to convey the board | substrate 200 supported on the conveyance roller 11b with oblique attitude. In addition, the detailed description of the structure of the magnet original plates 7a and 8a is the same as that of the magnet original plates 7a and 8a which concerns on 1st Embodiment.

In the space surrounded by the side wall 30b and the main wall 32 of the transfer chamber 30, a motor M2, a belt B2 and a plurality of magnet discs 7b for rotationally driving the plurality of transfer shafts 20b are provided. It is installed. Each magnet disc 7b is arranged to face the magnet disc 8b via the side wall 30b. The belt B2 is interposed between the shaft of the motor M2 and the plurality of magnet discs 7b, and the plurality of magnet discs 7b rotate in the same direction as the shaft of the motor M2 rotates. do.

The magnet original plate 8b rotates by rotating the magnet original plate 7b. Thereby, the conveyance shaft 20b rotates with the conveyance roller 21b. As a result, it becomes possible to convey the board | substrate 200 supported on the conveyance roller 21b in inclined position. In addition, the detailed description of the structure of the magnet original plates 7b and 8b is the same as that of the magnet original plates 7b and 8b which concerns on 1st Embodiment.

16 and 17 are sectional views taken along the line E-E of the substrate transfer device 100b of FIG. FIG. 16 shows a state in which the substrate 200 is supported by the conveying roller 21b, and FIG. 17 shows a state in which the substrate 200 is supported by the conveying roller 11b.

One end vicinity of the conveyance shaft 20b is rotatably supported above the support stand 13 by the support member 12e. The other end of the conveyance shaft 20b is rotatably supported above the support stand 13 by the support member 15e.

Moreover, one end of the support stand 13 is rotatably supported by the support shaft 13A. The other end of the support stand 13 is supported by the cylinder 16 so that it can operate up and down. The front end of the piston 16a of this cylinder 16 is provided on the lower surface of the support base 13.

As shown in Fig. 16, when the amount of protrusion of the piston 16a of the cylinder 16 decreases, the support 13 rotates in the direction of the arrow R11 around the support shaft 13A. As a result, the supporting member 12f is in a horizontal state. In this state, the top part of the conveyance roller 21b of the conveyance shaft 20b is located above the top part of the conveyance roller 11b of the conveyance shaft 10b. Therefore, the board | substrate 200 is supported horizontally by the conveyance roller 21b.

In this case, the magnet disc 8b and the magnet disc 7b provided at one end of the conveying shaft 20b face each other through the side wall 30b, and a magnetic force is generated between the magnet disc 7b and the magnet disc 8b. Works. Therefore, when the magnet original plate 7b is rotated by the belt B2, the magnet original plate 8b rotates and the conveyance roller 21b rotates with the conveyance shaft 20b.

As shown in Fig. 17, when the amount of protrusion of the piston 16a of the cylinder 16 increases, the support 13 rotates in the direction of the arrow R10 around the support shaft 13A. As a result, the supporting member 12f is inclined. In this state, the top part of the conveyance roller 21b of the conveyance shaft 20b is located below the top part of the conveyance roller 11b of the conveyance shaft 10b. Therefore, the board | substrate 200 is supported in inclined posture by the conveyance roller 11b.

In this case, the magnet disc 8a and the magnet disc 7a provided at one end of the conveying shaft 10b face each other through the side wall 30d, and a magnetic force is generated between the magnet disc 7a and the magnet disc 8a. Works. Therefore, when the magnet original plate 7a is rotated by the belt B1, the magnet original plate 8a rotates, and the conveyance roller 11b rotates with the conveyance shaft 10b.

In the substrate conveyance apparatus 100b which concerns on this embodiment, since it is not necessary to drill a hole in the side walls 30a-30d in order to transmit the rotational force of the motors M1 and M2 to the conveyance shafts 10 and 20, it contains a process liquid. The atmosphere to be prevented from leaking outside the transport chamber 30 is prevented.

Moreover, in the substrate processing apparatus 100b which concerns on this embodiment, since the transmission mechanism for transmitting the rotational force of the motors M1 and M2 to the conveyance shafts 10b and 20b is provided outside the conveyance chamber 30, a delivery mechanism Abrasion powder generated from the is prevented from being attached to the substrate 200. In addition, when the attitude | position of the board | substrate 200 is changed by the board | substrate conveying apparatus 100b, the vibration by the magnet disc 7a, 7b, 8a, 8b does not generate | occur | produce either. Therefore, uniform processing of the substrate 200 is not disturbed.

In addition, since the transmission mechanism for transmitting the rotational force of the motors M1 and M2 to the transfer shafts 10b and 20b is provided outside the transfer chamber 30, there is no need to install a container for accommodating lubricant in the transfer chamber 30. No supply of lubricant to the transfer chamber 30 is required. Therefore, the number of parts can be reduced and the structure in the conveyance chamber 30 can be simplified. In addition, the stroke amount of the cylinder 95 when the substrate 200 is changed from the inclined position to the horizontal position can be reduced. Therefore, the miniaturization and space saving of the board | substrate carrying apparatus 100b can be implement | achieved.

In the inclined posture, the entire area of the substrate 200 is supported by the small conveying roller 11b, and in the horizontal posture, the entire area of the substrate 200 is supported by the large conveying roller 21b. As a result, warpage due to its own weight is prevented from occurring in the substrate 200, and at the same time, excessive excessive load is prevented from being applied to the substrate 200.

Moreover, since rotational force is transmitted to all the small conveying rollers 11b and the large conveying rollers 21b, the conveyance defect of the board | substrate 200 can be prevented. Therefore, the substrate 200 can be changed to the inclined posture by a predetermined angle θ without deforming and breaking the substrate 200.

In addition, in this embodiment, although the support member 12f was made to rotate around the support shaft 13A with respect to a horizontal plane, you may move the support member 12f up and down in parallel.

In this embodiment, the conveyance shaft 10 corresponds to a plurality of first conveyance shafts, the small conveying roller 11 corresponds to the first roller, and the conveying shaft 10 and the small conveying roller 11 Corresponds to the first roller member, the conveying shaft 20 corresponds to the plurality of second conveying shafts, the large conveying roller 21 corresponds to the second roller, and the conveying shaft 20 and the large conveying The roller 21 corresponds to the second roller member, the side walls 30a to 30d correspond to the wall portion, the motors M1 and M2 and the belts B1 and B2 correspond to the rotation driving means, and the magnet disc ( 7a, 7b, 8a, 8b correspond to the transmission means, magnet discs 7a, 7b correspond to the first transfer member, magnet discs 8a, 8b correspond to the second transfer member, and magnets The 71 and 81 and the magnets 72 and 82 correspond to the plurality of first magnets and the plurality of second magnets, and the piston 16a of the cylinder 16 corresponds to the state changing means.

As will be apparent from the above description, according to the substrate transport apparatus of the present invention, there is no need to change from the inclined posture to the horizontal posture together with the motor and the belt, and the structure can be simplified, thereby saving space and reducing cost. Can be realized.

In addition, since there is no need to drill a hole in the side wall in order to transmit the rotational force of the motor to the transport shaft, the atmosphere containing the processing liquid is prevented from leaking outside the transport chamber, and the transmission mechanism for transmitting the rotational force of the motor to the transport shaft Since is provided outside the conveyance chamber, the abrasion powder which arises from a transmission mechanism is prevented from adhering to a board | substrate.

Moreover, when the attitude | position of a board | substrate is changed by a board | substrate conveying apparatus, the vibration by a magnet disc also does not generate | occur | produce, and uniform processing of a board | substrate is not prevented.

In addition, since the transmission mechanism for transmitting the rotational force of the motor to the transport shaft is provided outside the transport chamber, there is no need to install a container for accommodating the lubricant in the transport chamber, and no supply of lubricant to the transport chamber is required. Therefore, the number of parts can be reduced, and the structure in the transfer chamber can be simplified, and the miniaturization and space saving of the substrate transfer apparatus can be realized.

Claims (18)

A substrate transport apparatus for transporting a substrate, A conveyance chamber having a wall portion, A plurality of first transport shafts rotatably installed in the transport chamber, A first roller provided concentrically on the plurality of first conveyance shafts and supporting the substrate; State changing means for changing the plurality of first conveyance shafts into a first state and a second state by moving or inclining the plurality of first conveyance shafts; Rotation driving means is provided outside the conveyance chamber for generating a rotational force, A transmission means for transmitting the rotational force generated by the rotation driving means to the first roller member by a magnetic force, The delivery means, A first transmission member disposed to face the wall portion outside the transport chamber and rotated by a rotational force generated by the rotation driving means; A second transfer member rotatably installed together with the first transfer shaft in the transfer chamber, The first state is a state in which the second transfer member is in a first position facing the second transfer member through the wall portion, and the second state is that the second transfer member is Is in a second position away from the first position, And the rotational force of the first transfer member is transferred to the second transfer member through the wall portion in the first state. delete The method of claim 1, A plurality of second transport shafts rotatably provided in the transport chamber; It is further provided with the 2nd roller which is provided concentrically to the said 2nd conveyance shaft, and supports a board | substrate, The substrate is supported on the first roller when the first transport shaft is in the first state, and the substrate is supported on the second roller when the first transport shaft is in the second state. The said 1st conveyance shaft and the said 2nd conveyance shaft were provided so that it may be supported on a roller, The board | substrate conveying apparatus characterized by the above-mentioned. delete The method of claim 3, wherein The said 1st conveyance shaft and the said 2nd conveyance shaft are provided so that they may mutually cross. The board | substrate conveying apparatus characterized by the above-mentioned. The method of claim 3, wherein The said 1st conveyance shaft and the said 2nd conveyance shaft are provided in substantially parallel with each other, The board | substrate conveying apparatus characterized by the above-mentioned. The method according to any one of claims 1 to 6, The first transfer member has a first surface facing the wall and a first rotational shaft, and incorporates a plurality of first magnets disposed along a circumference around the first rotational shaft. The second transfer member has a second surface and a second rotation axis which are opposite to the wall portion, and incorporates a plurality of second magnets arranged along a circumference around the second rotation axis. Substrate transport apparatus, characterized in that. The method of claim 7, wherein The plurality of first magnets are arranged at equal intervals so that the N poles and the S poles are alternately formed on the first surface, and the plurality of second magnets are the N poles and the S poles on the second surface. And a plurality of first magnets arranged at equal intervals so as to be alternately formed. The method of claim 7, wherein And the plurality of first magnets of the first transfer member are embedded in a nonmagnetic member, and the plurality of second magnets of the second transfer member are embedded in a nonmagnetic member. . The method of claim 9, At least the outer peripheral surface of the nonmagnetic member of the second transfer member is made of resin. A substrate transport apparatus for transporting a substrate, A plurality of first transport shafts rotatably provided; A first roller provided concentrically on the plurality of first conveyance shafts and supporting the substrate; A plurality of second conveying shafts rotatably provided; It is provided concentrically to the said 2nd conveyance shaft, Comprising: The 2nd roller which supports a board | substrate, The plurality of first conveyance shafts are provided so as to intersect with the plurality of second conveyance shafts above the plurality of second conveyance shafts, The diameter of the first roller is smaller than the diameter of the second roller, By relatively inclining or moving the plurality of first conveyance shafts and the plurality of second conveyance shafts, a positional relationship between the plurality of first conveyance shafts and the plurality of second conveyance shafts is determined as a first. And state changing means for changing to a state or a second state, The first state is a state in which the top of the first roller is located above the top of the second roller, and in the second state, the top of the second roller is the first roller. And a substrate transport apparatus located above the top of the substrate. The method of claim 11, One of the plurality of first conveyance shafts and the plurality of second conveyance shafts is inclined in the first state, and the plurality of first conveyance shafts and the plurality of second conveyances in the second state. A substrate transport apparatus, characterized in that the other of the transport shafts becomes a horizontal posture. The method of claim 11, The plurality of first conveyance shafts and the second conveyance shafts are horizontal postures in the first state, and the plurality of first conveyance shafts and the second conveyances in the first state and the second state. A substrate transport apparatus, wherein the positions of the upper and lower sides of the shaft are different. The method according to any one of claims 11 to 13, The conveyance room having a wall part, Rotation driving means is provided outside the conveyance chamber, and generates a rotational force, And a transmission means for transmitting the rotational force generated by the rotation driving means to the first conveyance shaft by magnetic force, The first conveyance shaft, the first roller, the second conveyance shaft, and the second roller are provided in the conveyance chamber, The delivery means, A first transmission member disposed to face the wall portion outside the transport chamber and rotated by a rotational force generated by the rotation driving means; A second transfer member rotatably installed together with the first transfer shaft in the transfer chamber, When the plurality of first and second conveyance shafts are in the first state, the second transfer member is in a first position facing the second transfer member through the wall portion, and the first The rotational force is transmitted between the first transmission member and the second transmission member, and when the plurality of first and second transport shafts are in the second state, the second transmission member is the first transmission member. The substrate transfer apparatus characterized by being in the 2nd position away from the 1 position. A substrate transport apparatus for transporting a substrate, A plurality of first transport shafts rotatably provided; A first roller provided concentrically to the plurality of first conveyance shafts and supporting the substrate; A plurality of second conveying shafts rotatably provided; It is provided concentrically to the said 2nd conveyance shaft, Comprising: The 2nd roller which supports a board | substrate, The plurality of first conveyance shafts are provided substantially parallel to the plurality of second conveyance shafts, By relatively inclining or moving the plurality of first conveyance shafts and the plurality of second conveyance shafts, a positional relationship between the plurality of first conveyance shafts and the plurality of second conveyance shafts is determined as a first. And state changing means for changing to a state or a second state, The first state is a state in which the top of the first roller is located above the top of the second roller, and in the second state, the top of the second roller is formed of the first roller. A substrate transport apparatus, which is in a state located above the top portion. The method of claim 15, One of the plurality of first conveyance shafts and the plurality of second conveyance shafts is inclined in the first state, and the plurality of first conveyance shafts and the plurality of second conveyances in the second state. A substrate transport apparatus, characterized in that the other of the transport shafts becomes a horizontal posture. The method of claim 15, The plurality of first conveyance shafts and the second conveyance shafts become horizontal postures in the first state, and the plurality of first conveyance shafts and the second conveyance in the first state and the second state. A substrate transport apparatus, wherein the positions of the upper and lower sides of the shaft are different. The method according to any one of claims 15 to 17, The conveyance room having a wall part, Rotation driving means is provided outside the conveyance chamber for generating a rotational force, And a transmission means for transmitting the rotational force generated by the rotation driving means to the first conveyance shaft by magnetic force, The first conveyance shaft, the first roller, the second conveyance shaft, and the second roller are provided in the conveyance chamber, The delivery means, A first transmission member disposed to face the wall portion outside the transport chamber and rotated by a rotational force generated by the rotation driving means; A second transfer member rotatably installed together with the first transfer shaft in the transfer chamber, When the plurality of first and second conveyance shafts are in the first state, the second transfer member is in a first position facing the second transfer member through the wall portion, and the first The rotational force is transmitted between the first transmission member and the second transmission member, and when the plurality of first and second transport shafts are in the second state, the second transmission member is the first transmission member. The substrate transfer apparatus characterized by being in the 2nd position away from the 1 position.

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