TWI262890B - Substrate transporting apparatus - Google Patents

Substrate transporting apparatus

Info

Publication number
TWI262890B
TWI262890B TW093106961A TW93106961A TWI262890B TW I262890 B TWI262890 B TW I262890B TW 093106961 A TW093106961 A TW 093106961A TW 93106961 A TW93106961 A TW 93106961A TW I262890 B TWI262890 B TW I262890B
Authority
TW
Taiwan
Prior art keywords
transporting
axis
magnetic discs
magnetic
scale rollers
Prior art date
Application number
TW093106961A
Other languages
Chinese (zh)
Other versions
TW200502150A (en
Inventor
Shigeru Kohara
Naohisa Okada
Naoyuki Osada
Shigeki Minami
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003075874A external-priority patent/JP4307876B2/en
Priority claimed from JP2003075875A external-priority patent/JP4286035B2/en
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200502150A publication Critical patent/TW200502150A/en
Application granted granted Critical
Publication of TWI262890B publication Critical patent/TWI262890B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets

Abstract

To provide a substrate transporting apparatus capable of transporting safely without causing deformation and/or breaking the substrates and having a simple structure. When the projection quantity of the cylinder is increasing, and the magnetic discs are rotating, the magnet and the transporting axis would rotate coaxially by the magnetic forces acting between the magnetic discs, where the transporting axis is supported at an angle included with respect to the XY plane. The small scale rollers of rotation of the transporting axis would transport the substrate in the X-direction. When the projection quantity of the cylinder is decreasing, the magnetic force cannot act between the magnetic discs because the magnetic discs provided at an end of the transporting axis are moving away from the inclining wall, and the transporting axis moves from the inclined position to a state parallel to the X-Y plane. At this time, the external circumferential top of the small scale rollers of the transporting axis is located at a level lower than the external circumferential top of the large scale rollers, so as to transport the substrates by the large scale rollers.
TW093106961A 2003-03-19 2004-03-16 Substrate transporting apparatus TWI262890B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003075874A JP4307876B2 (en) 2003-03-19 2003-03-19 Substrate transfer device
JP2003075875A JP4286035B2 (en) 2003-03-19 2003-03-19 Substrate transfer device

Publications (2)

Publication Number Publication Date
TW200502150A TW200502150A (en) 2005-01-16
TWI262890B true TWI262890B (en) 2006-10-01

Family

ID=34315588

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093106961A TWI262890B (en) 2003-03-19 2004-03-16 Substrate transporting apparatus

Country Status (3)

Country Link
KR (1) KR100587847B1 (en)
CN (1) CN1288050C (en)
TW (1) TWI262890B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100729430B1 (en) * 2005-11-22 2007-06-15 주식회사 디엠에스 Apparatus capable of transporting works in vertical direction
KR101068875B1 (en) * 2008-11-26 2011-09-30 세메스 주식회사 Apparatus and method of transferring a substrate
CN102009847B (en) * 2010-11-01 2013-03-27 济南德佳玻璃机器有限公司 Angle rotation device
KR20150085112A (en) * 2010-11-15 2015-07-22 가부시키가이샤 아루박 Film-forming apparatus
CN104787532B (en) * 2015-04-07 2018-01-23 广东友力智能科技有限公司 The automatic sorting method of plate fitment component
CN105314322A (en) * 2015-11-27 2016-02-10 芜湖天金机械有限公司 Automatic discharging mechanism for roller burnishing of universal joint transmission shaft levers
CN107597605A (en) * 2017-10-30 2018-01-19 广东科德智能装备有限公司 A kind of tilting pan type sorter topples over plate
CN110707018A (en) * 2018-07-09 2020-01-17 细美事有限公司 Substrate transfer apparatus and substrate processing apparatus
DE102019210063B4 (en) * 2019-07-09 2021-05-20 NICE Solar Energy GmbH Substrate conveying device, vacuum treatment device with a substrate conveying device and method for conveying a substrate

Also Published As

Publication number Publication date
TW200502150A (en) 2005-01-16
CN1532126A (en) 2004-09-29
KR100587847B1 (en) 2006-06-09
KR20040087257A (en) 2004-10-13
CN1288050C (en) 2006-12-06

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees