CN1288050C - Base board transport device - Google Patents
Base board transport device Download PDFInfo
- Publication number
- CN1288050C CN1288050C CNB2004100070759A CN200410007075A CN1288050C CN 1288050 C CN1288050 C CN 1288050C CN B2004100070759 A CNB2004100070759 A CN B2004100070759A CN 200410007075 A CN200410007075 A CN 200410007075A CN 1288050 C CN1288050 C CN 1288050C
- Authority
- CN
- China
- Prior art keywords
- mentioned
- conveying axis
- conveying
- magnet
- state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims abstract description 248
- 230000005540 biological transmission Effects 0.000 claims description 44
- 230000009466 transformation Effects 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000000314 lubricant Substances 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 15
- 238000005406 washing Methods 0.000 description 10
- 230000003750 conditioning effect Effects 0.000 description 9
- 239000012530 fluid Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 230000007613 environmental effect Effects 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 235000014347 soups Nutrition 0.000 description 7
- 238000005452 bending Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000696 magnetic material Substances 0.000 description 4
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 1
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Abstract
To provide a substrate transporting apparatus capable of transporting safely without causing deformation and/or breaking the substrates and having a simple structure. When the projection quantity of the cylinder is increasing, and the magnetic discs are rotating, the magnet and the transporting axis would rotate coaxially by the magnetic forces acting between the magnetic discs, where the transporting axis is supported at an angle included with respect to the XY plane. The small scale rollers of rotation of the transporting axis would transport the substrate in the X-direction. When the projection quantity of the cylinder is decreasing, the magnetic force cannot act between the magnetic discs because the magnetic discs provided at an end of the transporting axis are moving away from the inclining wall, and the transporting axis moves from the inclined position to a state parallel to the X-Y plane. At this time, the external circumferential top of the small scale rollers of the transporting axis is located at a level lower than the external circumferential top of the large scale rollers, so as to transport the substrates by the large scale rollers.
Description
Technical field
The present invention relates to a kind of base board delivery device of conveying substrate.
Background technology
Adopt substrate board treatment, liquid crystal indicator is carried out all processing with glass substrate, CD with substrates such as glass substrate, semiconductor chips with glass substrate, photomask.Such substrate board treatment is provided with the space owing to mainly be used in the dust-free workshop so require to cut down.
Figure 18 is the total length that expression one example shortens substrate board treatment, tries hard to save the figure (opening the 2000-31239 communique with reference to the spy) of the substrate board treatment in space.
In substrate board treatment shown in Figure 180 900, form the conveying road 151 that is parallel to each other, the upset path 153 of carrying road 152 and linking them.
In substrate board treatment 900, block-by-block takes out the substrate among the substrate box C that is accommodated in branch transfer part 111, with the roughly U word shape sequentially-fed substrate on conveying road 151, upset path 153 and conveying road 152, and simultaneously it is implemented to handle, and then it is accommodated in the substrate box C of branch transfer part 111.
On the conveying road 151 of the substrate board treatment 900 of Figure 18, dispose load-transfer device 112, ultraviolet irradiation portion 113, ozone ashing portion 114 and brush washing portion 115 in order, on the conveying road 152 of substrate board treatment 900, dispose ultraviolet irradiation portion 119, air knife portion 118, washing portion 117 in order.
In addition, on the upset path 153 of substrate board treatment 900, in order placement substrate feedway 800, carry out soup handling part 810 and base board delivery device 801 that soup is handled.In soup handling part 810,, handle with the posture of predetermined angular degree that substrate is tilted for making the surface treatment uniformization of substrate.
Figure 19 is the sectional elevation of the base board delivery device 801 of Figure 18, and Figure 20 is the A-A line cutaway view of the base board delivery device 801 of Figure 19.
In Figure 19 and Figure 20, will in horizontal surface, 2 vertical directions be made as directions X and Y direction, vertical direction is made as the Z direction.As shown in figure 19, from the substrate delivery port 310 of conveying chamber 300 to Y direction conveying substrate, from substrate delivery port 320 to directions X output substrate.
In the conveying chamber 300 of the base board delivery device 801 of Figure 19, separate predetermined distance L10 ground and dispose a plurality of conveying axis 80a and a plurality of conveying axis 80b along directions X respectively.A plurality of conveying axis 80c along the Y direction, are configured in the predetermined distance L10 between conveying axis 80a and the conveying axis 80b.A plurality of conveying axis 80d are configured between conveying axis 80a, the 80b along the Y direction.
A plurality of roller P110 are set on each conveying axis 80a, 80b, a plurality of roller P210 are set on each conveying axis 80c, a plurality of roller P211 are set on each conveying axis 80d.
In addition, be located at the S. A. of the motor M 10 outside the conveying chamber 300, be attached on the transmission mechanism G1 sidewall of perforation conveying chamber 300, transmit rotational forcees to a plurality of conveying axis 80a from this transmission mechanism G1.Equally, be located at the S. A. of the motor M 20 outside the conveying chamber 300, be attached on the transmission mechanism G2 sidewall of perforation conveying chamber 300, transmit rotational forcees to a plurality of conveying axis 80b from this transmission mechanism G2.Thus, a plurality of roller P110 rotate with a plurality of conveying axis 80a, 80b.
In addition, be located at the S. A. of the motor M 30 outside the conveying chamber 300, be attached on the transmission mechanism G3 sidewall of perforation conveying chamber 300, transmit rotational forcees to a plurality of conveying axis 80c from this transmission mechanism G3.Thus, a plurality of roller P210 rotate with a plurality of conveying axis 80c.
As shown in figure 20, with respect to the horizontal plane, conveying axis 80a, 80b are set with the bevelled state.Conveying axis 80a, 80b are supported in the top of fixed way 90 by a plurality of holding componentss 96.Fixed way 90 is driven up and down by cylinder 95.
As shown in figure 20, from the substrate 200 that the substrate input port 310 of Figure 19 is imported,, support by roller P110 with inclination attitude.By being located at motor M 10, the M20 outside the conveying chamber 300,, make the roller P110 rotation of conveying axis 80a, 80b, to Y direction conveying substrate 200 by transmission mechanism G1, G2.
Then, if substrate 200 is transported to the position of regulation, then motor M 10, motor M 20 work of stopping the rotation.Thus, stop the rotation of a plurality of roller P110, stop conveying substrate 200.
Afterwards, promote fixed way 90 by cylinder 95 to the Z direction.Thus, by the roller P210 of a plurality of conveying axis 80c of a plurality of holding componentss 96 supports and the roller P211 of a plurality of conveying axis 80d, move to the top of a plurality of roller P110.Therefore, substrate 200 breaks away from roller P110, is supported on the roller P210, rises to the top.
In addition, when being moved upward conveying axis 80c, conveying axis 80d, the gear (not shown) of the motor M 30 of Figure 19 and transmission mechanism G30 and gear (not shown) interlock that is located on the conveying axis 80c.Thus, the rotational force to a plurality of roller P210 transmit motor (M30) makes roller P210 rotation.As a result, from substrate delivery port 320, carry the substrate of supporting by roller P210, roller P211 200 to the direction of arrow X.
So, adopt base board delivery device 801, can export to the Y direction with flat-hand position with the substrate 200 of inclination attitude to the directions X input.
But; if adopt base board delivery device 801 in the past; owing to be located at the motor M 10 outside the conveying chamber 300, the S. A. of M20, M30; by the hole on the sidewall that is located at conveying chamber 300; be attached on the in-to-in transmission mechanism G1, G2, G3 of conveying chamber 300; the environmental gas (protective gas) that therefore, might contain conditioning fluid to external leakage from the hole on the sidewall.
In addition,, cover frame 250 need be set on transmission mechanism G1, G2, G3, isolate with substrate 200 for the wearing and tearing powder of the gear that prevents transmission mechanism G1, G2, G3 is diffused in the conveying chamber 300.But, as mentioned above, when promoting conveying axis 80c, for transmitting rotational force, the bottom that must open the cover frame of transmission mechanism G3 to conveying axis 80c.Thus, the wearing and tearing powder that produces because of the gear of interlock transmission mechanism G3 is by this opening portion diffusion, sometimes on the surface attached to substrate 200.In addition, produce vibration because of the gear of interlock transmission mechanism G3 sometimes.As a result, hinder the uniform treatment of substrate 200.
In addition, for above-mentioned transmission mechanism G1, G2, the gear of G3, and need be in the conveying chamber 300 built-in resettlement sections 260 (lubricating pad) of taking in lubricating oil of putting.In addition, also need supply of lubricant in this resettlement section 260.When drive transmission mechanism G3, be difficult to supply of lubricant.Thus, the structure complicated in the conveying chamber 300 also increases components number simultaneously, becomes to hinder to dwindle the space of base board delivery device 801 and the major cause of cost-cutting.
In addition, if employing base board delivery device 801 in the past, with inclination attitude support substrate 200 time, as shown in figure 20, in the L10 of the interval of conveying axis 80a, 80b, support substrate 200.Therefore, along with the big footpathization of substrate 200, produce the bending that the deadweight by substrate 200 causes, substrate has because of excessively being applied the damaged danger of load.
In addition, the roller 211 of a plurality of conveying axis 80d when carrying with inclination attitude, is positioned at the below of a plurality of conveying axis 80a, 80b; When carrying, be positioned at the top of a plurality of conveying axis 80a, 80b with flat-hand position.Therefore, need conveying axis 80d and roller 211 be set in the mode of not interfering with a plurality of conveying axis 80a, 80b.Therefore, be difficult to transmit rotational force, reduce the carrying capacity of substrate 200 to all roller P211.As a result, the conveying of generation substrate 200 is bad.In addition, owing to must so needs strengthen the stroke amount of setting cylinder 95, so just be difficult to save the space of above-below direction with the mode conveying substrate 200 that does not contact with the transmission mechanism G1 of Figure 20.
Summary of the invention
The purpose of this invention is to provide a kind of base board delivery device, it can prevent that environmental gas from leaking, and can not hinder the posture of substrate uniform treatment ground with easy reconfiguration substrate, and can save space and cost-cutting.
Other purpose of the present invention provides a kind of base board delivery device, and the enough easy structures of energy do not make base plate deformation and damaged ground conveying substrate reliably.
The base board delivery device of the 1st invention, it is the base board delivery device of conveying substrate, it is characterized in that comprising: have conveying chamber, this conveying chamber has the substrate gangway when being surrounded by wall portion, rotatably be located at a plurality of the 1st conveying axis in the above-mentioned conveying chamber, the 1st roller with concentric setting of above-mentioned a plurality of the 1st conveying axis and support substrate, by moving or above-mentioned a plurality of the 1st conveying axis that tilts, and above-mentioned a plurality of the 1st conveying axis are transformed into the state transformation mechanism of the 1st state and the 2nd state, be located at outside the above-mentioned conveying chamber, produce the rotary drive mechanism of rotational force, and utilize magnetic force will pass to the transmission mechanism of above-mentioned the 1st conveying axis by the rotational force that above-mentioned rotary drive mechanism produces; Above-mentioned transmission mechanism, comprise: with above-mentioned wall portion subtend be configured in above-mentioned conveying chamber outer, utilize the rotational force that produces by above-mentioned rotary drive mechanism and the 1st magnet that rotates, and can be located at the 2nd magnet in the above-mentioned conveying chamber rotatably with above-mentioned the 1st conveying axis; Above-mentioned the 1st state is positioned at above-mentioned the 2nd magnet by above-mentioned wall portion and opposed the 1st position of above-mentioned the 2nd magnet, above-mentioned the 2nd state is positioned at the 2nd position that above-mentioned the 2nd magnet leaves from above-mentioned the 1st position, above-mentioned the 1st state, the rotational force of above-mentioned the 1st magnet passes to described the 2nd magnet by above-mentioned wall portion.
In this base board delivery device, when the 1st conveying axis was in the 1st state, the 2nd magnet was positioned at the 1st position, between the 1st magnet and the 2nd magnet, transmitted the rotational force that is produced by rotary drive mechanism.In addition, when the 1st conveying axis was in the 2nd state, the 2nd magnet was positioned at the 2nd position, between the 1st magnet and the 2nd magnet, did not transmit the rotational force that is produced by rotary drive mechanism.
At this moment, the hole is not set on sidewall owing to need not pass to the 1st magnet and the 2nd magnet for rotational force with rotary drive mechanism, so, can prevent to contain the environmental gas of conditioning fluid to the conveying chamber external leaks.
In addition, because rotary drive mechanism and the 1st magnet is located at outside the conveying chamber, so the wearing and tearing powder that can prevent to produce from rotary drive mechanism and the 1st magnet is attached on the substrate.In addition, do not produce the vibration of the 1st magnet and the 2nd magnet yet.In addition, between the 1st magnet and the 2nd magnet, do not need supply of lubricant yet.Therefore, do not hinder the uniform treatment of substrate.
In addition, because rotary drive mechanism and the 1st magnet is located at outside the conveying chamber, so, need just not need supply lubricant in conveying chamber at the built-in container of taking in lubricant of putting of conveying chamber yet.Therefore, can cut down components number, simultaneously, simplify the structure in the conveying chamber.So, can be with the posture of simple reconfiguration substrate, and, can realize the miniaturization of base board delivery device and save spatialization.
Also can: the 2nd magnet, in the 1st position, double wall portion is with the 1st magnet subtend; In the 2nd position, compare away from the 1st magnet with the 1st position.
At this moment, the 2nd magnet, by in the 1st position, double wall portion ground and the 1st magnet subtend can transmit the rotational force that is produced by rotary drive mechanism.In addition,, compare,, can not transmit the rotational force that produces by rotary drive mechanism by away from the 1st magnet with the 1st position in the 2nd position.
Also can: base board delivery device also has a plurality of the 2nd conveying axis that rotatably are located in the above-mentioned conveying chamber; The 2nd roller with concentric setting of above-mentioned a plurality of the 2nd conveying axis and support substrate, when being in above-mentioned the 1st state at above-mentioned the 1st conveying axis, substrate is supported on above-mentioned the 1st roller, when above-mentioned the 1st conveying axis is in above-mentioned the 2nd state, substrate is supported on the mode on above-mentioned the 2nd roller, and above-mentioned the 1st conveying axis and above-mentioned the 2nd conveying axis are set.
At this moment, when the 1st conveying axis is in the 1st state, substrate is supported on the 1st conveying axis; When the 1st conveying axis is in the 2nd state, substrate is supported on the 2nd conveying axis.Thus, can be from the 1st conveying axis to the 2nd conveying axis interposer substrate.
Also can: base board delivery device, the 1st state are the states that the 1st conveying axis with respect to the horizontal plane forms the 1st angle, and the 2nd state is the state that the 1st conveying axis with respect to the horizontal plane forms the 2nd angle that is different from the 1st angle.
At this moment, under the 1st state, the 1st conveying axis with respect to the horizontal plane forms the 1st angle, by the 1st conveying axis support substrate.At this moment, because the 2nd magnet, in the 1st position, double wall portion ground and the 1st magnet subtend, so, the rotational force that utilizes rotary drive mechanism to produce can be passed to the 1st conveying axis, can utilize the 1st conveying axis conveying substrate.
In addition, under the 2nd state, a plurality of the 1st conveying axis with respect to the horizontal plane form the 2nd angle, by the 2nd conveying axis support substrate.At this moment,,, compare, away from the 1st magnet, so the rotational force that will not utilize rotary drive mechanism to produce passes to the 1st conveying axis with the 1st position in the 2nd position owing to the 2nd magnet.
For base board delivery device, also the 1st conveying axis and the 2nd conveying axis can be set across mutually.
At this moment owing to mutually the 1st conveying axis and the 2nd conveying axis be set across, so, in the time of can the conversion throughput direction, from the 1st conveying axis to the 2nd conveying axis interposer substrate.
For base board delivery device, the 1st conveying axis and the 2nd conveying axis are set mutually also almost parallel.
At this moment because the 1st conveying axis and the 2nd conveying axis mutually are set almost parallel, so, when can keep the throughput direction of substrate, from the 1st conveying axis to the 2nd conveying axis interposer substrate.
Also can: the 1st magnet has the 1st and the 1st conveying axis with above-mentioned wall portion subtend, and built-in a plurality of edges are with the 1st magnet of above-mentioned the 1st conveying axis circumference configuration that is the center; Above-mentioned the 2nd magnet have can with the 2nd and the 2nd conveying axis of above-mentioned wall portion subtend, and built-in a plurality of edges are with the 2nd magnet of above-mentioned the 2nd conveying axis circumference configuration that is the center.
At this moment, because on the 1st magnet, along being built-in the 1st magnet of circumference at center with the 1st conveying axis, on the 2nd magnet, the edge is built-in the 2nd magnet of circumference at center with the 2nd conveying axis, so, can utilize the magnetic force of a plurality of magnet to transmit rotational force.As a result, the rotational force of the 1st magnet can be passed to the 2nd magnet really.
Also can: with in above-mentioned the 1st hand-deliver for the mode that forms the N utmost point and the S utmost point, by equidistant above-mentioned a plurality of the 1st magnet of configuration; With in the mode of the 2nd hand-deliver, dispose above-mentioned a plurality of the 2nd magnet by the spacing identical with above-mentioned a plurality of the 1st magnet for the formation N utmost point and the S utmost point.
At this moment, between the 1st magnet and the 2nd magnet, produce, can expeditiously rotational force be delivered to the 2nd magnet from the 1st magnet because of the different gravitation that attract of mutual polarity.
Also can: above-mentioned a plurality of the 1st magnet of above-mentioned the 1st magnet are built in the non-magnetic part, and above-mentioned a plurality of the 2nd magnet of above-mentioned the 2nd magnet are built in the non-magnetic part.At this moment, because the 1st magnet and the 2nd magnet is built in the 1st magnet and the 2nd magnet in the non-magnetic part, so, can be expeditiously the rotational force of the 1st magnet be passed to the 2nd magnet.
Also can: the outer peripheral face at least of the non-magnetic part of the 2nd magnet is made of resin.At this moment, can prevent the corrosion of conditioning fluid to the 2nd magnet.
The base board delivery device of the 2nd invention, it is a kind of base board delivery device, be used for conveying substrate, it is characterized in that: comprise a plurality of the 1st conveying axis that rotatably are provided with, with concentric also the 1st roller of support substrate that is provided with of above-mentioned a plurality of the 1st conveying axis, a plurality of the 2nd conveying axis of She Zhiing rotatably, and be provided with and the 2nd roller of support substrate with above-mentioned a plurality of the 2nd conveying axis are concentric; Above above-mentioned a plurality of the 2nd conveying axis, above-mentioned a plurality of the 1st conveying axis to be set with the cross one another mode of above-mentioned a plurality of the 2nd conveying axis; The diameter of above-mentioned the 1st roller is less than the diameter of above-mentioned the 2nd roller; Also have state transformation mechanism, it is by relative tilt or move above-mentioned a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis, and is the 1st state or the 2nd state with the position relation transformation of above-mentioned a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis; The top that above-mentioned the 1st state is above-mentioned the 1st roller is positioned at the top at the top of above-mentioned the 2nd roller, and the top that above-mentioned the 2nd state is above-mentioned the 2nd roller is positioned at the top at the top of above-mentioned the 1st roller.
In this base board delivery device, by relatively moving or tilt a plurality of the 1st conveying axis and a plurality of the 2nd conveying axis, can be the 1st state or the 2nd state with a plurality of the 1st conveying axis arranged in a crossed manner mutually and the position relation transformation of a plurality of the 2nd conveying axis by state transformation mechanism.
At this moment, under the 1st state, the top of a plurality of the 1st rollers is positioned at the top at the top of the 2nd roller.Thus, can utilize a plurality of the 1st roller support substrates.In addition, under the 2nd state, the top of a plurality of the 2nd rollers is positioned at the top at the top of the 1st roller.Thus, can utilize a plurality of the 2nd roller support substrates.As a result, can prevent from substrate, to produce the bending that causes because of deadweight, prevent from simultaneously the substrate part is applied excessive load.
In addition, owing to transmit rotational force to a plurality of the 1st rollers or a plurality of the 2nd roller, so can prevent the bad conveying of substrate.Therefore, can substrate be transformed into the 1st state and the 2nd state of predetermined angular indeformable, not damagedly, simultaneously, throughput direction that can conversion baseplate.
In addition, when substrate being transformed to the 1st state and the 2nd state, the stroke amount of above-below direction can be reduced, the space can be realized saving.
Also can: base board delivery device, the angle that a plurality of the 1st conveying axis with respect to the horizontal plane form under the 1st state is different from the angle that a plurality of the 2nd conveying axis with respect to the horizontal plane form under the 2nd state.
At this moment, because the angle that the 1st conveying axis with respect to the horizontal plane forms under the 1st state is different from the angle that the 2nd conveying axis with respect to the horizontal plane forms under the 2nd state, so, can conversion substrate angle of inclination with respect to the horizontal plane, utilize the 1st roller and the 2nd roller conveying substrate simultaneously.
Also can: base board delivery device, the angle that a plurality of the 1st conveying axis with respect to the horizontal plane form under the 1st state, the angle that with respect to the horizontal plane forms with a plurality of the 2nd conveying axis under the 2nd state equates.
At this moment, because a plurality of the 1st conveying axis with respect to the horizontal plane form under the 1st state angle, the angle that with respect to the horizontal plane forms with a plurality of the 2nd conveying axis under the 2nd state equate, so, substrate angle of inclination with respect to the horizontal plane be can keep, the 1st roller and the 2nd roller conveying substrate utilized simultaneously.
Also can be: base board delivery device, also comprise: have conveying chamber, this conveying chamber has the substrate gangway when being surrounded by wall portion, be located at outside the above-mentioned conveying chamber, produce the rotary drive mechanism of rotational force, and utilize magnetic force will pass to the transmission mechanism of above-mentioned the 1st conveying axis by the rotational force that above-mentioned rotary drive mechanism produces; Above-mentioned the 1st conveying axis, above-mentioned the 1st roller, above-mentioned the 2nd conveying axis and above-mentioned the 2nd roller are located in the above-mentioned conveying chamber; Above-mentioned transmission mechanism, comprise: to be configured in above-mentioned conveying chamber outer and utilize the 1st magnet of the rotational force rotation that is produced by above-mentioned rotary drive mechanism with above-mentioned wall portion subtend, and can be located at the 2nd conveying axis in the above-mentioned conveying chamber rotatably with above-mentioned the 1st conveying axis; When the above-mentioned a plurality of the 1st and the 2nd conveying axis is in above-mentioned the 1st state, above-mentioned the 2nd magnet is positioned at by above-mentioned wall portion and rotational force is transmitted in opposed the 1st position of above-mentioned the 2nd magnet between above-mentioned the 1st magnet and above-mentioned the 2nd magnet, when the above-mentioned a plurality of the 1st and the 2nd conveying axis was in above-mentioned the 2nd state, above-mentioned the 2nd magnet was positioned at the 2nd position of leaving from above-mentioned the 1st position.
At this moment, on sidewall, do not establish the hole owing to need not pass to the 1st magnet and the 2nd magnet for rotational force with rotary drive mechanism, so, can prevent to contain the external leaks of the environmental gas of conditioning fluid to conveying chamber.
In addition, because rotary drive mechanism and the 1st magnet is located at outside the conveying chamber, so the wearing and tearing powder that can prevent to produce from rotary drive mechanism and the 1st magnet is attached on the substrate.In addition, do not produce the vibration of the 1st magnet and the 2nd magnet yet.In addition, between the 1st magnet and the 2nd magnet, do not need supply of lubricant yet.Therefore, do not hinder the uniform treatment of substrate.
In addition, because rotary drive mechanism and the 1st magnet all is located at outside the conveying chamber, so, need just not need supply lubricant in conveying chamber at the built-in container of taking in lubricant of putting of conveying chamber yet.Therefore, can cut down components number, simultaneously, simplify the structure in the conveying chamber.So, can be with the posture of simple reconfiguration substrate, and, can realize the miniaturization and the space savingization of base board delivery device.
The base board delivery device of the 3rd invention, it is a kind of base board delivery device, be used for conveying substrate, comprise: a plurality of the 1st conveying axis of She Zhiing rotatably, with concentric also the 1st roller of support substrate that is provided with of above-mentioned a plurality of the 1st conveying axis, a plurality of the 2nd conveying axis of She Zhiing rotatably, and be provided with and the 2nd roller of support substrate with above-mentioned a plurality of the 2nd conveying axis are concentric; Above-mentioned a plurality of the 1st conveying axis roughly is provided with in parallel to each other with above-mentioned a plurality of the 2nd conveying axis; Also have state transformation mechanism, it is by relative tilt or move above-mentioned a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis, and is the 1st state or the 2nd state with the position relation transformation of above-mentioned a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis; The top of above-mentioned the 1st roller is positioned at the top at the top of above-mentioned the 2nd roller during above-mentioned the 1st state, and the top of above-mentioned the 2nd roller is positioned at the top at the top of above-mentioned the 1st roller during above-mentioned the 2nd state.
In this base board delivery device, by relatively moving or tilting a plurality of the 1st conveying axis and a plurality of the 2nd conveying axis, can utilize state transformation mechanism, a plurality of the 1st conveying axis of almost parallel state and the position of a plurality of the 2nd conveying axis are concerned, be transformed to the 1st state or the 2nd state.
At this moment, under the 1st state, the top of a plurality of the 1st rollers is positioned at the top at the top of the 2nd roller.Thus, can utilize a plurality of the 1st roller support substrates.In addition, under the 2nd state, the top of a plurality of the 2nd rollers is positioned at the top at the top of the 1st roller.Thus, can utilize a plurality of the 2nd roller support substrates.As a result, can prevent from substrate, to produce the bending that causes because of deadweight, prevent from simultaneously the substrate part is applied excessive load.
In addition, owing to transmit rotational force to a plurality of the 1st rollers or a plurality of the 2nd roller, so can prevent the bad conveying of substrate.Therefore, can substrate be transformed to the 1st state and the 2nd state indeformable, not damagedly.
Also can: base board delivery device, the angle that a plurality of the 1st conveying axis with respect to the horizontal plane form under the 1st state is different from the angle that a plurality of the 2nd conveying axis with respect to the horizontal plane form under the 2nd state.
At this moment, owing to be different from the angle that a plurality of the 2nd conveying axis with respect to the horizontal plane form under the 2nd state in the angle that the 1st conveying axis under the 1st state with respect to the horizontal plane forms, so, can conversion substrate angle of inclination with respect to the horizontal plane, utilize the 1st roller and the 2nd roller conveying substrate simultaneously.
Also can: base board delivery device, the angle that a plurality of the 1st conveying axis with respect to the horizontal plane form under the 1st state, the angle that with respect to the horizontal plane forms with a plurality of the 2nd conveying axis under the 2nd state equates.
At this moment, because a plurality of the 1st conveying axis with respect to the horizontal plane form under the 1st state angle, the angle that with respect to the horizontal plane forms with a plurality of the 2nd conveying axis under the 2nd state equate, so, substrate angle of inclination with respect to the horizontal plane be can keep, the 1st roller and the 2nd roller conveying substrate utilized simultaneously.
Also can be: base board delivery device, also comprise: have conveying chamber, this conveying chamber has the substrate gangway when being surrounded by wall portion, be located at outside the above-mentioned conveying chamber, produce the rotary drive mechanism of rotational force, and utilize magnetic force will pass to the transmission mechanism of above-mentioned the 1st conveying axis by the rotational force that above-mentioned rotary drive mechanism produces; Above-mentioned the 1st conveying axis, above-mentioned the 1st roller, above-mentioned the 2nd conveying axis and above-mentioned the 2nd roller are located in the above-mentioned conveying chamber; Above-mentioned transmission mechanism, comprise: with above-mentioned wall portion subtend be configured in the 1st magnet that above-mentioned conveying chamber is outer, utilize the rotational force rotation that is produced by above-mentioned rotary drive mechanism, and can be located at the 2nd magnet in the above-mentioned conveying chamber rotatably with above-mentioned the 1st conveying axis; When the above-mentioned a plurality of the 1st and the 2nd conveying axis is in above-mentioned the 1st state, above-mentioned the 2nd magnet is positioned at and opposed the 1st position of above-mentioned the 2nd magnet by above-mentioned wall portion, between above-mentioned the 1st magnet and above-mentioned the 2nd magnet, transmit rotational force, when the above-mentioned a plurality of the 1st and the 2nd conveying axis was in above-mentioned the 2nd state, above-mentioned the 2nd magnet was positioned at the 2nd position of leaving from above-mentioned the 1st position.
At this moment, the hole is not set on sidewall owing to need not pass to the 1st magnet and the 2nd magnet for rotational force with rotary drive mechanism, so, can prevent to contain the external leaks of the environmental gas of conditioning fluid to conveying chamber.
In addition, because rotary drive mechanism and the 1st magnet is located at outside the conveying chamber, so the wearing and tearing powder that can prevent to produce from rotary drive mechanism and the 1st magnet is attached on the substrate.In addition, do not produce the vibration of the 1st magnet and the 2nd magnet yet.In addition, between the 1st magnet and the 2nd magnet, do not need supply of lubricant yet.So, the uniform treatment that does not hinder substrate.
In addition, because rotary drive mechanism and the 1st magnet all is located at outside the conveying chamber, so, need just not need supply lubricant in conveying chamber at the built-in container of taking in lubricant of putting of conveying chamber yet.Therefore, can cut down components number, simultaneously, simplify the structure in the conveying chamber.So, can be with the posture of simple reconfiguration substrate, and, can realize the miniaturization of base board delivery device and save spatialization.
Description of drawings
Fig. 1 is the birds-eye view of the substrate board treatment of the base board delivery device of modal representation with the 1st embodiment of the present invention.
Fig. 2 is the sectional elevation of base board delivery device.
Fig. 3 is the A-A line cutaway view of the base board delivery device of Fig. 2.
Fig. 4 is the A-A line cutaway view of the base board delivery device of Fig. 2.
Fig. 5 is the B-B line cutaway view of the base board delivery device of Fig. 2.
Fig. 6 is the figure of the inner structure of expression magnetic plectane.
Fig. 7 (a) is the figure that represents the rotational force of magnetic plectane is passed to the state of magnetic plectane, (b) is the figure that represents the rotational force of magnetic plectane not to be passed to the state of magnetic plectane.
Fig. 8 is the block diagram of work of the base board delivery device of instruction diagram 2～Fig. 5.
Fig. 9 is the sectional elevation of base board delivery device.
Figure 10 is the A-A line cutaway view of the base board delivery device of Fig. 9.
Figure 11 is the A-A line cutaway view of the base board delivery device of Fig. 9.
Figure 12 is the B-B line cutaway view of the base board delivery device of Fig. 9.
Figure 13 is the B-B line cutaway view of the base board delivery device of Fig. 9.
Figure 14 (a) is the figure that represents the rotational force of magnetic plectane is passed to the state of magnetic plectane, (b) is the figure that represents the rotational force of magnetic plectane not to be passed to the state of magnetic plectane.
Figure 15 is the sectional elevation of base board delivery device.
Figure 16 is the A-A line cutaway view of the base board delivery device of Figure 15.
Figure 17 is the A-A line cutaway view of the base board delivery device of Figure 15
Figure 18 is the total length that expression one example shortens substrate board treatment, tries hard to save the figure of the substrate board treatment in space.
Figure 19 is the sectional elevation of the base board delivery device of Figure 18.
Figure 20 is the A-A line cutaway view of the base board delivery device of Figure 19.
The specific embodiment
Below, with reference to accompanying drawing, embodiments of the present invention are described.
(the 1st embodiment)
Fig. 1 is the birds-eye view of the substrate board treatment of the base board delivery device of modal representation with the 1st embodiment of the present invention.
In the substrate board treatment 500 of Fig. 1, form conveying road 154, conveying road 156 that is parallel to each other and the upset path 155 that links two conveying roads.Carry road 154,156 and upset path 155 approximate vertical.
On the conveying road 154 of substrate board treatment 500, belt conveyor 61, ultraviolet ray (UV) irradiation portion 62, soup handling part 63,64 are set in order.On the upset path 155 of substrate board treatment 500, base board delivery device 100, once washing portion 65 and base board delivery device 101 are set in order.On the conveying road 156 of substrate board treatment 500, secondary water washing portion 66,67, air knife portion 68 and belt conveyor 69 are set in order.
At first, in the branch transfer part 60 of substrate board treatment 500, send into the substrate box C that takes in many substrates 200.By feedway (not shown), take out the substrate 200 that is accommodated among the substrate box C one by one, be transported to belt conveyor 61.At this moment, in carrying road 154, be the uniformization treatment substrate, and with from horizontal surface with the tilt posture of predetermined angular of substrate, handle.
When being transported to belt conveyor 61, the posture of substrate 200 from flat-hand position be transformed to the inclination predetermined angular posture (below, be called " inclination attitude ".)。The substrate 200 of inclination attitude is transported to ultraviolet ray (UV) irradiation portion 62 by belt conveyor 61, to substrate 200 irradiation ultraviolet radiations.As a result, decompose organic matter and oil content, improve the screening characteristics of substrate 200 attached to substrate 200 surfaces.Then, at soup handling part 63,64, substrate 200 is implemented corrosion wait soup to handle.
Then, carrying road 155, substrate 200 is once washed processing.On base board delivery device 100, the throughput direction of conversion substrate 200 simultaneously, will transform to flat-hand position with inclination attitude substrate conveying 200.Then, substrate 200 is transported to once washing portion 65.In washing portion 65 once, processing is washed on the surface of substrate 200 with flat-hand position.Wash once that to handle be to separate out, adhere to impurity for preventing when dry substrate 200 surperficial.So, in the base board delivery device 100,101 of present embodiment, in conveying substrate 200, also can spray pure water from the top to substrate 200.
Then, substrate 200 is transported to base board delivery device 101.In the present embodiment, carrying road 156, with inclination attitude treatment substrate 200.So, in base board delivery device 101, in the throughput direction of conversion substrate 200, will transform to inclination attitude with flat-hand position substrate conveying 200.Then, substrate 200 is transported to secondary water washing portion 66,67.
Afterwards, in secondary water washing portion 66,67, with the surface of pure water cleaning base plate 200.Then, substrate 200 is transported to air knife portion 68.In air knife portion 68, substrate 200 is sprayed the air of tentiform.By belt conveyor 69 conveying substrates 200, utilize feedway (not shown) substrate 200 be accommodated in substrate box C in thereafter.Take in the substrate box C of the substrate 200 after many processing from minute transfer part 60 output.
Below, describe base board delivery device 100,101 in detail.In addition, base board delivery device 100 and base board delivery device 101 have roughly the same structure.Below, first talk about Benq's plate feedway 100.
Fig. 2 is the sectional elevation of base board delivery device 100.In Fig. 2,2 vertical in horizontal surface directions are made as directions X and Y direction, and vertical direction is made as the Z direction.
Base board delivery device 100 shown in Figure 2 has conveying chamber 30.Conveying chamber 30 is formed by the pair of sidewalls 30a parallel with the Y direction, 30c and pair of sidewalls 30b, the 30d parallel with directions X.On the sidewall 30a of conveying chamber 30, be provided with substrate input port 33, on the sidewall 30b of conveying chamber 30, be provided with substrate delivery port 34.
Base board delivery device 100, conversion are fed in the direction of the substrate 200 in the conveying chamber 30 from substrate input port 33 along directions X, from substrate delivery port 34, send substrate 200 to the Y direction.
In conveying chamber 30, dispose a plurality of conveying axis 10 along the Y direction, dispose a plurality of conveying axis 20 along directions X.On each conveying axis 10, by a plurality of small-sized conveying rollers 11 roughly uniformly-spaced are set.On each conveying axis 20, by a plurality of large-scale conveying rollers 21 roughly uniformly-spaced are set.
Rotatably support by holding components 12a rotatably to support by holding components 15a near the other end of a plurality of conveying axis 10 near the end of a plurality of conveying axis 10.At an end of conveying axis 10 magnetic plectane 8a is installed respectively.
Rotatably support by holding components 12b rotatably to support by holding components 15b near the other end of a plurality of conveying axis 20 near the end of a plurality of conveying axis 20.At an end of conveying axis 20, magnetic plectane 8b is installed respectively.
In the space that the sidewall 30d and the perisporium 31 of conveying chamber 30 surrounds, motor M 1, drive belt B1 and a plurality of magnetic plectane 7a that rotation drives a plurality of conveying axis 10 are set.Folder sidewall 30d is with each magnetic plectane 7a of magnetic plectane 8a subtend ground configuration.Between the S. A. and a plurality of magnetic plectane 7a of motor M 1, set up drive belt B1, by the S. A. of rotating machine M1, same direction is rotated a plurality of magnetic plectane 7a.
By rotation magnetic plectane 7a, and rotation magnetic plectane 8a.Thus, conveying axis 10 is with small-sized conveying roller 11 rotations.As a result, can carry the substrate 200 that is supported on the small-sized conveying roller 11 to directions X.See below about the details of the structure of magnetic plectane 7a and magnetic plectane 8a and to state.
In the space that the sidewall 30d and the perisporium 32 of conveying chamber 30 surrounds, motor M 2, drive belt B2 and a plurality of magnetic plectane 7b that rotation drives a plurality of conveying axis 20 are set.Folder sidewall 30c is with each magnetic plectane 7b of magnetic plectane 8b subtend ground configuration.Between the S. A. and a plurality of magnetic plectane 7b of motor M 2, set up drive belt B2, by the S. A. of rotating machine M2, same direction is rotated a plurality of magnetic plectane 7b.
By rotation magnetic plectane 7b, and rotation magnetic plectane 8b.Thus, conveying axis 20 is with large-scale conveying roller 21 rotations.As a result, can carry the substrate 200 that is supported on the large-scale conveying roller 21 to Y side.See below about the details of the structure of magnetic plectane 7b and magnetic plectane 8b and to state.
Fig. 3 and Fig. 4 are the A-A line cutaway views of the base board delivery device 100 of Fig. 2.Fig. 3 represents the state with inclination attitude support substrate 200, and Fig. 4 represents the state with flat-hand position support substrate 200.
Above support platform 13, rotatably support by holding components 12a near the end of conveying axis 10.Above support platform 13, rotatably support by holding components 15a near the other end of conveying axis 10.
In addition, rotatably support an end of platform 13 by supporting axis 13A.Can support the other end of platform 13 up or down by cylinder 16.The top of the piston 16a of cylinder 16 be installed in support platform 13 below.
As shown in Figure 3, when the overhang of the piston 16a that increases cylinder 16, support that platform 13 is the center with supporting axis 13A, to the direction rotation of arrow R10.Thus, conveying axis 10 is inclined.Under this state, the top of the small-sized conveying roller 11 of conveying axis 10 is positioned at the top at large-scale conveying roller 21 tops of conveying axis 20.So, can be by small-sized conveying roller 11 with inclination attitude support substrate 200.
In addition, as shown in Figure 3,, be provided with from vertical direction bevelled inclined wall 30e a little in the part of the sidewall 30d of conveying chamber 30.Magnetic plectane 8a and the parallel subtend of the inner face of inclined wall 30e.In addition, magnetic plectane 7a, with the parallel subtend in outside of inclined wall 30e be installed on the 76a.Thus, magnetic plectane 8a, folder inclined wall 30e is with magnetic plectane 7a subtend.So, if, rotate magnetic plectane 7a, can utilize the magnetic force that acts between magnetic plectane 7a and the magnetic plectane 8a with axle 76a by drive belt B1,8a rotates conveying axis 10 with the magnetic plectane.
As shown in Figure 4, when the overhang of the piston 16a that reduces cylinder 16, support that platform 13 is the center with supporting axis 13A, to the direction rotation of arrow R11.Thus, conveying axis 10 is the level of state.Under this state, the top of the large-scale conveying roller 21 of substrate 200 is positioned at the top at small-sized conveying roller 11 tops of conveying axis 10.So, can be by large-scale conveying roller 21 with flat-hand position support substrate 200.
At this moment, the magnetic plectane 8a that is located at conveying axis 10 1 ends moves to the direction away from inclined wall 30e.Thus, strengthen the distance between magnetic plectane 7a and the magnetic plectane 8a, between magnetic plectane 7a and magnetic plectane 8a, do not act on magnetic force.So, even, do not rotate magnetic plectane 8a by drive belt B1 rotation magnetic plectane 7a yet.As a result, conveying axis 10 and small-sized conveying roller 11 do not rotate.
Fig. 5 is the B-B line cutaway view of the base board delivery device 100 of Fig. 2.
Above support platform 13B, rotatably support by holding components 12b near the end of conveying axis 20, above support platform 13B, rotatably support by holding components 15b near the other end of conveying axis 20.Support platform 13B to be fixed on sidewall 30a, the 30c with horizontality.Thus, conveying axis 20b is the level of state.
Below, the formation of magnetic plectane 7a and magnetic plectane 8a is described according to Fig. 6.Fig. 6 is the figure of the inner structure of expression magnetic plectane.Fig. 6 (a) is the sectional elevation of magnetic plectane, and Fig. 6 (b) is the cutaway view of D-D line of the magnetic plectane of Fig. 6 (a), and Fig. 6 (c) is the lateral plan of the magnetic plectane of clamping inclined wall 30e ground subtend.
Shown in Fig. 6 (a) and (b), in the inside of magnetic plectane 7a, rounded shape is arranged alternately in one side to have the S utmost point, has the magnet 71 of the N utmost point at another side, and has the N utmost point in one side, has the magnet 72 of the S utmost point at another side.The structure of magnetic plectane 8a is identical with the structure of magnetic plectane 7a.
In addition, shown in Fig. 6 (b), magnetic plectane 7a is fixed on the end face of S. A. 10 by bolt 77a.
In embodiments of the present invention, magnetic plectane 7a is formed by non-magnetic material.For example, can adopt the metal or alloy of non-magnetic materials such as PTFE (tetrafluoroethylene), PCTFE fluorocarbon resin such as (three fluoridize ethene), PVC resins such as (polyvinylchlorides) or titanium, aluminium, corrosion-resistant steel.In addition, the metal or alloy of the above-mentioned non-magnetic material of having given an example, but and be confined to this, also can adopt other non-magnetic materials.
Shown in Fig. 6 (c), the one side subtend of magnetic plectane 7a and inclined wall 30e, the another side subtend of magnetic plectane 8a and inclined wall 30e.
At this moment, what the motor M 1 of Fig. 2 produced rotatablely moves, and by drive belt B1, passes to a 76a, rotation magnetic plectane 7a.Utilize the in-to-in magnet 71 of attraction magnetic plectane 7a and the in-to-in magnet 82 of magnetic plectane 8a, utilize the in-to-in magnet 72 of attraction magnetic plectane 7a and the in-to-in magnet 81 of magnetic plectane 8a.Thus, rotate magnetic plectane 8a with conveying axis 10.
In addition, the part of inclined wall 30e by magnetic plectane 7a and magnetic plectane 8a clamping, for increasing the magnetic action between magnetic plectane 7a and the magnetic plectane 8a, its thickness is less than the thickness of the sidewall 30d of other parts.
Below, the transmission and the partition of the rotational force between magnetic plectane 7a and the magnetic plectane 8a are described.
Fig. 7 (a) is the figure that represents the rotational force of magnetic plectane 7a is passed to the state of magnetic plectane 8a, and Fig. 7 (b) is the figure that represents the rotational force of magnetic plectane 7a not to be passed to the state of magnetic plectane 8a.
As shown in Figure 3, under the state of inclination conveying axis 10, shown in Fig. 7 (a), since the distance between magnetic plectane 7a and the magnetic plectane 8a less than, the distance of the boundary of effect gravitation between the magnet 82 of the magnet 71 of magnetic plectane 7a and magnetic plectane 8a and between the magnet 81 of the magnet 72 of magnetic plectane 7a and magnetic plectane 8a the distance of the boundary of effect gravitation, so the rotational force of magnetic plectane 7a can pass to magnetic plectane 8a really.
As shown in Figure 4, keep in level under the state of conveying axis 10, since the distance between magnetic plectane 7a and the magnetic plectane 8a greater than, the distance of the boundary of effect gravitation between the magnet 82 of the magnet 71 of magnetic plectane 7a and magnetic plectane 8a and between the magnet 81 of the magnet 72 of magnetic plectane 7a and magnetic plectane 8a the distance of the boundary of effect gravitation, so the rotational force of magnetic plectane 7a can not pass to magnetic plectane 8a.
So, in embodiments of the present invention, base board delivery device different from the past, do not need motor M 1, M2 and drive belt B1, B2 all from inclination attitude to the flat-hand position conversion, can simplified structure, can realize saving space and cost degradation.
Fig. 8 is the block diagram of action of the base board delivery device 100 of instruction diagram 2～Fig. 5.The state of Fig. 8 (a) expression inclination conveying axis 10, Fig. 8 (b) expression conveying axis is horizontal state.
Shown in Fig. 8 (a), when the overhang of the piston 16a of cylinder 16 reaches maximum, support a plurality of conveying axis 10 with the state of the tilt angle theta of relative X-Y plane (horizontal surface).At this moment, by rotating a plurality of conveying axis 10, by the small-sized conveying roller 11 of conveying axis 10, to directions X conveying substrate 200.In addition, in Fig. 8, omit the diagram of small-sized conveying roller 11.
If substrate 200 is transported to the position of regulation, shown in Fig. 8 (b), slowly reduce the overhang of the piston 16a of cylinder 16, a plurality of conveying axis 10 from the state of tilt angle theta to the state exchange parallel with X-Y plane.
Shown in Fig. 8 (c), the overhang of the piston 16a of cylinder 16-reach minimum, a plurality of conveying axis 10 just form the state parallel with X-Y plane.Thus, the top of the outer peripheral face of the small-sized conveying roller 11 of conveying axis 10 is positioned at the below at top of the outer peripheral face of large-scale conveying roller 21.As a result, the substrate of being supported by the small-sized conveying roller 11 of conveying axis 10 200 is supported by large-scale conveying roller 21.So, can be by the large-scale conveying roller 21 of rotation, to Y direction output substrate 200.
In the base board delivery device 100 of present embodiment, on sidewall 30a～30d, establish the hole owing to need not pass to conveying axis 10,20 for rotational force with M2, so, can prevent that the external leaks to conveying chamber 30 from containing the environmental gas of conditioning fluid.
In addition, in the base board delivery device 100 of present embodiment, owing to will be located at the outside of conveying chamber 30, so the wearing and tearing powder that can prevent to produce from transmission mechanism is attached on the substrate 200 to the transmission mechanism that conveying axis 10,20 transmits the rotational force of motor M 1, M2.In addition, when utilizing the posture of base board delivery device 100 conversion substrates 200, do not produce the vibration that causes by magnetic plectane 7a, 7b, 8a, 8b yet.So, the uniform treatment that does not hinder substrate 200.
In addition, owing to will be located at the outside of conveying chamber 30 to the transmission mechanism that conveying axis 10,20 transmits the rotational force of motor M 1, M2, so, need just not need supply lubricant in conveying chamber 30 at the conveying chamber 30 built-in containers of taking in lubricant of putting yet.Therefore, can cut down components number, simultaneously, simplify the structure in the conveying chamber 30.So, can realize the miniaturization and the space savingization of base board delivery device 100.
In addition, when inclination attitude, whole of substrate 200 support that when flat-hand position, whole of substrate 200 supported by large-scale conveying roller 21 by small-sized conveying roller 11.Thus, can prevent to produce the bending that causes because of deadweight, prevent from simultaneously substrate 200 parts are applied excessive load at substrate 200.
In addition, owing to transmit rotational force to all small-sized conveying rollers 11 and large-scale conveying roller 21, so, can prevent the bad conveying of substrate 200.Therefore, can be indeformable, not damagedly substrate 200 not be transformed to flat-hand position from the inclination attitude of inclination predetermined angular θ, simultaneously, the throughput direction of substrate 200 can be transformed into the Y direction from directions X.
In the base board delivery device 100 of present embodiment, can be substrate 200 parts not being applied the mode of over load, the throughput direction of substrate 200 is transformed into the Y direction from directions X.In addition, when inclination attitude transforms to flat-hand position, can reduce the stroke amount of cylinder 95.So, can realize the miniaturization and the space savingization of base board delivery device 100.
In the present embodiment, conveying axis 10 is equivalent to a plurality of the 1st conveying axis, small-sized conveying roller 11 is equivalent to the 1st roller, conveying axis 10 and small-sized conveying roller 11 are equivalent to the 1st roller member, conveying axis 20 is equivalent to a plurality of the 2nd conveying axis, large-scale conveying roller 21 is equivalent to the 2nd roller, conveying axis 20 and large-scale conveying roller 21 are equivalent to the 2nd roller member, sidewall 30a～30d is equivalent to wall portion, motor M 1, M2 and drive belt B 1, B2 is equivalent to rotary drive mechanism, magnetic plectane 7a, 7b, 8a, 8b is equivalent to transmission mechanism, magnetic plectane 7a, 7b is equivalent to the 1st transferring elements, magnetic plectane 8a, 8b is equivalent to the 2nd transferring elements, magnet 71,81 and magnet 72,82 are equivalent to a plurality of the 1st magnet and a plurality of the 2nd magnet, and cylinder 16 and piston 16a are equivalent to state transformation mechanism.
(the 2nd embodiment)
The base board delivery device of the 2nd embodiment, conversion simultaneously, are exported substrate with flat-hand position with the throughput direction of the substrate of flat-hand position input.Below, the base board delivery device 100a of the substrate board treatment of the 2nd embodiment is described.
Fig. 9 is the sectional elevation of base board delivery device 100a.In Fig. 9,2 vertical directions are made as directions X and Y direction in horizontal surface, and vertical direction is made as the Z direction.
Base board delivery device 100a shown in Figure 9 has conveying chamber 30.Conveying chamber 30 is formed by the pair of sidewalls 30a parallel with the Y direction, 30c and pair of sidewalls 30b, the 30d parallel with directions X.On the sidewall 30a of conveying chamber 30, be provided with substrate input port 33, on the sidewall 30b of conveying chamber 30, be provided with substrate delivery port 34.
Base board delivery device 100a, the direction of the substrate 200 in the conveying chamber 30 is sent in conversion from substrate input port 33 along directions X, send substrate 200 from substrate delivery port 34 along the Y direction.
In conveying chamber 30, dispose a plurality of conveying axis 10 along the Y direction, dispose a plurality of conveying axis 20 along directions X.On each conveying axis 10, by a plurality of small-sized conveying rollers 11 roughly uniformly-spaced are set.On each conveying axis 20, by a plurality of large-scale conveying rollers 21 roughly uniformly-spaced are set.
One end of a plurality of conveying axis 10 rotatably is supported on the sidewall 30d, and the other end of a plurality of conveying axis 10 rotatably is supported on the sidewall 30b.At an end of a plurality of conveying axis 10 magnetic plectane 8a is installed respectively.
Rotatably support by holding components 12c rotatably to support by holding components 15c near the other end of a plurality of conveying axis 20 near the end of a plurality of conveying axis 20.Holding components 12c and holding components 15c are supported by holding components 12d and holding components 15d.Near an end of conveying axis 20, magnetic plectane 8b is installed respectively.
In the space that the sidewall 30d and the perisporium 31 of conveying chamber 30 surrounds, motor M 2, drive belt B1 and a plurality of magnetic plectane 7a that rotation drives a plurality of conveying axis 10 are set.Folder sidewall 30d is with each magnetic plectane 7a of magnetic plectane 8a subtend ground configuration.Between the S. A. and a plurality of magnetic plectane 7a of motor M 1, set up drive belt B1, by the S. A. of rotating machine M1, same direction is rotated a plurality of magnetic plectane 7a.
By rotation magnetic plectane 7a, rotation magnetic plectane 8a.Thus, conveying axis 10 is with small-sized conveying roller 11 rotations.As a result, can carry the substrate 200 that is supported on the small-sized conveying roller 11 to directions X.
In the space that the sidewall 30c and the perisporium 32 of conveying chamber 30 surrounds, motor M 2, drive belt B2 and a plurality of magnetic plectane 7b that rotation drives a plurality of conveying axis 20 are set.Folder sidewall 30c is with each magnetic plectane 7b of magnetic plectane 8b subtend ground configuration.Between the S. A. and a plurality of magnetic plectane 7b of motor M 2, set up drive belt B2, by the S. A. of rotating machine M2, and same direction is rotated a plurality of magnetic plectane 7b.
By rotation magnetic plectane 7b, rotation magnetic plectane 8b.Thus, conveying axis 20 is with large-scale conveying roller 21 rotations.As a result, can carry the substrate 200 that is supported on the large-scale conveying roller 21 to Y side.
Figure 10 and Figure 11 are the C-C line cutaway views of the base board delivery device 100a of Fig. 9.Figure 10 represents the state by small-sized conveying roller 11 support substrates 200, and Figure 11 represents the state by large-scale conveying roller 21 support substrates 200.
Conveying axis 20 is supported by holding components 15c.Near the end of holding components 15c, above support platform 13,12d rotatably supports by holding components.Near the other end of holding components 15c, above support platform 13,15d rotatably supports by holding components.
In addition, rotatably support an end of platform 13 by supporting axis 13A.Can support the other end of platform 13 up or down by cylinder 16.The top of the piston 16a of cylinder 16 be installed in support platform 13 below.
As shown in figure 10, when the overhang of the piston 16a that reduces cylinder 16, support that platform 13 is the center with supporting axis 13A, to the direction rotation of arrow R11.Thus, holding components 15c is inclined.Under this state, the top of the small-sized conveying roller 11 of conveying axis 10 is positioned at the top at large-scale conveying roller 21 tops of conveying axis 20.So, can be by small-sized conveying roller 11 with flat-hand position support substrate 200.
In addition, as shown in figure 10, the parallel subtend of inner face of magnetic plectane 8a and the sidewall 30d of conveying chamber 30.In addition, magnetic plectane 7a, with the parallel subtend in outside of sidewall 30d be installed on the 76a.Thus, magnetic plectane 8a, folder sidewall 30d is with magnetic plectane 7a subtend.So, if, rotate magnetic plectane 7a, can utilize the magnet that acts between magnetic plectane 7a and the magnetic plectane 8a with axle 76a by drive belt B1, make magnetic plectane 8a with conveying axis 10 rotations.
As shown in figure 11, when the overhang of the piston 16a that increases cylinder 16, support that platform 13 is the center with supporting axis 13A, to the direction rotation of arrow R10.Thus, holding components 15c is the level of state.Under this state, the top of the large-scale conveying roller 21 of substrate 200 is positioned at the top at small-sized conveying roller 11 tops of conveying axis 10.So, can be by large-scale conveying roller 21 with flat-hand position support substrate 200.
Figure 12 and Figure 13 are the D-D line cutaway views of the base board delivery device 100a of Fig. 9.Figure 12 represents the state by small-sized conveying roller 11 support substrates 200, and Figure 13 represents the state by large-scale conveying roller 21 support substrates 200.
Above support platform 13B, rotatably support by holding components 12c near the end of conveying axis 20, above support platform 13B, rotatably support by holding components 15c near the other end of conveying axis 20.Below support platform 13B, cylinder 16 is set.
As shown in figure 12, when the overhang of the piston 16a that reduces cylinder 16, strengthen the distance between magnetic plectane 7b and the magnetic plectane 8b, between magnetic plectane 7b and magnetic plectane 8b, do not act on magnetic force.So, even, can not make magnetic plectane 8b rotation by drive belt B2 rotation magnetic plectane 7b yet.As a result, conveying axis 20 and large-scale conveying roller 21 do not rotate.
In addition, as shown in figure 13, when the overhang of the piston 16a that increases cylinder 16, magnetic plectane 8b folder sidewall 30c is with the parallel subtend of magnetic plectane 7b.So if utilize drive belt B2, magnetic plectane 7b rotates with axle 76b, by act on magnetic force between magnetic plectane 7b and magnetic plectane 8b, magnetic plectane 8b can be with conveying axis 20 and 21 rotations of large-scale conveying roller.
About the inner structure of the magnetic plectane 7a of present embodiment, 7b, 8a, 8b, identical with the inner structure of the magnetic plectane 7a of the 1st embodiment, 7b, 8a, 8b.
Below, the magnetic plectane 7b of base board delivery device 100a of present embodiment and the transmission and the partition of the rotational force between the magnetic plectane 8b are described.
Figure 14 (a) is the figure that represents the rotational force of magnetic plectane 7b is passed to the state of magnetic plectane 8b, and Figure 14 (b) is the figure that represents the rotational force of magnetic plectane 7b not to be passed to the state of magnetic plectane 8b.
As Figure 10 and shown in Figure 12, under holding components 15c bevelled state, shown in Figure 14 (a), configuration magnetic plectane 7b and magnetic plectane 8b stagger up and down.Therefore, since the distance between magnetic plectane 7b and magnetic plectane 8b greater than, the distance of the boundary of effect gravitation between the magnet 82 of the magnet 71 of magnetic plectane 7b and magnetic plectane 8b and between the magnet 81 of the magnet 72 of magnetic plectane 7b and magnetic plectane 8b the distance of the boundary of effect gravitation, so, the rotational force of magnetic plectane 7b can not be passed to magnetic plectane 8b.
As Figure 11 and shown in Figure 13, be under the horizontality at holding components 15c, shown in Figure 14 (b), but magnetic plectane 7b and magnetic plectane 8b are configured in the position of subtend.Since the distance between magnetic plectane 7b and the magnetic plectane 8b less than, the distance of the boundary of effect gravitation between the magnet 82 of the magnet 71 of magnetic plectane 7b and magnetic plectane 8b and between the magnet 81 of the magnet 72 of magnetic plectane 7b and magnetic plectane 8b the distance of the boundary of effect gravitation, so, can be reliably the rotational force of magnetic plectane 7b be passed to magnetic plectane 8b.
In the base board delivery device 100a of present embodiment, on sidewall 30a～30d, establish the hole owing to need not pass to conveying axis 10,20 for rotational force with M1, M2, so, can prevent that the external leaks to conveying chamber 30 from containing the environmental gas of conditioning fluid.
In addition, in the base board delivery device 100a of present embodiment, owing to will be located at the outside of conveying chamber 30, so the wearing and tearing powder that can prevent to produce from transmission mechanism is attached on the substrate 200 to the transmission mechanism that conveying axis 10,20 transmits the rotational force of motor M 1, M2.In addition, when utilizing the posture of base board delivery device 100a conversion substrate 200, do not produce the vibration that causes by magnetic plectane 7a, 7b, 8a, 8b yet.So, the uniform treatment that does not hinder substrate 200.
In addition, owing to will be located at the outside of conveying chamber 30 to the transmission mechanism that conveying axis 10,20 transmits the rotational force of motor M 1, M2, so, need just not need supply lubricant in conveying chamber 30 at the conveying chamber 30 built-in containers of taking in lubricant of putting yet.Therefore, can cut down components number, simultaneously, simplify the structure in the conveying chamber 30.In addition, when inclination attitude transforms to flat-hand position, can reduce the stroke amount of cylinder 95.So, can realize the miniaturization and the space savingization of base board delivery device 100.
In addition, when flat-hand position, whole of substrate 200 by small-sized conveying roller 11 or 21 supports of large-scale conveying roller.Thus, can prevent from substrate 200, to produce the bending that causes because of deadweight, prevent from simultaneously substrate 200 parts are applied excessive load.
In addition, owing to transmit rotational force to all small-sized conveying rollers 11 and large-scale conveying roller 21, so, can prevent the bad conveying of substrate 200.Therefore, can indeformable, not damaged substrate 200 ground, the throughput direction of substrate is transformed into the Y direction from directions X.
In the present embodiment, conveying axis 10 is equivalent to a plurality of the 1st conveying axis or the 2nd conveying axis, small-sized conveying roller 11 is equivalent to the 1st roller or the 2nd roller, conveying axis 10 and small-sized conveying roller 11 are equivalent to the 1st roller member, conveying axis 20 is equivalent to a plurality of the 2nd conveying axis or the 1st conveying axis, large-scale conveying roller 21 is equivalent to the 2nd roller, conveying axis 20 and large-scale conveying roller 21 are equivalent to the 2nd roller or the 1st roller, sidewall 30a～30d is equivalent to wall portion, motor M 1, M2 and drive belt B1, B2 is equivalent to rotary drive mechanism, magnetic plectane 7a, 7b, 8a, 8b is equivalent to transmission mechanism, magnetic plectane 7a, 7b is equivalent to the 1st transmission mechanism, magnetic plectane 8a, 8b is equivalent to the 2nd transferring elements, magnet 71,81 and magnet 72,82 are equivalent to a plurality of the 1st magnet and a plurality of the 2nd magnet, and cylinder 16 and piston 16a are equivalent to state transformation mechanism.
(the 3rd embodiment)
The base board delivery device of the 3rd embodiment, conversion simultaneously, are exported substrate with inclination attitude with the posture of the substrate of flat-hand position input.Below, the base board delivery device 100b of the substrate board treatment of the 3rd embodiment is described.
Figure 15 is the sectional elevation of base board delivery device 100b.In Figure 15,2 vertical directions are made as directions X and Y direction in horizontal surface, and vertical direction is made as the Z direction.
Base board delivery device 100b shown in Figure 15 has conveying chamber 30.Conveying chamber 30 is formed by the pair of sidewalls 30a parallel with the Y direction, 30c and pair of sidewalls 30b, the 30d parallel with directions X.On the sidewall 30a of conveying chamber 30, be provided with substrate input port 33, on the sidewall 30c of conveying chamber 30, be provided with substrate delivery port 34.
Base board delivery device 100b, conversion is from substrate input port 33, sends into the posture of the substrate 200 in the conveying chamber 30 with flat-hand position, sends substrate 200 from substrate delivery port 34 with inclination attitude.
In conveying chamber 30, dispose a plurality of conveying axis 10b along the Y direction, also dispose a plurality of conveying axis 20b along the Y direction.On each conveying axis 10b, by a plurality of conveying roller 11b roughly uniformly-spaced are set.On each conveying axis 20b, by a plurality of conveying roller 21b roughly uniformly-spaced are set.
Rotatably support by holding components 12f rotatably to support by holding components 15f near the other end of a plurality of conveying axis 10b near the end of a plurality of conveying axis 10b.Near the end of conveying axis 10b, magnetic plectane 8a is installed respectively.
Rotatably support by holding components 12g rotatably to support by holding components 15g near the other end of a plurality of conveying axis 20b near the end of a plurality of conveying axis 20b.Near the end of conveying axis 20b, magnetic plectane 8b is installed respectively.
In the space that the sidewall 30d and the perisporium 31 of conveying chamber 30 surrounds, motor M 1, drive belt B1 and a plurality of magnetic plectane 7a that rotation drives a plurality of conveying axis 10b are set.Folder sidewall 30d is with each magnetic plectane 7a of magnetic plectane 8a subtend ground configuration.Between the S. A. and a plurality of magnetic plectane 7a of motor M 1, set up drive belt B1, by the S. A. of rotating machine M1, make the same direction rotation of a plurality of magnetic plectane 7a.
By rotation magnetic plectane 7a, and magnetic plectane 8a rotation.Thus, conveying axis 10b rotates with conveying roller 11b.As a result, can carry the substrate 200 that is supported on the conveying roller 11b with inclination attitude.In addition, the details of the structure of magnetic plectane 7a, 8a is identical with the structure of magnetic plectane 7a, the 8a of the 1st embodiment.
In the space that the sidewall 30d and the perisporium 32 of conveying chamber 30 surrounds, motor M 2, drive belt B2 and a plurality of magnetic plectane 7b that rotation drives a plurality of conveying axis 20b are set.Folder sidewall 30c is with each magnetic plectane 7b of magnetic plectane 8b subtend ground configuration.Between the S. A. and a plurality of magnetic plectane 7b of motor M 2, set up drive belt B2, by the S. A. of rotating machine M2, make the same direction rotation of a plurality of magnetic plectane 7b.
By rotation magnetic plectane 7b, and make magnetic plectane 8b rotation.Thus, conveying axis 20b rotates with conveying roller 21b.As a result, can carry the substrate 200 that is supported on the conveying roller 21b with flat-hand position.In addition, the details of the structure of magnetic plectane 7b, 8b is identical with the structure of magnetic plectane 7b, the 8b of the 1st embodiment.
Figure 16 and Figure 17 are the E-E line cutaway views of the base board delivery device 100b of Figure 15.Figure 16 represents the state by conveying roller 21b support substrate 200, and Figure 17 represents the state by conveying roller 11b support substrate 200.
Above support platform 13, rotatably support by holding components 12e near the end of conveying axis 20b.Above support platform 13, rotatably support the other end of conveying axis 20b by holding components 15e.
In addition, rotatably support an end of platform 13 by supporting axis 13A.Can support the other end of platform 13 up or down by cylinder 16.The top of the piston 16a of cylinder 16 be installed in support platform 13 below.
As shown in figure 16, when the overhang of the piston 16a that reduces cylinder 16, support that platform 13 is the center with supporting axis 13A, to the direction rotation of arrow R11.Thus, holding components 12f is the level of state.Under this state, the top of the conveying roller 21b of conveying axis 20b is positioned at the top at top of the conveying roller 11b of conveying axis 10b.So, can be by conveying roller 21b with flat-hand position support substrate 200.
At this moment, be located at the magnetic plectane 8b and the magnetic plectane 7b of conveying axis 20b one end, folder sidewall 30b relatively to, between magnetic plectane 8b and magnetic plectane 7b, act on magnetic force.So, by drive belt B2 rotation magnetic plectane 7b the time, make magnetic plectane 8b rotation, rotate conveying roller 21b with conveying axis 20b.
In addition, as shown in figure 17, when the overhang of the piston 16a that increases cylinder 16, support that platform 13 is the center with supporting axis 13A, to the direction rotation of arrow R10.Thus, holding components 12f is inclination attitude.Under this state, the top of the conveying roller 21b of conveying axis 20b is positioned at the below at top of the conveying roller 11b of conveying axis 10b.So, can be by conveying roller 11b with inclination attitude support substrate 200.
At this moment, be located at the magnetic plectane 8a and the magnetic plectane 7a of conveying axis 10b one end, folder sidewall 30d subtend acts on magnetic force between magnetic plectane 8a and magnetic plectane 7a.So, by drive belt B1 rotation magnetic plectane 7a the time, make magnetic plectane 8a rotation, rotate conveying roller 11b with conveying axis 10b.
In the base board delivery device 100b of present embodiment, on sidewall 30a～30d, establish the hole owing to need not pass to conveying axis 10,20 for rotational force with M1, M2, so, can prevent that the external leaks to conveying chamber 30 from containing the environmental gas of conditioning fluid.
In addition, in the base board delivery device 100b of present embodiment, owing to will be located at the outside of conveying chamber 30, so the wearing and tearing powder that can prevent to produce from transmission mechanism is attached on the substrate 200 to the transmission mechanism that conveying axis 10b, 20b transmit the rotational force of motor M 1, M2.In addition, when utilizing the posture of base board delivery device 100b conversion substrate 200, do not produce the vibration that magnetic plectane 7a, 7b, 8a, 8b cause yet.So, the uniform treatment that does not hinder substrate 200.
In addition, owing to will be located at the outside of conveying chamber 30 to the transmission mechanism that conveying axis 10b, 20b transmit the rotational force of motor M 1, M2, so, need just not need supply lubricant in conveying chamber 30 at the conveying chamber 30 built-in containers of taking in lubricant of putting yet.Therefore, can cut down components number, simultaneously, simplify the structure in the conveying chamber 30.In addition, with substrate 200 when inclination attitude transforms to flat-hand position, can reduce the stroke amount of cylinder 95.So, can realize miniaturization and the space savingization of base board delivery device 100b.
In addition, under inclination attitude, whole of substrate 200 support that under flat-hand position, whole of substrate 200 supported by large-scale conveying roller 21b by conveying roller 11b.Thus, can prevent from substrate 200, to produce the bending that causes because of deadweight, prevent from simultaneously substrate 200 parts are applied excessive load.
In addition, owing to transmit rotational force to all conveying roller 11b and conveying roller 21b, so, can prevent the bad conveying of substrate 200.Therefore, can indeformable, not damaged substrate 200 ground, the throughput direction of substrate is transformed into the inclination attitude of predetermined angular θ from flat-hand position.
In addition, in the present embodiment, with respect to the horizontal plane, be the center with supporting axis 13A, rotation holding components 12f, but also can move up and down holding components 12f.
In the present embodiment, conveying axis 10 is equivalent to a plurality of the 1st conveying axis, small-sized conveying roller 11 is equivalent to the 1st roller, conveying axis 10 and small-sized conveying roller 11 are equivalent to the 1st roller member, conveying axis 20 is equivalent to a plurality of the 2nd conveying axis, large-scale conveying roller 21 is equivalent to the 2nd roller, conveying axis 20 and large-scale conveying roller 21 are equivalent to the 2nd roller member, sidewall 30,30a～30d is equivalent to wall portion, motor M 1, M2 and drive belt B1, B2 is equivalent to rotary drive mechanism, magnetic plectane 7a, 7b, 8a, 8b is equivalent to transmission mechanism, magnetic plectane 7a, 7b is equivalent to the 1st transferring elements, magnetic plectane 8a, 8b is equivalent to the 2nd transferring elements, magnet 71,81 and magnet 72,82 are equivalent to a plurality of the 1st magnet and a plurality of the 2nd magnet, and cylinder 16 and piston 16a are equivalent to state transformation mechanism.
Claims (16)
1. a base board delivery device is used for conveying substrate, it is characterized in that: comprise
Have conveying chamber, this conveying chamber has the substrate gangway when being surrounded by wall portion,
Rotatably be located at a plurality of the 1st conveying axis in the above-mentioned conveying chamber,
With the 1st roller of concentric setting of above-mentioned a plurality of the 1st conveying axis and support substrate,
By moving or above-mentioned a plurality of the 1st conveying axis that tilts, and above-mentioned a plurality of the 1st conveying axis are transformed into the state transformation mechanism of the 1st state and the 2nd state,
Be located at the rotary drive mechanism that above-mentioned conveying chamber is outer, produce rotational force, and
Utilize magnetic force will pass to the transmission mechanism of above-mentioned the 1st conveying axis by the rotational force that above-mentioned rotary drive mechanism produces;
Above-mentioned transmission mechanism, comprise: with above-mentioned wall portion subtend be configured in above-mentioned conveying chamber outer, utilize the rotational force that produces by above-mentioned rotary drive mechanism and the 1st magnet that rotates, and can be located at the 2nd magnet in the above-mentioned conveying chamber rotatably with above-mentioned the 1st conveying axis;
Above-mentioned the 1st state is positioned at above-mentioned the 2nd magnet by above-mentioned wall portion and opposed the 1st position of above-mentioned the 2nd magnet, and above-mentioned the 2nd state is positioned at the 2nd position that above-mentioned the 2nd magnet leaves from above-mentioned the 1st position,
Above-mentioned the 1st state, the rotational force of above-mentioned the 1st magnet passes to described the 2nd magnet by above-mentioned wall portion.
2. base board delivery device as claimed in claim 1 is characterized in that:
Also have a plurality of the 2nd conveying axis that rotatably are located in the above-mentioned conveying chamber;
With the 2nd roller of concentric setting of above-mentioned a plurality of the 2nd conveying axis and support substrate,
When being in above-mentioned the 1st state at above-mentioned the 1st conveying axis, substrate is supported on above-mentioned the 1st roller, and when above-mentioned the 1st conveying axis was in above-mentioned the 2nd state, substrate was supported on the mode on above-mentioned the 2nd roller, and above-mentioned the 1st conveying axis and above-mentioned the 2nd conveying axis are set.
3. base board delivery device as claimed in claim 2 is characterized in that: above-mentioned the 1st conveying axis and above-mentioned the 2nd conveying axis are arranged in a crossed manner mutually.
4. base board delivery device as claimed in claim 2 is characterized in that: above-mentioned the 1st conveying axis and the mutual almost parallel of above-mentioned the 2nd conveying axis ground are provided with.
5. as any described base board delivery device in the claim 1～4, it is characterized in that: above-mentioned the 1st magnet has the 1st and the 1st conveying axis with above-mentioned wall portion subtend, and, the 1st magnet that the circumference that built-in a plurality of edges are the center with above-mentioned the 1st conveying axis disposes; Above-mentioned the 2nd magnet have can with the 2nd and the 2nd conveying axis of above-mentioned wall portion subtend, and built-in a plurality of edges are with the 2nd magnet of above-mentioned the 2nd conveying axis circumference configuration that is the center.
6. base board delivery device as claimed in claim 5 is characterized in that: with in the mode of above-mentioned the 1st hand-deliver for the formation N utmost point and the S utmost point, press equidistantly above-mentioned a plurality of the 1st magnet of configuration; With in the mode of the 2nd hand-deliver, dispose above-mentioned a plurality of the 2nd magnet by the spacing identical with above-mentioned a plurality of the 1st magnet for the formation N utmost point and the S utmost point.
7. base board delivery device as claimed in claim 5 is characterized in that: above-mentioned a plurality of the 1st magnet of above-mentioned the 1st magnet are built in the non-magnetic part, and above-mentioned a plurality of the 2nd magnet of above-mentioned the 2nd magnet are built in the non-magnetic part.
8. base board delivery device as claimed in claim 7 is characterized in that: the outer peripheral face at least of the non-magnetic part of above-mentioned the 2nd magnet is made of resin.
9. a base board delivery device is used for conveying substrate, it is characterized in that: comprise
A plurality of the 1st conveying axis of She Zhiing rotatably,
With concentric also the 1st roller of support substrate that is provided with of above-mentioned a plurality of the 1st conveying axis,
A plurality of the 2nd conveying axis of She Zhiing rotatably, and
With concentric also the 2nd roller of support substrate that is provided with of above-mentioned a plurality of the 2nd conveying axis;
Above above-mentioned a plurality of the 2nd conveying axis, above-mentioned a plurality of the 1st conveying axis to be set with the cross one another mode of above-mentioned a plurality of the 2nd conveying axis;
The diameter of above-mentioned the 1st roller is less than the diameter of above-mentioned the 2nd roller;
Also have state transformation mechanism, it is by relative tilt or move above-mentioned a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis, and is the 1st state or the 2nd state with the position relation transformation of above-mentioned a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis;
The top that above-mentioned the 1st state is above-mentioned the 1st roller is positioned at the top at the top of above-mentioned the 2nd roller, and the top that above-mentioned the 2nd state is above-mentioned the 2nd roller is positioned at the top at the top of above-mentioned the 1st roller.
10. base board delivery device as claimed in claim 9, it is characterized in that: under above-mentioned the 1st state in above-mentioned a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis one be inclination attitude, another is flat-hand position in a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis under above-mentioned the 2nd state.
11. base board delivery device as claimed in claim 9, it is characterized in that: above-mentioned a plurality of the 1st conveying axis and the 2nd conveying axis are flat-hand position under above-mentioned the 1st state, and above-mentioned a plurality of the 1st conveying axis are different with the upper-lower position of a plurality of the 2nd conveying axis under above-mentioned the 2nd state.
12., it is characterized in that as any described base board delivery device in the claim 9～11:
Also comprise: have conveying chamber, this conveying chamber has the substrate gangway when being surrounded by wall portion,
Be located at outside the above-mentioned conveying chamber, produce the rotary drive mechanism of rotational force, and utilize magnetic force will pass to the transmission mechanism of above-mentioned the 1st conveying axis by the rotational force that above-mentioned rotary drive mechanism produces;
Above-mentioned the 1st conveying axis, above-mentioned the 1st roller, above-mentioned the 2nd conveying axis and above-mentioned the 2nd roller are located in the above-mentioned conveying chamber;
Above-mentioned transmission mechanism, comprise: to be configured in above-mentioned conveying chamber outer and utilize the 1st magnet of the rotational force rotation that is produced by above-mentioned rotary drive mechanism with above-mentioned wall portion subtend, and can be located at the 2nd conveying axis in the above-mentioned conveying chamber rotatably with above-mentioned the 1st conveying axis;
When the above-mentioned a plurality of the 1st and the 2nd conveying axis is in above-mentioned the 1st state, above-mentioned the 2nd magnet is positioned at by above-mentioned wall portion and rotational force is transmitted in opposed the 1st position of above-mentioned the 2nd magnet between above-mentioned the 1st magnet and above-mentioned the 2nd magnet, when the above-mentioned a plurality of the 1st and the 2nd conveying axis was in above-mentioned the 2nd state, above-mentioned the 2nd magnet was positioned at the 2nd position of leaving from above-mentioned the 1st position.
13. a base board delivery device is used for conveying substrate, it is characterized in that:
Comprise: a plurality of the 1st conveying axis of She Zhiing rotatably, be provided with and the 1st roller of support substrate with above-mentioned a plurality of the 1st conveying axis are concentric, a plurality of the 2nd conveying axis of She Zhiing rotatably, and with the concentric setting of above-mentioned a plurality of the 2nd conveying axis the 2nd roller of support substrate also;
Above-mentioned a plurality of the 1st conveying axis roughly is provided with in parallel to each other with above-mentioned a plurality of the 2nd conveying axis;
Also have state transformation mechanism, it is by relative tilt or move above-mentioned a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis, and is the 1st state or the 2nd state with the position relation transformation of above-mentioned a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis;
The top of above-mentioned the 1st roller is positioned at the top at the top of above-mentioned the 2nd roller during above-mentioned the 1st state, and the top of above-mentioned the 2nd roller is positioned at the top at the top of above-mentioned the 1st roller during above-mentioned the 2nd state.
14. base board delivery device as claimed in claim 13, it is characterized in that: under above-mentioned the 1st state in above-mentioned a plurality of the 1st conveying axis and above-mentioned a plurality of the 2nd conveying axis one be inclination attitude, another is flat-hand position in above-mentioned a plurality of the 1st conveying axis and a plurality of the 2nd conveying axis under above-mentioned the 2nd state.
15. base board delivery device as claimed in claim 13 is characterized in that: it is different with the upper-lower position of the 2nd conveying axis to be flat-hand position above-mentioned a plurality of the 1st conveying axis under above-mentioned the 1st state and above-mentioned the 2nd state at above-mentioned a plurality of the 1st conveying axis under above-mentioned the 1st state and the 2nd conveying axis.
16., it is characterized in that as any described base board delivery device in the claim 13～15:
Also comprise: have conveying chamber, this conveying chamber has the substrate gangway when being surrounded by wall portion,
Be located at outside the above-mentioned conveying chamber, produce the rotary drive mechanism of rotational force, and utilize magnetic force will pass to the transmission mechanism of above-mentioned the 1st conveying axis by the rotational force that above-mentioned rotary drive mechanism produces;
Above-mentioned the 1st conveying axis, above-mentioned the 1st roller, above-mentioned the 2nd conveying axis and above-mentioned the 2nd roller are located in the above-mentioned conveying chamber;
Above-mentioned transmission mechanism, comprise: with above-mentioned wall portion subtend be configured in the 1st magnet that above-mentioned conveying chamber is outer, utilize the rotational force rotation that is produced by above-mentioned rotary drive mechanism, and can be located at the 2nd magnet in the above-mentioned conveying chamber rotatably with above-mentioned the 1st conveying axis;
When the above-mentioned a plurality of the 1st and the 2nd conveying axis is in above-mentioned the 1st state, above-mentioned the 2nd magnet is positioned at and opposed the 1st position of above-mentioned the 2nd magnet by above-mentioned wall portion, between above-mentioned the 1st magnet and above-mentioned the 2nd magnet, transmit rotational force, when the above-mentioned a plurality of the 1st and the 2nd conveying axis was in above-mentioned the 2nd state, above-mentioned the 2nd magnet was positioned at the 2nd position of leaving from above-mentioned the 1st position.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003075874A JP4307876B2 (en) | 2003-03-19 | 2003-03-19 | Substrate transfer device |
| JP2003075875A JP4286035B2 (en) | 2003-03-19 | 2003-03-19 | Substrate transfer device |
| JP2003075875 | 2003-03-19 | ||
| JP2003075874 | 2003-03-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1532126A CN1532126A (en) | 2004-09-29 |
| CN1288050C true CN1288050C (en) | 2006-12-06 |
Family
ID=34315588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100070759A Expired - Fee Related CN1288050C (en) | 2003-03-19 | 2004-02-27 | Base board transport device |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100587847B1 (en) |
| CN (1) | CN1288050C (en) |
| TW (1) | TWI262890B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100729430B1 (en) * | 2005-11-22 | 2007-06-15 | 주식회사 디엠에스 | Apparatus capable of transporting works in vertical direction |
| KR101068875B1 (en) * | 2008-11-26 | 2011-09-30 | 세메스 주식회사 | Apparatus and method of transferring a substrate |
| CN102009847B (en) * | 2010-11-01 | 2013-03-27 | 济南德佳玻璃机器有限公司 | Angle rotation device |
| JP5524349B2 (en) * | 2010-11-15 | 2014-06-18 | 株式会社アルバック | Deposition equipment |
| CN104787532B (en) * | 2015-04-07 | 2018-01-23 | 广东友力智能科技有限公司 | The automatic sorting method of plate fitment component |
| CN105314322A (en) * | 2015-11-27 | 2016-02-10 | 芜湖天金机械有限公司 | Automatic discharging mechanism for roller burnishing of universal joint transmission shaft levers |
| CN107597605A (en) * | 2017-10-30 | 2018-01-19 | 广东科德智能装备有限公司 | A kind of tilting pan type sorter topples over plate |
| CN110707018A (en) * | 2018-07-09 | 2020-01-17 | 细美事有限公司 | Substrate transfer apparatus and substrate processing apparatus |
| DE102019210063B4 (en) * | 2019-07-09 | 2021-05-20 | NICE Solar Energy GmbH | Substrate conveying device, vacuum treatment device with a substrate conveying device and method for conveying a substrate |
-
2004
- 2004-02-27 CN CNB2004100070759A patent/CN1288050C/en not_active Expired - Fee Related
- 2004-03-15 KR KR1020040017419A patent/KR100587847B1/en not_active IP Right Cessation
- 2004-03-16 TW TW093106961A patent/TWI262890B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200502150A (en) | 2005-01-16 |
| TWI262890B (en) | 2006-10-01 |
| KR100587847B1 (en) | 2006-06-09 |
| KR20040087257A (en) | 2004-10-13 |
| CN1532126A (en) | 2004-09-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1712333A (en) | Substrate turning over apparatus and method, substrate transporting device and method, substrate processing apparatus and method | |
| CN100350552C (en) | System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold | |
| CN1286151C (en) | Substrate processor and substrate processing method | |
| CN1661650A (en) | Apparatus for manufacturing flat-panel display | |
| CN1288050C (en) | Base board transport device | |
| CN101035725A (en) | Board conveying device | |
| CN1091341C (en) | Method and device for assambling electronic components | |
| CN1908779A (en) | Method for fabricating bonded substrate | |
| CN1435732A (en) | Chemical processing device | |
| CN101064240A (en) | Substrate processing method, substrate processing system and substrate processing apparatus | |
| CN1346510A (en) | Mehtod and apparatus for holding and positioing semiconductor workpieces during electropolishing and/or electroplating of the workpieces | |
| CN1676436A (en) | Lid unit for thin plate supporting container | |
| CN1676285A (en) | Transport apparatus, control method for the same, and vacuum processing system | |
| CN1720612A (en) | Component-supplying head device, component-supplying device, comonent-mounting device, and method of moving mounting head portion | |
| CN1531048A (en) | Producing object connecting device and carrying system therewith | |
| CN1820357A (en) | Wafer expanding apparatus, component supplying apparatus and wafer sheet expanding method | |
| CN101034666A (en) | Substrate treating apparatus | |
| CN1815690A (en) | Vacuum processing apparatus | |
| CN1267771C (en) | Base board transport room and base board treating device | |
| CN1301545C (en) | Producer and producing method for producing object | |
| CN1629054A (en) | Lid unit for thin-plate supporting container | |
| CN1991592A (en) | Object stage device | |
| CN1855416A (en) | Substrate processing device | |
| CN1928475A (en) | Vacuum drying device and drying method for substrate | |
| CN1787197A (en) | Substrate processing apparatus and substrate transfer method therefor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20061206 Termination date: 20170227 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |