KR20110056029A - Apparatus for conveying substrate - Google Patents

Apparatus for conveying substrate Download PDF

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Publication number
KR20110056029A
KR20110056029A KR1020090112700A KR20090112700A KR20110056029A KR 20110056029 A KR20110056029 A KR 20110056029A KR 1020090112700 A KR1020090112700 A KR 1020090112700A KR 20090112700 A KR20090112700 A KR 20090112700A KR 20110056029 A KR20110056029 A KR 20110056029A
Authority
KR
South Korea
Prior art keywords
substrate
rollers
side rollers
present
transfer apparatus
Prior art date
Application number
KR1020090112700A
Other languages
Korean (ko)
Inventor
주재성
Original Assignee
세메스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세메스 주식회사 filed Critical 세메스 주식회사
Priority to KR1020090112700A priority Critical patent/KR20110056029A/en
Publication of KR20110056029A publication Critical patent/KR20110056029A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
    • B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
    • B65G21/2045—Mechanical means for guiding or retaining the load on the load-carrying surface
    • B65G21/2063—Mechanical means for guiding or retaining the load on the load-carrying surface comprising elements not movable in the direction of load-transport
    • B65G21/2072—Laterial guidance means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a substrate transfer device. The substrate transfer apparatus includes a plurality of rollers that rotate in contact with the bottom surface of the substrate and a plurality of side rollers that rotate in contact with the side of the substrate so that the substrate does not deviate from a specific direction so as to transfer in a specific direction of the substrate, The substrate includes a first substrate and a second substrate different in size from the first substrate, and the side rollers include a plurality of first side rollers corresponding to the first substrate and a plurality of second side rollers corresponding to the second substrate. do.

Description

Apparatus for conveying substrate

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus for transferring a substrate used in a semiconductor manufacturing process, a flat panel display (FPD) manufacturing process, and the like.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. Such an information processing apparatus has a display device for displaying the processed information to the outside. As a display device, what is currently attracting attention is a flat panel display device such as a liquid crystal display device, an organic EL display device, a plasma display device and the like.

Such a flat panel display apparatus includes a multilayer thin film and a wiring pattern on a substrate. In order to form a thin film and / or a pattern on a substrate, various manufacturing processes such as deposition, baking, etching, cleaning, and drying are required. Each process is mainly performed in a process chamber. In order to perform the required series of processes, a substrate is transferred to a corresponding process chamber, and a substrate transfer device is installed between chambers of each process.

Such a substrate transfer device may include a plurality of rollers that rotate in contact with the bottom surface of the substrate to transfer the substrate in a specific direction, and a plurality of side rollers that rotate in contact with the side of the substrate so that the substrate does not deviate from the specific direction. Can be. However, in the case of a substrate transfer device used for research and development (R & D), it is necessary to be able to transfer substrates of various sizes, and in this case, it is important to properly design the side rollers in contact with the sides so that the substrate does not deviate from a specific direction. In particular, when the rail is arranged so that the side rollers can move horizontally according to the size of the substrate to be transported to the lower portion of the substrate transfer apparatus to achieve the above object, not only the substrate transfer apparatus is large but also the driving of the equipment is unstable. Can be done.

Specifically, the size of the equipment can be increased by placing additional rails under the substrate transfer device. In addition, as the size of the substrate to be transferred increases in size and variety, the horizontal movement distance of the side rollers on the lower rail may increase, so that driving of moving the side rollers using the lower rail may become unstable. Further, since the lower rail is additionally disposed in the substrate transfer apparatus, it may be difficult to place additional equipment such as a nozzle or a sensor under the substrate transfer apparatus, thereby complicating the equipment.

The problem to be solved by the present invention is to provide a substrate transfer apparatus with a simplified structure.

Problems to be solved by the present invention are not limited to the above-mentioned problems, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

The substrate transfer apparatus according to an aspect of the present invention for achieving the above technical problem, so that the plurality of rollers and the substrate rotating in contact with the lower surface of the substrate so as to transfer in a specific direction of the substrate does not deviate from the specific direction, And a plurality of side rollers rotating in contact with the substrate, wherein the substrate includes a first substrate and a second substrate having a different size from the first substrate, wherein the side rollers comprise a plurality of first side rollers and a first substrate corresponding to the first substrate. And a plurality of second side rollers corresponding to the second substrate.

Other specific details of the invention are included in the detailed description and drawings.

Specific details of other embodiments are included in the detailed description and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, only the embodiments are to make the disclosure of the present invention complete, the general knowledge in the art to which the present invention belongs It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. As used herein, “comprises” and / or “comprising” refers to the presence of one or more other components, steps, operations and / or elements. Or does not exclude additions. “And / or” includes each and all combinations of one or more of the items mentioned.

Although the first, second, etc. are used to describe various elements, components and / or sections, these elements, components and / or sections are of course not limited by these terms. These terms are only used to distinguish one element, component or section from another element, component or section. Therefore, the first device, the first component, or the first section mentioned below may be a second device, a second component, or a second section within the technical spirit of the present invention.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used in a sense that can be commonly understood by those skilled in the art. In addition, terms that are defined in a commonly used dictionary are not ideally or excessively interpreted unless they are specifically defined clearly.

1 is a plan view illustrating a substrate transfer apparatus according to an exemplary embodiment of the present invention.

Referring to FIG. 1, a substrate transfer apparatus according to an embodiment of the present invention includes a shaft 110, a roller 120, side rollers 200, 210, and 220.

The plurality of shafts 110 are disposed at regular intervals in the process chamber, and the plurality of rollers 120 are installed in the longitudinal direction of the shaft 110. The plurality of rollers 120 are in contact with the lower surfaces of the substrates S1 and S2 and rotate to transfer the substrates S1 and S2 in a specific direction x.

As the shaft 110 rotates, the plurality of rollers 120 rotate, and thus the substrates S1 and S2 are transferred in a specific direction x. In FIG. 1, the rotation method of the shaft 110 is not clearly illustrated for convenience of description. For example, both ends of the plurality of shafts 110 are each provided with a pulley, the plurality of pulleys may be interconnected by a chain or belt. At least one pulley among the plurality of pulleys may receive a rotational force from a driving member (eg, a motor). As another example, magnetic polys may be provided at both ends of the plurality of shafts 110, and the plurality of magnetic polys may be interconnected by magnetic force.

The plurality of side rollers 200, 210, and 220 may prevent the substrates S1 and S2 from coming off in a specific direction x. The plurality of side rollers 200, 210, and 220 rotate in contact with the side surfaces of the substrates S1 and S2. Here, the plurality of side rollers 200, 210, and 220 do not rotate by separate driving members, but may naturally rotate according to the movement of the substrates S1 and S2.

Particularly, in one embodiment of the present invention, the side rollers 200, 210, and 220 have sizes of the plurality of first side rollers 200, 210 and the first substrate S1 corresponding to the first substrate S1. Since a plurality of second side rollers 200 and 220 corresponding to different second substrates S2 are included, the substrate transfer apparatus can transfer the first and second substrates S1 and S2 in a specific direction.

2A and 2B are diagrams illustrating the operation of the substrate transfer apparatus according to an embodiment of the present invention.

2A and 2B, in the substrate transfer apparatus according to the exemplary embodiment of the present invention, the first and second side rollers 200, 210, and 220 may be formed of the first substrate (S1, S2). Depending on whether it is S1 or the second substrate S2, the substrates S1 and S2 may be moved up and down from the lower sides of the substrates S1 and S2 to the side surfaces of the substrates S1 and S2 so that the substrates S1 and S2 do not deviate from a specific direction. .

Specifically, the first side rollers 200 and 210 may include one side first side roller 200 corresponding to one side of the first substrate S1 and the other side first side rollers corresponding to the other side of the first substrate S1. 210, and the second side rollers 200 and 220 may correspond to one side of the second side roller 200 and the other side of the second substrate S2 corresponding to one side of the second substrate S2. The second side roller 220 may be included. Meanwhile, the one side first side roller 200 and the one side second side roller 200 and 220 may be the same.

As a result, when the first substrate S1 is transferred by the substrate transfer device, the first side rollers 200 and 210 are vertically moved from the lower side of the first substrate S1 and disposed on the side surface of the first substrate S1. On the other hand, the second side roller 220 on the other side of the second side rollers 200 and 220 may move vertically and be disposed below the first substrate S1. As a result, the first side rollers 200 and 210 may rotate in contact with the side surface of the first substrate S1 to prevent the first substrate S1 from being separated from the specific direction x. The roller 220 may be disposed below the first substrate S1 so as not to disturb the transfer of the first substrate S1. Similarly, when the second substrate S2 is transferred by the substrate transfer device, the second side rollers 200 and 220 are vertically moved from the bottom of the second substrate S2 and disposed on the side of the second substrate S2. On the other hand, the other side of the first side rollers 210 of the first side rollers 200 and 210 may be vertically moved and disposed below the second substrate S2. As a result, the second side rollers 200 and 220 may rotate in contact with the side surfaces of the second substrate S2 so that the second substrate S2 may not be separated from the specific direction x. The other first side roller 210 of the 200 and 210 may be disposed below the second substrate S2 and may not interfere with the transfer of the second substrate S2.

As a result, the substrate transfer apparatus according to the embodiment of the present invention may transfer the substrate by vertical movement of the plurality of first and second side rollers 200, 210, and 220 corresponding to the substrates S1 and S2. S1 and S2) can be prevented from deviating from a specific direction. That is, even if the lower rail is not additionally arranged in order to adjust the position of the side rollers according to the size of the substrate, various sizes of substrates can be stably transferred. Therefore, by the lower rail for adjusting the position of the side rollers, the size of the substrate transfer apparatus may increase or the driving of the substrate transfer apparatus may not be unstable. Furthermore, additional equipment such as nozzles or sensors can be placed relatively easily under the substrate transfer device.

In the above description, the substrate transfer apparatus according to the exemplary embodiment of the present invention transfers the first substrate and the second substrate having a different size from the first substrate, but is not limited thereto. For example, in another embodiment of the present invention, the substrate transfer apparatus may transfer at least three substrates having different sizes, and a plurality of side rollers may be disposed correspondingly.

3 is a plan view illustrating a substrate transfer apparatus according to another exemplary embodiment of the present invention. 4A and 4B are diagrams illustrating the operation of the substrate transfer apparatus according to another embodiment of the present invention.

1 and 3, the substrate transport apparatus according to another exemplary embodiment of the present invention is that one side first side roller 211 and one side second side roller 221 are not identical to each other. It may be substantially the same as the substrate transfer apparatus according to one embodiment.

In detail, the first side rollers 211 and 215 may include one side first side roller 211 corresponding to one side of the first substrate S1 and the other side first side roller corresponding to the other side of the first substrate S1. 215, and the second side rollers 221 and 225 correspond to one side of the first side roller 221 and the other side of the second substrate S2 corresponding to one side of the second substrate S2. The second side roller 225 may be included. As a result, when the first substrate S1 is transferred by the substrate transfer device, the first side rollers 211 and 215 vertically move from the lower side of the first substrate S1 and are disposed on the side surface of the first substrate S1. On the other hand, the second side rollers 221 and 215 may be vertically moved and disposed below the first substrate S1. When the second substrate S2 is transferred by the substrate transfer apparatus, the second side rollers 221 and 225 are vertically moved from the bottom of the second substrate S2 and disposed on the side of the second substrate S2. The first side rollers 211 and 215 may be vertically moved and disposed below the second substrate S2.

Those skilled in the art will appreciate that the present invention can be embodied in other specific forms without changing the technical spirit or essential features of the present invention. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is indicated by the scope of the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and the equivalent concept are included in the scope of the present invention. Should be interpreted.

1 is a plan view illustrating a substrate transfer apparatus according to an exemplary embodiment of the present invention.

2A and 2B are diagrams illustrating the operation of the substrate transfer apparatus according to an embodiment of the present invention.

3 is a plan view illustrating a substrate transfer apparatus according to another exemplary embodiment of the present invention.

4A and 4B are diagrams illustrating the operation of the substrate transfer apparatus according to another embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

110: shaft 120: roller

Side rollers: 200, 210, 211, 215, 220, 221, 225

Claims (5)

A plurality of rollers rotating in contact with the bottom surface of the substrate so as to be transferred in a specific direction of the substrate; And And a plurality of side rollers rotating in contact with the side of the substrate so that the substrate does not deviate from the specific direction, The substrate includes a first substrate and a second substrate different in size from the first substrate, And the side rollers include a plurality of first side rollers corresponding to the first substrate and a plurality of second side rollers corresponding to the second substrate. The method of claim 1, When the first substrate is transferred, the plurality of first side rollers rotate in contact with the side surface of the first substrate, And the second side rollers rotate in contact with a side surface of the second substrate when the second substrate is transferred. The method of claim 1, The plurality of first side rollers include a plurality of one side first side rollers and the other side first side rollers respectively corresponding to one side and the other side of the first substrate. The plurality of second side rollers include a plurality of one side second side rollers and the other side second rollers respectively corresponding to one side and the other side of the second substrate. The one side first side roller and the one side second side roller is the same substrate transport apparatus. The method of claim 3, wherein According to whether the substrate to be transferred is the first substrate or the second substrate, the other first side roller and the other second side roller is vertically moved from the lower side of the substrate disposed on the side of the substrate . The method of claim 1, And when the plurality of first side rollers rotate in contact with a side surface of the first substrate, the plurality of second side rollers are disposed below the first substrate.
KR1020090112700A 2009-11-20 2009-11-20 Apparatus for conveying substrate KR20110056029A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020090112700A KR20110056029A (en) 2009-11-20 2009-11-20 Apparatus for conveying substrate

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Application Number Priority Date Filing Date Title
KR1020090112700A KR20110056029A (en) 2009-11-20 2009-11-20 Apparatus for conveying substrate

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140346006A1 (en) * 2013-05-27 2014-11-27 Samsung Display Co., Ltd. Side roller and substrate transport device including the same
US9123761B2 (en) 2012-12-05 2015-09-01 Samsung Display Co., Ltd. Substrate transferring device
CN114927599A (en) * 2022-05-18 2022-08-19 东方日升（常州）新能源有限公司 Solar cell, preparation method thereof and laser annealing device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9123761B2 (en) 2012-12-05 2015-09-01 Samsung Display Co., Ltd. Substrate transferring device
US20140346006A1 (en) * 2013-05-27 2014-11-27 Samsung Display Co., Ltd. Side roller and substrate transport device including the same
US9165809B2 (en) * 2013-05-27 2015-10-20 Samsung Display Co., Ltd. Side roller and substrate transport device including the same
CN114927599A (en) * 2022-05-18 2022-08-19 东方日升（常州）新能源有限公司 Solar cell, preparation method thereof and laser annealing device

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