JP2011168363A - Substrate carrying device and substrate carrying method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stably carry a substrate, without increasing the contact area with the substrate of rollers, by using a plurality of rollers. <P>SOLUTION: The substrate 1 is mounted on a plurality of first rollers 20 arranged at a predetermined interval in the substrate moving direction, and the plurality of first rollers 20 are rotated, and while moving the substrate 1 in the substrate moving direction, an under surface of the substrate 1 moved by the plurality of first rollers 20 is supported by a plurality of second rollers 10, and the plurality of second rollers 10 are moved in the substrate moving direction together with the substrate 1 moved by the plurality of first rollers 20. Deformation of the substrate 1 caused between the first rollers is restrained by the second rollers, and the substrate 1 is stably carried without increasing the contact area with the substrate 1 of the rollers by joining the first rollers and the second rollers together. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a substrate transport apparatus and a substrate transport method for transporting a substrate in the manufacture of a display panel substrate such as a liquid crystal display device, and in particular, includes a plurality of rollers provided at predetermined intervals in the substrate moving direction. The present invention relates to a substrate transfer apparatus and a substrate transfer method for moving a substrate mounted on a plurality of rollers.

  In the manufacturing process of a TFT (Thin Film Transistor) substrate, a color filter substrate, a plasma display panel substrate, an organic EL (Electroluminescence) display panel substrate, etc. of a liquid crystal display device used as a display panel, circuit patterns and colors are formed on the substrate. In order to form a filter or the like, processing such as exposure, development, etching, and peeling of the substrate is performed. In addition, before or after chemical processing such as development, etching, and peeling, the substrate is cleaned with a cleaning solution such as pure water, and the substrate after cleaning is dried. In order to perform these series of processes, the substrate is transferred to the exposure apparatus, the substrate processing apparatus, the substrate cleaning apparatus, or the substrate drying apparatus by the substrate transfer apparatus.

  A substrate transport apparatus that transports a display panel substrate generally includes a plurality of rollers provided at predetermined intervals in the substrate moving direction, and the substrate is mounted on the plurality of rollers to move. There exists a thing of patent document 1 as such a board | substrate conveyance apparatus.

JP-A-10-265018

  With the recent increase in the screen size of display panels, the size of the substrate has become larger and thinner. Therefore, when the substrate is transferred by the substrate transfer device, the substrate is deformed due to its own weight between the rollers provided at a predetermined interval, the substrate is subjected to excessive stress, and the tip of the substrate does not get on the next roller. There was a risk that the board would fall. In order to avoid this, it is necessary to reduce the distance between the rollers. However, if the distance between the rollers is reduced, the number of rollers increases and the contact area of the rollers with the substrate increases. There has been a problem that the number of opportunities to adhere to the lower surface of the substrate increases.

  In addition, as the number of display panels is increased, the sizes of the substrates are diversified. When transporting substrates having significantly different sizes, it is necessary to change the roller interval. If the distance between the rollers is narrowed from the beginning in order to save the trouble of changing the distance between the rollers, there has been a problem that, as described above, there is an increased chance that foreign matters such as dust adhere to the lower surface of the substrate.

  An object of the present invention is to use a plurality of rollers and stably carry a substrate without increasing the contact area of the rollers with the substrate. Another object of the present invention is to use a plurality of rollers and stably carry substrates of different sizes without changing the interval between the rollers.

  The substrate transfer device of the present invention is provided at predetermined intervals in the substrate movement direction, and rotates while mounting the substrate to move the substrate in the substrate movement direction, and the plurality of first rollers. And a plurality of second rollers for supporting the lower surface of the substrate moved by the plurality of second rollers, and a moving means for moving the plurality of second rollers together with the substrate moved by the plurality of first rollers in the substrate moving direction. Is.

  In the substrate transport method of the present invention, the substrate is mounted on a plurality of first rollers provided at predetermined intervals in the substrate movement direction, and the plurality of first rollers are rotated to move the substrate in the substrate movement direction. However, the lower surface of the substrate moved by the plurality of first rollers is supported by the plurality of second rollers, and the plurality of second rollers are moved together with the substrate moved by the plurality of first rollers. It moves in the direction.

  The lower surface of the substrate moved by the plurality of first rollers is supported by the plurality of second rollers, and the plurality of second rollers are moved in the substrate moving direction together with the substrate moved by the plurality of first rollers. Therefore, the deformation of the substrate that occurs between the first rollers is suppressed by the second roller. Accordingly, the substrate can be transported stably without increasing the contact area of the combined roller of the first roller and the second roller to the substrate. Even if the substrate sizes are different, the substrates of different sizes can be stably conveyed without changing the interval between the first rollers.

  Furthermore, the substrate transport apparatus of the present invention includes a plurality of air nozzles that blow compressed air upward on the lower surface of the substrate moved by the plurality of first rollers, and the moving means includes the plurality of air nozzles. It moves with 2 rollers. In the substrate transport method of the present invention, a plurality of air nozzles for blowing compressed air upward are provided on the lower surface of the substrate moved by the plurality of first rollers, and the plurality of air nozzles are connected to the plurality of second rollers. It moves together. The compressed air blown upward from the air noise onto the lower surface of the substrate further suppresses the deformation of the substrate that occurs between the first rollers, thereby further stably transporting the substrate.

  Alternatively, the substrate transport apparatus of the present invention includes a plurality of air nozzles that spray compressed air obliquely in the substrate moving direction on the lower surface of the substrate moved by the plurality of first rollers, and the moving means includes the plurality of air nozzles. And move together with the plurality of second rollers. Further, the substrate transport method of the present invention is provided with a plurality of air nozzles for blowing compressed air obliquely in the substrate moving direction on the lower surface of the substrate moved by the plurality of first rollers, and the plurality of air nozzles are connected to the plurality of first nozzles. It moves with 2 rollers. The compressed air blown obliquely from the air noise to the lower surface of the substrate in the substrate moving direction further suppresses the deformation of the substrate that occurs between the first rollers, and assists the movement of the substrate by the first roller. Therefore, the large substrate can be stably conveyed without increasing the rotational force of the first roller.

  Furthermore, the substrate transport apparatus according to the present invention includes a plurality of second rollers, in which the rotation shafts of the plurality of first rollers are provided across the width of the substrate, and are moved in the substrate moving direction by the moving means. Elevating means for lowering and raising before and after the rotating shaft of one roller is provided. In the substrate transport method of the present invention, the rotation shafts of the plurality of first rollers are provided across the width of the substrate, and the plurality of second rollers that move in the substrate movement direction are rotated by the plurality of first rollers. It is lowered and raised before and after the shaft. When the rotation shafts of the plurality of first rollers are provided across the width of the substrate, the plurality of second rollers moving in the substrate moving direction are lowered and raised before and after the rotation shafts of the plurality of first rollers. Thus, the second roller can be moved in the substrate movement direction over the plurality of first rollers provided at predetermined intervals in the substrate movement direction without contacting the rotation shaft of the first roller. .

  According to the substrate transfer apparatus and the substrate transfer method of the present invention, the substrate is mounted on the plurality of first rollers provided at predetermined intervals in the substrate moving direction, and the plurality of first rollers are rotated to place the substrate on the substrate. While moving in the moving direction, the lower surface of the substrate moved by the plurality of first rollers is supported by the plurality of second rollers, and the plurality of second rollers are moved by the plurality of first rollers. By moving in the substrate moving direction together with the substrate, the deformation of the substrate occurring between the first rollers can be suppressed by the second roller. Therefore, the substrate can be stably conveyed without increasing the contact area of the roller including the first roller and the second roller to the substrate. Further, even when the substrate sizes are different, it is possible to stably carry substrates of different sizes without changing the interval between the first rollers.

  Furthermore, according to the substrate transport apparatus and the substrate transport method of the present invention, a plurality of air nozzles for blowing compressed air upward are provided on the lower surface of the substrate moved by the plurality of first rollers, and a plurality of air nozzles are provided. By moving together with the second roller, the deformation of the substrate that occurs between the first rollers can be further suppressed, so that the substrate can be transported more stably.

  Alternatively, according to the substrate transport apparatus and the substrate transport method of the present invention, a plurality of air nozzles for blowing compressed air obliquely in the substrate moving direction are provided on the lower surface of the substrate moved by the plurality of first rollers, and a plurality of air nozzles are provided. By moving the air nozzle together with the plurality of second rollers, it is possible to further suppress the deformation of the substrate that occurs between the first rollers, and to assist the movement of the substrate by the first roller. Therefore, the large substrate can be stably conveyed without increasing the rotational force of the first roller.

  Furthermore, according to the substrate transport apparatus and the substrate transport method of the present invention, the rotation shafts of the plurality of first rollers are provided across the width of the substrate, and the plurality of second rollers that move in the substrate movement direction are provided with the plurality of second rollers. The second roller is moved up and down before and after the rotation axis of the first roller, so that the second roller moves across the plurality of first rollers provided at predetermined intervals in the substrate movement direction. The substrate can be moved in the direction of movement without contacting the substrate.

FIG. 1A is a top view of a substrate transfer apparatus according to an embodiment of the present invention, and FIG. 1B is a partial cross-sectional side view of the AA portion of FIG. 2A is a top view illustrating a state in which the substrate transport apparatus illustrated in FIG. 1 has moved the substrate, and FIG. 2B is a partial cross-sectional side view of the AA portion in FIG. FIG. 3A is a top view of a substrate transfer apparatus according to another embodiment of the present invention, and FIG. 3B is a partial cross-sectional side view of the BB portion of FIG. 4A is a top view showing a state in which the substrate transport apparatus shown in FIG. 3 has moved the substrate, and FIG. 4B is a partial cross-sectional side view of the section BB in FIG. 4A. It is a side view of the raising / lowering table of the board | substrate conveyance apparatus by further another embodiment of this invention. It is a side view of the raising / lowering table of the board | substrate conveyance apparatus by further another embodiment of this invention. FIG. 7A is a top view of a substrate transfer apparatus according to still another embodiment of the present invention, and FIG. 7B is a partial cross-sectional side view of the CC section of FIG. 7A. It is a figure explaining operation | movement of the board | substrate conveyance apparatus shown in FIG. It is a figure explaining operation | movement of the board | substrate conveyance apparatus shown in FIG.

  FIG. 1A is a top view of a substrate transfer apparatus according to an embodiment of the present invention, and FIG. 1B is a partial cross-sectional side view of the AA portion of FIG. The substrate transport apparatus includes a base 2, a support plate 3, an auxiliary roller 10, an auxiliary roller moving mechanism, a feed roller 20, a motor 21, a shaft joint 22, a pulley 23, a belt 24, and a positioning roller 30.

  In FIG. 1A, two support plates 3 are attached to the base 2 with an interval in a direction orthogonal to the substrate moving direction. Each support plate 3 is rotatably attached with the rotation shafts of a plurality of feed rollers 20. The plurality of feed rollers 20 are installed on each support plate 3 at a predetermined interval in the substrate moving direction, and the feed rollers 20 installed on each support plate 3 are arranged facing each other between the support plates 3. Yes. Outside the support plate 3, pulleys 23 are attached to the rotation shafts of the feed rollers 20, and each pulley 23 is connected to each support plate 3 by a belt 24. For each support plate 3, the rotation shaft of one feed roller 20 is connected to the shaft of the motor 21 via the shaft coupling 22, and the rotation of the motor 21 is directly or via the pulley 23 and the belt 24. , And transmitted to the rotation shaft of each feed roller 20. The substrate 1 is mounted on a plurality of feed rollers 20 installed on each support plate 3 on both sides in the width direction, and is moved in the substrate movement direction by the rotation of the feed roller 20.

  1A and 1B, the rotation shafts of a plurality of positioning rollers 30 are rotatably attached to the upper surface of each support plate 3. The plurality of positioning rollers 30 are installed on each support plate 3 at a predetermined interval in the substrate moving direction, and the positioning rollers 30 installed on each support plate 3 are arranged facing each other on the support plate 3. Yes. As shown in FIG. 1B, each positioning roller 30 contacts the side surface of the substrate 1 moved by the feed roller 20 to prevent the substrate 1 from being inclined with respect to the substrate moving direction. .

  The auxiliary roller moving mechanism includes a guide rail 4, a moving table 5, a guide shaft 6, a lifting table 7, an air cylinder 8, a support 9, a motor 11, a shaft coupling 12, a bearing 13, a ball screw 14a, a nut 14b, and a sensor 15. It is configured to include. 1A and 1B, a pair of guide rails 4 is provided on the upper surface of the base 2, and a moving table 5 is mounted on the guide rails 4. A motor 11 is installed on the side surface of the base 2, and a shaft of the motor 11 is connected to a ball screw 14 a by a shaft coupling 12. The ball screw 14 a is rotatably supported by the bearing 13. In FIG. 1B, a nut 14 b that is moved by a ball screw 14 a is attached to the lower surface of the moving table 5. When the motor 11 is rotated, the nut 14 b is moved by the ball screw 14 a, and the moving table 5 is moved along the guide rail 4.

  In FIG. 1 (b), a guide shaft 6 and an air cylinder 8 are installed on the upper surface of the moving table 5. A lift table 7 is mounted on the tip of the rod of the air cylinder 8, and the lift table 7 is raised and lowered along the guide shaft 6 by the air cylinder 8. A plurality of support columns 9 are attached to the upper surface of the elevating table 7, and the rotation shaft of the auxiliary roller 10 is rotatably attached to each support column 9. The plurality of auxiliary rollers 10 support the lower surface of the substrate 1 moved by the feed roller 20. The air cylinder 8 raises or lowers the lifting table 7 to adjust the height of the auxiliary roller 10.

  1A and 1B, a sensor 15 is attached to a side surface of the lifting table 7 on the substrate moving direction side. The sensor 15 has a light projecting system and a light receiving system. The light received from the light projecting system is reflected by the light receiving system, and the end of the substrate 1 on the substrate moving direction side is received. To detect. Based on the detection result of the sensor 15, the motor 11 rotates the ball screw 14 a and moves the moving table 5 so that the auxiliary roller 10 moves together with the substrate 1 moved by the feed roller 20.

  2A is a top view illustrating a state in which the substrate transport apparatus illustrated in FIG. 1 has moved the substrate, and FIG. 2B is a partial cross-sectional side view of the AA portion in FIG. The plurality of auxiliary rollers 10 are moved in the substrate moving direction together with the substrate 1 moved by the plurality of feeding rollers 20 by the auxiliary roller moving mechanism while supporting the lower surface of the substrate 1 moved by the plurality of feeding rollers 20. . After transporting the substrate 1 to an exposure apparatus, substrate processing apparatus, substrate cleaning apparatus or substrate drying apparatus (not shown), the motor 11 rotates the ball screw 14a in the reverse direction to return the moving table 5 to the original position.

  FIG. 3A is a top view of a substrate transfer apparatus according to another embodiment of the present invention, and FIG. 3B is a partial cross-sectional side view of the BB portion of FIG. In this embodiment, in the auxiliary roller moving mechanism, instead of the motor 11, the shaft coupling 12, the bearing 13, the ball screw 14a, and the nut 14b shown in FIG. 1, the motor 16, the pulley 17, the belt 18, and the fixture 19 is used. Other components are the same as those of the embodiment shown in FIG.

  In FIG. 3B, two pulleys 17 are attached to the upper surface of the base 2 with the moving table 5 interposed therebetween. The two pulleys 17 are connected by a belt 18, and the rotating shaft of one pulley is connected to the shaft of the motor 16 installed on the lower surface of the base 2. A fixture 19 fixed to the belt 18 is attached to the lower surface of the moving table 5. When the motor 16 is rotated, the belt 18 is moved by the pulley 17, the attachment 19 is moved, and the moving table 5 is moved along the guide rail 4.

  3A and 3B, a sensor 15 is attached to the side surface of the lifting table 7 on the substrate moving direction side. The sensor 15 has a light projecting system and a light receiving system. The light received from the light projecting system is reflected by the light receiving system, and the end of the substrate 1 on the substrate moving direction side is received. To detect. Based on the detection result of the sensor 15, the motor 16 rotates the pulley 17 and moves the moving table 5 so that the auxiliary roller 10 moves together with the substrate 1 moved by the feed roller 20.

  4A is a top view showing a state in which the substrate transport apparatus shown in FIG. 3 has moved the substrate, and FIG. 4B is a partial cross-sectional side view of the section BB in FIG. 4A. The plurality of auxiliary rollers 10 are moved in the substrate moving direction together with the substrate 1 moved by the plurality of feeding rollers 20 by the auxiliary roller moving mechanism while supporting the lower surface of the substrate 1 moved by the plurality of feeding rollers 20. . After transporting the substrate 1 to an exposure apparatus, substrate processing apparatus, substrate cleaning apparatus or substrate drying apparatus (not shown), the motor 16 rotates the pulley 17 in the reverse direction to return the moving table 5 to the original position.

  Since the lower surface of the substrate 1 moved by the plurality of feed rollers 20 is supported by the plurality of auxiliary rollers 10, the plurality of auxiliary rollers 10 are moved in the substrate moving direction together with the substrate 1 moved by the plurality of feed rollers 20. The deformation of the substrate 1 that occurs between the feed rollers 20 is suppressed by the auxiliary roller 10. Therefore, the conveyance of the substrate 1 is stably performed without increasing the contact area of the roller including the feed roller 20 and the auxiliary roller 10 to the substrate 1. Even if the substrate sizes are different, the substrates of different sizes can be stably conveyed without changing the interval between the feed rollers 20.

  FIG. 5 is a side view of a lifting table of a substrate transfer apparatus according to still another embodiment of the present invention. In the present embodiment, a plurality of air nozzles 40a are provided on the upper surface of the lifting table of the substrate transfer apparatus shown in FIG. 1 or FIG. The air nozzle 40 a blows compressed air upward on the lower surface of the substrate 1 moved by the plurality of feed rollers 20. The compressed air blown upward from the air noise 40a onto the lower surface of the substrate 1 further suppresses the deformation of the substrate 1 that occurs between the feed rollers 20, and the substrate 1 is transported more stably.

  FIG. 6 is a side view of a lifting table of a substrate transfer apparatus according to still another embodiment of the present invention. In the present embodiment, a plurality of air nozzles 40b are provided on the upper surface of the lifting table of the substrate transfer apparatus shown in FIG. 1 or FIG. The air nozzle 40 b blows compressed air obliquely in the substrate moving direction against the lower surface of the substrate 1 that is moved by the plurality of feed rollers 20. The compressed air blown obliquely from the air noise 40b to the lower surface of the substrate 1 in the substrate movement direction further suppresses the deformation of the substrate 1 that occurs between the feed rollers 20, and assists the movement of the substrate 1 by the feed rollers 20. Therefore, the large substrate 1 can be stably conveyed without increasing the rotational force of the feed roller 20.

  FIG. 7A is a top view of a substrate transfer apparatus according to still another embodiment of the present invention, and FIG. 7B is a partial cross-sectional side view of the CC section of FIG. 7A. In this embodiment, in the embodiment shown in FIG. 1, the rotation axis of the feed roller 20 is provided across the width of the substrate 1, and instead of the air cylinder 8 that adjusts the height of the auxiliary roller 10, an air cylinder is used. An air cylinder 8 ′ having a longer stroke than 8 is provided. Other components are the same as those of the embodiment shown in FIG.

  In FIG. 7A, both ends of the rotation shafts of the plurality of feed rollers 20 are rotatably attached to each support plate 3. Outside the support plate 3, pulleys 23 are attached to the rotation shafts of the feed rollers 20, and the pulleys 23 are connected by belts 24. The rotation shaft of one feed roller 20 is connected to the shaft of the motor 21 via a shaft coupling 22, and the rotation of the motor 21 is directly or via the pulley 23 and the belt 24. It is transmitted to the rotating shaft. The substrate 1 is mounted on a plurality of feed rollers 20 and is moved in the substrate moving direction by the rotation of the feed rollers 20.

  8 and 9 are diagrams for explaining the operation of the substrate transfer apparatus shown in FIG. As shown in FIGS. 8A and 8B, the plurality of auxiliary rollers 10 support the lower surface of the substrate 1 moved by the plurality of feeding rollers 20, and the plurality of feeding rollers 20 by the auxiliary roller moving mechanism. Is moved in the substrate moving direction together with the substrate 1 moved by the above. As shown in FIG. 8B, when the auxiliary roller 10 approaches the rotation axis of the feed roller 20, the air cylinder 8 ′ lowers the lifting table 7 as shown in FIG. 10 is lowered to a position lower than the rotational axis of the feed roller 20. Then, as shown in FIG. 9 (a), after the auxiliary roller 10 passes under the rotating shaft of the feed roller 20, the air cylinder 8 ′ lifts the lifting table 7 as shown in FIG. 9 (b). The auxiliary roller 10 is returned to the original height. As shown in FIGS. 9B and 9C, the auxiliary roller 10 supports the lower surface of the substrate 1 moved by the feed roller 20 again, and the substrate moved by the feed roller 20 by the auxiliary roller moving mechanism. 1 is moved in the substrate moving direction.

  After repeating these operations and transporting the substrate 1 to an exposure apparatus, substrate processing apparatus, substrate cleaning apparatus or substrate drying apparatus (not shown), the air cylinder 8 ′ lowers the elevating table 7 and sends the auxiliary roller 10 to it. The roller 20 is lowered to a position lower than the rotation axis. Then, after the motor 11 reversely rotates the ball screw 14a and returns the moving table 5 to the original position, the air cylinder 8 ′ raises the lifting table 7 to bring the auxiliary roller 10 to the original height. return.

  When the rotation shafts of the plurality of feed rollers 20 are provided across the width of the substrate 1, the plurality of auxiliary rollers 10 moving in the substrate moving direction are lowered and raised before and after the rotation shafts of the plurality of feed rollers 20, The auxiliary roller 10 can be moved in the substrate movement direction without contacting the rotation shaft of the feed roller 20 across a plurality of feed rollers 20 provided at predetermined intervals in the substrate movement direction.

  In the auxiliary roller moving mechanism of the embodiment shown in FIG. 7, the motor 16, the pulley 17, and the belt shown in FIG. 3 are used instead of the motor 11, the shaft coupling 12, the bearing 13, the ball screw 14a, and the nut 14b. 18 and attachment 19 may be used. Further, the lifting table 7 may be provided with the air nozzle 40a shown in FIG. 5 or the air nozzle 40b shown in FIG.

  According to the embodiment described above, the substrate 1 is mounted on the plurality of feed rollers 20 provided at predetermined intervals in the substrate movement direction, and the plurality of feed rollers 20 are rotated to move the substrate 1 in the substrate movement direction. Meanwhile, the lower surface of the substrate 1 moved by the plurality of feed rollers 20 is supported by the plurality of auxiliary rollers 10, and the plurality of auxiliary rollers 10 together with the substrate 1 moved by the plurality of feed rollers 20 are moved in the substrate moving direction. By moving, deformation of the substrate 1 that occurs between the feed rollers 20 can be suppressed by the auxiliary roller 10. Accordingly, the substrate 1 can be stably conveyed without increasing the contact area of the roller including the feed roller 20 and the auxiliary roller 10 to the substrate 1. Further, even if the substrate sizes are different, it is possible to stably carry substrates of different sizes without changing the interval between the feed rollers 20.

  Furthermore, according to the embodiment shown in FIG. 4, a plurality of air nozzles 40a for blowing compressed air upward are provided on the lower surface of the substrate 1 moved by the plurality of feed rollers 20, and a plurality of air nozzles 40a are provided. By moving together with the auxiliary roller 10, deformation of the substrate 1 occurring between the feed rollers 20 can be further suppressed, so that the substrate 1 can be transported more stably.

  Further, according to the embodiment shown in FIG. 5, the plurality of air nozzles 40 b that blow the compressed air obliquely in the substrate moving direction are provided on the lower surface of the substrate 1 that is moved by the plurality of feed rollers 20. By moving 40b together with the plurality of auxiliary rollers 10, it is possible to further suppress the deformation 1 of the substrate that occurs between the feed rollers 20, and to assist the movement of the substrate 1 by the feed rollers 20. Therefore, the large substrate 1 can be stably conveyed without increasing the rotational force of the feed roller 20.

  Furthermore, according to the embodiment shown in FIG. 7, the rotation shafts of the plurality of feed rollers 20 are provided across the width of the substrate 1, and the plurality of auxiliary rollers 10 that move in the substrate moving direction are provided with the plurality of feed rollers 20. The auxiliary roller 10 is moved across the plurality of feed rollers 20 provided at a predetermined interval in the substrate movement direction without contacting the rotation shaft of the feed roller 20 by lowering and raising before and after the rotation axis of the substrate. It can move in the moving direction.

DESCRIPTION OF SYMBOLS 1 Board | substrate 2 Base 3 Support plate 4 Guide rail 5 Moving table 6 Guide shaft 7 Lifting table 8, 8 'Air cylinder 9 Support | pillar 10 Auxiliary roller 11, 21, 16 Motor 12, 22 Shaft coupling 13 Bearing 14a Ball screw 14b Nut 15 Sensor 17, 23 Pulley 18, 24 Belt 19 Mounting tool 20 Feed roller 30 Positioning roller 40a, 40b Air nozzle

Claims (8)

A plurality of first rollers that are provided at predetermined intervals in the substrate movement direction, rotate while mounting the substrate, and move the substrate in the substrate movement direction;
A plurality of second rollers for supporting a lower surface of the substrate moved by the plurality of first rollers;
A substrate transfer apparatus comprising: a moving unit configured to move the plurality of second rollers in a substrate moving direction together with the substrate moved by the plurality of first rollers. A plurality of air nozzles for blowing compressed air upward on the lower surface of the substrate moved by the plurality of first rollers;
The substrate transfer apparatus according to claim 1, wherein the moving unit moves the plurality of air nozzles together with the plurality of second rollers. A plurality of air nozzles for blowing compressed air obliquely in the substrate moving direction on the lower surface of the substrate moved by the plurality of first rollers;
The substrate transfer apparatus according to claim 1, wherein the moving unit moves the plurality of air nozzles together with the plurality of second rollers. The plurality of first rollers are provided with a rotation axis across the width of the substrate,
2. An elevating unit that lowers and raises the plurality of second rollers moved in the substrate moving direction by the moving unit before and after the rotation shafts of the plurality of first rollers. The substrate transfer apparatus according to claim 3. The substrate is mounted on a plurality of first rollers provided at predetermined intervals in the substrate moving direction,
While rotating the plurality of first rollers and moving the substrate in the substrate moving direction,
The lower surface of the substrate moved by the plurality of first rollers is supported by the plurality of second rollers,
A substrate transporting method, comprising: moving a plurality of second rollers together with a substrate moved by the plurality of first rollers in a substrate moving direction. A plurality of air nozzles for blowing compressed air upward are provided on the lower surface of the substrate moved by the plurality of first rollers,
6. The substrate transfer method according to claim 5, wherein the plurality of air nozzles are moved together with the plurality of second rollers. A plurality of air nozzles that blow compressed air obliquely in the substrate moving direction are provided on the lower surface of the substrate moved by the plurality of first rollers,
6. The substrate transfer method according to claim 5, wherein the plurality of air nozzles are moved together with the plurality of second rollers. Providing a plurality of first roller rotation axes across the width of the substrate;
8. The plurality of second rollers that move in the substrate moving direction are lowered and raised before and after the rotation shafts of the plurality of first rollers. 9. Substrate transport method.

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