CN105993068B - Substrate transfer device - Google Patents
Substrate transfer device Download PDFInfo
- Publication number
- CN105993068B CN105993068B CN201580003423.1A CN201580003423A CN105993068B CN 105993068 B CN105993068 B CN 105993068B CN 201580003423 A CN201580003423 A CN 201580003423A CN 105993068 B CN105993068 B CN 105993068B
- Authority
- CN
- China
- Prior art keywords
- pallet
- magnetic
- transfer
- magnet
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
Abstract
The present invention provides a kind of substrate transfer device, and the substrate transfer device includes: pallet, substrate are mounted on the pallet；Magnetic transfer part is placed in below the pallet, so that the pallet is suspended and is shifted the pallet by magnetic force；Guide unit guides the transfer of the pallet without contacting the pallet；And gap maintains component, is located at least one region between the magnetic transfer part and the guide unit.In substrate transfer device of the invention, due to generating friction not between pallet and magnetic transfer part, do not generate particle, and be therefore not in the product defects as caused by particle and be not in such as vacuum pump part failure.
Description
Technical field
The present invention relates to substrate transfer devices, and are specifically to be mounted with base about via the transfer of contactless method
The substrate transfer device of the pallet (tray) of plate.
Background technique
By and large, flat-panel display device (Flat Panel Display device, referred to as: FPD) (such as liquid crystal
Show device (Liquid Crystal Display device, referred to as: LCD), plasma display panel device (Plasma
Display Panel device, referred to as: PDP), field emission display (Field Emission Display device,
Referred to as: FED) and electro-luminescence display device (Electro luminescence Display device, referred to as: ELD))
It is to be manufactured by multiple processing procedures are executed on substrate.That is, repeating to deposit (deposition) processing procedure, light on substrate
Lithographic (photolithography) processing procedure and etching (etching) processing procedure are multiple, and in addition execute cleaning, are attached and cut
Processing procedure is cut to manufacture flat-panel display device.
These manufacturing processes of flat-panel display device are executed in the multiple chamber interiors for wherein having prepared suitable environment.For
This, it is contemplated to method in line, wherein substrate is installed on pallet (Tray), and the pallet is then erected to by vertical or inclination
It shifts will pass through the inside of the multiple chamber.
Transfer device for transfer base substrate may include substrate pallet mounted thereto, and the bottom of the contact pallet
And thrust is provided to the driving roller of the pallet whereby by motor rotation.That is, prior art transfer device is by being located at
On the low portion of chamber and contact tray bottom driving roller torque transfer tray.The instant disclosure of these transfer devices
In South Korea patent application Patent Publication case the 2003-0068292nd.
However, there is limitation, because generating particle as the friction between driving roller and tray bottom increases
(particle).The particle is attached to transferred substrate, generates the defects of display device whereby, and according to high standard/height
The exploitation of efficiency device and cause defective components.Also, particle is introduced into for leading in the vacuum pump that chamber interior forms vacuum
Cause the failure of vacuum pump.
(existing technical literature)
South Korea patent application Patent Publication case the 2003-0068292nd
Summary of the invention
Technical problem to be solved
The present invention is provided the substrate that can be prevented particle from generating due to the transfer base substrate in the case where not contacting pallet and turned
Moving device.
The present invention is provided due to the substrate that pallet shifts while by magnetic suspension and can prevent particle from generating
Transfer device.
Technical means to solve problem
According to exemplary embodiments, substrate transfer device includes: pallet, substrate are mounted on the pallet；Magnetism transfer
Unit is placed in below the pallet, and the pallet is magnetically made to suspend, and shifts the pallet by magnetic force；And it leads
Draw unit, the transfer of the pallet is guided in the case where not contacting the pallet.
Substrate transfer device can further include transfer substrate, and it includes be provided to contact connecing for the downside of the pallet
Touching region and the elongated area extended downwardly from contact area two sides.
Magnetic buanch unit may include: magnetic suspension part, be placed on a region of transfer substrate and magnetically
Pallet is set to suspend；And magnetic transfer part, it is placed in below magnetic suspension part shifted in one direction by magnetic force
The pallet of suspension.
Magnetic suspension part may include: the first magnetic suspension part, contact transfer substrate, and include at least one magnetic
Body；And the second magnetic suspension part, and the first magnetic suspension spaced-apart, and include will be applied to it is magnetic outstanding from first
The suction of floating part and at least any one at least one magnet in repulsion.
Magnetic transfer part may include: rotary shaft；Magnetic rotating part, it includes be disposed to around the more of the rotary shaft
A magnet；And magnetic transfer portion, it is separated with magnetic rotating part and includes multiple magnets.
Substrate transfer device can further include accommodating portion, in inner containment magnetism rotating part, wherein the receiving
Partial upper part contacts the second magnetic suspension part.
The multiple magnet of magnetic transfer portion may be provided at least one region of the elongated area of transfer substrate, described
One area surface is to magnetic rotating part.
The multiple magnet of magnetic rotating part may be provided so that having polar magnet different from each other by alternately
Placement, to revolve around it axis at a predetermined angle, and the multiple magnet of magnetic transfer portion may be provided so that having that
The magnet of this opposed polarity is alternately disposed, to have angle identical with the angle of magnetic rotating part.
Guide unit may include: the first steering magnet is coupled to the upper part of pallet；And second steering magnet,
It is located on the upper wall of chamber with spaced a predetermined distance from the first steering magnet, wherein the first steering magnet and the second steering magnet
Be applied in suction or repulsion at least any one.
Guide unit can further include the transfer guide member being located between pallet and chamber inner wall.
Transfer guide member may be provided between elongated area and chamber inner wall.
Substrate transfer device can further include at least one region being located between magnetic buanch unit and guide unit
On gap maintain component.
Gap maintain component to may be provided in elongated area and magnetic suspension portion point between region or elongated area led with transfer
Draw at least one of region between part.
At least part for shifting guide member can move in the direction close to pallet and in the direction far from pallet.
When pallet is transferred, the transfer guide member being located in traversing chamber can be proximally located at the first position of pallet
Place, and when pallet is returned, transfer guide member can be located remotely from the second place of pallet.
Invention effect
Include according to the substrate transfer device of exemplary embodiments: magnetic transfer part, below pallet, the magnetism
Transfer part magnetically suspends and shifts the pallet of installation base plate thereon；And guide unit, on pallet and in pallet
Side surface on, guide unit guide pallet movement.It rubs therefore, because not generated between pallet and magnetic transfer part
It wipes, therefore does not generate particle, and be therefore not in the product defects as caused by particle and be not in the zero of such as vacuum pump
The failure of part.
In the substrate transfer device according to exemplary embodiments, at least the one of the transfer guide member of the transfer of pallet is guided
Part can move on the direction close to pallet and on the direction far from pallet.Also that is, when pallet is transferred, traversing chamber
Transfer guide member disposed close to pallet, and when pallet is returned, the transfer guide member of traversing chamber far from pallet and
It is positioned to allow for the position of pallet to be easily moved.Therefore, when the position of pallet mobile in traversing chamber, support can be increased
The mobile nargin of disk.
Detailed description of the invention
Fig. 1 is the front view according to the substrate transfer device of exemplary embodiments.
Fig. 2 is the side view for illustrating the substrate transfer device according to exemplary embodiments.
Fig. 3 is the side view for illustrating the magnetic buanch unit of the substrate transfer device according to first exemplary embodiment.
Fig. 4 is the schematic diagram for illustrating the magnetic transfer part of the substrate transfer device according to first exemplary embodiment.
Fig. 5 is the side view for illustrating the magnetic buanch unit of the substrate transfer device according to second exemplary embodiment.
Fig. 6 is the side view for illustrating the magnetic buanch unit of the substrate transfer device according to third exemplary embodiments.
Fig. 7 is the side view for illustrating the guide unit of the substrate transfer device according to exemplary embodiments.
Fig. 8 is the side view for illustrating the magnetic buanch unit of the substrate transfer device according to the 4th exemplary embodiments.
Fig. 9 is the side view for illustrating the magnetic buanch unit of the substrate transfer device according to the 5th exemplary embodiments.
Figure 10 and Figure 11 is the side view for illustrating the substrate transfer device according to the 6th exemplary embodiments.
Specific embodiment
Hereinafter, exemplary embodiments will be more fully described referring to attached drawing.However, the present invention can take a different form, and
It is not understood as limited to embodiments set forth herein.Specifically, these embodiments are provided so that the present invention will be
It is thorough and complete, and scope of the invention will be sufficiently conveyed to those skilled in the art.
Fig. 1 is according to the front view of the substrate transfer device of first exemplary embodiment, and Fig. 2 is illustrated according to first case
The side view of the substrate transfer device of the property shown embodiment.That is, Fig. 1 is front view, and Fig. 2 is from the point of view of the direction of self installation substrate
Side view.Also, Fig. 3 is the side view for illustrating the magnetic buanch unit of the substrate transfer device according to first exemplary embodiment,
And Fig. 4 is the schematic diagram for illustrating the magnetic transfer part of the substrate transfer device according to first exemplary embodiment.
Referring to Fig. 1 to Fig. 4, may include according to the substrate transfer device of exemplary embodiments: pallet 100, transfer installation
Substrate on it；Magnetic buanch unit 200 is placed in 100 lower section of pallet, the pallet 100 is magnetically made to suspend,
And the pallet 100 is shifted by magnetic force；And guide unit 300,100 top of pallet is placed in guide the support
The transfer of disk 100.
Pallet 100 is to be provided with the shape of hollow, rectangular frame, and substrate is mounted thereto.That is, pallet 100 can be hollow
The shape of rectangular frame manufactures, so that four items with predetermined length are located at upper side, lower side, left side and right side
On, it is spaced apart at a predetermined distance from each other, and the end of item is in contact with each other.Also, multiple fixtures for removably clamping substrate can be set
On pallet 100.Herein, the edge of substrate can be contacted four sides of pallet 100 by preset width, and substrate can be solid by fixture
It is fixed.This pallet 100 be substrate be mounted thereon and the pallet vertical or obliquely shifted in the state erect.
That is, multiple chambers connect in one direction, and the pallet 100 for being equipped with substrate on it moves through the multiple chamber
While internal, the predetermined processing procedure of such as thin film deposition process is executed on substrate.Pallet 100 is moved through the multiple
Chamber may include: load chamber, substrate is installed on pallet 100 wherein；And multiple deposition chambers, make a reservation for wherein thin
Film is deposited on the substrate being mounted on pallet 100；And traversing (traverse) chamber, wherein pallet 100 be elevated and
It is moved the position of pallet 100.That is, substrate is installed on pallet 100 in loading chamber, then moved through in pallet described
Multiple films are deposited on substrate while multiple deposition chambers, and then in traversing chamber mobile pallet position so that
Pallet can be mobile towards chamber is loaded.Herein, vacuum shape can be maintained by loading chamber, the multiple deposition chambers and traversing chamber
State.Also, substrate can be the various substrates for manufacturing the flat-panel display device comprising liquid crystal display device, and can be by including (example
Such as) glass, plastic cement, film or similar material is made.In addition, the transfer substrate 110 of the part of contact buanch unit 200 can be set
Below pallet 100.Transfer substrate 110 may be provided in the whole region of 100 bottom of pallet.That is, transfer substrate 110 can have with
The identical length of length of 100 bottom of pallet, and can be connected to the bottom of pallet 100 to have predetermined thickness in a downward direction
Degree.This transfer substrate 110 may include the first area 111 with the width of same size with pallet 100, and be located at first area
111 lower sections simultaneously have the width (for example, second area 112 of a half width of pallet 100) for being less than 100 width of pallet.Herein,
The part of magnetic buanch unit 200 can contact second area 112.Of course, it is possible to which various shape provides transfer substrate 110.
Magnetic buanch unit 200 magnetically makes the suspension of pallet 100 simultaneously transfer tray 100 while the nothing of maintenance and pallet 100
Contact condition.This magnetic buanch unit 200 may include the magnetic suspension part 210 for magnetically making pallet 100 suspend, and magnetism turns
Part 220 is moved, magnetic transfer part 220 is by being applied to shift from suction or the repulsion of magnetic suspension part 210 by magnetic
The pallet 100 that property floating parts 210 magnetically suspend.
Magnetic suspension part 210 may include the first magnetic suspension part 211 for being provided to contact transfer substrate 110, and
It is provided to the second magnetic suspension part 212 separated with the first magnetic suspension part 211.Herein, the second magnetic suspension part
212 may be provided between the inner wall for the multiple chamber that pallet 100 and pallet 100 are transferred through.Herein, the second magnetic suspension portion
Divide 212 can be fixed to the inner wall for the multiple chamber that pallet 100 is transferred through, and is fixed on predetermined away from cavity bottom part
At height.That is, being equipped with the pallet 100 of substrate thereon transferred can pass through the multiple chambers being connected in series, the first magnetic suspension
Part 211 may be coupled to two side surfaces of the second area 112 of the transfer substrate 110 below pallet 100, and second is magnetic
Floating parts 212 may be provided between pallet 100 and chamber to face the first magnetic suspension part 211 and may be coupled in chamber
Wall or bottom surface.As illustrated in Figure 3, the first magnetic suspension part 211 may include: be fixed to the second of transfer substrate 110
First fixing component 211a of two side surfaces in region 112, be located at the first fixing component 211a side surface presumptive area
On at least one first magnet 211b, and be located at the first fixing component 211a bottom surface presumptive area at least
One the second magnet 211c.That is, each of first and second magnet 211b, 211c may be provided as single magnet or
One and second in magnet 211b, 211c at least any one may be provided as two or be greater than two magnets.For example, first
Magnet 211b may be provided as single magnet, and the second magnet 211c may be provided as two or be greater than two magnets.First is solid
Determining component 211a can have the substantially hexahedral shape offer of predetermined altitude and width, and can be along the second of transfer substrate 110
Region 112 is with length identical with the length of second area 112 and has width identical with the cup depth of second area 112
Degree.Therefore, the first magnetic suspension part 211 can be coplanar with transfer substrate 110.That is, by the first fixing component 211a and being located at
The width that second area 112 between first fixing component defines can be of same size with the first area 111 of transfer substrate 110
Or it is of same size with pallet 100.Certainly, by second area 112 and second area 112 side and the other side first
The width that magnetic suspension part 211 is defined can be more than or less than the width of transfer substrate 110 or the width of pallet 100.Also, first
And second magnet 211b, 211c may be provided to be embedded in the first fixing component 211a up to predetermined depth.That is, first and second
Magnet 211b, 211c may be provided in the first fixing component 211a at predetermined depth, so that first and second magnet 211b, 211c
It surface can be with the surface co-planar of the first fixing component 211a.First fixing component 211a can be by such as to the magnetic force generated by magnet
Metal, ceramics, plastic cement or the similar material not responded are formed, and can be formed by (for example) tungsten.Second magnetic suspension portion
Points 212 may be provided with spaced a predetermined distance from the first magnetic suspension part 211 and in face of the first magnetic suspension part 211.That is,
Second magnetic suspension part 212 may be provided on the inner wall side of chamber and separate with the first magnetic suspension part 211, so that in it
Surface faces the first magnetic suspension part 211.This second magnetic suspension part 212 may include: with the first magnetic suspension part 211
The first fixing component 211a it is spaced a predetermined distance from and face its second fixing component 212a and magnetic in face of first respectively
The third magnet and the 4th magnet 212b, 212c of the first magnet 211b and the second magnet 211c of floating parts 211.Herein,
Each of three and the 4th magnet 212b, 212c may be provided as in single magnet or third and the 4th magnet 212b, 212c
At least one may be provided as two of the number corresponding to first and second magnet 211b, 211c or be greater than two magnets.
For example, when providing a first magnet 211b and two or being greater than two the second magnet 211c, it is possible to provide a third
Magnet 212b and two are greater than two the 4th magnet 212c.Also, the second fixing component 212a can be connected to chamber inner wall or
Bottom surface is simultaneously fixed to it, and may be provided so that side with " └ " shape and the other side have " ┘ " shape so as to
The first fixing component 211a with rectangular cross section is spaced a predetermined distance from.First magnet 211b and third magnet 212b can have
Polarity and suction different from each other can work therebetween.However, the second magnet 211c and the 4th magnet 212c can have each other
Identical polarity, and repulsion can work therebetween.Repulsion works between magnet 211c, 212c in second and the 4th, and because
This pallet 100 can be suspended.Also, suction works between first and third magnet 211b, 212b, and it therefore can prevent pallet
100 upwardly or downwardly move.That is, pallet 100 can be by the repulsion of second and the 4th between magnet 211c, 212c and by magnetically
It suspends and moves up, the repulsion can inhibit by the suction to work between first and third magnet 211b, 212b.Class
Being similar to the first fixing component 211a, the second fixing component 212a can be by the gold that does not respond to the magnetic force generated by magnet such as
Belong to, ceramics, plastic cement or similar material are formed, and can be formed by (for example) tungsten.First magnetic suspension part 211 can be in pallet
It is located in the whole region of transfer substrate 110 on 100 length direction (that is, on the shift direction of pallet 100), and the second magnetic
Property floating parts 212 may be provided in the whole region that pallet 100 moves through.That is, since pallet 100 passes through the multiple chamber
Inside, therefore the second magnetic suspension part 212 may be provided in the inner wall of the multiple chamber in face of the first magnetic suspension part
On 211 region.However, in first and second magnetic suspension part 211,212 at least any one can be provided that it is multiple so that
At least the multiple of any one obtained in first and second magnetic suspension part 211,212 configures at a predetermined interval.For example,
Second magnetic suspension part 212 can be located in whole region in the longitudinal direction, and can provide multiple first magnetic suspensions part
211 so that the multiple first magnetic suspension part 211 configures at a predetermined interval.Also, the of the first magnetic suspension part 211
One and second magnet 211b, 211c and the second magnetic suspension part 212 third and the 4th magnet 212b, 212c can be in length
It is located in whole region on direction, and can be provided that multiple and separate at predetermined intervals.For example, the first magnet 211b and
Two magnet 211c may be provided on whole region, and can provide third and the 4th magnet 212b, 212c at a predetermined interval.Also, with
It is magnetic in maintaining the gap in the gap between first and second magnetic suspension part 211,212 that component 213 is maintained to may be provided in first
Between floating parts 211 and the second magnetic suspension part 212.That is, since suction is in facing with each other first and third magnet
It works between 211b, 212b, therefore gap between first and second magnetic suspension part 211,212 is reduced or first and the
Three magnet 211b, 212b can be attached to each other.Component 213 can be maintained by gap is provided and maintain first and second magnetic suspension portion
Divide the gap between 211,212.This gap maintains component 213 to may be provided in the region below first and third magnet 211b, 212b
On.That is, gap maintenance component 213 may be provided in the outer surface and the second magnetic suspension part 212 of the first magnetic suspension part 211
Between inner surface.Also, gap maintains component 213 to may be provided between first and second magnetic suspension part 211,212 in length side
In upward whole region, and multiple gaps can be provided at a predetermined interval and maintain component 213.
Magnetic transfer part 220 may include: be provided to and the magnetic rotation spaced apart by a predetermined distance of the bottom surface of transfer substrate 110
Transfer part 221, and be located at the lower section of transfer substrate 110 with magnetic rotating part 221 magnetic transfer portion 222 spaced apart by a predetermined distance.Magnetic
Property rotating part 221 may be provided with spaced a predetermined distance from the bottom surface of transfer substrate 110.Herein, magnetic rotating part 221 can have
The width of same size with pallet 100, and can have the width more than or less than 100 width of pallet.As described in Fig. 3 and Fig. 4
Bright, this magnetic rotating part 221 may include multiple 5th magnets on rotary shaft 221a and the surface for being formed in rotary shaft 221a
221b.Rotary shaft 221a can have the shape of roughly circular item and by rotation motor (not shown) in one or the other direction
Upper rotation.Also, the multiple 5th magnet 221b can be located at the surface of rotary shaft 221a around the shape of axis by a predetermined angle
On, and for example, there can be thread shape.That is, multiple 5th magnet 221b can be provided on rotary shaft 221a (as schemed
Illustrated in 4) with angularly (for example, 45 °) circular axis.Herein, the multiple 5th magnet 221b may be provided so that the pole S
And the pole N is alternately provided while angularly (for example, 45 °) revolve around it axis.Magnetic transfer portion 222 may be provided in transfer base
110 lower section of bottom.That is, magnetic transfer portion 222 may be provided in the second area 112 of the transfer substrate 110 between magnetic suspension part 210
Lower section.In this magnetic transfer portion 222, there is polar magnet different from each other alternately to dispose.That is, as illustrated in Figure 4,
Magnetic transfer portion 222 may include the third fixing component 222a for being fixed to the bottom surface of second area 112 of transfer substrate 110, and
The multiple 6th magnet 222b being located on a surface of third fixing component 222a, wherein polarity is different from each other, that is, the pole S and N
Pole can be alternately provided to the multiple 6th magnet 222b.Herein, it is possible to provide multiple 6th magnets of magnetic transfer portion 222
222b is to have angle (for example, 45 °) identical with the angle of the multiple 5th magnet 221b of magnetic rotating part 221.Cause
This, due to be attributed to the rotation of magnetic rotating part 221 polarity and magnetic transfer portion 222 polarity it is different from each other or identical, and
Suction or repulsion work whereby, therefore magnetic transfer portion 222 moves up in one direction according to the rotation of magnetic rotating part 221
It is dynamic.That is, the linear movement for being converted to magnetic transfer portion 222 of magnetic rotating part 221 is to move the pallet of magnetic suspension
100。
Guide unit 300 may include the first steering magnet 310 for being coupled to the upper part of pallet 100, and be located at chamber
Upper wall on with second steering magnet 320 spaced apart by a predetermined distance of the first steering magnet 310.Herein, first and second is guided
Magnet 310,320 can polarity having the same so that repulsion works therebetween, or can have polarity different from each other so that
Suction is obtained to work therebetween.Also, first and second steering magnet 310,320 can be provided with various shape.It for example, can be with
Rectilinear form provides first and second steering magnet 310,320 facing with each otherly.Also, the first steering magnet 310 can round item
Shape provides, and the second steering magnet 320 can have for example with the curved cross section of " ∩ " shape with 310 top of self-aiming magnet
Around the first steering magnet 310.That is, the second steering magnet 320 may be provided to surround the first steering magnet 310 simultaneously with first
Steering magnet 310 is spaced a predetermined distance from.Therefore, the upper end of pallet 100 is through guiding so that pallet 100 is same what is be transferred
When do not fall, this is because the second steering magnet 320 310 two sides of the first steering magnet to the first steering magnet 310 application push away
Power or pulling force.
Wherein the combination of the electromagnet of assembling iron core and coil, permanent magnet or electromagnet and permanent magnet can be used as illustrating
The magnet of property embodiment.
As described above, had according to the substrate transfer device of exemplary embodiments and be placed in 100 lower section of pallet and magnetic
It suspends to property and the magnet buanch unit 200 of transfer tray 100, and is placed on pallet 100 and guides the guiding of pallet 100
Unit 300.Also, magnet buanch unit 200 includes the magnetic suspension part 210 for magnetically making pallet 100 suspend, and it is attributed to magnetic
Rotation conversion linear movement is shifted the magnetic transfer part 220 of the pallet 100 of magnetic suspension by power.Therefore, according to illustration
Property embodiment substrate transfer device so that pallet 100 is suspended by magnetic suspension part 210, and then magnetic rotating part
220 rotate in one direction to shift the pallet 100 of magnetic suspension in one direction.In this exemplary embodiments, by
It generates and rubs between pallet 100 and magnetic buanch unit 200 in not, therefore do not generate particle.Therefore, attribution is not generated
In the product defects of particle, and the failure of the part of such as vacuum pump does not occur.
According to the substrate transfer device of exemplary embodiments can via make in 100 lower magnetic of pallet pallet 100 suspend
And implement by the various methods of magnetic force transfer tray 100 are used.That is, the structure below pallet 100 can be in different ways
It is modified.This another illustrative example is illustrated in Fig. 5 and Fig. 6.Fig. 5 is the base illustrated according to second exemplary embodiment
The side view of the magnetic buanch unit of plate transfer device, and will be by using this Fig. 5 that second exemplary embodiment is described below.
Referring to Fig. 5, may include according to the substrate transfer device of second exemplary embodiment: pallet 100, transfer are mounted on
Substrate thereon；Magnetic buanch unit 200 is placed in 100 lower section of pallet by magnetic suspension transfer tray 100；And
Guide unit 300 is placed in the transfer that pallet 100 is guided on pallet 100.Herein, it will not describe or easily describe
Configuration identical with first exemplary embodiment.
Transfer substrate 110 is located at 100 lower section of pallet, and transfer substrate 110 may include with of same size with pallet 100
The first area 111 of width is placed in 111 lower section of first area and has the second area less than 111 width of first area
112, and 112 lower section of second area is located to surround the third region 113 of magnetic rotating part 222.Third region 113 may include
From the extension that second area 112 extends downwardly, horizontally it is located at horizontal component 113a below extension, and from water
Vertical component 113b, 113c that the two sides of flat part 113a extend downwardly.Herein, horizontal component 113a is provided to have and be greater than
The width and vertical component 113b, 113c of the width of magnetic rotating part 221 are provided to the height for being greater than magnetic rotating part 221
The height of degree.Therefore, horizontal component 113a and vertical component 113b, 113c in horizontal component two sides are provided to surround magnetic
The upper part and side section of property rotating part 221.
This magnetic buanch unit 200 may include the magnetic suspension part 210 for magnetically making pallet 100 suspend, and by fair
Perhaps suction or repulsion work between magnetic buanch unit 200 and magnetic suspension part 210 and shift by magnetic suspension portion
Divide the magnetic transfer part 220 of the pallet 100 of 210 magnetic suspensions.Magnetic suspension part 210 may include being located at transfer substrate 110
Second area 112 on the first magnetic suspension part 211, be provided to separate with the first magnetic suspension part 211 second
Magnetic suspension part 212, the gap maintenance component for maintaining the gap between first and second magnetic suspension part 211,212
213, and the supporting member 214 of the second magnetic suspension part 212 of support.First magnetic suspension part 211 may include: be fixed to
First fixing component 211a of the side surface of the second area 112 of transfer substrate 110 and bottom surface, it is located at the first fixing component
At least one first magnet 211b in the presumptive area of the side surface of 211a, and it is located at the bottom of the first fixing component 211a
At least one second magnet 211c in the presumptive area on surface.First fixing component 211a may be provided with " └ "
One side of shape and the another side with " ┘ " shape.Herein, the first fixing component 211a may be provided to shift certainly
The first area 111 of substrate 110 is prominent.That is, by the first fixing component 211a and the secondth area between the first fixing component
The width that domain 112 is defined can be greater than the width of the first area 111 of transfer substrate 110 or the width of pallet 100.Also, first
And second each of magnet 211b, 211c may be provided as in single magnet or first and second magnet 211b, 211c
At least any one can two or greater than two magnets offers.For example, the first magnet 211b may be provided as single magnet,
And second magnet 211c may be provided as two or be greater than two magnets.Second magnetic suspension part 212 may be provided with
One magnetic suspension part 211 is spaced a predetermined distance to face the first magnetic suspension part 211.This second magnetic suspension part 212
It may include the second fixed structure spaced a predetermined distance from the first fixing component 211a of the first magnetic suspension part 211 and towards it
Part 212a, and respectively in face of the first magnetic suspension part 211 the first magnet 211b and the second magnet 211c third and the
Four magnet 212b, 212c.Herein, each of third and the 4th magnet 212b, 212c can be with the offer of single magnet or thirds
And the 4th at least one of magnet 212b, 212c can correspond to two of number of first and second magnet 211b, 211c
Or it is greater than two magnets and provides.For example, when providing a first magnet 211b and two or be greater than two the second magnets
When 211c, it is possible to provide a third magnet 212b and two are greater than two the 4th magnet 212c.Also, the second fixing component 212a
May be provided with a side with " └ " shape and the another side with " ┘ " shape so as to the first fixed structure
Part 211a is spaced a predetermined distance from.Supporting member 214 may be provided in 212 lower section of the second magnetic suspension part to support the second magnetic suspension
Part 212.That is, supporting member 214 may be provided between the horizontal component and cavity bottom of the second magnetic suspension part 212 with support
The horizontal component of second magnetic suspension part 212.Supporting member 214 supports the horizontal component of the second magnetic suspension part 212, and
Therefore the second magnetic suspension part 212 can be more stably supported.That is, the vertical component of the second magnetic suspension part 212 be by
It is fixed by the inner wall of chamber and the horizontal component of the second magnetic suspension part 212 is supported by supporting member 214, and therefore
Two magnetic suspension parts 212 can more stably be implemented.A part of transfer substrate 110 and magnetic transfer part 220 may be provided in
The inside of supporting member 214.That is, the third region 113 of transfer substrate 110 may be provided in the inside of supporting member 214, and magnetic turn
Moving part 220 may be provided in the inside in third region 113.
Magnetic transfer part 220 may include magnetic rotating part 221 and with magnetic rotating part 221 magnetism spaced apart by a predetermined distance
Transfer portion 222.Magnetic rotating part 221 may be provided in the inside of horizontal component 113a and vertical component 113b, 113c with its every
Open preset distance.Magnetic transfer portion 222 may be provided at least one region of horizontal component 113a and vertical component 113b, 113c
On.Similar to exemplary embodiments, magnetic rotating part 221 includes rotary shaft 221a, and is provided to surround by a predetermined angle
Multiple 5th magnet 221b on the surface of rotary shaft 221a.Magnetic transfer portion 222 may be provided to vertical component 113b, 113c.
That is, magnetic transfer portion 222 may be provided to the two sides of magnetic rotating part 221.Certainly, magnetic transfer portion 222 may be provided to water
Flat part 113a, and it is provided to horizontal component 113a and vertical component 113b, 113c two.This magnetic transfer portion 222 can
Has predetermined fixing component, and the pole S and the pole N are alternately set on the fixing element.Herein, magnetic transfer portion 222 may be provided
To have angle (such as 45 °) identical with the angle of the multiple 5th magnet 221b of magnetic rotating part 221.Therefore, by
It is mutually the same in the polarity for the rotation for being attributed to magnetic rotating part 221 and the polarity of magnetic transfer portion 222, and suction acts as whereby
With, therefore magnetic transfer portion 222 is according to the rotation upper movement in one direction of magnetic rotating part 221.That is, magnetic rotating part 221
The linear movement for being converted to magnetic transfer portion 222 to move the pallet 100 of magnetic suspension.
Fig. 6 is the side view for illustrating the magnetic buanch unit of the substrate transfer device according to third exemplary embodiments.
Referring to Fig. 6, may include according to the substrate transfer device of third exemplary embodiments: pallet 100, transfer are mounted on
Substrate thereon；Magnetic buanch unit 200 is placed in 100 lower section of pallet by magnetic suspension transfer tray 100；And
Guide unit 300 is placed in the transfer that pallet 100 is guided on pallet 100.Herein, in third exemplary embodiments,
Knot of the structure of the magnetic suspension part 210 of magnetic buanch unit 200 different from the use of Fig. 5 second exemplary embodiment described
Structure, and this will be mainly described as follows using another exemplary embodiments.
The magnetic suspension part 210 of magnetic buanch unit 200 may include: the first magnetic suspension part 211 is located at transfer
On the second area 112 of substrate 110；Second magnetic suspension part 212, be provided to the first magnetic suspension part 211 every
It opens；Gap maintains component 213, is used to maintain the gap between first and second magnetic suspension part 211,212；And support
Component 214 supports the second magnetic suspension part 212.First magnetic suspension part 211 may include: the first fixing component 211a,
The side surface of its second area 112 for being fixed to transfer substrate 110 and bottom surface, and with a side with " └ " shape
Face and the another side with " ┘ " shape；At least one first magnet 211b, is located at the upper table of the first fixing component 211a
In the presumptive area in face；And at least one second magnet 211c, it is located at the pre- of the bottom surface of the first fixing component 211a
Determine on region.That is, although the first magnet 211b is located at the first fixing component 211a's in first and second exemplary embodiments
On side surface, but the first magnet 211b may be provided on the upper surface of the first fixing component 211a in the third embodiment.Herein,
One magnet 211b may be provided in the side on the upper surface of the first fixing component 211a while with the first area 111 of transfer substrate 110
Surface separates.Also, the second magnetic suspension part 212 may be provided with the first magnetic suspension part 211 it is spaced a predetermined distance from
In face of the first magnetic suspension part 211.This second magnetic suspension part 212 may include with the first magnetic suspension part 211
One fixing component 211a is spaced a predetermined distance from and faces its second fixing component 212a, and faces the first magnetic suspension respectively
The third and the 4th magnet 212b, 212c of the first magnet 211b and the second magnet 211c of part 211.Herein, the second fixed structure
Part 212a can be spaced a predetermined distance from the first fixing component 211a and faces it, and may be provided to haveShape
One side and another side with "U" shape are to face the upper surface of the first fixing component 211a.Second fixing component
212a may be provided with short upper side and long lower side, and within its whole region with the first fixing component 211a
It is equally spaced.Herein, the first magnet 211b and third magnet 212b can have opposed polarity each other, and suction can rise whereby
Effect.Second magnet 211c and the 4th magnet 212c can have identical polar each other, and repulsion can work whereby.Also, at it
Between the suction magnet that works can further be located at side surface and the second fixing component 212a of the first fixing component 211a
On side surface.
Fig. 7 is the side view for illustrating the guide unit 300 according to exemplary embodiments.
Referring to Fig. 7, may include according to the guide unit 300 of exemplary embodiments: the first plate 311 is coupled to pallet 100
Top；First steering magnet 310 is located on the first plate 311；Second plate 321, is fixed to the upper wall of chamber；Second leads
Draw magnet 320, it is spaced a predetermined distance from the first steering magnet 310 and be located on the second plate 321；Side plate 330, from the second plate
321 side surface extends downwardly；Third steering magnet 340 is located on the side surface of the first plate 311；4th steering magnet
350, it is spaced a predetermined distance from third steering magnet 340 and in face of third steering magnet 340 and being located on side plate 330；And
Second gap maintains component 360, be located in the presumptive area of side plate 330 with maintain side plate 330 and steering magnet 310,320,
340, the gap between 350.Herein, third and the 4th steering magnet 340,350 may be provided on the second steering magnet 320
Two plates 321 and between the side plate 330 of the second plate, and may be provided in the first plate 311 and between the side plate 330 of the first plate and
On second plate 321 and two regions between the side plate 330 of the second plate.Also, first and second steering magnet 310,320 can
With identical polar so that repulsion works therebetween, or there can be polarity different from each other so that suction acts as therebetween
With.Also, third and the 4th steering magnet 340,350 can have identical polar so that repulsion works therebetween.Therefore, pallet
100 upper end portion can be by the suction and third and the 4th guiding magnetic between first and second steering magnet 310,320
Repulsion between body 340,350 and shift while being directed to without falling.That is, since repulsion is by third and the 4th steering magnet
340,350 apply from side surface, therefore compared with the situation for using first and second steering magnet 310,320, and pallet 100 hangs down
Straight posture transfer can be easier to execute.Also, maintaining component 360, the shake of pallet 100 due to further providing for the second gap
Width can be maintained evenly, and therefore the vertical position transfer of pallet 100 can be easier to execute.
The transfer guide member for guiding the transfer of pallet 100 can further be located at 100 lower section of pallet.Shifting guide member can be through mentioning
It is provided with spaced a predetermined distance from pallet 100, wherein pallet 100 is arranged there between.Transfer guide member may be provided in pallet 100 and chamber
Inner wall between.That is, two transfer guide members may be provided between the side surface of chamber and pallet 100 with pallet 100 every
Open preset distance.For example, in Fig. 3, Fig. 5 and Fig. 6, transfer guide member may be provided in the outer of magnetic suspension part 210
Portion.That is, transfer guide member may be provided between the second magnetic suspension part 212 of magnetic suspension part 210 and the inner wall of chamber.When
Transfer guide member is when being located between the second magnetic suspension part 212 and the inner wall of chamber, and the can be fixed from the bottom surface of chamber
Two magnetic suspension parts 212.Fig. 8 and Fig. 9 description will be used below and have this substrate transfer device for shifting guide member.
Fig. 8 is the side view for illustrating the magnetic buanch unit of the substrate transfer device according to the 4th exemplary embodiments.
Referring to Fig. 8, the substrate transfer device according to the 4th exemplary embodiments may include: pallet 100, and transfer is mounted on
Substrate thereon；Magnetic buanch unit 200 is placed in 100 lower section of pallet by magnetic suspension transfer tray 100；And
Guide unit 300 is used to guide pallet 100.Guide unit 300 may be provided on pallet 100 and lower section.In Fig. 7 description and
The configuration of explanation may be provided on pallet 100, and the transfer guide member 370 of the transfer for guiding pallet 100 may be provided in pallet
100 lower sections.Herein, in the 4th exemplary embodiments, configuration identical with the first configuration into third exemplary embodiments
It will be briefly described or will not be described.
Transfer substrate 110 is located at 100 lower section of pallet, and transfer substrate 100 may include: first area 111, have and support
The width of same size of disk 100；And elongated area 114, it is located on the side surface of first area 111 and around magnetic rotation
Portion 221.It is extended downwardly that is, elongated area 114 may be provided with the side surface from first area 111.Herein, elongated area 114
It may be provided the width to have the width for being greater than magnetic rotating part 221, so as to spaced a predetermined distance from magnetic rotating part 221.
The plate shape that can have preset width and length provides this elongated area 114.Also, gap maintains component 213 to may be provided in extension
In presumptive area inside region 114.That is, gap maintains component 213 in the third exemplary embodiments using Fig. 6 description
It is located between first and second magnetic suspension part 211,212 magnetic outstanding to maintain the first magnetic suspension part 211 and second
Gap between floating part 212.In the 4th exemplary embodiments, gap maintains component 213 to may be provided in inside elongated area 114
Between elongated area 114 and magnetic transfer part 220.Certainly, gap maintains component 213 to may be provided in magnetic transfer part 220
A region on.That is, gap maintains component 213 to may be provided between elongated area 114 and magnetic transfer part 220, or through mentioning
It is provided with being fixed to the presumptive area of magnetic transfer part 220.At least one the 7th magnet 115 may be provided in elongated area 114 extremely
On a few region, that is, it is located on the perimeter of elongated area.
Magnetic buanch unit 200 may include the magnetic suspension part 210 of magnetic suspension pallet 100, and by permission suction
Or repulsion works between magnetic buanch unit 200 and magnetic suspension part 210 and shifts magnetic by magnetic suspension part 210
The magnetic transfer part 220 of the pallet 100 of suspension.Magnetic suspension part 210 may include being provided to be fixed to transfer substrate 110
First area 111 the first magnetic suspension part 211, and be provided to separated with the first magnetic suspension part 211
Two magnetic suspension parts 212.First magnetic suspension part 211 may include being fixed under the first area 111 of transfer substrate 110
The first fixing component 211a on surface, and be located at the first fixing component 211a lower surface presumptive area at least one
First magnet 211b.Upper part part is fixed to the first fixing component 211a and its bottom of the low portion of first area 111
Portion surface can be horizontal.Herein, it is possible to provide greater than the width of the first fixing component 211a of the width of first area 111.By
It is provided to the width with the width greater than first area 111 in the first fixing component 211a, therefore contacts the first fixed structure
The elongated area 114 of the side surface of part 211a may be provided to have the width greater than 111 width of first area.Also, at least one
A first magnet 211b may be provided in below the first fixing component 211a, such as can provide three magnets maintenance simultaneously therebetween identical
Interval.Second magnetic suspension part 212 may be provided with spaced a predetermined distance from face of first with the first magnetic suspension part 211
Magnetic suspension part 211.This second magnetic suspension part 212 may include the first fixed structure with the first magnetic suspension part 211
Part 211a is spaced a predetermined distance from and faces its second fixing component 212a, and extremely in face of the first magnetic suspension part 211
At least one third magnet 212b of a few first magnet 211b.Also, the second fixing component 212a may be provided with have with
The identical shape of shape of first fixing component 211a, so as to spaced a predetermined distance from the first fixing component 211a.For example,
First and second fixing component 211a, 212a can have rectangular cross-sectional shape.Herein, the of the second magnetic suspension part 212
Two fixing component 212a can be fixed to a region of magnetic transfer part 220.
Magnetic transfer part 220 may include magnetic rotating part 221 and magnetic rotating part 221 magnetism spaced apart by a predetermined distance
Transfer portion 222, and wherein accommodate the receiving component 223 of magnetic rotating part 221.Receiving component 223 is revolved in inner containment magnetism
Transfer part 221, and lower portion can be fixed to cavity bottom.Herein, receiving component 223 may be provided with hollow shape with
So that magnetic rotating part 221 can be rotatably accommodated therein.Also, can provide receiving component 223 so that in its side table
Expose at least part of magnetic transfer portion 222 to the open air in face.Also, the second magnetic suspension part 212 may be provided in the upper table of receiving component 223
On face.That is, the second fixing component 212a of the second magnetic suspension part 212 can be fixed to the upper part of receiving component 223.Magnetic
Property transfer portion 222 may include at least one magnet, and may be provided on the elongated area 114 in face of magnetic rotating part 221.That is, prolonging
Stretching region 114 may be provided in spaced a predetermined distance from receiving component 223 outside receiving component 223, and include at least one magnet
Magnetic transfer portion 222 may be provided in inside elongated area 114 so as in face of the magnetic rotating part that is contained in receiving component 223
221。
Transfer guide member 370 may be provided between magnetic buanch unit 200 and chamber.That is, guide unit 300 can be in pallet
The transfer of 100 upper and lower section guiding pallet 100.Transfer guide member 370 may be provided in 100 lower section of pallet with certainly magnetic buanch unit
200 side surface guides the transfer of magnetic buanch unit 200.This transfer guide member 370 may be provided in magnetic buanch unit 200 and chamber
Between the inner surface of room, and can have preset width and height.Also, at least one magnet is located at the inside of transfer guide member 370
In presumptive area on side.That is, transfer guide member 370 may include being located at magnetic buanch unit 200 and chamber in the height direction
Vertical panel 371 between room, and at least one the 8th magnet 372 being located in the presumptive area of vertical panel 371.Vertical panel
371 may be provided with the height with such as the first magnetic suspension part 211.That is, vertical panel 371 may be provided with have until
Border surface between the first area 111 of transfer substrate 110 and the first fixing component 211a of the first magnetic suspension part 211
Height.Also, at least one the 8th magnet 372 is provided to vertical panel 371.8th magnet 372 may be provided in face of being located at
The 7th magnet 115 on elongated area 114.Herein, the 7th magnet 115 of elongated area 114 and the 8th magnet of vertical panel 371
372 can have polarity or identical polarity different from each other, and suction or repulsion can work whereby.Inside deposition chambers
Shift guide member 370 can be fixed, and the transfer guide member 370 of traversing chamber interior can be close to pallet 100 or separate
It is moved on the direction of pallet 100.Herein, magnetic suspension can be used in the transfer guide member of traversing chamber interior and contactlessly moves
It is dynamic.That is, the transfer that principle identical with the principle in the magnetic transfer part for using Fig. 4 to describe can be applied to traversing chamber guides
Part 370.For example, the magnetism of multiple magnets (not shown) for having rotary shaft (not shown) and being located on the surface of rotary shaft
Rotating part (not shown) may be provided in 371 lower section of vertical panel to separate with vertical panel 371, and have polar magnet different from each other can
It is located on the lower surface of vertical panel 371 at a predetermined interval to be separated with magnetic rotating part.Therefore, due under vertical panel 371
The polarity of the polarity of the rotation of the magnetic rotating part of side and magnetic transfer portion on magnetic rotating part can it is different from each other or that
This is identical.Since suction or repulsion work whereby, magnetic transfer portion is rotated in one or another according to magnetic rotating part
It is moved on one direction.That is, the linear movement for being converted to magnetic transfer portion of magnetic rotating part, and it is therefore mobile magnetic outstanding
Floating vertical panel 371.
Fig. 9 is the side view for illustrating the magnetic buanch unit of the substrate transfer device according to the 5th exemplary embodiments.
Referring to Fig. 9, the substrate transfer device according to the 5th exemplary embodiments may include: pallet 100, and transfer is mounted on
Substrate thereon；Magnetic buanch unit 200 is placed in 100 lower section of pallet by magnetic suspension transfer tray 100；And
Guide unit 300 is used to guide pallet 100.Guide unit 300 may be provided in the upper and lower section of pallet 100.In Fig. 7 description and
The configuration of explanation may be provided on pallet 100, and the transfer guide member 370 for guiding the transfer of pallet 100 may be provided under pallet 100
Side.Herein, in the 5th exemplary embodiments, gap maintains the 4th that the installation position of component 213 is described different from the use of Fig. 8
The installation position of exemplary embodiments.That is, except gap maintains component 213 to be located between transfer guide member 370 and elongated area 114
Difference other than, according to the substrate transfer device of the 5th exemplary embodiments have and the substrate according to the 4th exemplary embodiments
The identical configuration of transfer device.Gap maintains component 213 to may be provided between transfer guide member 370 and elongated area 114
On elongated area 114 or it is located in the presumptive area of transfer guide member 370.For example, maintenance component 213 in gap, which may be provided in, prolongs
Stretch 115 lower section of the 7th magnet in region 114.Therefore, maintenance component 213 in gap may be provided in magnetic buanch unit 200 and lead with transfer
Draw between part 370, even and if therefore still can be magnetic in transfer 370 interior shifting of guide member when magnetic buanch unit 200 shakes
Buanch unit 200.Certainly, gap maintains component 213 that can not be only defined between transfer guide member 370 and elongated area 114, and
It may be provided between elongated area 114 and magnetic transfer part 220.That is, at least two or being greater than two gaps and maintaining components 213 can
It is located at least two or is greater than on two regions.
Shift guide member 370 at least part can in one direction or with one contrary another party
It moves up.For example, the transfer guide member inside deposition chambers is fixed, and is led in the transfer of traversing chamber interior
It can be moveable for drawing part.That is, when the transfer of 100 auto-deposition chamber of pallet, be located at the transfer guide member of traversing chamber interior by
The transfer of pallet 100 is guided by maintaining the first gap away from pallet 100, and when the transfer completion of pallet 100 and pallet direction
When loading chamber return, it is located at shifting guide member towards the inner wall movement of chamber and maintaining away from pallet 100 for traversing chamber interior
The second gap greater than the first gap.It is mobile in traversing chamber interior to shift guide member, and therefore when the position of pallet 100 is moved
The mobile nargin of pallet 100 can be increased when dynamic.That is, pallet 100 can be detached from the effect of magnetive attraction, and it is therefore possible to realize
Easy traversing (that is, changing its course (lane change)).To be used below Figure 10 and Figure 11 describe this transfer guide member 370 exist
The substrate transfer device wherein moved.
Referring to Figure 10 and Figure 11, the substrate transfer device according to the 6th exemplary embodiments may include: pallet 100, turn
Move substrate mounted thereto；Magnetic buanch unit 200 is placed in 100 lower section of pallet by magnetic suspension transfer tray
100；And guide unit 300, it includes be placed in 100 lower section of pallet to guide the transfer guide member of the transfer of pallet 100
370.Transfer guide member 370 can move up in a reciprocal direction and another party, and can be in the side close to pallet 100
It moves upwards and on the direction far from pallet 100.This removable transfer guide member 370 can at least be located at traversing chamber interior.
Shifting guide member 370 may include vertical panel 371a and level board 371b, and vertical panel 371a may be provided in level board
On 371b.That is, vertical panel 371a can vertically be provided in an upward direction from the presumptive area of level board 371b.Also, hanging down
In straight panel 371a, it is possible to provide at least one the 8th magnet 372 is so as in face of the be located on the elongated area 114 of pallet 100 the 7th
Magnet 115.Level board 371b may be provided in below vertical panel 371a and can horizontally be provided.Herein, moveable part 395 can be set
Below level board 371b.Moveable part 395 may be provided so that at least part of lower region thereof is around guide rail
390, and can be moved on reciprocal one and another direction along guide rail 390.When moveable part 395 is mobile,
The transfer guide member 370 being positioned above is mobile.Support section 380 is located at 390 lower section of guide rail.380 supporting guide of support section
390 and the transfer guide member 370 on guide rail.Also, for driving the driving unit (not shown) of moveable part 395 that can set
Inside support section 380.Driving unit includes cylinder, motor or similar, and as illustrated in Figure 10 close to pallet 100
A direction on and the mobile moveable part 395 on another direction of separate pallet 100 as illustrated in Figure 11.This
Place, when auto-deposition chamber transfer tray 100, transfer guide member 370 is located adjacent at the first position of pallet 100.It is executing
Change its course in the case where (that is, traversing so that pallet 100 is returned towards chamber is loaded), moveable part 395 is driven by driving unit
So that transfer guide member 370 is moved on the direction far from pallet 100 to be located at the second place.In transfer guide member 370
After movement, pallet 100 is elevated, and is then returned towards loading chamber.Then, transfer guide member 370 is moved again to
First position.
As described above, technical idea of the invention is specifically described about above-described embodiment, but should be noted that aforementioned
Embodiment is merely provided for illustrating without limiting the present invention.Various embodiments be can provide to allow those skilled in the art understand that
Scope of the invention, however, the present invention is not limited thereto.
Claims (12)
1. a kind of substrate transfer device, comprising:
Pallet, substrate are mounted on the pallet；
Transfer substrate is provided to contact the lower side of the pallet；
Magnetic buanch unit is placed in below the pallet while separating with the transfer substrate, and configured to magnetically
So that the pallet is suspended and shifts the pallet by magnetic force；
Guide unit, configured to guiding the transfer of the pallet without contacting the pallet,
Wherein the transfer substrate includes the contact area for the lower side for being provided to contact the pallet and from institute
The elongated area that the two sides of contact area extend downwardly is stated,
It is described magnetism buanch unit include:
Magnetic suspension part is placed on a region of the transfer substrate magnetically to make the pallet suspend；And
Magnetic transfer part is placed in below the magnetic suspension part shifted in one direction by magnetic levitation
The pallet,
The magnetism transfer part includes:
Magnetic rotating part it includes rotary shaft and is provided to surround multiple magnets of the rotary shaft；And
Magnetic transfer portion separates with the magnetic rotating part, and includes multiple magnets,
The rotary shaft is located in the elongated area with the magnetic rotating part and separates simultaneously with the elongated area, the magnetic
Property transfer portion is located at least one region of the elongated area.
2. substrate transfer device according to claim 1, wherein the magnetic suspension portion point includes:
First magnetic suspension part, configured to contacting the transfer substrate, and including at least one magnet；And
Second magnetic suspension part, and the first magnetic suspension spaced-apart, and include that will be applied to from described first
The suction of magnetic suspension part and at least any one at least one magnet in repulsion.
3. substrate transfer device according to claim 2 further comprises configured to the magnetism described in inner containment
The accommodating portion of rotating part, wherein the upper part of housing section contacts second magnetic suspension part.
4. substrate transfer device according to claim 3, wherein the multiple magnet of the magnetism transfer portion is located at institute
On at least one region for stating the elongated area of transfer substrate, at least one described area surface is to the magnetic rotating part.
5. substrate transfer device according to claim 4, wherein
The multiple magnet of the magnetism rotating part is provided such that be replaced with the polar magnet different from each other
Ground disposes to surround the rotary shaft at a predetermined angle, and
The multiple magnet of the magnetism transfer portion is provided such that be replaced with the polar magnet different from each other
Ground placement is so as to angle identical with the magnetism angle of rotating part.
6. substrate transfer device according to claim 1, wherein the guide unit includes:
First steering magnet is coupled to the upper part of the pallet；And
Second steering magnet is located on the upper wall of chamber with spaced a predetermined distance from first steering magnet,
Wherein first steering magnet and second steering magnet be applied in suction or repulsion at least any one.
7. substrate transfer device according to claim 6, wherein the guide unit further comprises being located at the pallet
Transfer guide member between the inner wall of the chamber.
8. substrate transfer device according to claim 7, wherein the transfer guide member is located at the elongated area and institute
It states between the inner wall of chamber.
9. substrate transfer device according to claim 8, further comprise be located at the magnetic buanch unit with it is described
Gap at least one region between guide unit maintains component.
10. substrate transfer device according to claim 9, wherein the gap maintain component be located at the elongated area with
At least one in the region between region or the elongated area and the transfer guide member between the magnetic suspension portion point
On a.
11. substrate transfer device according to claim 8, wherein at least part of the transfer guide member is close to institute
It states on the direction of pallet and is moved on the direction far from the pallet.
12. substrate transfer device according to claim 11, wherein
When the pallet is transferred, the transfer guide member being located in traversing chamber is proximally located at the first of the pallet
At position, and
When the pallet is returned, the transfer guide member is located remotely from the second place of the pallet.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020140167325 | 2014-11-27 | ||
| KR10-2014-0167325 | 2014-11-27 | ||
| KR1020150131585A KR20160063969A (en) | 2014-11-27 | 2015-09-17 | Apparatus for transferring substrate |
| KR10-2015-0131585 | 2015-09-17 | ||
| PCT/KR2015/012799 WO2016085277A1 (en) | 2014-11-27 | 2015-11-26 | Substrate transfer apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105993068A CN105993068A (en) | 2016-10-05 |
| CN105993068B true CN105993068B (en) | 2019-05-31 |
Family
ID=56193018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580003423.1A Active CN105993068B (en) | 2014-11-27 | 2015-11-26 | Substrate transfer device |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20160063969A (en) |
| CN (1) | CN105993068B (en) |
| TW (1) | TWI575643B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102359244B1 (en) | 2016-11-21 | 2022-02-08 | 한국알박(주) | Film Deposition Method |
| CN109484794A (en) | 2017-09-13 | 2019-03-19 | 京东方科技集团股份有限公司 | A kind of base plate transfer device |
| CN107808835B (en) * | 2017-10-20 | 2020-07-10 | 深圳市华星光电技术有限公司 | Magnetic conduction plate and device transfer device |
| CN107783331B (en) * | 2017-10-20 | 2020-12-04 | 深圳市华星光电技术有限公司 | Device transfer apparatus, method of transferring device, and device transfer board |
| JP2020500257A (en) * | 2017-10-27 | 2020-01-09 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Apparatus for contactlessly transporting a carrier in a deposition system, system for contactlessly transporting a carrier, carrier being transported in a deposition system without contact, and method for transporting a carrier in a deposition system |
| KR102213655B1 (en) * | 2017-12-28 | 2021-02-08 | (주)가온솔루션 | Magnetic levitation transportation apparatus |
| KR101958411B1 (en) | 2018-08-28 | 2019-03-14 | 한국알박(주) | Film Deposition Apparatus and Method |
| CN109019028A (en) * | 2018-09-10 | 2018-12-18 | 京东方科技集团股份有限公司 | Base plate transmission device |
| WO2020228939A1 (en) * | 2019-05-13 | 2020-11-19 | Applied Materials, Inc. | Magnetic levitation system, base structure of a magnetic levitation system, and method of transporting a carrier |
| KR102232179B1 (en) * | 2020-12-23 | 2021-03-26 | (주)가온솔루션 | Magnetic levitation transportation apparatus |
| CN113098330B (en) * | 2021-05-21 | 2022-06-07 | 上海隐冠半导体技术有限公司 | Displacement device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002329761A (en) * | 2001-04-27 | 2002-11-15 | Tokyo Electron Ltd | Transfer apparatus, cleaning apparatus and development apparatus |
| JP2003168716A (en) * | 2001-12-03 | 2003-06-13 | Dia Shinku Kk | Component transport and component storage device using it |
| CN1676445A (en) * | 2004-03-31 | 2005-10-05 | 安内华株式会社 | Substrate moving device |
| KR20080104479A (en) * | 2007-05-28 | 2008-12-03 | 엘지디스플레이 주식회사 | Apparatus for transferring substrates |
| CN101986425A (en) * | 2009-07-28 | 2011-03-16 | 佳能安内华股份有限公司 | Driving device and vacuum processing apparatus |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100707390B1 (en) * | 2005-12-19 | 2007-04-13 | 주식회사 아바코 | Apparatus for carring glass |
| KR20080046761A (en) * | 2006-11-23 | 2008-05-28 | 엘지디스플레이 주식회사 | Apparatus for transferring substrate and apparatus for manufacturing thin film having the same |
| KR100880877B1 (en) * | 2007-11-02 | 2009-01-30 | 한국기계연구원 | Maglev-type substrate transfer apparatus |
| KR101271112B1 (en) * | 2011-02-01 | 2013-06-04 | (주)이루자 | Vaccum processing apparatus |
-
2015
- 2015-09-17 KR KR1020150131585A patent/KR20160063969A/en not_active Application Discontinuation
- 2015-11-26 CN CN201580003423.1A patent/CN105993068B/en active Active
- 2015-11-27 TW TW104139527A patent/TWI575643B/en active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002329761A (en) * | 2001-04-27 | 2002-11-15 | Tokyo Electron Ltd | Transfer apparatus, cleaning apparatus and development apparatus |
| JP2003168716A (en) * | 2001-12-03 | 2003-06-13 | Dia Shinku Kk | Component transport and component storage device using it |
| CN1676445A (en) * | 2004-03-31 | 2005-10-05 | 安内华株式会社 | Substrate moving device |
| KR20080104479A (en) * | 2007-05-28 | 2008-12-03 | 엘지디스플레이 주식회사 | Apparatus for transferring substrates |
| CN101986425A (en) * | 2009-07-28 | 2011-03-16 | 佳能安内华股份有限公司 | Driving device and vacuum processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201631690A (en) | 2016-09-01 |
| TWI575643B (en) | 2017-03-21 |
| KR20160063969A (en) | 2016-06-07 |
| CN105993068A (en) | 2016-10-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105993068B (en) | Substrate transfer device | |
| CN203721699U (en) | Disk-like object holding device and disk-like object rotating platform < | |
| KR101848849B1 (en) | Apparatus for transferring substrate | |
| WO2016202187A1 (en) | Moving-type magnetic suspension apparatus | |
| JP6400977B2 (en) | Spin processing device | |
| TWI552254B (en) | Magnetically levitated transportation apparatus | |
| JP6092349B2 (en) | Substrate transfer device | |
| CN109154062A (en) | It is used for transmission the device and method of carrier or substrate | |
| CN103762196B (en) | The clamping device of pan and the rotation platform of pan | |
| JP2012165856A (en) | Window glass cleaner | |
| CN204303790U (en) | A kind of for clamping and the device of rotating disk thing | |
| CN107062828A (en) | A kind of Minton dryer | |
| KR101708710B1 (en) | Apparatus for transferring substrate | |
| CN106144550B (en) | The lifting device of electronic element bearing disk | |
| CN108217207B (en) | Electromagnetic levitation type base plate transfer device | |
| TW202002140A (en) | Wafer picking and placing method capable of effectively absorbing a thin wafer and removing the thin wafer from a wafer cassette without damaging the thin wafer | |
| KR20120092719A (en) | Apparatus for drying substrate and method for drying substrate | |
| JPWO2016072314A1 (en) | Electronic parts transfer device | |
| TWI262890B (en) | Substrate transporting apparatus | |
| JP5274911B2 (en) | Substrate processing equipment | |
| KR101226473B1 (en) | Method for transferring carrier and vacuum processing apparatus using thereof | |
| KR20150124379A (en) | Method and apparatus of transporting brittle material substrate | |
| TW202046436A (en) | Lifting module for holding wafer box | |
| JP4505002B2 (en) | Transport device | |
| JP2009040569A (en) | Reversing device of plate-like member |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |