TW201631690A - Substrate transfer apparatus - Google Patents

Abstract

Provided is a substrate transfer apparatus including a tray on which a substrate is mounted, a magnetic transfer part which is disposed under the tray, magnetically levitates the tray, and transfers the tray by a magnetic force, a guide unit which guides the transfer of the tray without contacting the tray, and a gap maintaining member provided on at least one region between the magnetic transfer part and the guide unit.

Description

Device for transferring substrates

The present invention relates to a substrate transfer device, and more particularly to a substrate transfer device that transfers a tray on which a substrate is mounted via a contactless method.

In general, flat panel display devices (FPD) (such as liquid crystal display devices (LCD), plasma display panel devices (PDP), field emission display devices (field emission) A display device (FED) and an electro luminescence display device (ELD) are manufactured by performing a plurality of processes on a substrate. That is, on the substrate, the deposition process, the photolithography process, and the etching process are repeated a plurality of times, and a cleaning, attaching, and dicing process is additionally performed to manufacture a flat panel display device.

These manufacturing processes of the flat panel display device are performed inside a plurality of chambers in which an optimum environment is prepared. To this end, an in-line method is envisaged in which the substrate is mounted on a tray and the tray is then transferred vertically or obliquely upright to pass through the interior of the plurality of chambers.

The transfer device for transferring the substrate may include a tray on which the substrate is mounted, and a drive roller that contacts the bottom of the tray and is rotated by the motor to thereby provide thrust to the tray. That is, the prior art transfer device transfers the tray by a torque provided on the lower portion of the chamber and contacting the drive roller at the bottom of the tray. An example of such a transfer device is disclosed in Korean Patent Application Laid-Open No. 2003-0068292.

However, there is a limit because particles are generated as the friction between the drive roller and the bottom of the tray increases. The particles adhere to the transferred substrate, thereby causing defects in the display device, and causing defective devices in accordance with the development of high specification/high performance devices. Also, the particles are introduced into a vacuum pump for forming a vacuum inside the chamber, causing malfunction of the vacuum pump.

The present invention provides a substrate transfer device capable of preventing generation of particles by transferring a substrate without contacting the tray.

The present invention also provides a substrate transfer device capable of preventing the generation of particles due to the transfer of the tray while being magnetically suspended.

According to an exemplary embodiment, a substrate transfer apparatus includes: a tray on which the substrate is mounted; a magnetic transfer unit disposed under the tray, magnetically suspending the tray, and transferring the tray by magnetic force; And a guiding unit that guides the transfer of the tray without contacting the tray.

The substrate transfer device can further include a transfer substrate including a contact region provided to contact the underside of the tray and an extended region extending downwardly from both sides of the contact region.

The magnetic transfer unit may include: a magnetic suspension portion disposed on one region of the transfer substrate and magnetically suspending the tray; and a magnetic transfer portion disposed under the magnetic suspension portion to transfer the magnetically suspended tray in one direction.

The magnetic suspension portion may include: a first magnetic suspension portion contacting the transfer substrate and including at least one magnet; and a second magnetic suspension portion spaced apart from the first magnetic suspension portion and containing the first magnetic suspension to be applied At least one magnet of at least one of a portion of the suction and repulsive force.

The magnetic transfer portion may include: a rotating shaft; a magnetic rotating portion including a plurality of magnets disposed to surround the rotating shaft; and a magnetic transfer portion spaced apart from the magnetic rotating portion and including a plurality of magnets.

The substrate transfer device may further include a accommodating portion that accommodates the magnetic rotating portion inside, wherein an upper portion of the accommodating portion contacts the second magnetic levitation portion.

The plurality of magnets of the magnetic transfer portion may be disposed on at least one region of the extended region of the transfer substrate, the one region facing the magnetic rotating portion.

The plurality of magnets of the magnetic rotating portion may be provided such that magnets having different polarities from each other are alternately disposed to surround the rotating shaft at a predetermined angle, and the plurality of magnets of the magnetic transfer portion may be provided to have each other Magnets of different polarities are alternately placed so as to have the same angle as the angle of the magnetic rotating portion.

The guiding unit may include: a first guiding magnet coupled to the upper portion of the tray; and a second guiding magnet disposed on the upper wall of the chamber to be spaced apart from the first guiding magnet by a predetermined distance, wherein The first guiding magnet and the second guiding magnet are applied with at least one of suction or repulsive force.

The guiding unit may further comprise a transfer guide disposed between the tray and the inner wall of the chamber.

The transfer guide can be disposed between the extended region and the inner wall of the chamber.

The substrate transfer device may further include a gap maintaining member provided on at least one region between the magnetic transfer unit and the guiding unit.

The gap maintaining member may be disposed on at least one of a region between the extended region and the magnetic suspension portion or a region between the extended region and the transfer guide.

At least a portion of the transfer guide is movable in a direction approaching the tray and in a direction away from the tray.

The transfer guide disposed in the traverse chamber may be located at a first position adjacent to the tray when the tray is transferred, and the transfer guide may be located at a second position away from the tray when the tray is returned.

Hereinafter, the exemplary embodiments will be described in more detail with reference to the accompanying drawings. However, the invention may be embodied in different forms and should not be construed as being limited to the embodiments set forth herein. Rather, the embodiments are provided so that this disclosure will be thorough and complete, and the scope of the invention will be fully conveyed by those skilled in the art.

1 is a front elevational view of a substrate transfer apparatus according to a first exemplary embodiment, and FIG. 2 is a side view illustrating a substrate transfer apparatus according to a first exemplary embodiment. That is, FIG. 1 is a front view from the direction in which the substrate is mounted, and FIG. 2 is a side view. 3 is a side view illustrating a magnetic transfer unit of the substrate transfer device according to the first exemplary embodiment, and FIG. 4 is a schematic view illustrating a magnetic transfer portion of the substrate transfer device according to the first exemplary embodiment.

Referring to FIGS. 1 through 4, a substrate transfer apparatus according to an exemplary embodiment may include a tray 100 that transfers a substrate mounted thereon, and a magnetic transfer unit 200 disposed under the tray 100 to magnetically cause the The tray 100 is suspended, and the tray 100 is transferred by magnetic force; and a guiding unit 300 disposed above the tray 100 to guide the transfer of the tray 100.

The tray 100 is provided in the shape of a hollow rectangular frame on which the substrate is mounted. That is, the tray 100 may be manufactured in the shape of a hollow rectangular frame such that four strips having a predetermined length are provided on the upper side, the lower side, the left side, and the right side, spaced apart from each other by a predetermined distance, and the ends of the strips are in contact with each other. Further, a plurality of jigs for detachably holding the substrate may be provided on the tray 100. Here, the edges of the substrate may contact the four sides of the tray 100 by a predetermined width, and the substrate may be fixed by a jig. This tray 100 is transferred in a state in which the substrate is mounted thereon and the tray is vertically or obliquely erected. That is, a plurality of chambers are connected in one direction, and a predetermined process such as a thin film deposition process is performed on the substrate while the tray 100 on which the substrate is mounted moves through the inside of the plurality of chambers. The plurality of chambers through which the tray 100 moves may include: a loading chamber in which the substrate is mounted on the tray 100; and a plurality of deposition chambers in which a predetermined film is deposited on the substrate mounted on the tray 100 And traversing the chamber in which the tray 100 is lifted and the position of the tray 100 is moved. That is, the substrate is mounted on the tray 100 in the loading chamber, and then a plurality of thin films are deposited on the substrate while the tray moves through the plurality of deposition chambers, and then the position of the tray is moved in the traverse chamber So that the tray can be moved towards the loading chamber. Here, the loading chamber, the plurality of deposition chambers, and the traverse chamber may maintain a vacuum state. Also, the substrate may be various substrates for manufacturing a flat panel display device including a liquid crystal display device, and may be made of a material including, for example, glass, plastic, film, or the like. In addition, the transfer substrate 110 that contacts a portion of the transfer unit 200 may be disposed under the tray 100. The transfer substrate 110 may be disposed on the entire area of the bottom of the tray 100. That is, the transfer substrate 110 may have the same length as the length of the bottom of the tray 100, and may be coupled to the bottom of the tray 100 to have a predetermined thickness in the downward direction. The transfer substrate 110 may include a first region 111 having the same width as the width of the tray 100, and a second region 112 disposed below the first region 111 and having a width smaller than the width of the tray 100 (eg, half the width of the tray 100). . Here, a portion of the magnetic transfer unit 200 may contact the second region 112. Of course, the transfer substrate 110 can be provided in a variety of shapes.

The magnetic transfer unit 200 magnetically suspends the tray 100 and transfers the tray 100 while maintaining a non-contact state with the tray 100. The magnetic transfer unit 200 may include a magnetic suspension portion 210 that magnetically suspends the tray 100, and a magnetic transfer portion 220 that is transferred by the magnetic suspension portion 210 by being applied with suction or repulsive force from the magnetic suspension portion 210. The suspended tray 100.

The magnetic suspension portion 210 can include a first magnetic suspension portion 211 that is provided to contact the transfer substrate 110, and a second magnetic suspension portion 212 that is provided to be spaced apart from the first magnetic suspension portion 211. Here, the second magnetic suspension portion 212 may be disposed between the tray 100 and the inner wall of the plurality of chambers through which the tray 100 is transferred. Here, the second magnetic suspension portion 212 may be fixed to an inner wall of the plurality of chambers through which the tray 100 is transferred, and fixed at a predetermined height from a bottom portion of the chamber. That is, the tray 100 on which the substrate is mounted may be transferred through a plurality of chambers connected in series, and the first magnetic suspension portion 211 may be coupled to two of the second regions 112 of the transfer substrate 110 below the tray 100. The side surface, and the second magnetic suspension portion 212 may be disposed between the tray 100 and the chamber to face the first magnetic suspension portion 211 and may be coupled to the inner or bottom surface of the chamber.

As illustrated in FIG. 3, the first magnetic floating portion 211 may include: a first fixing member 211a fixed to both side surfaces of the second region 112 of the transfer substrate 110, and a predetermined portion provided on a side surface of the first fixing member 211a At least one first magnet 211b on the area, and at least one second magnet 211c provided on a predetermined area of the bottom surface of the first fixing member 211a. That is, each of the first magnet 211b and the second magnet 211c may be provided as a single magnet, or at least any one of the first magnet 211b and the second magnet 211c may be provided as two or more than two magnet. For example, the first magnet 211b can be provided as a single magnet, and the second magnet 211c can be provided as two or more than two magnets. The first fixing member 211a may be provided in a substantially hexahedral shape having a predetermined height and width, and may have the same length as the length of the second region 112 along the second region 112 of the transfer substrate 110 and have a depression with the second region 112 The same width as the depth. Therefore, the first magnetic floating portion 211 can be coplanar with the transfer substrate 110. That is, the width defined by the first fixing member 211a and the second region 112 between the first fixing members may be the same as the width of the first region 111 of the transfer substrate 110 or the same as the width of the tray 100. Of course, the width defined by the second region 112 and the first magnetic floating portion 211 on one side and the other side of the second region 112 may also be greater or smaller than the width of the transfer substrate 110 or the width of the tray 100. Also, the first magnet 211b and the second magnet 211c may be provided to be embedded in the first fixing member 211a to a predetermined depth. That is, the first magnet 211b and the second magnet 211c may be disposed at a predetermined depth in the first fixing member 211a such that the surfaces of the first magnet 211b and the second magnet 211c may be coplanar with the surface of the first fixing member 211a. The first fixing member 211a may be formed of a material such as metal, ceramic, plastic, or the like that does not respond to the magnetic force generated by the magnet, and may be formed of, for example, tungsten.

The second magnetic suspension portion 212 may be provided to be spaced apart from the first magnetic suspension portion 211 by a predetermined distance and to face the first magnetic suspension portion 211. That is, the second magnetic suspension portion 212 may be disposed on the inner wall side of the chamber and spaced apart from the first magnetic suspension portion 211 such that the inner surface thereof faces the first magnetic suspension portion 211. The second magnetic suspension portion 212 may include a second fixing member 212a spaced apart from and facing the first fixing member 211a of the first magnetic suspension portion 211, and a first surface facing the first magnetic suspension portion 211, respectively. A magnet 211b and a third magnet 212b and a fourth magnet 212c of the second magnet 211c. Here, each of the third magnet 212b and the fourth magnet 212c may be provided as a single magnet, or at least one of the third magnet 212b and the fourth magnet 212c may be provided to correspond to the first magnet 211b and Two or more than the number of the second magnets 211c. For example, when one first magnet 211b and two or more second magnets 211c are provided, one third magnet 212b and two or more than four fourth magnets 212c may be provided. Further, the second fixing member 212a may be coupled to and fixed to the inner wall or the bottom surface of the chamber, and may be provided such that one side has a "└" shape and the other side has a "┘" shape so as to have a rectangular cross shape. The first fixing members 211a of the cross section are spaced apart by a predetermined distance. The first magnet 211b and the third magnet 212b may have different polarities from each other and suction may function therebetween. However, the second magnet 211c and the fourth magnet 212c may have the same polarity as each other, and the repulsive force may function therebetween. The repulsive force acts between the second magnet 211c and the fourth magnet 212c, and thus the tray 100 can be suspended. Also, the suction acts between the first magnet 211b and the third magnet 212b, and thus the tray 100 can be prevented from moving up and down. That is, the tray 100 can be magnetically suspended and moved upward by the repulsive force between the second magnet 211c and the fourth magnet 212c, and the repulsive force can be acted between the first magnet 211b and the third magnet 212b. Suction inhibition. Similar to the first fixing member 211a, the second fixing member 212a may be formed of a material such as metal, ceramic, plastic, or the like that does not respond to the magnetic force generated by the magnet, and may be formed of, for example, tungsten.

The first magnetic suspension portion 211 may be disposed on the entire area of the transfer substrate 110 in the longitudinal direction of the tray 100 (that is, in the transfer direction of the tray 100), and the second magnetic suspension portion 212 may be disposed on the tray 100 to be worn. Over the entire area. That is, since the tray 100 passes through the inside of the plurality of chambers, the second magnetic suspension portion 212 may be provided on a region of the inner wall of the plurality of chambers facing the first magnetic suspension portion 211. However, at least any one of the first magnetic suspension portion 211 and the second magnetic suspension portion 212 may be provided in plurality such that the at least one of the first magnetic suspension portion 211 and the second magnetic suspension portion 212 A plurality of are arranged at predetermined intervals. For example, the second magnetic floating portion 212 may be disposed over the entire area in the length direction, and a plurality of first magnetic floating portions 211 may be provided to cause the plurality of first magnetic floating portions 211 to be disposed at predetermined intervals. Moreover, the first magnet 211b and the second magnet 211c of the first magnetic suspension portion 211 and the third magnet 212b and the fourth magnet 212c of the second magnetic suspension portion 212 may be disposed on the entire area in the longitudinal direction, and may also be Multiples are provided and separated by predetermined intervals. For example, the first magnet 211b and the second magnet 211c may also be disposed over the entire area, and the third magnet 212b and the fourth magnet 212c may also be provided at predetermined intervals.

Also, a gap maintaining member 213 for maintaining a gap between the first magnetic floating portion 211 and the second magnetic floating portion 212 may be disposed between the first magnetic floating portion 211 and the second magnetic floating portion 212. That is, since the suction acts between the first magnet 211b and the third magnet 212b facing each other, the gap between the first magnetic suspension portion 211 and the second magnetic suspension portion 212 is reduced or the first magnet 211b and the first The three magnets 212b may be attached to each other. The gap between the first magnetic suspension portion 211 and the second magnetic suspension portion 212 can be maintained by providing the gap maintaining member 213. The gap maintaining member 213 may be disposed on a region below the first magnet 211b and the third magnet 212b. That is, the gap maintaining member 213 may be disposed between the outer surface of the first magnetic floating portion 211 and the inner surface of the second magnetic floating portion 212. Also, the gap maintaining member 213 may be provided over the entire area in the longitudinal direction between the first magnetic floating portion 211 and the second magnetic floating portion 212, and a plurality of gap maintaining members 213 may be provided at predetermined intervals.

The magnetic transfer portion 220 may include a magnetic rotating portion 221 provided to be spaced apart from the bottom surface of the transfer substrate 110 by a predetermined distance, and a magnetic transfer portion 222 disposed under the transfer substrate 110 to be spaced apart from the magnetic rotating portion 221 by a predetermined distance.

The magnetic rotating portion 221 may be provided to be spaced apart from the bottom surface of the transfer substrate 110 by a predetermined distance. Here, the magnetic rotating portion 221 may have the same width as the width of the tray 100, and may also have a width larger or smaller than the width of the tray 100. As illustrated in FIGS. 3 and 4, the magnetic rotating portion 221 may include a rotating shaft 221a and a plurality of fifth magnets 221b formed on a surface of the rotating shaft 221a. The rotating shaft 221a may have a substantially circular strip shape and be rotated in one or the other direction by a rotary motor (not shown). Also, the plurality of fifth magnets 221b may be provided on the surface of the rotating shaft 221a around the axis at a predetermined angle, and may have a thread shape, for example. That is, a plurality of the fifth magnets 221b (as illustrated in FIG. 4) may be provided on the rotating shaft 221a to surround the shaft at an angle (for example, 45°). Here, the plurality of fifth magnets 221b may be provided such that the S poles and the N poles are alternately provided while being rotated around the rotation axis by an angle (for example, 45°).

The magnetic transfer portion 222 may be disposed under the transfer substrate 110. That is, the magnetic transfer portion 222 may be disposed under the second region 112 of the transfer substrate 110 between the magnetic suspension portions 210. In this magnetic transfer portion 222, magnets having different polarities from each other are alternately disposed. That is, as illustrated in FIG. 4, the magnetic transfer portion 222 may include a third fixing member 222a fixed to the bottom surface of the second region 112 of the transfer substrate 110, and a plurality of surfaces provided on one surface of the third fixing member 222a. The sixth magnet 222b, in which the polarities are different from each other, that is, the S pole and the N pole may be alternately supplied to the plurality of sixth magnets 222b. Here, the plurality of sixth magnets 222b of the magnetic transfer portion 222 may be provided to have the same angle (for example, 45°) as the angle of the plurality of fifth magnets 221b of the magnetic rotating portion 221. Therefore, since the polarity due to the rotation of the magnetic rotating portion 221 and the polarity of the magnetic transfer portion 222 are different or the same from each other, and the suction or repulsive force acts thereby, the magnetic transfer portion 222 is in one direction according to the rotation of the magnetic rotating portion 221. Move on. That is, the rotation of the magnetic rotating portion 221 is converted into linear motion of the magnetic transfer portion 222 to move the magnetically suspended tray 100.

The guiding unit 300 may include a first guiding magnet 310 coupled to an upper portion of the tray 100, and a second guiding magnet 320 disposed on an upper wall of the chamber to be spaced apart from the first guiding magnet 310 by a predetermined distance . Here, the first guiding magnet 310 and the second guiding magnet 320 may have the same polarity such that the repulsive force acts therebetween, or may have different polarities from each other such that the suction acts therebetween. Further, the first guiding magnet 310 and the second guiding magnet 320 may be provided in various shapes. For example, the first guiding magnet 310 and the second guiding magnet 320 may be provided in a straight shape facing each other. Also, the first guiding magnet 310 may be provided in a circular strip shape, and the second guiding magnet 320 may have a cross section curved, for example, in a '∩' shape to surround the first guiding magnet 310 above the self-guide magnet 310. That is, the second guiding magnet 320 may be provided to surround the first guiding magnet 310 while being spaced apart from the first guiding magnet 310 by a predetermined distance. Therefore, the upper end of the tray 100 is guided so that the tray 100 does not fall while being transferred, because the second guiding magnet 320 applies a thrust to the first guiding magnet 310 on both sides of the first guiding magnet 310 or pull.

An electromagnet in which a core and a coil are combined, a permanent magnet or a combination of an electromagnet and a permanent magnet can be used as the magnet of the exemplary embodiment.

As described above, the substrate transfer apparatus according to the exemplary embodiment includes the magnet transfer unit 200 disposed under the tray 100 and magnetically suspending and transferring the tray 100, and a guide unit disposed above the tray 100 and guiding the tray 100 300. Also, the magnet transfer unit 200 includes a magnetic suspension portion 210 that magnetically suspends the tray 100, and a magnetic transfer portion 220 of the tray 100 that is converted into linear motion due to magnetic force to transfer the magnetic suspension. Therefore, the substrate transfer apparatus according to the exemplary embodiment magnetically suspends the tray 100 by the magnetic suspension portion 210, and then the magnetic rotating portion 220 is rotated in one direction to transfer the magnetically suspended tray 100 in one direction. In this exemplary embodiment, since no friction is generated between the tray 100 and the magnetic transfer unit 200, no particles are generated. Therefore, product defects due to the particles are not generated, and failure of parts such as a vacuum pump does not occur.

The substrate transfer device according to the exemplary embodiment can be implemented by magnetically suspending the tray 100 under the tray 100 and by various methods using the magnetic transfer tray 100. That is, the structure under the tray 100 can be modified in different ways. Another illustrative example of this is illustrated in Figures 5 and 6. FIG. 5 is a side view illustrating a magnetic transfer unit of a substrate transfer apparatus according to a second exemplary embodiment, and a second exemplary embodiment will be described below by using this FIG. 5.

Referring to FIG. 5, a substrate transfer apparatus according to a second exemplary embodiment may include: a tray 100 that transfers a substrate mounted thereon; a magnetic transfer unit 200 disposed under the tray 100 to transfer the tray 100 by magnetic suspension; And a guiding unit 300 disposed above the tray 100 to guide the transfer of the tray 100. Here, the same configuration as the first exemplary embodiment will not be described or simply described.

The transfer substrate 110 is disposed under the tray 100, and the transfer substrate 110 may include a first region 111 having the same width as the width of the tray 100, a second region 112 disposed below the first region 111 and having a width smaller than the first region 111, And a third region 113 disposed under the second region 112 to surround the magnetic rotating portion 222. The third region 113 may include an extending portion extending downward from the second region 112, a horizontal portion 113a horizontally disposed below the extending portion, and vertical portions 113b and 113c extending downward from both sides of the horizontal portion 113a. Here, the horizontal portion 113a is provided to have a width larger than the width of the magnetic rotating portion 221 and the vertical portions 113b and 113c are provided to have a height larger than the height of the magnetic rotating portion 221. Therefore, the horizontal portion 113a and the vertical portions 113b and 113c on both sides of the horizontal portion are provided to surround the upper portion and the side portion of the magnetic rotating portion 221.

The magnetic transfer unit 200 may include a magnetic suspension portion 210 that magnetically suspends the tray 100, and is magnetically suspended by the magnetic suspension portion 210 by allowing suction or repulsive force to act between the magnetic transfer unit 200 and the magnetic suspension portion 210. The magnetic transfer portion 220 of the tray 100.

The magnetic suspension portion 210 can include a first magnetic suspension portion 211 disposed on the second region 112 of the transfer substrate 110, a second magnetic suspension portion 212 provided to be spaced apart from the first magnetic suspension portion 211, for maintaining the first A gap maintaining member 213 of the gap between the magnetic suspension portion 211 and the second magnetic suspension portion 212, and a support member 214 supporting the second magnetic suspension portion 212. The first magnetic suspension portion 211 may include: a first fixing member 211a fixed to a side surface and a bottom surface of the second region 112 of the transfer substrate 110, at least one on a predetermined region of a side surface of the first fixing member 211a A magnet 211b, and at least one second magnet 211c provided on a predetermined area of the bottom surface of the first fixing member 211a. The first fixing member 211a may be provided to have one side having a "└" shape and another side having a "┘" shape. Here, the first fixing member 211a may be provided to protrude from the first region 111 of the transfer substrate 110. That is, the width defined by the first fixing member 211a and the second region 112 between the first fixing members may be greater than the width of the first region 111 of the transfer substrate 110 or the width of the tray 100. Also, each of the first magnet 211b and the second magnet 211c may be provided as a single magnet, or at least any one of the first magnet 211b and the second magnet 211c may be provided by two or more than two magnets. For example, the first magnet 211b can be provided as a single magnet, and the second magnet 211c can be provided as two or more than two magnets. The second magnetic floating portion 212 may be provided to be spaced apart from the first magnetic floating portion 211 by a predetermined distance to face the first magnetic floating portion 211. The second magnetic suspension portion 212 may include a second fixing member 212a spaced apart from and facing the first fixing member 211a of the first magnetic suspension portion 211, and a first magnet facing the first magnetic suspension portion 211, respectively The third magnet 212b and the fourth magnet 212c of the second magnet 211c. Here, each of the third magnet 212b and the fourth magnet 212c may be provided by a single magnet, or at least one of the third magnet 212b and the fourth magnet 212c may correspond to the first magnet 211b and the second magnet 211c Two or more than two magnets are provided. For example, when one first magnet 211b and two or more second magnets 211c are provided, one third magnet 212b and two or more than four fourth magnets 212c may be provided. Further, the second fixing member 212a may be provided to have one side having a "└" shape and another side having a "┘" shape to be spaced apart from the first fixing member 211a by a predetermined distance. A support member 214 may be disposed under the second magnetic suspension portion 212 to support the second magnetic suspension portion 212. That is, the support member 214 may be disposed between the horizontal portion of the second magnetic suspension portion 212 and the bottom of the chamber to support the horizontal portion of the second magnetic suspension portion 212. The support member 214 supports the horizontal portion of the second magnetic suspension portion 212, and thus the second magnetic suspension portion 212 can be more stably supported. That is, the vertical portion of the second magnetic suspension portion 212 is fixed by the inner wall of the chamber and the horizontal portion of the second magnetic suspension portion 212 is supported by the support member 214, and thus the second magnetic suspension portion 212 can be further Implemented steadily. A portion of the transfer substrate 110 and the magnetic transfer portion 220 may be disposed inside the support member 214. That is, the third region 113 of the transfer substrate 110 may be disposed inside the support member 214, and the magnetic transfer portion 220 may be disposed inside the third region 113.

The magnetic transfer portion 220 may include a magnetic rotating portion 221 and a magnetic transfer portion 222 spaced apart from the magnetic rotating portion 221 by a predetermined distance. The magnetic rotating portion 221 may be provided inside the horizontal portion 113a and the vertical portions 113b and 113c to be spaced apart therefrom by a predetermined distance. The magnetic transfer portion 222 may be provided on at least one of the horizontal portion 113a and the vertical portions 113b and 113c. Similar to the exemplary embodiment, the magnetic rotating portion 221 includes a rotating shaft 221a, and a plurality of fifth magnets 221b provided to surround the surface of the rotating shaft 221a at a predetermined angle. The magnetic transfer portion 222 can be provided to the vertical portions 113b and 113c. That is, the magnetic transfer portion 222 may be provided to both sides of the magnetic rotating portion 221. Of course, the magnetic transfer portion 222 can also be provided to the horizontal portion 113a and also to both the horizontal portion 113a and the vertical portions 113b and 113c. The magnetic transfer portion 222 may be provided with a predetermined fixing member, and the S pole and the N pole may be alternately provided on the fixing member. Here, the magnetic transfer portion 222 may be provided to have the same angle (for example, 45°) as the angle of the plurality of fifth magnets 221b of the magnetic rotating portion 221. Therefore, since the polarity due to the rotation of the magnetic rotating portion 221 and the polarity of the magnetic transfer portion 222 are identical to each other, and the suction is thereby actuated, the magnetic transfer portion 222 moves in one direction according to the rotation of the magnetic rotating portion 221. That is, the rotation of the magnetic rotating portion 221 is converted into linear motion of the magnetic transfer portion 222 to move the magnetically suspended tray 100.

FIG. 6 is a side view illustrating a magnetic transfer unit of a substrate transfer device according to a third exemplary embodiment.

Referring to FIG. 6, a substrate transfer apparatus according to a third exemplary embodiment may include: a tray 100 that transfers a substrate mounted thereon; a magnetic transfer unit 200 disposed under the tray 100 to transfer the tray 100 by magnetic suspension; And a guiding unit 300 disposed above the tray 100 to guide the transfer of the tray 100. Here, in the third exemplary embodiment, the structure of the magnetic suspension portion 210 of the magnetic transfer unit 200 is different from that of the second exemplary embodiment described using FIG. 5, and this will mainly utilize another exemplary embodiment. The description is as follows.

The magnetic suspension portion 210 of the magnetic transfer unit 200 may include a first magnetic suspension portion 211 disposed on the second region 112 of the transfer substrate 110, and a second magnetic suspension portion 212 provided with the first magnetic suspension portion 211 Separated; a gap maintaining member 213 for maintaining a gap between the first magnetic floating portion 211 and the second magnetic floating portion 212; and a support member 214 supporting the second magnetic floating portion 212. The first magnetic suspension portion 211 may include: a first fixing member 211a fixed to a side surface and a bottom surface of the second region 112 of the transfer substrate 110, and having one side having a "└" shape and having a "┘" shape The other side; at least one first magnet 211b provided on a predetermined area of the upper surface of the first fixing member 211a; and at least one second magnet 211c provided on a predetermined area of the bottom surface of the first fixing member 211a . That is, although the first magnet 211b is provided on the side surface of the first fixing member 211a in the first and second exemplary embodiments, the first magnet 211b may be provided in the first fixing member 211a in the third embodiment. On the upper surface. Here, the first magnet 211b may be disposed on the upper surface of the first fixing member 211a while being spaced apart from the side surface of the first region 111 of the transfer substrate 110. Also, the second magnetic suspension portion 212 may be provided to be spaced apart from the first magnetic suspension portion 211 by a predetermined distance to face the first magnetic suspension portion 211. The second magnetic suspension portion 212 may include a second fixing member 212a spaced apart from and facing the first fixing member 211a of the first magnetic suspension portion 211, and a first surface facing the first magnetic suspension portion 211, respectively. The magnet 211b and the third magnet 212b and the fourth magnet 212c of the second magnet 211c. Here, the second fixing member 212a may be spaced apart from and facing the first fixing member 211a by a predetermined distance, and may be provided to have one side having a "ᄃ" shape and another side having a "コ" shape to face The upper surface of the first fixing member 211a. The second fixing member 212a may be provided to have a short upper side surface and a long lower side surface, and spaced apart from the first fixing member 211a by the same distance within the entire area thereof. Here, the first magnet 211b and the third magnet 212b may have different polarities from each other, and the suction force may act thereby. The second magnet 211c and the fourth magnet 212c may have the same polarity with each other, and the repulsive force may function thereby. Further, a magnet in which the suction force acts may be further provided on the side surface of the first fixing member 211a and the side surface of the second fixing member 212a.

FIG. 7 is a side view illustrating a guiding unit 300 in accordance with an exemplary embodiment.

Referring to FIG. 7, the guiding unit 300 according to an exemplary embodiment may include: a first board 311 coupled to an upper portion of the tray 100; a first guiding magnet 310 disposed on the first board 311; and a second board The holder is fixed to the upper wall of the chamber; the second guiding magnet 320 is spaced apart from the first guiding magnet 310 by a predetermined distance and is disposed on the second plate 321; the side plate 330 is from the side of the second plate 321 The surface extends downward; a third guiding magnet 340 is disposed on a side surface of the first plate 311; and a fourth guiding magnet 350 is spaced apart from the third guiding magnet 340 by a predetermined distance and faces the third guiding The magnet 340 is also disposed on the side plate 330; and a second gap maintaining member 360 is provided on a predetermined area of the side plate 330 to maintain a gap between the side plate 330 and the guiding magnets 310, 320, 340, and 350. Here, the third guiding magnet 340 and the fourth guiding magnet 350 may also be disposed between the second plate 321 above the second guiding magnet 320 and the side plate 330 facing the second plate, and may also be disposed at The first plate 311 is spaced between the side plate 330 facing the first plate and the second plate 321 and the side plate 330 facing the second plate. Also, the first guiding magnet 310 and the second guiding magnet 320 may have the same polarity such that the repulsive force acts therebetween, or may have different polarities from each other such that the suction acts therebetween. Also, the third guiding magnet 340 and the fourth guiding magnet 350 may have the same polarity such that the repulsive force acts therebetween. Therefore, the upper end portion of the tray 100 can be transferred by the suction between the first guiding magnet 310 and the second guiding magnet 320 and the repulsive force between the third guiding magnet 340 and the fourth guiding magnet 350. Guide without falling. That is, since the repulsive force is applied from the side surface by the third guiding magnet 340 and the fourth guiding magnet 350, the vertical direction of the tray 100 is compared with the case where the first guiding magnet 310 and the second guiding magnet 320 are used. Posture shifting is easier to perform. Also, since the second gap maintaining member 360 is further provided, the swing width of the tray 100 can be uniformly maintained, and thus the vertical posture shift of the tray 100 can be performed more easily.

The transfer guide of the transfer tray 100 can be further disposed under the tray 100. The transfer guide can be provided to be spaced apart from the tray 100 by a predetermined distance with the tray 100 disposed therebetween. A transfer guide can be provided between the tray 100 and the inner wall of the chamber. That is, two transfer guides may be provided to be spaced apart from the tray 100 by a predetermined distance between the side surface of the chamber and the tray 100. For example, in FIGS. 3, 5, and 6, the transfer guide may be disposed outside of the magnetic suspension portion 210. That is, the transfer guide may be disposed between the second magnetic suspension portion 212 of the magnetic suspension portion 210 and the inner wall of the chamber. The second magnetic suspension portion 212 can be secured from the bottom surface of the chamber when the transfer guide is disposed between the second magnetic suspension portion 212 and the inner wall of the chamber. A substrate transfer device including the transfer guide will be described below using Figs. 8 and 9.

FIG. 8 is a side view illustrating a magnetic transfer unit of a substrate transfer device according to a fourth exemplary embodiment.

Referring to FIG. 8, a substrate transfer apparatus according to a fourth exemplary embodiment may include: a tray 100 that transfers a substrate mounted thereon; a magnetic transfer unit 200 disposed under the tray 100 to transfer the tray 100 by magnetic suspension; And a guiding unit 300 for guiding the tray 100. The guiding unit 300 can be disposed above and below the tray 100. The configuration described and illustrated in FIG. 7 can be disposed above the tray 100, and a transfer guide 370 for guiding the transfer of the tray 100 can be disposed under the tray 100. Here, in the fourth exemplary embodiment, configurations identical to those in the first to third exemplary embodiments will be briefly described or will not be described.

The transfer substrate 110 is disposed under the tray 100, and the transfer substrate 100 may include: a first region 111 having the same width as the width of the tray 100; and an extension region 114 disposed on a side surface of the first region 111 and surrounding the magnetic The portion 221 is rotated. That is, the extended region 114 can be provided to extend downward from the side surface of the first region 111. Here, the extended region 114 may be provided to have a width larger than the width of the magnetic rotating portion 221 so as to be spaced apart from the magnetic rotating portion 221 by a predetermined distance. This extended region 114 may be provided in a plate shape having a predetermined width and length. Also, the gap maintaining member 213 may be provided on a predetermined area inside the extended region 114. That is, in the third exemplary embodiment described using FIG. 6, the gap maintaining member 213 is provided between the first magnetic floating portion 211 and the second magnetic floating portion 212 to be maintained at the first magnetic floating portion 211 and the second. A gap between the magnetic suspension portions 212. In the fourth exemplary embodiment, the gap maintaining member 213 may be disposed inside the extended region 114 between the extended region 114 and the magnetic transfer portion 220. Of course, the gap maintaining member 213 may also be provided on one area of the magnetic transfer portion 220. That is, the gap maintaining member 213 may be provided between the extended region 114 and the magnetic transfer portion 220, or provided to be fixed to a predetermined region of the magnetic transfer portion 220. At least one seventh magnet 115 may be disposed on at least one region of the extended region 114, that is, on an outer region of the extended region.

The magnetic transfer unit 200 may include a magnetic suspension portion 210 of the magnetic suspension tray 100, and transfer the tray 100 magnetically suspended by the magnetic suspension portion 210 by allowing suction or repulsive force to act between the magnetic transfer unit 200 and the magnetic suspension portion 210. Magnetic transfer portion 220. The magnetic suspension portion 210 can include a first magnetic suspension portion 211 that is provided to be secured to the first region 111 of the transfer substrate 110, and a second magnetic suspension portion 212 that is provided to be spaced apart from the first magnetic suspension portion 211. The first magnetic suspension portion 211 may include a first fixing member 211a fixed to a lower surface of the first region 111 of the transfer substrate 110, and at least one first magnet 211b provided on a predetermined region of a lower surface of the first fixing member 211a . The first fixing member 211a whose upper portion is fixed to the lower portion of the first region 111 and the bottom surface thereof may be horizontal. Here, the width of the first fixing member 211a larger than the width of the first region 111 may be provided. Since the first fixing member 211a is provided to have a width larger than the width of the first region 111, the extended region 114 contacting the side surface of the first fixing member 211a may be provided to have a width larger than the width of the first region 111. Also, at least one first magnet 211b may be disposed under the first fixing member 211a, for example, three magnets may be provided while maintaining the same interval therebetween. The second magnetic floating portion 212 may be provided to be spaced apart from the first magnetic floating portion 211 by a predetermined distance to face the first magnetic floating portion 211. The second magnetic suspension portion 212 may include a second fixing member 212a spaced apart from and facing the first fixing member 211a of the first magnetic suspension portion 211, and at least one facing the first magnetic suspension portion 211 At least one third magnet 212b of a magnet 211b. Also, the second fixing member 212a may be provided to have the same shape as that of the first fixing member 211a so as to be spaced apart from the first fixing member 211a by a predetermined distance. For example, the first fixing member 211a and the second fixing member 212a may have a rectangular cross-sectional shape. Here, the second fixing member 212a of the second magnetic floating portion 212 may be fixed to one region of the magnetic transfer portion 220.

The magnetic transfer portion 220 may include a magnetic rotating portion 221, a magnetic transfer portion 222 spaced apart from the magnetic rotating portion 221 by a predetermined distance, and a receiving member 223 in which the magnetic rotating portion 221 is accommodated. The accommodating member 223 accommodates the magnetic rotating portion 221 inside, and the lower portion thereof can be fixed to the bottom of the chamber. Here, the receiving member 223 may be provided to have a hollow shape such that the magnetic rotating portion 221 may be rotatably accommodated therein. Also, the accommodating member 223 may be provided such that at least a portion of the magnetic transfer portion 222 is exposed at its side surface. Also, the second magnetic suspension portion 212 may be provided on the upper surface of the accommodating member 223. That is, the second fixing member 212a of the second magnetic suspension portion 212 may be fixed to the upper portion of the accommodating member 223. The magnetic transfer portion 222 may include at least one magnet and may be disposed on the extended region 114 facing the magnetic rotating portion 221. That is, the extension region 114 may be disposed outside the accommodation member 223 to be spaced apart from the accommodation member 223 by a predetermined distance, and the magnetic transfer portion 222 including at least one magnet may be disposed inside the extension region 114 so as to face the accommodation member 223 Magnetic rotating portion 221.

A transfer guide 370 can be disposed between the magnetic transfer unit 200 and the chamber. That is, the guiding unit 300 can guide the transfer of the tray 100 above and below the tray 100. The transfer guide 370 may be disposed under the tray 100 to guide the transfer of the magnetic transfer unit 200 from the side surface of the magnetic transfer unit 200. The transfer guide 370 can be disposed between the magnetic transfer unit 200 and the inner surface of the chamber, and can have a predetermined width and height. Also, at least one magnet is provided on a predetermined area on the inner side surface of the transfer guide 370. That is, the transfer guide 370 may include a vertical plate 371 disposed between the magnetic transfer unit 200 and the chamber in the height direction, and at least one eighth magnet 372 provided on a predetermined region of the vertical plate 371. The vertical plate 371 may be provided to have a height such as the first magnetic suspension portion 211. That is, the vertical plate 371 may be provided to have a height up to a boundary surface between the first region 111 of the transfer substrate 110 and the first fixing member 211a of the first magnetic suspension portion 211. Also, at least one eighth magnet 372 is provided to the vertical plate 371. The eighth magnet 372 can be provided to face the seventh magnet 115 disposed on the extended region 114. Here, the seventh magnet 115 of the extended region 114 and the eighth magnet 372 of the vertical plate 371 may have different polarities or the same polarity from each other, and suction or repulsive force may function thereby. The transfer guide 370 inside the deposition chamber may be fixed, and the transfer guide 370 inside the traverse chamber may move in a direction approaching or away from the tray 100. Here, the transfer guide inside the traverse chamber can be moved without contact using magnetic suspension. That is, the same principle as that used in the magnetic transfer portion described using FIG. 4 can be applied to the transfer guide 370 of the traverse chamber. For example, a magnetic rotating portion (not shown) including a rotating shaft (not shown) and a plurality of magnets (not shown) provided on the surface of the rotating shaft may be provided below the vertical plate 371 to be opposed to the vertical plate 371. Magnets spaced apart and having different polarities from each other may be provided on the lower surface of the vertical plate 371 at a predetermined interval to be spaced apart from the magnetic rotating portion. Therefore, the polarity due to the rotation of the magnetic rotating portion below the vertical plate 371 and the polarity of the magnetic transfer portion above the magnetic rotating portion may be different from each other or the same as each other. Since the suction or repulsive force acts thereby, the magnetic transfer portion moves in one direction or the other according to the rotation of the magnetic rotating portion. That is, the rotation of the magnetic rotating portion is converted into linear motion of the magnetic transfer portion, and thus the magnetically suspended vertical plate 371 is moved.

9 is a side view illustrating a magnetic transfer unit of a substrate transfer device according to a fifth exemplary embodiment.

Referring to FIG. 9, a substrate transfer apparatus according to a fifth exemplary embodiment may include: a tray 100 that transfers a substrate mounted thereon; a magnetic transfer unit 200 disposed under the tray 100 to transfer the tray 100 by magnetic suspension; And a guiding unit 300 for guiding the tray 100. The guiding unit 300 can be disposed above and below the tray 100. The configuration described and illustrated in FIG. 7 can be disposed above the tray 100, and the transferred transfer guide 370 of the guide tray 100 can be disposed below the tray 100. Here, in the fifth exemplary embodiment, the placement position of the gap maintaining member 213 is different from the seating position of the fourth exemplary embodiment described using FIG. That is, the substrate transfer device according to the fifth exemplary embodiment has the same with the substrate transfer device according to the fourth exemplary embodiment except that the gap maintaining member 213 is provided between the transfer guide 370 and the extended region 114. The same configuration. The gap maintaining member 213 may be provided on the extended region 114 between the transfer guide 370 and the extended region 114 or on a predetermined region of the transfer guide 370. For example, the gap maintaining member 213 may be disposed under the seventh magnet 115 of the extended region 114. Therefore, the gap maintaining member 213 can be disposed between the magnetic transfer unit 200 and the transfer guide 370, and thus the magnetic transfer unit 200 can be transferred inside the transfer guide 370 even when the magnetic transfer unit 200 is shaken. Of course, the gap maintaining member 213 may be provided not only between the transfer guide 370 and the extended region 114 but also between the extended region 114 and the magnetic transfer portion 220. That is, at least two or more than two gap maintaining members 213 may be provided on at least two or more than two regions.

At least a portion of the transfer guide 370 can be moved in one direction or in another direction opposite the one direction. For example, the transfer guide inside the deposition chamber is fixed, and the transfer guide inside the traverse chamber can be movable. That is, when the tray 100 is transferred from the deposition chamber, the transfer guide provided inside the traverse chamber guides the transfer of the tray 100 by maintaining the first gap from the tray 100, and when the transfer of the tray 100 is completed And when the tray returns toward the loading chamber, the transfer guide disposed inside the traverse chamber moves toward the inner wall of the chamber and maintains a second gap from the tray 100 that is larger than the first gap. The transfer guide moves inside the traverse chamber, and thus the movement margin of the tray 100 can be increased as the position of the tray 100 moves. That is, the tray 100 can be decoupled from the magnetic force, and thus it is possible to achieve easy traverse (i.e., lane change). The substrate transfer device in which the transfer guide 370 is moved will be described below using FIGS. 10 and 11.

10 and 11, the substrate transfer apparatus according to the sixth exemplary embodiment may include: a tray 100 that transfers a substrate mounted thereon; and a magnetic transfer unit 200 disposed under the tray 100 to be transferred by magnetic levitation A tray 100; and a guiding unit 300 including a transfer guide 370 disposed under the tray 100 to guide the transfer of the tray 100. The transfer guides 370 are movable in one direction and the other direction opposite to each other, and are movable in a direction approaching the tray 100 and in a direction away from the tray 100. The movable transfer guide 370 can be disposed at least within the traverse chamber.

The transfer guide 370 may include a vertical plate 371a and a horizontal plate 371b, and the vertical plate 371a may be disposed above the horizontal plate 371b.

That is, the vertical plate 371a may be vertically provided in the upward direction from a predetermined area of the horizontal plate 371b. Also, in the vertical plate 371a, at least one eighth magnet 372 may be provided to face the seventh magnet 115 provided on the extended region 114 of the tray 100. The horizontal plate 371b may be disposed below the vertical plate 371a and may be provided horizontally. Here, the movable portion 395 may be disposed below the horizontal plate 371b. The movable portion 395 can be provided such that at least a portion of its lower region surrounds the rail 390 and can move along one and the other direction opposite each other along the rail 390. When the movable portion 395 moves, the transfer guide 370 located above it moves. The support portion 380 is disposed below the guide rail 390. The support portion 380 supports the rail 390 and the transfer guide 370 above the rail. Further, a driving unit (not shown) for driving the movable portion 395 may be provided inside the support portion 380. The drive unit includes a cylinder, a motor or the like, and moves the movable portion 395 in one direction approaching the tray 100 as illustrated in FIG. 10 and in another direction away from the tray 100 as illustrated in FIG. Here, when the tray 100 is transferred from the deposition chamber, the transfer guide 371 is located at a first position close to the tray 100. In the case where the redirection is performed (that is, traversed to return the tray 100 toward the loading chamber), the movable portion 395 is driven by the driving unit such that the transfer guide 371 moves in a direction away from the tray 100 to be located at the second Location. After the transfer guide 371 is moved, the tray 100 is lifted and then returned toward the loading chamber. Then, the transfer guide 371 is again moved to the first position.

A substrate transfer apparatus according to an exemplary embodiment includes: a magnetic transfer portion below the tray, the magnetic transfer portion magnetically suspending and transferring a tray on which the substrate is mounted; and a guiding unit above the tray and on the tray On the side surface, the guiding unit guides the movement of the tray. Therefore, since friction is not generated between the tray and the magnetic transfer portion, no particles are generated, and thus product defects caused by the particles do not occur and failure of parts such as a vacuum pump does not occur.

In the substrate transfer device according to the exemplary embodiment, at least a portion of the transfer guide of the transfer tray may be moved in a direction approaching the tray and in a direction away from the tray. That is, when the tray is transferred, the transfer guide of the traverse chamber is placed close to the tray, and when the tray is returned, the transfer guide of the traverse chamber is placed away from the tray to allow the position of the tray to be Move easily. Therefore, when the position of the tray is moved in the traverse chamber, the movement margin of the tray can be increased.

As described above, the technical idea of the present invention has been specifically described with respect to the above embodiments, but it should be noted that the foregoing embodiments are provided only for the purpose of illustration and not limitation. Various embodiments may be provided to allow those skilled in the art to understand the scope of the invention, but the invention is not limited thereto.

100‧‧‧Tray
110‧‧‧Transfer substrate
111‧‧‧First area
112‧‧‧Second area
113a‧‧‧ horizontal section
113b‧‧‧ vertical part
113c‧‧‧ vertical part
114‧‧‧Extended area
115‧‧‧ seventh magnet
200‧‧‧Magnetic transfer unit
210‧‧‧Magnetic suspension
211‧‧‧First magnetic suspension section
211a‧‧‧First fixed component
211b‧‧‧First magnet
211c‧‧‧second magnet
212‧‧‧Second magnetic suspension section
212a‧‧‧Second fixed component
212b‧‧‧third magnet
212c‧‧‧fourth magnet
213‧‧‧Gap maintenance component
214‧‧‧Support members
220‧‧‧Magnetic transfer part
221‧‧‧Magnetic rotating part
221a‧‧‧Rotary axis
221b‧‧‧ fifth magnet
222‧‧‧Magnetic Transfer Section
222a‧‧‧ third fixed member
222b‧‧‧ sixth magnet
223‧‧‧ accommodating components
300‧‧‧Guide unit
310‧‧‧First guiding magnet
311‧‧‧ first board
320‧‧‧Second guiding magnet
321‧‧‧ second board
330‧‧‧ side panels
340‧‧‧ Third Guide Magnet
350‧‧‧4th guiding magnet
360‧‧‧Second gap maintenance member
370‧‧‧Transfer guides
371‧‧‧ vertical board
371a‧‧‧ vertical board
371b‧‧‧ horizontal board
372‧‧‧8th magnet
380‧‧‧Support section
390‧‧‧rails
395‧‧‧ movable part

The exemplary embodiments may be understood in more detail in the following description in conjunction with the accompanying drawings in which: FIG. 1 is a front elevational view of a substrate transfer apparatus in accordance with an exemplary embodiment. 2 is a side view illustrating a substrate transfer device in accordance with an exemplary embodiment. 3 is a side view illustrating a magnetic transfer unit of a substrate transfer device according to a first exemplary embodiment. 4 is a schematic view illustrating a magnetic transfer portion of a substrate transfer device according to a first exemplary embodiment. FIG. 5 is a side view illustrating a magnetic transfer unit of a substrate transfer device according to a second exemplary embodiment. FIG. 6 is a side view illustrating a magnetic transfer unit of a substrate transfer device according to a third exemplary embodiment. FIG. 7 is a side view illustrating a guiding unit of a substrate transfer device, according to an exemplary embodiment. FIG. 8 is a side view illustrating a magnetic transfer unit of a substrate transfer device according to a fourth exemplary embodiment. 9 is a side view illustrating a magnetic transfer unit of a substrate transfer device according to a fifth exemplary embodiment. 10 and 11 are side views illustrating a substrate transfer device according to a sixth exemplary embodiment.

100‧‧‧Tray

110‧‧‧Transfer substrate

111‧‧‧First area

114‧‧‧Extended area

115‧‧‧ seventh magnet

211‧‧‧First magnetic suspension section

211a‧‧‧First fixed component

211b‧‧‧First magnet

212‧‧‧Second magnetic suspension section

212a‧‧‧Second fixed component

212b‧‧‧third magnet

213‧‧‧Gap maintenance component

221‧‧‧Magnetic rotating part

221a‧‧‧Rotary axis

221b‧‧‧ fifth magnet

222‧‧‧Magnetic Transfer Section

223‧‧‧ accommodating components

370‧‧‧Transfer guides

371‧‧‧ vertical board

372‧‧‧8th magnet

Claims (15)

A substrate transfer device comprising: a tray on which a substrate is mounted; a magnetic transfer unit disposed under the tray and configured to magnetically suspend the tray and transfer the tray by magnetic force; And a guiding unit configured to direct the transfer of the tray without contacting the tray. The substrate transfer device of claim 1, further comprising a transfer substrate comprising a contact region provided to contact a lower side of the tray, and downward from both sides of the contact region Extended extension area. The substrate transfer device of claim 2, wherein the magnetic transfer unit comprises: a magnetic suspension portion disposed on a region of the transfer substrate to magnetically suspend the tray; and a magnetic transfer portion It is placed below the magnetic suspension portion to transfer the tray suspended by magnetic force in one direction. The substrate transfer device of claim 3, wherein the magnetic suspension portion comprises: a first magnetic suspension portion configured to contact the transfer substrate and including at least one magnet; and a second magnetic suspension a portion that is spaced apart from the first magnetically suspended portion and that includes at least one magnet that is to be applied with at least one of a suction force and a repulsive force from the first magnetically suspended portion. The substrate transfer device of claim 4, wherein the magnetic transfer portion comprises: a rotating shaft; a magnetic rotating portion including a plurality of magnets disposed to surround the rotating shaft; and a magnetic transfer portion It is spaced apart from the magnetic rotating portion and includes a plurality of magnets. The substrate transfer device of claim 5, further comprising a receiving portion configured to accommodate the magnetic rotating portion therein, wherein an upper portion of the receiving portion contacts the second magnetic floating portion. The substrate transfer device of claim 6, wherein the plurality of magnets of the magnetic transfer portion are provided on at least one region of the extended region of the transfer substrate, the one region facing the The magnetic rotating part is described. The substrate transfer device of claim 7, wherein the plurality of magnets of the magnetic rotating portion are provided such that the magnets having different polarities from each other are alternately disposed to surround the rotation at a predetermined angle a shaft, and the plurality of magnets of the magnetic transfer portion are provided such that the magnets having different polarities from each other are alternately disposed so as to have the same angle as the angle of the magnetic rotating portion. The substrate transfer device of claim 2, wherein the guiding unit comprises: a first guiding magnet coupled to an upper portion of the tray; and a second guiding magnet disposed in the cavity The upper wall of the chamber is spaced apart from the first guiding magnet by a predetermined distance, wherein the first guiding magnet and the second guiding magnet are applied with at least one of suction or repulsive force. The substrate transfer device of claim 9, wherein the guiding unit further comprises a transfer guide disposed between the tray and an inner wall of the chamber. The substrate transfer device of claim 10, wherein the transfer guide is disposed between the extended region and the inner wall of the chamber. The substrate transfer device of claim 11, further comprising a gap maintaining member provided on at least one region between the magnetic transfer unit and the guiding unit. The substrate transfer device of claim 12, wherein the gap maintaining member is disposed between a region between the extended region and the magnetic suspension portion or between the extended region and the transfer guide At least one of the areas. The substrate transfer device of claim 11, wherein at least a portion of the transfer guide moves in a direction approaching the tray and in a direction away from the tray. The substrate transfer device of claim 14, wherein the transfer guide disposed in the traverse chamber is located at a first position adjacent to the tray when the tray is transferred, and The transfer guide is located at a second position away from the tray when the tray is returned.