KR101767667B1 - Apparatus for transferring substrate and the method for transferring substrate using it - Google Patents

Apparatus for transferring substrate and the method for transferring substrate using it Download PDF

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Publication number
KR101767667B1
KR101767667B1 KR1020150135577A KR20150135577A KR101767667B1 KR 101767667 B1 KR101767667 B1 KR 101767667B1 KR 1020150135577 A KR1020150135577 A KR 1020150135577A KR 20150135577 A KR20150135577 A KR 20150135577A KR 101767667 B1 KR101767667 B1 KR 101767667B1
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South Korea
Prior art keywords
tray
unit
path
guide
transfer
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KR1020150135577A
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Korean (ko)
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KR20170036429A (en
Inventor
김선길
이기태
김영범
민문영
전승배
박성규
홍원호
천민호
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한국알박(주)
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A transfer unit and a guide unit provided on the upper and lower sides of the tray, respectively, and at least a part of each of the transfer unit and the guide unit to transfer the position of the tray in the direction crossing the transfer path And a control unit connected to the tray position changing unit and the tray position changing unit for changing and controlling the operation of the transfer unit and the guide unit is used to bring the tray on which the substrate is placed into the carrying area, At least a part of the transfer unit and the guide unit arranged in the upper and lower parts of the tray in the area are moved in synchronization with each other to move the tray in the direction to change the position of the tray. Thus, friction between the tray, the transfer unit, and the guide unit is not generated, so that generation of particles can be reduced, and occurrence of product defects due to particles can be suppressed and prevented.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer apparatus and a substrate transfer method using the same,

The present invention relates to a substrate transfer apparatus and a substrate transfer method using the same, and more particularly, to a substrate transfer apparatus capable of easily changing the position of a tray on which a substrate is placed, and a substrate transfer method using the same.

2. Description of the Related Art Generally, a liquid crystal display device (LCD), a plasma display panel (PDP), a field emission display (FED), an electro luminescence display device A flat panel display device (FPD) such as an organic light emitting diode (ELD) is manufactured by performing a plurality of processes on a substrate. That is, a deposition process, a photolithography process, and an etching process are repeated a plurality of times on a substrate, and processes such as cleaning, lapping, and cutting are performed to manufacture a flat panel display.

The manufacturing process of such a flat panel display device proceeds in a plurality of chambers provided with an optimal environment. To this end, an in-line method has been considered in which a substrate is placed on a tray, and then the tray is vertically or inclinedly moved to pass through a plurality of chambers.

The conveying device for conveying the substrate may include a tray on which the substrate is placed and a driving roller that contacts the bottom of the tray and provides thrust to the tray by being rotated by the motor. That is, in the conventional conveying apparatus, the lower portion of the tray and the drive roller provided below the chamber are brought into contact with each other, and the tray is moved by the rotational force of the drive roller. An example of such a transfer device is disclosed in Korean Patent Publication No. 2003-0068292.

However, as the frictional force between the driving roller and the lower portion of the tray increases, particles are generated. The particles are adhered to the transported substrate, causing a defect of the display device. This causes a problem that the demand for high-end and high-performance quality of the devices required according to development trends can not be met. Further, particles may be introduced into the vacuum pump for forming a vacuum in the chamber, which may cause the failure of the vacuum pump.

The present invention provides a substrate transfer apparatus capable of preventing generation of particles by transferring a tray in a non-contact manner, and a substrate transfer method using the same.

The present invention provides a substrate transfer apparatus capable of shortening the operation time by simple transfer, and a substrate transfer method using the same.

The substrate transfer apparatus according to an embodiment of the present invention includes a tray on which a substrate is mounted, a transfer unit provided on a lower side of the tray to form a transfer path for transferring the tray, a transfer unit for transferring the tray, A tray position changing unit connected to at least a part of each of the conveying unit and the guide unit for changing a position of the tray in a direction crossing the conveyance path, And a control unit for controlling operations of the transfer unit and the guide unit.

Wherein the transfer unit and the guide unit are connected to one of a pair of stationary portions and a pair of the stationary portions disposed in a processing region where the substrate is processed, And may include a single variation portion to be disposed.

Wherein the tray position changing unit includes a first position changing unit disposed below the variation part of the conveying unit and forming a changing path in a direction crossing the movement path of the tray, And a second position changing unit that forms the change path.

Wherein the first position changing portion comprises a first changing path forming body forming the changing path under the variation portion of the conveying unit, a support block disposed between the first changing path forming body and the changing portion of the conveying unit, And a first driving unit connected to the support block to allow the support block to reciprocate along the change path.

Wherein the second position changing portion comprises a second changing path forming body forming the changing path above the variation portion of the guide unit, a support frame disposed between the second changing path forming body and the variable portion of the guide unit, And a second driving unit connected to the second change path forming body and allowing the support frame to reciprocate along the changing path.

The control unit may interlock the first position changing unit and the second position changing unit to synchronize the movement of the variation unit of the transfer unit and the variation unit of the guide unit.

The first modified path forming body may include a plurality of first path forming guide members extending from the changing path, and the supporting block may be disposed on the first path forming guide member.

The first driving unit includes a first driving shaft passing through the supporting block and extending to the changing path, a first supporting shaft surrounding at least a part of the first driving shaft and mounted through the supporting block, And a first driver connected to the first driving shaft to rotate the first driving shaft.

The second modified path forming body includes a plurality of second path forming guide members extending from the changing path and a second moving block placed on the second path forming guide member and horizontally movable with the changing path .

The second driving unit includes a second driving shaft extending through the second moving block and extending to the changing path, a second supporting shaft surrounding at least a part of the second driving shaft and mounted through the second moving block, And a second driver connected to the second drive shaft to rotate the second drive shaft.

And a judging unit connected to the conveying unit, the guide unit and the control unit for judging whether or not the stationary portion and the varying portion of the conveying unit and the stationary portion and the varying portion of the guide unit face each other in parallel have.

The transport unit may be provided with at least one of the variation unit of the transport unit and the variation unit of the guide unit to provide power for transporting the tray to the stationary unit.

The transfer unit and the guide unit can transfer the tray by magnetic force.

A method of transferring a substrate according to an embodiment of the present invention includes the steps of bringing a tray on which a substrate is placed into a conveying region, synchronizing at least a part of a conveying unit and a guide unit disposed at upper and lower portions of the tray in the conveying region, Moving the tray in a position changing direction, and taking the tray out of a path different from the path in which the tray is carried.

The step of synchronizing at least a part of the transfer unit and the guide unit and moving the tray in the direction for changing the position of the tray may be performed by integrally moving the tray, the variation part of the transfer unit and the variation part of the guide unit.

Wherein the step of synchronizing at least a part of the transfer unit and the guide unit and moving the transfer unit in the direction of changing the position of the tray includes rotating the first and second drive shafts of the fluctuation part of the transfer unit and the fluctuation part of the guide unit, And the linear motion of the first support shaft and the second support shaft of the variation unit of the transfer unit and the variation unit of the guide unit, respectively.

The step of bringing the tray into the carrying region and the step of taking out the tray may be performed by moving only the tray.

The substrate transfer apparatus and the substrate transfer method using the same according to the embodiment of the present invention change positions by integrating a tray on which a substrate is placed and a transfer unit and a guide unit arranged on the upper and lower sides of the tray. That is, the position of the tray can be easily changed by synchronizing the operation of a part of the guide unit and a part of the conveying unit in which the tray is supported. Therefore, since friction between the tray, the transfer unit, and the guide unit is not generated, generation of particles is reduced, and occurrence of product defects due to particles can be suppressed and prevented. And, the failure of the accessory such as the vacuum pump does not occur.

1 is a front view of a substrate transfer apparatus according to an embodiment of the present invention;
2 is a perspective view of a substrate transfer apparatus according to an embodiment of the present invention;
FIG. 3 is a perspective view of a substrate transfer apparatus except for the chamber of FIG. 2; FIG.
4 is a side view of a substrate transfer apparatus according to an embodiment of the present invention;
5A is a side view of a transfer unit according to an embodiment of the present invention.
5B is a side view of a transfer unit according to a modification of the present invention;
6A to 6D are process drawings showing a substrate transfer method using a substrate transfer apparatus according to an embodiment of the present invention.
FIG. 7 is a schematic view for explaining a movement path of a tray according to an embodiment of the present invention; FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but is capable of other various forms of implementation, and that these embodiments are provided so that this disclosure will be thorough and complete, It is provided to let you know completely.

The substrate transfer apparatus according to the embodiment of the present invention is an apparatus for facilitating the positional movement of the substrate, and it is possible to shorten the time required to move the substrate, thereby improving the efficiency and productivity of the apparatus provided with the substrate transfer apparatus . Hereinafter, a substrate transfer apparatus and a substrate transfer method using the same according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 7.

1 is a front view of a substrate transfer apparatus according to an embodiment of the present invention. 2 is a perspective view of a substrate transfer apparatus according to an embodiment of the present invention. 3 is a perspective view of the substrate transfer apparatus except the chamber of FIG. 4 is a side view of a substrate transfer apparatus according to an embodiment of the present invention. FIG. 5A is a side view of a transfer unit according to an embodiment of the present invention, and FIG. 5B is a side view of a transfer unit according to a modification of the present invention. Hereinafter, FIG. 5 refers to both FIGS. 5A and 5B.

1 to 5, a substrate transfer apparatus according to an embodiment of the present invention for easily transferring a substrate in a transfer region R · A of a substrate, includes a tray 100 on which a substrate is mounted, A conveying unit 200 provided below the tray 100 to form a path for moving the tray 100 and conveying the tray 100; a conveying unit 200 connected to an upper portion of the tray 100 to guide the conveyance of the tray 100; The tray position changing unit 400 and the tray position changing unit 400 which are connected to at least a part of the guide unit 300, the transfer unit 200 and the guide unit 300 to change the position of the tray 100, And a control unit 500 for controlling the control unit 500. In the present invention, the transport unit 200 and the guide unit 300 are described as being configured to transport the tray 100 by magnetic force. However, the transport unit 200 and the guide unit 300 are configured such that the tray 100 is slid And may be in various forms. The transfer unit 200 and the guide unit 300, which will be described later, are connected to one of a pair of fixing portions and a pair of fixing portions arranged in the processing region T 占 where the substrate is processed, And a single fluctuation portion disposed in the carrying region R 占 to change the position of the tray 100, respectively. The fixed part of the guide unit 300 is fixed to the fixed guide part 300A and the fluctuating part is the fluctuation guide part 300B. Lt; / RTI >

The tray 100 is provided with an empty hollow square frame to mount the substrate. That is, the tray 100 is provided with four bars having predetermined lengths spaced vertically and horizontally by a predetermined distance, and the edges of the bars are brought into contact with each other, so that the center portion can be formed into a hollow rectangular frame. Further, the tray 100 may be provided with a plurality of clamps for clamping the substrate so that the substrate can be detached. At this time, the substrate can be contacted to the four sides of the tray 100 with a predetermined width and fixed by a clamp. The tray 100 is loaded with the substrate and transported in a vertical or inclined state. That is, a plurality of chambers are connected in one direction, and a predetermined process such as a thin film deposition process is performed on the substrate while the tray 100 on which the substrate is mounted moves within the plurality of chambers. The plurality of chambers through which the tray 100 moves include a loading chamber for placing the substrate on the tray 100, a plurality of deposition chambers for depositing a predetermined thin film on the substrate mounted on the tray 100, And a traverse chamber that lifts and moves the position of the substrate. That is, after the tray 100 seats the substrate in the loading chamber, a plurality of thin films are deposited on the substrate while moving the plurality of deposition chambers, and the position in the traverse chamber can be shifted toward the loading chamber. At this time, the loading chamber, the deposition chamber, and the traverse chamber may perform processing of the substrate in a vacuum state. In addition, the substrate may be a variety of substrates for manufacturing a flat panel display device including a liquid crystal display device, and may be made of a material including, for example, glass, plastic, film, and the like. A transfer base 110, which is in contact with a part of the transfer unit 200, is provided below the tray 100.

The transfer base 110 may be provided in the entire area under the tray 100. That is, the transfer base 110 is provided at the same length as the lower portion of the tray 100, and may be connected to the lower portion of the tray 100 to have a predetermined thickness downward. The transfer base 110 includes a first region 111 having the same width as the width of the tray 100 and a second region 111 disposed on the side of the first region 111 and surrounding the magnetic rotating means 221. [ 0.0 > 114 < / RTI > That is, the second region 114 may extend from the side of the first region 111 downward. Here, the second region 114 may be provided at a larger interval than the width of the magnetic rotating means 221 so as to be spaced apart from the magnetic rotating means 221 by a predetermined distance. The second region 114 may be provided in a plate shape having a predetermined width and length. In addition, a space maintaining unit 213 may be provided in a predetermined area inside the second area 114. That is, the gap maintaining means 213 may be provided inside the second region 114 between the second region 114 connected to the tray 100 and the magnetic transfer member 220. Of course, the gap maintaining means 213 may be provided in one region of the magnetic transfer member 220. [ That is, the gap maintaining means 213 may be fixed to a predetermined region of the second region 114 or the magnetic transfer body 220 between the second region 114 and the magnetic transfer body 220. At least one seventh magnet 115 may be provided in at least one region of the second region 114, that is, in the outer region.

The transfer unit 200 magnetically levitates the tray 100 to maintain the non-contact state with the tray 100 and transfer the tray 100. The transfer unit 200 forms a transfer path of the tray 100 so that the tray 100 can move inside the plurality of chambers. At this time, the transfer unit 200 includes the above-described loading chamber, a fixed transfer unit 200A that forms a transfer path of the tray 100 to a plurality of deposition chambers, and a variable transfer unit 200A that forms the path of movement of the tray 100 in the traverse chamber. (200B). That is, the fixed portion of the transfer unit 200 mentioned above is the fixed transfer portion 200A, and the variable portion may be the variable transfer portion 200B.

Each of the stationary conveyance section 200A and the fluctuation conveyance section 200B includes a magnetic levitation body 210 magnetically levitating the tray 100 and a magnetic levitation body 210 And a magnetic transfer member 220 for transferring the tray 100 magnetically levitated by the magnetic transfer member 220.

The stationary conveyance section 200A is for forming a movement path of the tray 100 in a chamber excluding a traverse chamber for moving the position of the tray 100. The stationary conveyance section 200A is a structure in which the reciprocating movement of the tray 100 is divided To be moved in the region where the light is emitted. 1, the fixed transfer unit 200A includes a fixed transfer unit 200A that forms a path for moving the tray 100 before the traverse chamber when the tray 100 is sequentially moved to the loading chamber, the plurality of deposition chambers, 1 fixed feeder 200A and a second fixed feeder 200A that forms a path of movement of the tray 100 outside the traverse chamber when the tray 100 is transported from the traverse chamber. At this time, the first fixed transferring part 200A and the second fixed transferring part 200A are spaced apart from each other and arranged in a line, thereby forming a forward and backward movement path of the tray 100. [ In the meantime, in the present invention, the first fixed transfer unit 200A is a path passing through the tray 100 for moving to the traverse chamber, and the second fixed transfer unit 200A is a path for moving the tray 100 from the traverse chamber Means a route passing through. However, the present invention is not limited to this, and the roles of the first fixed transfer unit 200A and the second fixed transfer unit 200A may be reversed. That is, the fixed conveyance section 200A focuses on the formation of the path of the conveyance and conveyance of the tray 100 to the traverse chamber in a separated state.

The variable conveyance section 200B is disposed close to the end of the fixed conveyance section 200A and receives the tray 100 from the fixed conveyance section 200A. That is, the variable conveyance section 200B forms a path of movement of the tray 100 in the traverse chamber, and is formed to be parallel to the end of the first fixed conveyance section 200A and the end of the second fixed conveyance section 200A . That is, the variable conveyance unit 200B forms an unfixed movement path of the tray 100, and the end thereof is aligned with the end of the first fixed conveyance unit 200A by the tray position changing unit 400 described later, And may be parallel to the end of the stationary conveyance section 200A. Accordingly, the fluctuating conveyance unit 200B can receive the tray 100 moved through the path of the first fixed conveyance unit 200A to be transferred to the traverse chamber, and deliver the same to the second fixed conveyance unit 200A.

The magnetic levitation body 210 includes a first magnetic levitation means 211 fixed to the first region 111 of the transfer base 110 and a second magnetic levitation means 211 separated from the first magnetic levitation means 211, And may include lifting means 212. The first magnetic levitation means 211 includes a first fixing member 211a fixed to the lower surface of the first region 111 of the transfer base 110 and a second fixing member 211b fixed to the lower surface of the first region 111 of the transfer base 110, Of the first magnet 211b. The upper side of the first fixing member 211a is coupled to the lower side of the first region 111, and the lower side of the first fixing member 211a can be horizontal. At this time, the width of the first fixing member 211a may be larger than the width of the first region 111. [ Since the first fixing member 211a is provided with a width wider than the width of the first region 111, the second region 114, which is in contact with the side surface of the first fixing member 211a and extends downward, As shown in Fig. At least one first magnet 211b may be provided under the first fixing member 211a. For example, three first magnets 211b may be provided at the same interval. The second magnetic levitation means 212 may be provided to face the first magnetic levitation means 211 at a predetermined distance from the first magnetic levitation means 211. The second magnetic levitation means 212 includes a second fixed member 212a facing the first fixed member 211a of the first magnetic levitation means 211 and spaced apart from the first fixed member 211a by a predetermined distance, And at least one third magnet 212b facing at least one first magnet 211b of the first magnet 211b. The second fixing member 212a may be formed in the same shape as the first fixing member 211a so as to be spaced apart from the first fixing member 211a by a predetermined distance. For example, the first and second fixing members 211a and 212a may have a rectangular cross-sectional shape. At this time, the second fixing member 212a of the second magnetic levitation means 212 may be fixed to one region of the magnetic transfer means 220. [

The magnetic transfer member 220 includes a magnetic rotating means 221, a magnetic transfer means 222 spaced apart from the magnetic rotating means 221 by a predetermined distance, a receiving means 223 for receiving the magnetic rotating means 221 inside, . ≪ / RTI > The receiving means 223 may receive the magnetic transfer means 222 therein and the lower side may be fixed to the chamber bottom surface. At this time, the receiving means 223 is provided in a hollow shape so that the magnetic transfer means 222 can be accommodated therein and rotated. Further, the receiving means 223 may be provided such that at least a part of the magnetic transfer means 222 is exposed on the side surface. The second magnetic levitation means 212 may be provided on the upper surface of the receiving means 223. That is, the second fixing member 212a of the second magnetic levitation means 212 can be fixed to the upper portion of the receiving means 223. The magnetic transfer means 222 may be provided in the second region 114 including at least one magnet and facing the magnetic rotating means 221. [ That is, the second region 114 is provided outside the receiving means 223 at a predetermined distance from the receiving means 223, and the inner region of the second region 114 is provided with the magnetic rotating means Magnetic transfer means 222 including at least one magnet may be provided so as to face the magnetism transfer means 221.

Meanwhile, a transfer guide 370 may be provided between the transfer unit 200 and the chamber. That is, the guide unit 300 can guide the conveyance of the tray 100 on the upper side and the lower side of the tray 100. The guide unit 300 can guide the conveyance of the tray 100 on the side of the conveyance unit 200, A conveyance guide 370 for guiding conveyance can be provided. The transfer guide 370 is provided between the transfer unit 200 and the inner surface of the chamber and may have a predetermined width and height. In addition, at least one magnet may be provided in a predetermined region of the transfer guide 370. That is, the transport guide 370 includes a vertical plate 371 provided between the transfer unit 200 and the chamber in the height direction, and at least one eighth magnet 372 provided in a predetermined area of the vertical plate 371 . The vertical plate 371 may be provided at the height of the first magnetic levitation means 211, for example. That is, the vertical plate 371 may be provided at a height up to the interface between the first area 111 of the transfer base 110 and the first fixing member 211a of the first magnetic levitation unit 211. At least one eighth magnet 372 is provided on the vertical plate 371. The eighth magnet 372 may be provided facing the seventh magnet 115 provided in the second region 114. [ At this time, the seventh magnet 115 of the second region 114 and the eighth magnet 372 of the vertical plate 371 may have different polarities or the same polarity, so that attraction or repulsive force may act. On the other hand, the conveyance guide 370 in the deposition chamber can be fixed, and the conveyance guide 370 in the traverse chamber can move in the direction away from and closer to the tray 100. [ At this time, the conveyance guide in the traverse chamber can move in a non-contact manner by using the magnetic levitation. That is, the conveyance guide 370 of the traverse chamber can use the same principle as the magnetic conveyance means. For example, a magnetic rotating means may be provided on the lower side of the vertical plate 371 and spaced apart from the vertical plate 371 to provide a rotating shaft (not shown) and a plurality of magnets (not shown) on the surface of the rotating shaft. Magnets of different polarities may be provided at predetermined intervals on the lower surface of the vertical plate 371 apart from the rotating means. Therefore, since the polarity of the magnetic rotation means on the lower side of the vertical plate 371 and the polarity of the magnetic transfer means on the upper side thereof have polarities different from each other or have the same polarity, The magnetic transfer means is moved in one direction or another direction in accordance with the rotation. That is, the rotational motion of the magnetic rotating means is converted into linear motion by the magnetic transfer means to move the vertical plate 371 magnetically levitated.

Referring to FIG. 5B, the transfer unit 200 according to the modification of the present invention is different in the formation position of the transfer unit 200 and the gap holding means 213 in the embodiment of the present invention described above. That is, the conveying unit 200 according to the modification of the present invention has all the same structure as that of the conveying unit of the embodiment, and the interval maintaining unit 213 is provided between the conveying guide 370 and the second area 114 different. The gap maintaining means 213 may be provided in a predetermined region of the second region 114 or the transfer guide 370 between the transfer guide 370 and the second region 114. [ For example, on the lower side of the magnet 115 of the second area 114. The gap holding means 213 is provided between the substrate transfer unit 200 and the transfer guide 370 so that the substrate transfer unit 200 is transferred inside the transfer guide 370 even when the substrate transfer unit 200 is shaken . Of course, the gap maintaining means 213 may be provided between the second region 114 and the magnetic transfer body 220 as well as between the transfer guide 370 and the second region 114. That is, at least two or more of the interval maintaining units 213 may be provided in at least two areas.

The guide unit 300 is disposed at an upper portion of the tray 100 to guide the conveyance of the tray 100. That is, the upper end of the tray 100 can be moved while being guided by the pulling force or the repulsive force of a guide magnet (not shown) provided on the guide unit 300 so that the tray 100 does not collapse. More specifically, a plurality of magnets (not shown) provided in the guide unit 300 generate attraction force or repulsive force on the upper surface of the tray 100, thereby making it possible to smoothly carry out vertical transportation of the tray 100 more smoothly. In addition, since the guide unit 300 further includes the second interval maintaining means (not shown) between the trays 100, the swing width of the tray 100 can be kept constant, Can be made more smooth. At this time, the guide unit 300 may include a fixed guide portion 300A and a variable guide portion 300B as in the case of the transfer unit 200. [ That is, in the guide unit 300, the fixing portion is the fixed guide portion 300A, and the variation portion may be the variation guide portion 300B. When the position of the tray 100 is changed through the tray position changing unit 400 to change the position of the tray 100, the guide unit 300 is divided into the fixed portion and the variable portion, The position must be fixed so that the position can be changed at the same time.

On the other hand, a determination unit (not shown) may be provided between the fixed unit and the variable unit of each of the transfer unit 200 and the guide unit 300 to determine whether the fixed unit and the variable unit face each other in parallel. That is, when the position of the tray 100 is changed, the fixed conveyance section 200A of the conveyance unit 200 and the variable conveyance section 200B are connected to each other in parallel and the fixed guide section 300A of the guide unit 300 and the variable guide section 300B are to be connected in parallel, the tray 100 can be brought in and carried in without being detached to the traverse chamber after the position change. When the fixed conveyance section 200A, the variable conveyance section 200B, the fixed guide section 300A and the variable guide section 300B are not connected in parallel, the conveyance of the tray 100 is stopped, .

The tray position changing unit 400 (hereinafter, a position changing unit) is for changing the position of the tray 100, and more particularly, for moving the tray 100 to the carrying position for transporting the tray in the traverse chamber Respectively. That is, as described above, when the trays 100 are transported to the other chambers in the traverse chamber and the trays 100 are transported to the traverse chamber, Location changes must be made. Therefore, the position changing unit 400 of the present invention can easily change the position of the tray 100, at least a part of the transfer unit 200 and the guide unit 300, that is, the variable transfer unit 200B, The position of the tray 300B may be changed to the transport position of the tray 100 to prevent the tray 100 from moving alone.

The position changing unit 400 is disposed at a lower portion of the fluctuation transfer unit 200B of the transfer unit 200 so as to be movable in the first direction The position changing portion 400A and the guide unit 300, that is, the second position that is located above the variation guide portion 300B and forms the movement path in the direction intersecting the movement path of the tray 100, And a changing unit 400B. That is, the first position changing unit 400A and the second position changing unit 400B can be interlocked with each other to change the position of the tray 100.

The first position changing portion 400A is connected to the lower side of the variable conveying portion 200B to form a movement path in a direction crossing the movement path of the tray 100. [ That is, the first position changing portion 400A forms a position changing path of the tray 100 below the tray 100 and moves the tray 100 and the variable conveying portion 200B in a direction intersecting the moving path (Hereinafter referred to as a change path). The first position changing portion 400A includes a first changing path forming body 410a disposed at a lower portion of the variable feeding portion 200B and a second changing path forming body 410b disposed between the first changing path forming body 410a and the variable feeding portion 200B And a first driving part 450a connected to the supporting block 430a and the supporting block 430a arranged to make the supporting block 430a reciprocate on the changing path.

The first change path forming body 410a may be formed to extend the length of the change path to allow the tray 100 to move. The first path forming member 410a includes a first path forming guide member 411a extending to the path of change and installed at the bottom of the chamber C and a second path forming guide member 411b extending from the first path forming guide member 411a, And a first moving block 413a disposed on the first path forming guide member 411a and movable along the first path forming guide member 411a. That is, the first path forming guide member 411a is formed by the length of the tray 100 moving to the changing path, and at least one of the first path forming guide member 411a may be installed at the bottom of the chamber C. The first path forming guide member 411a may include a plurality of the first path forming guide members 411a so that the tray 100 and the variable transferring unit 200B can stably move, and a plurality of the path forming guide members 411a may be spaced apart from each other. Thus, almost all the areas of the tray 100 and the fluctuating feed portion 200B in the moving direction can be supported. The first moving block 413a is disposed on the first path forming guide member 411a and can horizontally move along the path formed by the first path forming guide member 411a. At this time, the first moving block 413a may be provided to cover the entire upper portion of the first path forming guide member 411a. However, in the present invention, And is arranged on the member 411a so that the transfer driver (not shown) can be disposed close to the fluctuation transfer section.

The support block 430a is configured to connect the first path forming guide member 411a and the variable feed portion 200B and is provided between the first path forming guide member 411a and the variable feed portion 200B, 200B. The support block 430a moves along the change path by the first drive part 450a described later, thereby making it possible to move the variable feed part 200B along the change path. At this time, at least a portion of the support block 430a is directly contacted with the first path forming guide member 411a, so that the first path forming guide member 411a is positioned on the first path forming guide member 411a in the same manner as the first moving block 413a It can be moved horizontally.

The first driving unit 450a may be connected to the supporting block 430a to provide power to the supporting block 430a so that the supporting block 430a can reciprocate along the changing path. The first driving unit 450a includes a first driving shaft 451a extended along the changing path and a first supporting shaft 453a and a second driving shaft 452b formed to surround at least a portion of the first driving shaft 451a. And a first driver 455a connected to the first driving shaft 451a to rotate the first driving shaft 451a to move the first supporting shaft 453a along the first driving shaft 451a. That is, the first driving unit 450a rotates the first driving shaft 451a by the first driving unit 455a, and the first driving shaft 451a reciprocates along the changing path by the first driving shaft 451a, . The first support shaft 453a is fixed to the support block 430a and is not fixed to the first drive shaft 451a so that the change path can be slid along the first drive shaft 451a .

The second position changing portion 400B is connected to the upper side of the variation guide portion 300B and forms a changing path in the same direction as the changing path formed by the first position changing portion 400A. That is, the second position change unit 400B changes the position of the tray 100 and the variation guide unit 300B by forming a path through which the position of the tray 100 can be changed, on the upper side of the tray 100 . The second position change portion 400B includes a second change path formation body 410b disposed on the upper portion of the variation guide portion 300B and a second change path formation body 410b disposed between the second change path formation body 410b and the variation guide portion 300B And a second driving unit 450b connected to the supporting frame 430b and the second changing path forming member 410b disposed on the supporting frame 430b and allowing the supporting frame 430b to reciprocate along the changing path.

The second variable path forming member 410b is provided to form a path of change at an upper portion of the tray 100 and may be formed by extending the tray 100 to a length enough to move along the path of change. The second path forming member 410b includes a second path forming guide member 411b extending along the path of change over the tray 100 and a second path forming guide member 411b extending along the path forming guide member 411b. 2 motion block 413b. That is, the second path forming guide member 411b may be formed in contact with the upper portion of the chamber C, such that the tray 100 moves along the path of the change. At this time, a plurality of second path forming guide members 411b may be provided so that the tray 100 and the variation guide unit 300B can be stably positioned. That is, in the present invention, a pair of second path forming guide members 411b are provided apart from each other. The second moving block 413b is disposed on the second path forming guide member 411b and is provided for horizontally moving along the path formed by the second path forming guide member 411b. At this time, the second moving block 413b may be provided to cover almost the entire upper portion of the second path forming guide member 411b. Further, the second moving block 413b may be provided with a region to which a support frame 430b Respectively. On the other hand, the second modified path forming body 410b may be a combination of an LM guide and an LM block as in the first modified path forming body 410a.

The support frame 430b is provided to interconnect the second variable path forming member 410b and the variable guide portion 300B. More specifically, the support frame 430b is provided to connect the second movable block 413b And the other end is connected to the upper portion of the variation guide portion 300B. The support frame 430b is connected to the second moving block 413b which can slide the variable path along the second path forming guide member 411b. Accordingly, the movement of the second moving block 413b can be interlocked with the movement of the tray 100 and the variation guide portion 300B. One end connected to the second moving block 413b may be divided into a plurality of end portions and the other end connected to the variation guide portion 300B may be provided with a variable guide portion 300B in the direction of movement.

The second driving part 450b is connected to the second moving block 413b of the second changing path forming body 410b and is connected to the second moving block 413b so that the second moving block 413b can reciprocate along the changing path. Lt; / RTI > The second driving unit 450b includes a second driving shaft 451b extending along the changing path and a second supporting shaft 451b and a second driving shaft 451b formed to surround at least a part of the second driving shaft 451b. And a second driver 455b connected to the second driving shaft 451b to rotate the second driving shaft 451b. That is, the second driving unit 450b can reciprocate along the second driving shaft 451b, which rotates the second supporting shaft 451b by rotating the second driving shaft 451b by the second driving unit 455b have. The second support shaft 451b is fixed to the second movement block 413b and is not fixed to the second drive shaft so that it can slide along the second drive shaft 451b.

In the embodiment of the present invention, the second variable path forming body 410b is disposed outside the chamber C (that is, the upper part of the chamber C), the support frame 430b passes through the chamber C And connects the second moving block 413b and the variation guide portion 300B. Hence, the chamber C may be provided with a penetration portion C · H along the modification path so that the support frame 430b can move by the movement of the second movement block 413b. A sealing member (not shown) may be further provided to prevent the vacuum in the chamber C from being broken even if the support frame 430b is disposed through the chamber C.

However, it is needless to say that the second variable path forming member 410b may be disposed inside the chamber C. When the second variable path forming member 410b is provided in the chamber C, H) is not required. Thus, since the work for sealing the penetrating portion of the chamber C is unnecessary, the configuration of the facility can be prevented from increasing. Also, the production and efficiency of the process can be increased because no sealing area is formed and continuous maintenance is not required.

The control unit 500 is connected to the first position changing unit 400A and the second position changing unit 400B and is configured to interlock the first position changing unit 400A and the second position changing unit 400B, And the first position changing unit 400A and the second position changing unit 400B synchronize the operation. That is, the control unit 500 synchronizes the operations of the first position change unit 400A and the second position change unit 400B, thereby synchronizing the operation of the first position change unit 400A and the second position change unit 400B, The displacement guide portion 300B to which the position changing portion 400B is connected can be moved in the same manner. The control unit 500 is connected to the first driving unit 450a of the first position changing unit 400A and the second driving unit 450b of the second position changing unit 400B so that the first driving unit 450a And the second driving unit 450b may be operated simultaneously. Therefore, the configuration in which the first position changing portion 400A and the second position changing portion 400B respectively move in the same direction at the same point of time allows the tray 100, the variable conveying portion 200B, 300B can be easily integrated in a vertical state to change their positions.

Hereinafter, a substrate transfer method using a substrate transfer apparatus according to an embodiment of the present invention will be described with reference to FIGS. 6A to 6D. Here, Figs. 6A to 6D are process drawings showing a substrate transfer method using the substrate transfer apparatus.

A method of transferring a substrate according to an embodiment of the present invention includes the steps of bringing a tray 100 on which a substrate is placed into a conveying region R · A for conveyance, And moving the tray 100 in a direction different from the conveyed path of the tray 100. In this case, the tray 100 is moved in the direction of changing the position of the tray 100 in synchronization with the conveying unit and the variation guide unit 300B.

First, the substrate is loaded into the chamber after being placed on the tray 100. At this time, the tray 100 is sequentially transferred in the order of the loading chamber, the processing chamber, and the traverse chamber along the extended path. At this time, the path formed in the loading chamber and the processing chamber is a fixed path and a path that can be changed in the path formed in the traverse chamber. That is, the guide unit 300 and the transfer unit 200 are disposed on the upper and lower sides of the tray 100 and are transported by magnetic levitation. When the transport unit 200 and the processing chamber are connected to each other, And is guided through the fixed guide portion 300A of the guide unit 300 and the fixed guide portion 300A of the guide unit 300 and supported by the variable conveyance portion 200B and the variation guide portion 300B. As such, since the tray 100 carried into the traverse chamber is to be transported to return to the loading chamber again for the subsequent process or to move the substrate out of the chamber, a change of the position of the tray 100 in the traverse chamber is required. That is, the tray 100 is transported in a path different from the path in which the tray 100 is brought in, so that the substrate can be continuously processed.

When the tray 100 is brought into the area for changing the position, that is, the carrying area, the control unit 500 moves the first position changing unit 400A connected to the lower side of the tray 100 and the upper side And the second position changing unit 400B connected to the second position changing unit 400B. That is, the control unit 500 simultaneously operates the first driver 455a of the first position change unit 400A and the second driver 455b of the second position change unit 400B, and the first driver 455a, The second drive shaft 451b is rotated by the second driver 455b. At this time, the rotational motion of each of the first driving shaft 451a and the second driving shaft 451b is converted into linear motion of the first supporting shaft 453a and the second supporting shaft 451b connected to the first driving shaft 451a and the second driving shaft 451b, respectively. The support block 430a and the support frame 430b connected to the first support shaft 453a and the second support shaft 451b are connected to each other in a direction in which the first support shaft 453a and the second support shaft 451b move That is, along the changing path, thereby changing the position of the tray 100. [

7 is a schematic view for explaining a movement path of a tray according to an embodiment of the present invention.

7, the substrate transfer apparatus of the present invention is configured such that the operations of the first position changing portion 400A and the second position changing portion 400B of the tray position changing unit 400 are synchronized by the control unit 500 , The position of the tray 100, the variable conveyance unit 200B, and the variation guide unit 300B in the traverse chamber can be changed. That is, the operation of the first driving portion 450a of the first position changing portion 400A and the operation of the second driving portion 450b of the second position changing portion 400B are synchronized, and the tray 100, the variable conveying portion 200B, The variation guide portion 300B can be moved along the change path in a state of being integrated and moved from the first position to the second position. That is, the tray 100 carried from the P1 position of the fixed area to the P2 position of the fluctuation area causes the control unit 500 to simultaneously generate power by the first driving part 450a and the second driving part 450b, The position can be changed to the P3 position. That is, the first driving shaft 451a and the second driving shaft 451b are rotated to move the first driving portion 450a and the second driving portion 450b to the P3 position of the fluctuation region, And the second support shaft 451b slides the change path. Thus, the first position changing portion 400A, the second position changing portion 400B, the variable conveying portion 200B, and the variation guide portion 300B are simultaneously moved to the P3 position. The tray 100 can be transported from the traverse chamber to another chamber by moving only the tray 100 from the P3 position to the P4 position of the fixed region.

In the above description, the tray 100 is moved in the order of P1 P2 → P3 P4. However, the tray 100 may be moved in the reverse order of P4 P3 → P2 P1. That is, the tray 100 can be moved in the order of P4 P3? P2 P1 by operating the first driving unit 450a and the second driving unit 450b so as to be opposite to the movement of the preceding tray 100. [

As described above, according to the substrate transfer apparatus of the present invention, when the position of the tray on which the substrate is mounted is changed, the tray is not separately removed to change its position. That is, since the tray, the transfer unit, and a part of the guide unit are integrated, and the integrated structure is moved to a position different from the original position, independent movement of the tray is not required. Thus, friction between the tray and other components and an increase in the tray moving step are not required, so that generation of particles can be suppressed and prevented.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention.

100: Tray 200: Feed unit
200A: Fixed feeder 200B: Variable feeder
210: magnetic levitating member 220: magnetic transfer member
300: Guide unit 300A: Fixed guide part
300B: Variation guide unit 400: Tray position changing unit
400A: first position changing unit 400B: second position changing unit
410a: first modified path formation body 410b: second modified path formation body
430a: Support block 430b: Support frame
450a: first driving part 450b: second driving part

Claims (17)

A tray on which a substrate is mounted;
A transfer unit provided below the tray to form a transfer path of the tray and to transfer the tray;
A guide unit provided at an upper side of the tray for guiding conveyance of the tray; And
And a tray position changing unit connected to at least a part of each of the conveying unit and the guide unit to change a position of the tray in a direction crossing the conveying path,
Wherein the transfer unit and the guide unit each include a pair of fixed portions disposed in a process region where the substrate is processed and a transfer region connected to one of the pair of the fixed portions in parallel to change the position of the tray, Each of which is a single variable part,
Further comprising: a determination unit for determining whether or not the fixed portion and the variable portion of the transfer unit and the fixed portion and the variable portion of the guide unit face each other in parallel,
And the tray position changing unit moves the tray and the fluctuating unit in unison. delete The method according to claim 1,
Wherein the tray position changing unit comprises:
A first position changing unit disposed below the variation unit of the conveyance unit and forming a change path in a direction crossing the movement path of the tray; And
And a second position changing unit disposed above the variation unit of the guide unit to form the change path. The method of claim 3,
Wherein the first position changing unit comprises:
A first changing path forming body forming the changing path at a lower portion of the fluctuation portion of the conveying unit,
A support block disposed between the first modification path forming body and the fluctuation portion of the transfer unit; And
And a first driving unit coupled to the support block to allow the support block to reciprocate along the change path. The method of claim 3,
Wherein the second position changing unit comprises:
A second changing path forming body forming the changing path at an upper portion of the variation portion of the guide unit,
A support frame disposed between the second modified path forming body and the variable portion of the guide unit; And
And a second driving part connected to the second change path forming body to allow the support frame to reciprocate along the changing path. The method according to claim 4 or 5,
Further comprising a control unit, connected to the tray position changing unit, for controlling operations of the conveying unit and the guide unit,
Wherein the control unit interlocks the first position changing portion and the second position changing portion to synchronize the movement of the variation portion of the transfer unit and the variation portion of the guide unit. The method of claim 4,
Wherein the first path forming member includes a plurality of first path forming guide members extending from the path changing path,
And the support block is disposed on the first path forming guide member. The method of claim 7,
Wherein the first driving unit includes:
A first drive shaft extending through the support block and extending to the change path;
A first support shaft surrounding at least a part of the first drive shaft and mounted through the support block; And
And a first driver connected to the first drive shaft to rotate the first drive shaft. The method of claim 5,
The second modified path forming body may include:
A plurality of second path forming guide members extending from the changing path; And
And a second moving block that is seated on the second path forming guide member and is horizontally movable with the changing path. The method of claim 9,
Wherein the second driver comprises:
A second driving shaft extending through the second moving block and extending to the changing path;
A second support shaft surrounding at least a portion of the second drive shaft and mounted through the second move block; And
And a second driver connected to the second drive shaft to rotate the second drive shaft. delete The method of claim 3,
Wherein at least one of a variation part of the conveyance unit and a variation part of the guide unit is provided with a power for supplying the tray to the fixing part. The method according to claim 1,
Wherein the transfer unit and the guide unit transfer the tray by a magnetic force. A conveying unit provided below the tray on which the substrate is mounted to form a conveying path of the tray and conveying the tray; a guide unit provided on the tray to guide the conveyance of the tray; And a tray position changing unit connected to at least a part of each of the plurality of conveying units to change a position of the tray in a direction crossing the conveying path, A pair of fixing portions and a single variation portion which is arranged in a conveyance region which is connected in parallel with any one of the pair of fixing portions and changes the position of the tray, Judging whether or not the fixed portion and the variable portion of the guide unit face each other in parallel And a substrate transfer method using the substrate transfer apparatus further comprises a bonnet,
Bringing the tray on which the substrate is placed into a carrying region;
Determining whether the fixed and variable portions of the transfer unit and the fixed and variable portions of the guide unit face each other in parallel;
Moving the tray, the variation unit of the conveyance unit, and the variation unit of the guide unit integrally in a direction of the tray changing direction in the conveyance area; And
And transporting the tray to a path different from the path through which the tray is carried. delete 15. The method of claim 14,
Wherein the step of moving the tray in a position-
The rotational movement of the first drive shaft and the second drive shaft of the fluctuation portion of the transfer unit and the fluctuation portion of the guide unit is controlled by the fluctuation portion of the transfer unit and the first and second support shafts of the fluctuation portions of the guide unit, Wherein the substrate is transferred to a linear motion. 15. The method of claim 14,
Wherein the step of transporting the tray to the transport region and transporting the tray are performed by moving only the tray.
KR1020150135577A 2015-09-24 2015-09-24 Apparatus for transferring substrate and the method for transferring substrate using it KR101767667B1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3914717B2 (en) * 2001-04-13 2007-05-16 武秀 林 Flat panel transfer system
JP4856308B2 (en) * 2000-12-27 2012-01-18 キヤノンアネルバ株式会社 Substrate processing apparatus and via chamber

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4856308B2 (en) * 2000-12-27 2012-01-18 キヤノンアネルバ株式会社 Substrate processing apparatus and via chamber
JP3914717B2 (en) * 2001-04-13 2007-05-16 武秀 林 Flat panel transfer system

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