CN103762196B - The clamping device of pan and the rotation platform of pan - Google Patents
The clamping device of pan and the rotation platform of pan Download PDFInfo
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- CN103762196B CN103762196B CN201410058299.6A CN201410058299A CN103762196B CN 103762196 B CN103762196 B CN 103762196B CN 201410058299 A CN201410058299 A CN 201410058299A CN 103762196 B CN103762196 B CN 103762196B
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- clamping
- pan
- support member
- movable base
- face
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a kind of clamping device of pan, including clamping part, lifting unit, lifting executor；Wherein, described clamping part includes the movable base of ring bodies；Described movable base can move up and down and circumferencial direction on be distributed multiple clamping elements, the lower section of described clamping element is provided with the cooperating therewith support member for carrying pan, can relative vertical movement between described clamping element and described support member；The lower end of described lifting unit is connected to the lifting executor driving described lifting unit to move up and down；The upper end of described lifting unit controls the up and down motion of described movable base；The present invention controls the distance between clamping element and support member thus realizing opening and closing of silicon chip by the up and down motion of lifting unit.The present invention provides a kind of new clamping device on the basis of existing electromagnetic suspension platform, and its motion mode is easy, facilitates mechanical arm to pick and place silicon chip and clamp silicon chip and make silicon chip keep high-speed rotation on floating platform.
Description
Technical field
The present invention relates to technical field of semiconductor wafer technology, more particularly to a kind of disk clamping device and pan
Rotation platform.
Background technology
In the production technology of integrated circuit, pan such as semiconductor wafer or silicon chip will stand as etching, cleaning, throw
The kinds of surface treatment process step such as light, thin film deposition.And during these, be required for supporting by clamping device and pressing from both sides
Hold pan, existing disk clamping device is roughly divided into three major types：The first kind is engaged to disk by gear for clamp assemblies
Shape thing clamps；Equations of The Second Kind passes through magneticaction for clamp assemblies and pan is clamped；3rd class passes through other machines for clamp assemblies
Tool mode clamps to pan, and such as United States Patent (USP) US20120018940A1 is disclosed a kind of clamping device, engaged by gear
Thus realizing the clamping to pan, opening and closing of clamping device is controlled by magnetic force.
At present, market have developed a kind of electromagnet suspension rotation platform, after being passed through alternating current, be provided with magnetic devices
Silicon slice platform can produce the magnetic field contrary with annular stator, annular stator controls clamping part to suspend and drives clamping part to rotate.
By using electromagnetic force, silicon chip carrying platform is stably suspended in the air, improves the stability of silicon chip carrying platform.Existing
For this electromagnetic suspension rotation platform, a kind of new and easy clamping device of motion mode need to be developed, facilitate mechanical arm to take
Put silicon chip and make silicon chip that high-speed rotation to be kept on floating platform.
Content of the invention
The technical problem to be solved is to provide the rotation platform of a kind of disk clamping device and pan, side
Just mechanical arm picks and places silicon chip.
In order to solve above-mentioned technical problem, the invention provides a kind of clamping device of pan, including clamping part, lifting
Portion, lifting executor；Wherein, described clamping part includes the movable base of ring bodies；Described movable base can move up and down and circle
Multiple clamping elements are distributed on circumferential direction, the lower section of described clamping element is provided with the cooperating therewith support member for carrying pan,
Can relative vertical movement between described clamping element and described support member；The lower end of described lifting unit is connected to drive described lifting
The lifting executor that portion moves up and down；The upper end of described lifting unit controls the up and down motion of described movable base；When lifting unit supports
When pushing away described movable base and moving upwards, it is fixed on clamping element in described movable base away from described support member, is used for picking and placeing
Pan；When lifting unit pulls described movable base to move downward, described clamping element and described support member close to each other until
Clamping pan.
Preferably, described lifting unit includes quill shaft and the impeller that can move up and down, described quill shaft lower end with described
Lifting executor be connected, and the upper end of described quill shaft is fixedly connected with described impeller.
Preferably, described clamping part also includes fixed pedestal, outer ring and lower member；Wherein, under described movable base
Side is provided with annular fixed pedestal, and the circumferencial direction of described fixed pedestal fixedly mounts multiple support members；Under described fixed pedestal
Side is provided with described outer ring, is provided with magnetic devices in described outer ring；It is solid that described lower member and described movable base pass through connector
Fixed connection；Described impeller promotes described lower member, so that described lower member is moved up and down.
Preferably, described support member includes loading end and keeps out face, and the described face of keeping out has for limiting described plate-like
The transverse shifting jut of thing, described face of keeping out is against the edge of described pan；Described clamping element is included for loading plate-like
The loading surface of thing and the clamping face for clamping pan, described loading surface is located at the lower section in described clamping face；Described clamping element
It is provided with the semi-circular recesses moving up and down for support member, the clamping face of described clamping element is matched with the loading end of described support member
The distance between the tight pan of co-clip, described clamping face and described loading end are adapted with the thickness of pan.
Preferably, described clamping part also includes fixed pedestal, outer ring and lower member；Wherein, described support member is arranged on
In described movable base and described support member can be up and down with respect to described movable base, described fixed pedestal is provided with and institute
State the corresponding push rod in support member position, described push rod is used for pushing described support member, make described support member and described clamping element it
Between distance reduce；It is provided with described outer ring below described fixed pedestal, in described outer ring, be provided with magnetic devices；Described lower member
It is fixedly connected by connector with described movable base；Described impeller promotes described lower member, so that described lower member is entered
Row moves up and down.
Preferably, the upper end of described push rod is spherical.
Preferably, the upper end of described support member includes loading end and keeps out face, and the described face of keeping out has for limiting
State the jut of the transverse shifting of pan, against the edge of described pan, the lower end of described support member sets in described face of keeping out
The protruding block that restricted support member moves upwards；Described clamping element includes the clamping face for clamping pan；Described clamping element
Clamping face match with the loading end of described support member clamping pan, the distance between described clamping face and described loading end
It is adapted with the thickness of pan.
Preferably, the loading end of described support member is the arc surface protruding to loading end outer surface.
Preferably, the clamping face of described clamping element is provided with pyramidal projections.
Preferably, it is provided with elastic component between described protruding block and described movable base.
Preferably, it is provided with the suction device preventing both from relatively sliding between described impeller and described lower member；Or/
And between described fixed pedestal and described movable base, it is provided with the suction device preventing both from relatively sliding.
Preferably, it is provided with least one set Magnet between described impeller and described lower member；Or/and described fixed pedestal
It is provided with least one set Magnet and described movable base between.
Preferably, the quantity of described support member is no less than the quantity of described clamping element.
The present invention also provides a kind of rotation platform of pan it is characterised in that including annular stator, gripper shoe, cavity；
Wherein, it is provided with multiple coils in described annular stator, described gripper shoe upper end carries described annular stator, described gripper shoe lower end
Connect described cavity, in described cavity, be provided with the clamping device of described pan as arbitrary in claim 1～13.
Preferably, the lower end of described cavity is provided with leakage fluid dram or/and exhaust outlet.
Compared with currently existing scheme, the present invention provides a kind of new clamping on the basis of existing electromagnetic suspension platform
Device, its motion mode is easy, facilitates mechanical arm to pick and place silicon chip and clamp silicon chip and make silicon chip keep high speed on floating platform
Rotation.
Brief description
For the technical scheme being illustrated more clearly that in the embodiment of the present invention, below by use required in embodiment
Accompanying drawing be briefly described it should be apparent that, drawings in the following description are only some embodiments of the present invention, for ability
For the those of ordinary skill of domain, on the premise of not paying creative work, can also be obtained other attached according to these accompanying drawings
Figure.
Fig. 1 is the schematic perspective view of pan rotation platform of the present invention；
Fig. 2 is located at structural representation during clamping for first embodiment of the invention disk clamping device；
Fig. 3 is located at structural representation when opening for first embodiment of the invention disk clamping device；
Fig. 4 is the close-up schematic view of first embodiment of the invention disk clamping device；
Fig. 5 is the structural representation of first embodiment of the invention support member；
Fig. 6 is the structural representation of first embodiment of the invention clamping element；
Fig. 7 is the structural representation of the present invention two embodiment disk clamping device；
Fig. 8 is the structural representation that the present invention two embodiment disk clamping device is located at during clamping；
Fig. 9 is located at structural representation when opening for second embodiment of the invention disk clamping device；
Figure 10 is the structural representation of second embodiment of the invention support member；
Figure 11 is the structural representation of second embodiment of the invention clamping element.
Primary clustering symbol description：
1st, clamping part；11st, outer ring；12nd, fixed pedestal；13rd, support member；13a loading end；13b keeps out face；13f protruding block；
14th, movable base；15th, clamping element；15c loading surface；15d clamps face；15e groove；16th, lower member；17th, connector；2nd, ring
Shape stator；3rd, lifting unit；31st, quill shaft；32nd, impeller；4th, gripper shoe；5th, cavity；51st, side wall；52nd, leakage fluid dram；6th, push rod；
7th, elastic component.
Specific embodiment
To describe embodiments of the present invention in detail below in conjunction with schema and embodiment, thereby how the present invention to be applied
Technological means are solving technical problem and to reach realizing process and fully understanding and implement according to this of technology effect.
Embodiment one
Referring to figs. 1 to shown in Fig. 6, the present invention provides a kind of rotation platform of pan, including clamping part 1, annular stator
2nd, lifting unit 3, gripper shoe 4 and cavity 5；In the present embodiment, pan is silicon chip W, wherein：
Described clamping part 1 includes the movable base 14 of ring bodies, the fixed pedestal 12 of ring bodies, outer ring 11 and lower member
16；Described movable base 14 can move up and down and circumferencial direction on be distributed multiple clamping elements 15, the circumference of described fixed pedestal 12
Multiple support members 13 being matched with clamping element 15 are fixedly mounted on direction, described clamping element 15 is provided with for described support member 13
The groove 15e passing through；It is provided with described outer ring 11 below described fixed pedestal 12, in described outer ring 11, be provided with magnetic devices；Described
Lower member 16 is fixedly connected by connector 17 with described movable base 14.
It is provided with multiple coils in described annular stator 2；
Described lifting unit 3 includes the quill shaft 31 that can move up and down and impeller 32, described quill shaft 31 lower end with described
Lifting executor's (not shown) is connected, and the upper end of described quill shaft 31 is fixedly connected with described impeller 32；
Described gripper shoe 4 upper end carries described annular stator 2, and described gripper shoe 4 lower end connects described cavity 5；
The lower end of described cavity 5 is provided with leakage fluid dram 52 or/and exhaust outlet (not shown).
Additionally, the external diameter of described clamping part 1 is less than the internal diameter of described annular stator 2, the side wall 51 of cavity 5 is located at clamping part
Between 1 and annular stator 2, between described clamping part 1 and the side wall 51 of described cavity 5, there is certain gap.After energising, described
Magnetic devices in clamping part 1 are passed through alternating current and produce alternating magnetic field, thus annular stator 2 generates opposite to that magnetic
, annular stator 2 can control clamping part 1 to suspend and drive clamping part 1 to rotate.
In the present embodiment, the operation principle of clamping device is：
When pan is in loading condition, lifting unit 3 described in lifting actuator driven moves upwards, described lifting unit 3
Impeller 32 promote lower member 16 action upwards, because lower member 16 is fixedly connected with connector 17, described connector 17
It is fixedly connected with movable base 14, so the impeller 32 of lifting unit 3 promotes described movable base 14 to move upwards, because of described
Support member 13 is fixed on described fixed pedestal 12, thus be fixed on can clamping element 15 on motivation pedestal 14 with movable base 14
Motion upwards be gradually distance from described support member 13, when the distance between clamping element 15 and described support member 13 are suitable, in folder
Tightly carrying out silicon chip between part 15 and support member 13 picks and places action.In the present embodiment, described lifting executor can be electric cylinders or cylinder.
First, pan is placed on the loading surface 15c of clamping element 15 by mechanical hand, and described lifting unit 3 moves downward, therefore
The impeller 32 of described lifting unit 3 moves downward therewith, and described support member 13 relative upward movement, when the loading end of support member 13
When 13a is higher than described clamping element 15 loading surface 15c, pan is carried on the loading end 13a of described support member 13, clamping part 1
In self gravitation or under impeller 32 pulling force, described lower member 16, connector 17 and the movable base being provided with clamping element 15
14 move downward simultaneously, because support member 13 is fixed on described fixed pedestal 12, so support member 13 and described clamping element 15 it
Between distance be gradually reduced until clamping pan.
In order to prevent between described impeller 32 and described lower member 16 relatively sliding, described impeller 32 and described under
It is provided with suction device, described suction device is each in described impeller 32 or in described lower member 16 between end pieces 16
If the Magnet attracting each other；Meanwhile, in order to prevent from relatively sliding between described fixed pedestal 12 and described movable base 14, described
It is provided with the same suction device preventing both from relatively sliding, described attraction between fixed pedestal 12 and described movable base 14
Assembly first is one group of Magnet attracting each other.
What deserves to be explained is, in order to preferably carry pan, strengthen the stability that pan carries, described support member 13
Quantity be no less than described clamping element 15 quantity.
Refer to Fig. 5, Fig. 6, described support member 13 includes loading end 13a and keeps out face 13b, the described face 13b that keeps out has
There is the transverse shifting jut for limiting described pan, the described face 13b that keeps out is against the edge of described pan；Described folder
Tight part 15 includes the loading surface 15c for the loading pan and clamping face 15d, described loading surface 15c for clamping pan
Lower section positioned at described clamping face 15d；Described clamping element 15 is provided with the semi-circular recesses 15e moving up and down for support member 13,
The clamping face 15d of described clamping element 15 is matched with the loading end 13a of described support member 13 clamping pan, described clamping face
The distance between 15d and described loading end 13a is adapted with the thickness of pan.
In order to reduce the contact surface of clamping element 15 or described support member 13 and silicon chip, the loading end 13a of described support member 13
It is the arc surface protruding to loading end outer surface；The clamping face 15d of described clamping element 15 is provided with the downward pyramidal projections of cone.
Embodiment two
On the basis of embodiment one, and unlike embodiment one：Refer to Fig. 7 to Figure 11, described clamping part 1 includes
The movable base 14 of ring bodies, the fixed pedestal 12 of ring bodies, outer ring 11 and lower member 16；Wherein, described movable base 14
On be fixed with multiple clamping elements 15, described movable base 14 be provided with multiple can be up and down with respect to described movable base 14
Support member 13, described support member 13 is corresponding to the position of described clamping element 15, and described fixed pedestal 12 is located at described movable base
The lower section of seat 14, described fixed pedestal 12 is provided with spherical push rod 6 corresponding with described support member 13 position；Likewise, institute
State and below fixed pedestal 12, be provided with described outer ring 11, in described outer ring 11, be provided with magnetic devices；Described lower member 16 with described
Movable base 14 is fixedly connected by connector 17；Described impeller 32 promotes described lower member 16, makes described lower member
16 are moved up and down.
Refer to Figure 10,11, the upper end of described support member 13 includes loading end 13a and keeps out face 13b, described keeps out face
13b has the jut of the transverse shifting for limiting described pan, and the described face 13b that keeps out is against the side of described pan
Edge, the lower end of described support member 13 is provided with and limits the protruding block that support member 13 moves upwards；Described clamping element 15 is included for pressing from both sides
The clamping face 15d of tight pan；The clamping face 15d of described clamping element 15 and the loading end 13a of described support member 13 match co-clip
Tight pan, the distance between described clamping face 15d and described loading end 13a is adapted with the thickness of pan.
In order to reduce the contact surface of clamping element 15 or described support member 13 and silicon chip, the loading end 13a of described support member 13
It is the arc surface protruding to loading end outer surface；The clamping face 15d of described clamping element 15 is provided with pyramidal projections.
In order to preferably make support member 13 slide up and down, between described protruding block and described movable base 14, it is provided with elastic component
7.
In the present embodiment, the operation principle of clamping device is：
When silicon chip is in loading condition, lifting executor's (not shown) drives described lifting unit 3 to move upwards, institute
The impeller 32 stating lifting unit 3 promotes lower member 16 action upwards, because of lower member 16, connector 17 and movable base 14
Three is fixedly connected, so the impeller 32 of lifting unit 3 promotes described movable base 14 to move upwards, because of described support member 13 phase
It is flexibly connected to described movable base 14, described support member 13 moves downward and is gradually distance from described clamping element 15, works as clamping element
When the distance between 15 and described support member 13 are suitable, carry out silicon chip between clamping element 15 and support member 13 and pick and place action.
When silicon chip is in state of the art, described lifting unit 3 moves downward, the impeller 32 of described lifting unit 3 therewith to
Lower motion, clamping part 1 in self gravitation or under impeller 32 pulling force, described lower member 16, connector 17 and be provided with clamping
The movable base 14 of part 15 moves downward simultaneously, and described support member 13 is gradually reduced with respect to the distance between described push rod 6, when
When described movable base 14 continues to move downward, described push rod 6 pushes described support member 13, until described support member 13 with described
Both clamping elements 15 mutually clamp pan.
Described above illustrate and describes some preferred embodiments of the present invention, but as previously mentioned it should be understood that the present invention
Be not limited to form disclosed herein, be not to be taken as the exclusion to other embodiment, and can be used for various other combinations,
Modification and environment, and can be in invention contemplated scope described herein, by technology or the knowledge of above-mentioned teaching or association area
It is modified.And the change that those skilled in the art are carried out and change without departing from the spirit and scope of the present invention, then all should be at this
In the protection domain of bright claims.
Claims (15)
1. a kind of clamping device of pan is it is characterised in that include clamping part, lifting unit, lifting executor；Wherein,
Described clamping part includes the movable base of ring bodies；Described movable base can move up and down and circumferencial direction on be distributed multiple
Clamping element, the lower section of described clamping element is provided with the cooperating therewith support member for carrying pan, described clamping element with described
Can relative vertical movement between support member；
The lower end of described lifting unit is connected to the lifting executor driving described lifting unit to move up and down；Described lifting unit upper
End controls the up and down motion of described movable base；
When lifting unit pushes described movable base and moves upwards, it is fixed on clamping element in described movable base away from described
Support member, is used for picking and placeing pan；When lifting unit pulls described movable base to move downward, described clamping element and described support member
Close to each other until clamping pan.
2. the clamping device of pan according to claim 1 is it is characterised in that described lifting unit includes moving up and down
Quill shaft and impeller, described quill shaft lower end with described lifting executor be connected, the upper end of described quill shaft is pushed away with described
Moving part is fixedly connected.
3. the clamping device of pan according to claim 2 is it is characterised in that described clamping part also includes fixed base
Seat, outer ring and lower member；Wherein,
The lower section of described movable base is provided with annular fixed pedestal, and the circumferencial direction of described fixed pedestal fixedly mounts multiple
Support member；
It is provided with described outer ring below described fixed pedestal, in described outer ring, be provided with magnetic devices；
Described lower member is fixedly connected by connector with described movable base；Described impeller promotes described lower member,
Described lower member is made to be moved up and down.
4. pan according to claim 3 clamping device it is characterised in that
Described support member includes loading end and keeps out face, and the described face of keeping out has the transverse shifting for limiting described pan
Jut, described face of keeping out is against the edge of described pan；
Described clamping element includes the loading surface for loading pan and the clamping face for clamping pan, described loading surface position
Lower section in described clamping face；
Described clamping element is provided with the semi-circular recesses moving up and down for support member, the clamping face of described clamping element and described support
The loading end of part matches clamping pan, and the thickness phase of the distance between described clamping face and described loading end and pan is fitted
Should.
5. the clamping device of pan according to claim 2 is it is characterised in that described clamping part also includes fixed base
Seat, outer ring and lower member；Wherein,
Described support member is arranged in described movable base and described support member can be up and down with respect to described movable base, institute
State fixed pedestal and be provided with push rod corresponding with described support member position, described push rod is used for pushing described support member, make described
The distance between support member and described clamping element reduce；
It is provided with described outer ring below described fixed pedestal, in described outer ring, be provided with magnetic devices；
Described lower member is fixedly connected by connector with described movable base；Described impeller promotes described lower member,
Described lower member is made to be moved up and down.
6. the clamping device of pan according to claim 5 is it is characterised in that the upper end of described push rod is spherical.
7. pan according to claim 5 clamping device it is characterised in that
The upper end of described support member includes loading end and keeps out face, and the described face of keeping out has the horizontal stroke for limiting described pan
To the jut of movement, against the edge of described pan, the lower end of described support member is provided with restriction support member in described face of keeping out
The protruding block moving upwards；
Described clamping element includes the clamping face for clamping pan；The clamping face of described clamping element and the carrying of described support member
Match clamping pan in face, and the distance between described clamping face and described loading end are adapted with the thickness of pan.
8. the clamping device of pan according to claim 7 is it is characterised in that the loading end of described support member is to holding
The arc surface that section outer surface protrudes.
9. the clamping device of pan according to claim 7 is it is characterised in that the clamping face of described clamping element is provided with cone
Shape projection.
10. the clamping device of pan according to claim 7 is it is characterised in that described protruding block and described movable base
It is provided with elastic component between seat.
The clamping device of 11. pans according to claim 3 is it is characterised in that described impeller and described bottom
It is provided with the suction device preventing both from relatively sliding between part；Or/and be provided between described fixed pedestal and described movable base
Prevent the suction device that both slide relatively.
The clamping device of 12. pans according to claim 11 is it is characterised in that described impeller and described bottom
It is provided with least one set Magnet between part；Or/and be provided with least one set Magnet between described fixed pedestal and described movable base.
13. according to the clamping device of the arbitrary described pan of claim 1～12 it is characterised in that the number of described support member
Amount is no less than the quantity of described clamping element.
A kind of 14. rotation platforms of pan are it is characterised in that include annular stator, gripper shoe, cavity；Wherein, described annular
It is provided with multiple coils, described gripper shoe upper end carries described annular stator, described gripper shoe lower end connects described cavity in stator,
Also include the clamping device of described pan as arbitrary in claim 1～13.
The rotation platform of 15. pans according to claim 14 is it is characterised in that the lower end of described cavity is provided with discharge opeing
Mouth or/and exhaust outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410058299.6A CN103762196B (en) | 2014-02-20 | 2014-02-20 | The clamping device of pan and the rotation platform of pan |
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| CN201410058299.6A CN103762196B (en) | 2014-02-20 | 2014-02-20 | The clamping device of pan and the rotation platform of pan |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104538345B (en) * | 2014-12-31 | 2017-06-06 | 北京七星华创电子股份有限公司 | A kind of pan device for clamping and rotating |
| CN105448785B (en) * | 2015-12-31 | 2018-12-18 | 北京北方华创微电子装备有限公司 | Semiconductor film-forming apparatus, wafer automatic positioning clamping structure and method for chucking |
| WO2018188062A1 (en) * | 2017-04-14 | 2018-10-18 | 深圳市方鹏科技有限公司 | Robotic imaging system based on virtual reality technology |
| CN111613548B (en) * | 2019-02-25 | 2023-05-23 | 奇景光电股份有限公司 | Wafer blow-drying equipment |
| CN117558676B (en) * | 2023-12-28 | 2024-03-22 | 苏州赛腾精密电子股份有限公司 | Wafer detection clamping equipment |
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| JP2004253756A (en) * | 2002-12-24 | 2004-09-09 | Hitachi High-Tech Electronics Engineering Co Ltd | Substrate mounting apparatus, carrying arm, positioning methodology of semiconductor wafer, and device and method for inspecting substrate |
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|---|---|---|---|---|
| CN101136352A (en) * | 2006-08-30 | 2008-03-05 | 细美事有限公司 | Spin head and substrate treating method using the same |
| CN203721699U (en) * | 2014-02-20 | 2014-07-16 | 北京七星华创电子股份有限公司 | Disk-like object holding device and disk-like object rotating platform < |
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