JP5997203B2 - Single-wafer workpiece dust remover - Google Patents

Description

  The present invention relates to a dust removing device for a single-wafer workpiece.

  Conventionally, an upper dust removal head and a lower dust removal head are arranged vertically opposite to remove dust adhering to a single-wafer workpiece, and each dust removal head has an upstream suction port, an air ejection outlet, and a downstream suction port. Is known, for example, as disclosed in Patent Document 1.

  In recent years, with the spread of small portable terminals represented by smartphones, a large number of small liquid crystals and small organic ELs have come into circulation. In order to transport the small-sized single-piece workpiece (substrate 40) used in these on the production line, when the transport means is a roller type, the arrangement pitch of the rollers (interval dimension C in FIG. 5) is set to at least the transport direction of the substrate 40. It is necessary to make it half or less of the length dimension B.

In the vicinity of the upper and lower dust removal heads, the substrate cannot be transported unless the substrate is always in contact with the drive rollers before and after the dust removal head. Therefore, a dust removing head that fits within the distance between rollers (the distance dimension D in FIG. 5) corresponding to the distance dimension C that is less than half of the length dimension B (see FIG. 5) of the substrate 40 is required. However, due to the structure of the dust removal head, there is a limit to reducing the length in the conveyance direction.
As shown in FIG. 5, in the conventional dust removing apparatus, the length dimension B in the transport direction of the substrate 40 and the distance dimension A between the upstream drive roller 41 and the downstream drive roller 42 in the vicinity of the cleaner are B ≦ A. In this case, since the substrate 40 does not reach the downstream drive roller 42 when leaving the upstream drive roller 41, the substrate 40 stops between the upstream drive roller 41 and the downstream drive roller 42. FIG. 5 shows a case where the free rollers 43 and 43 are provided in the vicinity of the suction port.

Japanese Patent No. 3559256

  The problem to be solved is that dust cannot be removed while the small single-wafer workpiece is smoothly conveyed.

Therefore, in the dust removing apparatus according to the present invention, the upper dust removing head and the lower dust removing head are arranged in a vertically opposed manner in order to remove dust adhering to the small single-wafer workpiece, and further, the lower dust removing head is connected to the upstream suction port. In a dust removal apparatus for a single-wafer workpiece, in which an air ejection discharge port and a downstream suction port are sequentially provided on the workpiece upper surface, an upstream free roller and a downstream free roller are provided in the vicinity of each of the front and rear of the discharge port. In addition, a first work conveying belt is suspended between the upstream drive rotating body provided in the vicinity of the upstream side of the lower dust removal head and the upstream free roller, and further provided in the vicinity of the downstream side of the lower dust removal head. A second work transport belt is suspended from the downstream drive rotating body and the downstream free roller, and a part of the upstream suction port is formed on the upper wall portion that forms the work-corresponding upper surface of the lower dust removal head. 1st And the upstream free roller is inserted and disposed in the first through hole, and the first work conveyance belt is caused to enter the upstream negative pressure chamber of the lower dust removing head through the first through hole. And the first work conveying belt is suspended from the upstream upstream drive rotating body through the through hole in the upstream side wall of the upstream negative pressure chamber, and the downstream side suction is suspended from the upper wall portion. A second through hole forming a part of the mouth is formed, and the downstream free roller is inserted and disposed in the second through hole, and the second work conveying belt is lowered through the second through hole. The second work conveying belt is suspended from the downstream drive rotating body outside by being inserted into the downstream negative pressure chamber of the dust removal head and inserted into the through hole in the downstream side wall of the downstream negative pressure chamber . Is.

Moreover, the conveyance direction space | interval dimension of the said upstream free roller and downstream free roller is set to the half or less of the conveyance direction dimension of the said small sheet | seat workpiece | work conveyed.

In addition, a speed change means for making the feeding speed of the small single-piece workpiece constant is provided, and the speed change means includes a basic rotary body provided in the vicinity of the upstream drive rotary body or the downstream drive rotary body, A variable speed rotator having a diameter or the number of teeth different from that of the basic rotator, and an endless flexible member suspended from the basic rotator and the variable speed rotator, and the variable speed rotator is driven by the upstream drive rotation. It is comprised so that it may rotate integrally with a body or a downstream drive rotary body.
The lower dust removing head, the upstream free roller, the downstream free roller, the upstream drive rotator, the downstream drive rotator, the first work transport belt, and the second work transport belt are unitized.

In addition, an upstream free roller and a downstream free roller for small single-wafer workpieces are provided at the center in the width direction, and an upstream free roller and a downstream free roller for large single-wafer workpieces are provided on the outside in the width direction. Each of the large single-wafer workpiece and the small single-wafer workpiece is configured to be able to convey and remove dust.
Further, a support free roller is provided between the upstream free roller and the downstream free roller so that the small single-wafer workpiece smoothly transfers from the upstream free roller to the downstream free roller.

  According to the dust removing device of the present invention, dust can be removed while smoothly transporting a small single-wafer workpiece. In other words, according to the dust removing apparatus of the present invention, it can be optimized so that it can be applied even when the single-wafer workpiece is small. Further, the conveying belt and the free roller do not disturb the wind force of the air discharged from the discharge port, and do not disturb the dust removal effect. Further, dust adhering to the conveyor belt and the free roller can be removed. Further, dust can be removed while reliably transporting the small single-wafer workpiece.

BRIEF DESCRIPTION OF THE DRAWINGS It is whole structure explanatory drawing which shows the 1st Embodiment of this invention. It is a top view. It is whole structure explanatory drawing which shows 2nd Embodiment. It is a top view. It is a whole block diagram which shows a prior art example.

Hereinafter, the present invention will be described in detail based on the illustrated embodiment.
1 and 2 show a first embodiment of the present invention. In this dust removing device, an upper dust removing head 1 and a lower dust removing head 2 are arranged in a vertically opposed manner in order to remove dust adhering to a small single-wafer workpiece W ₁ such as a small liquid crystal or a small organic EL. In the present invention, the “small size” of the small single-wafer workpiece W ₁ means that the dimension in the feed direction is 250 mm or less. The small leaves work W _1, for example, there is a sheet-fed work for smartphones. The lower dust removal head 2 includes an upstream suction port 3, an air ejection discharge port 4, and a downstream suction port 5 in order on the workpiece upper surface 6. The small single-wafer workpiece W ₁ is conveyed between the upper dust removing head 1 and the lower dust removing head 2 in the direction of arrow Y in FIGS. That is, the arrow Y indicates the workpiece conveyance direction (feeding direction).

  An upstream free roller 7 and a downstream free roller 8 are provided in the vicinity of the front and rear of the discharge port 4. A first work conveyance belt 10 is suspended from an upstream drive rotating body 9 and an upstream free roller 7 provided in the vicinity of the upstream side of the lower dust removal head 2. Further, the second work conveying belt 20 is suspended from the downstream drive rotating body 11 and the downstream free roller 8 provided in the vicinity of the downstream side of the lower dust removing head 2. The first work conveyance belt 10 and the second work conveyance belt 20 are made of, for example, an O-ring. The O-ring is preferable because it travels lightly and has excellent durability, and feeds while supporting the workpiece W such as a substrate softly. Furthermore, by using a rubber O-ring, the frictional resistance is large, and the workpiece is reliably fed without slipping.

  A first through hole 21 constituting a part of the upstream suction port 3 is formed in the upper wall portion 12 that forms the work-corresponding upper surface 6 of the lower dust removal head 2, and the upstream free roller 7 is formed in the first through hole 21. The first work conveying belt 10 is inserted and disposed in the upstream negative pressure chamber 13 of the lower dust removing head 2 through the first through hole 21, and the upstream side wall 14 of the upstream negative pressure chamber 13. The first work conveying belt 10 is suspended by the external upstream drive rotating body 9 through the through hole 15. The upstream drive rotator 9 is composed of a roller. In addition, the specific shape and arrangement of the upstream suction port 3 are configured by alternately arranging rectangular first through holes 21 and a pair of elongated slit holes 3A, 3A in FIG. .

  A second through hole 22 constituting a part of the downstream suction port 5 is formed in the upper wall portion 12 so that the downstream free roller 8 is inserted and disposed in the second through hole 22 and the second work conveying belt 20. Enters the downstream negative pressure chamber 16 of the lower dust removing head 2 through the second through hole 22 and is inserted into the through hole 18 of the downstream side wall 17 of the downstream negative pressure chamber 16 to enter the second work conveying belt. 20 is suspended from the external downstream drive rotor 11. The downstream drive rotator 11 is composed of a roller. In addition, the specific shape and arrangement of the downstream suction port 5 are configured by alternately arranging rectangular second through holes 22 and a pair of elongated slit holes 5A, 5A in FIG. .

The conveyance direction interval dimension E between the upstream free roller 7 and the downstream free roller 8 is set to be less than or equal to half the conveyance direction dimension G of the small single-piece workpiece W ₁ to be conveyed. As a result, the workpiece W can reliably transfer from the belt 10 to the belt 20.

  The lower dust removing head 2, the upstream free roller 7, the downstream free roller 8, the upstream drive rotator 9, the downstream drive rotator 11, the first work transport belt 10, and the second work transport belt 20 are defined as a unit U. (Unitized).

  The upstream drive rotator 9 and the downstream drive rotator 11 are composed of rollers. The plurality of upstream drive rotating bodies 9 are fixed to a (common) rotating shaft 23, and a pulley 24 is fixed to the rotating shaft 23, so that a driving endless member such as a belt such as a timing belt or a flat belt, a chain, etc. 25 is suspended from this pulley 24 and a driving pulley (not shown). As an example of the driving pulley outside the figure, a pulley that rotationally drives the upstream conveying roller 30 in FIG. 1 is used. Alternatively, an endless member in which the endless member 25 is suspended so as to rotate the plurality of upstream conveying rollers 30 may be used as the endless member 25.

Further, the plurality of downstream drive rotating bodies 11 are fixed to a (common) horizontal rotating shaft 33, and a pulley 34 is fixed to the rotating shaft 33 so that a belt such as a timing belt or a flat belt, a chain, etc. The driving endless member 35 is suspended from the pulley 34 and a driving pulley (not shown). As an example of the driving pulley outside the figure, a pulley that rotationally drives the downstream-side transport roller 36 in FIG. 1 is used. Alternatively, an endless member in which the endless member 35 is suspended so as to rotate the plurality of downstream conveyance rollers 36 may be used as the endless member 35.
In this way, the workpiece feeding speed of the belts 10 and 20 and the workpiece feeding speed of the conveying rollers 30 and 36 are made equal.

3 and 4 show a second embodiment. A support free roller 19 is provided between the upstream free roller 7 and the downstream free roller 8 so that the small single-wafer workpiece W ₁ smoothly transfers from the upstream free roller 7 to the downstream free roller 8. In particular, the small single-piece workpiece W ₁ having the conveyance direction dimension G equal to the conveyance direction interval dimension E can be conveyed without stopping in the middle.

An upstream free roller 7a and a downstream free roller 8a for small single-wafer workpieces are provided in the center in the width direction, and an upstream free roller 7b and a belt for large single-wafer workpieces are not suspended on the outer side in the width direction. provided downstream free roller 8b, transport and dust removal can be made either of a large leaf workpiece W ₀ and smaller leaves workpiece W _1. As the large-sized single-wafer workpiece W ₀ , for example, there is a single-wafer workpiece for television.

  The upstream drive rotator 9 includes a grooved shaft for suspending the first work conveying belt 10. The downstream drive rotator 11 includes a grooved shaft for suspending the second work conveying belt 20.

A speed change means 31 is provided for making the feeding speed of the small single-piece workpiece W ₁ constant. The speed change means 31 includes a basic rotary body 38 (existing or newly installed) provided in the vicinity of the upstream drive rotary body 9 or the downstream drive rotary body 11, and a speed change rotation having a different diameter or number of teeth from the basic rotary body 38. A body 39, and an endless flexible member 44 (such as a timing belt or a chain) suspended from the basic rotator 38 and the transmission rotator 39. The basic rotating body 38 is configured to rotate integrally with the upstream conveying roller 30 or the downstream conveying roller 36. The speed changing rotator 39 is configured to rotate integrally with the upstream drive rotator 9 or the downstream drive rotator 11. When the diameter (strictly speaking, the diameter of the outer peripheral surface around which the first conveyor belt 10 is suspended) D ₁ of the upstream drive rotating body 9 is different from the diameter D ₀ of the upstream conveyor roller 30, the small single-wafer workpiece W _1. The feed rate can be made constant. When the diameter of the downstream drive rotator 11 (strictly speaking, the diameter of the outer peripheral surface on which the second conveyor belt 20 is suspended) D ₂ is different from the diameter D ₃ of the downstream conveyor roller 36, the small single-wafer workpiece W ₁ The feed rate can be made constant.
Other configurations are the same as those of the first embodiment.

  The present invention can be modified in design. For example, the slit holes 3A and 3A can be arranged one by one without being paired. In addition to the O-ring, the belts 10 and 20 preferably have an I-shaped cross section or a square shape.

As described above, according to the present invention, the upper dust removing head 1 and the lower dust removing head 2 are arranged in a vertically opposed manner in order to remove dust adhering to the small single-wafer workpiece W ₁ , and the lower dust removing head 2 is disposed upstream. In a dust removal apparatus for a single-wafer workpiece in which a side suction port 3, an air ejection port 4 and a downstream side suction port 5 are sequentially provided on the workpiece upper surface 6, in the vicinity of the front and rear of the discharge port 4, the upstream side A free roller 7 and a downstream free roller 8 are provided, and a first work conveying belt 10 is suspended from an upstream drive rotating body 9 provided in the vicinity of the upstream side of the lower dust removing head 2 and the upstream free roller 7. Furthermore, since the suspension of the second work conveyance belt 20 on the downstream side driving rotor 11 and the downstream-side free roller 8 provided in the vicinity of the downstream side of the lower dust removing head 2, carrying the small leaves workpiece W ₁ smoothly Dust can be removed while doing so. Further, since none of the first work transport belt 10, the second work transport belt 20, the upstream free roller 7, and the downstream free roller 8 is disposed on the discharge port 4, the discharge is performed from the discharge port 4. It does not interfere with the dust removal effect without interfering with the wind force of air.

  In addition, a first through hole 21 that constitutes a part of the upstream suction port 3 is formed in the upper wall portion 12 that forms the workpiece-corresponding upper surface 6 of the lower dust removing head 2, and the upstream free roller 7 is installed in the upper wall portion 12. The first work transport belt 10 is inserted into the first through hole 21 and is made to enter the upstream negative pressure chamber 13 of the lower dust removing head 2 through the first through hole 21, and The first work conveyor belt 10 is suspended from the upstream upstream drive rotating body 9 through the through hole 15 of the upstream side wall 14 of the upstream negative pressure chamber 13, and the downstream side of the upper wall 12 is connected to the downstream side. A second through hole 22 constituting a part of the suction port 5 is formed, and the downstream free roller 8 is inserted into the second through hole 22 and the second work conveying belt 20 is inserted into the second through hole 22. It penetrates into the downstream negative pressure chamber 16 of the lower dust removing head 2 through the hole 22 and is inserted into the through hole 18 in the downstream side wall 17 of the downstream negative pressure chamber 16. Since the second workpiece conveying belt 20 is suspended from the external downstream drive rotating body 11, the first workpiece conveying belt 10, the second workpiece conveying belt 20, the upstream free roller 7, and the downstream free roller 8 are negative. It is installed in the pressure space and can remove dust adhering to the first work transport belt 10, the second work transport belt 20, the upstream free roller 7, and the downstream free roller 8. Alternatively, abrasion powder generated from the belts 10 and 20 made of rubber or the like is skillfully sucked and removed to the negative pressure chambers 13 and 16.

Further, since the transport direction interval dimension E between the upstream free roller 7 and the downstream free roller 8 is set to be less than or equal to half the transport direction dimension G of the small single-piece workpiece W ₁ to be transported, the downstream end of the belt 10 from the upstream end of the belt 20, and it possessed a small leaves workpiece W _1, can be dust removal while reliably transport the small leaves workpiece W _1. For example, when E = 45 mm, it is possible to smoothly feed (without stopping) a small single-wafer workpiece W ₁ of G = 90 mm, which has been difficult to feed in the past, and to perform dust removal efficiently.

In addition, a transmission means 31 for making the feeding speed of the small single-piece workpiece W ₁ constant is provided, and the transmission means 31 is provided in the vicinity of the upstream drive rotor 9 or the downstream drive rotor 11. A basic rotary body 38, a speed changing rotary body 39 having a diameter or the number of teeth different from that of the basic rotary body 38, and an endless flexible member 44 suspended from the basic rotary body 38 and the speed changing rotary body 39, the transmission rotary member 39, and then, is rotated in the upstream drive rotary member 9 or the downstream side drive rotor 11 integrally shaped, the diameter D ₁ of the upstream drive rotary member 9, the upstream transport roller When it is different from the diameter D _{0 of} 30, the feeding speed of the small single-wafer workpiece W ₁ can be made constant. Diameter D ₂ of the downstream drive rotor 11 is different from the diameter D ₃ of the downstream transport roller 36, it can be made constant feed rate of the small leaves workpiece W _1.

  The lower dust removing head 2, the upstream free roller 7, the downstream free roller 8, the upstream drive rotator 9, the downstream drive rotator 11, the first work transport belt 10, and the second work transport belt 20 are combined into a unit. Since it is U, it can be installed easily and reliably between the most downstream end 30A of the upstream conveying roller 30 (existing or newly installed) and the most upstream end 36A of the downstream conveying roller 36.

In addition, an upstream free roller 7a and a downstream free roller 8a for small single-wafer workpieces are provided at the center in the width direction, and an upstream free roller 7b and a downstream free roller for large single-wafer workpieces are provided on the outer side in the width direction. 8b and is provided, since none of the large leaves workpiece W ₀ and smaller leaves workpiece W ₁ has been conveyed, dedusted capable configuration, be shared in the manufacture of large-sized leaves the workpiece W ₀ and smaller leaves the workpiece W ₁ it can. In particular, the present invention can also be used when a large single-wafer workpiece W ₀ and a small single-wafer workpiece W ₁ are conveyed together.

Further, a support free roller 19 is provided between the upstream free roller 7 and the downstream free roller 8 so that the small sheet work W ₁ smoothly transfers from the upstream free roller 7 to the downstream free roller 8. since it is configured, it is possible to dust conveys the small leaves workpiece W ₁ reliably smoothly. In particular, the small single-piece workpiece W ₁ having the conveyance direction dimension G equal to the conveyance direction interval dimension E can be conveyed without stopping in the middle.

DESCRIPTION OF SYMBOLS 1 Upper dust removal head 2 Lower dust removal head 3 Upstream side suction port 4 (For air ejection) Discharge port 5 Downstream side suction port 6 Upper surface corresponding to a work 7 Upstream free roller 7a Upstream free roller 7b of small sheet work 7b Small sheet work Downstream free roller 8a upstream free roller of large sheet work 8b downstream free roller of large sheet work 8 downstream free roller 9 upstream drive rotating body
10 1st work conveyance belt
11 Downstream drive rotor
12 Upper wall
13 Upstream negative pressure chamber
14 Upstream side wall
15 Through hole
16 Downstream negative pressure chamber
17 Downstream side wall
18 Through hole
19 Support free roller
20 Second workpiece conveyor belt
21 First through hole
22 Second through hole
31 Speed change means
38 Basic rotating body
39 Variable speed rotating body
44 Endless flexible member E Dimension in transport direction G Dimension in transport direction U Unit W ₀ Large sheet work W ₁ Small sheet work

Claims (6)

An upper dust removal head (1) and a lower dust removal head (2) are arranged vertically opposite to remove dust adhering to the small single-wafer workpiece (W ₁ ), and the lower dust removal head (2) is located upstream. In a dust removal apparatus for a single-wafer workpiece, comprising a suction port (3), an air ejection discharge port (4), and a downstream suction port (5) in order on the workpiece-corresponding upper surface (6).
An upstream free roller (7) and a downstream free roller (8) are provided in the vicinity of the front and rear of the discharge port (4), and upstream drive rotation is provided in the vicinity of the upstream side of the lower dust removing head (2). A first work conveyor belt (10) is suspended between the body (9) and the upstream free roller (7), and further, a downstream drive rotating body (near the downstream side of the lower dust removing head (2)) ( 11) and the downstream free roller (8) above, the second work conveyor belt (20) is suspended ,
A first through hole (21) constituting a part of the upstream suction port (3) is formed in the upper wall portion (12) forming the work-corresponding upper surface (6) of the lower dust removal head (2). The upstream free roller (7) is inserted into the first through hole (21) and the first work conveying belt (10) is passed through the first through hole (21) to the lower dust removing head. The first work conveying belt is inserted into the upstream negative pressure chamber (13) of (2) and inserted into the through hole (15) of the upstream side wall (14) of the upstream negative pressure chamber (13). (10) is suspended from the external upstream drive rotor (9),
In addition, a second through hole (22) constituting a part of the downstream suction port (5) is formed in the upper wall portion (12), and the downstream free roller (8) is connected to the second through hole ( 22) and the second work conveying belt (20) is inserted into the negative pressure chamber (16) on the downstream side of the lower dust removing head (2) through the second through hole (22). And, the second work conveying belt (20) is inserted into the external downstream drive rotator (11) through the through hole (18) of the downstream side wall (17) of the downstream negative pressure chamber (16). Single-wafer workpiece dust remover characterized by being suspended . The conveyance direction interval dimension (E) between the upstream free roller (7) and the downstream free roller (8) is set to be equal to or less than half the conveyance direction dimension (G) of the small single-piece workpiece (W ₁ ) to be conveyed. The dust removal apparatus for a single-wafer workpiece according to claim 1. A transmission means (31) for making the feeding speed of the small single-wafer workpiece (W ₁ ) constant is provided, and the transmission means (31) includes the upstream drive rotator (9) or the downstream drive rotator ( 11) a basic rotator (38) provided in the vicinity, a speed changing rotator (39) having a diameter or the number of teeth different from that of the basic rotator (38), the basic rotator (38) and the speed changing rotation An endless flexible member (44) suspended from the body (39),
The dust removal for a single-wafer workpiece according to claim 1 or 2, wherein the speed changing rotator (39) is configured to rotate integrally with the upstream drive rotator (9) or the downstream drive rotator (11). apparatus. The lower dust removing head (2), the upstream free roller (7), the downstream free roller (8), the upstream drive rotator (9), the downstream drive rotator (11), and the first work conveying belt (10). The dust removal apparatus for a single-wafer workpiece according to claim 1, 2 or 3 , wherein the second workpiece transport belt (20) is a unit (U) . An upstream free roller (7a) and a downstream free roller (8a) for a small single-wafer workpiece are provided at the center in the width direction, and an upstream free roller (7b) for a large single-wafer workpiece is provided on the outer side in the width direction. The sheet according to claim 1, 2, 3 or 4, wherein a downstream free roller (8b) is provided so that both the large-sized sheet work (W ₀ ) and the small-sized sheet work (W ₁ ) can be conveyed and dust-removed. Leaf work dust removal device. A supporting free roller (19) is provided between the upstream free roller (7) and the downstream free roller (8), and a small sheet from the upstream free roller (7) to the downstream free roller (8). The dust removing device for a single-wafer workpiece according to claim _{1, wherein the} workpiece (W ₁ ) is smoothly transferred .

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