KR100899135B1 - Glass transporting system - Google Patents

Glass transporting system Download PDF

Info

Publication number
KR100899135B1
KR100899135B1 KR1020080100637A KR20080100637A KR100899135B1 KR 100899135 B1 KR100899135 B1 KR 100899135B1 KR 1020080100637 A KR1020080100637 A KR 1020080100637A KR 20080100637 A KR20080100637 A KR 20080100637A KR 100899135 B1 KR100899135 B1 KR 100899135B1
Authority
KR
South Korea
Prior art keywords
substrate
horizontal bar
cassette
main
main frame
Prior art date
Application number
KR1020080100637A
Other languages
Korean (ko)
Inventor
이재환
Original Assignee
주식회사 톱텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 톱텍 filed Critical 주식회사 톱텍
Priority to KR1020080100637A priority Critical patent/KR100899135B1/en
Application granted granted Critical
Publication of KR100899135B1 publication Critical patent/KR100899135B1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

Abstract

The present invention relates to a substrate transfer system, and more particularly, to minimize the distance between the stacked substrates, to increase the efficiency of loading the substrate, to reduce the size of the equipment and to allow random transfer to the substrate. It relates to a substrate transfer system.

To this end, the main frame; a conveyor installed on one side of the main frame; a lifter including a lifting shaft provided on both sides of the inside of the main frame, and a lifting unit lifting along the lifting shaft; a plurality of substrates are seated on the lifting unit Cassettes mounted on the horizontal bar up and down; Installed on one side of the main frame, when the substrate of the cassette is lifted by the lifter corresponding, the main drive unit for rotating the horizontal bar to push the substrate toward the conveyor, including; The horizontal bar is installed horizontally with respect to the ground in the cassette, the horizontal bar provides a substrate transfer system, characterized in that a plurality of rollers for supporting the bottom of the substrate is installed.

Board, Feed, Cassette, Lift, Horizontal Bar, Roller, Main Drive, Auxiliary Drive, Magnetic

Description

Substrate Transport System

The present invention relates to a substrate transfer system, and more particularly, to minimize the distance between the stacked substrates, to increase the efficiency of loading the substrate, to reduce the size of the equipment and to allow random transfer to the substrate. It relates to a substrate transfer system.

Recently, as the demand for electronic devices such as computers and televisions has exploded, the demand for flat panel display devices used for such electronic devices has also increased.

Such flat panel displays include liquid crystal displays (LCDs), plasma display panels (PDPs), field emission displays (FEDs), and the like. The size of the substrate is gradually increasing in size.

In particular, in the 8th generation, which has recently started operation of the production line, the size of the substrate to be handled is very large up to about 2.2 × 2.5 m.

In manufacturing a flat panel display device for manufacturing such a large substrate, as shown in FIG. 1, a cassette 10 capable of storing and storing a large substrate is required.

That is, when the substrate G is loaded into the flat panel display device manufacturing apparatus which performs a specific process on the board | substrate G, and the board | substrate G processed by the flat panel display device manufacturing apparatus is carried out, a new board | substrate ( A cassette capable of temporarily storing G) and the transported substrate G is located outside the flat panel display device manufacturing apparatus, so that new substrates are sequentially brought into the flat panel display device manufacturing apparatus, and the processed substrate G is removed. It is loaded again in the cassette 10 in order.

As described above, the reason why the cassette 10 is used is that the transport of the substrate G takes a lot of time when the substrate G is transported one by one, and the substrate G may be damaged during the transport process. Therefore, a plurality of substrates G are stacked in the cassette 10 and then the cassette 10 itself is transported. By transporting the substrate G in the cassette unit as described above, it is possible to prevent the substrate from being damaged during the transport process, and to increase the efficiency of the work.

Here, the conventional cassette 10 will be described briefly. As shown in FIG. 1, the conventional cassette 10 includes a main frame 11 forming the overall shape of the cassette, a horizontal frame 12 installed horizontally up and down along the circumference of the main frame 11. The support frame 13 is disposed across the horizontal frame 12, and the support pin 14 is spaced apart at regular intervals on the support frame 13 is disposed a plurality.

At this time, the cassette 10 is located on the support 20. At this time, the cassette 10 and the support 20 are coupled by precise position adjustment of the aligner (not shown in the drawing) separately provided.

And in front of the support stand 20, as shown in FIG. 1, the conveyance robot 30 which moves the board | substrate G is arrange | positioned, and the board | substrate mounted in the cassette 10 by this conveyance robot 30 is carried out. The G may be carried out to the outside, and the substrate G may be moved from the outside to be loaded into the cassette.

However, the conventional substrate transfer system has the following problems.

First, the pitch between the support pins 14 installed on each support frame 13 to support the substrate G must be secured to a certain level so that the hand 32 of the transfer robot 30 can be inserted. do.

As described above, when the length of the support pin 14 is increased in order to secure the pitch between the support pins 14, the specific portion of the substrate G supported by the support pins 14 is It can't handle the weight, so it goes down.

Accordingly, while the hand 32 of the transfer robot 30 enters between the substrate G and the support frame 13 in order to transfer the substrate G, the hand 32 collides with the substrate G and thus the substrate G. There was a problem of breaking.

In this case, when the height of the support pin 14 is further increased in order to solve the above problem, the distance between the support presses 13 increases, so that the number of substrates G loaded on one cassette 10 decreases. A problem arises in that the loading efficiency on the substrate G is lowered.

Second, the installation of the transfer robot 30 and the radius for the action of the transfer robot 30 to be secured, the problem that the size of the entire installation has increased.

Accordingly, the size of the installation is made, there is a problem that the efficiency of the installation space is inferior.

Third, as the transfer to the substrate G is sequentially performed, there is a problem that the efficiency of transferring the substrate G is lowered.

The present invention has been made to solve the above problems, an object of the present invention is to minimize the distance between the stacked substrates to increase the efficiency of the loading of the substrate, and to reduce the size of the equipment and random (random to the substrate) It is to provide a substrate transfer system that enables transfer.

To this end, the main frame; a conveyor installed on one side of the main frame; a lifter including a lifting shaft provided on both sides of the inside of the main frame, and a lifting unit lifting along the lifting shaft; a plurality of substrates are seated on the lifting unit Cassettes mounted on the horizontal bar up and down; Installed on one side of the main frame, when the substrate of the cassette is lifted by the lifter corresponding, the main drive unit for rotating the horizontal bar to push the substrate toward the conveyor, including; The horizontal bar is installed horizontally with respect to the ground in the cassette, the horizontal bar provides a substrate transfer apparatus, characterized in that a plurality of rollers for supporting the bottom of the substrate is installed.

At this time, it is preferable that the auxiliary driving part corresponding to the main driving part is provided at each end of the horizontal bar.

At this time, the main driving portion and the auxiliary driving portion is made of a magnetic, it is preferable that the power is transmitted by the magnetic force in a non-contact state with each other.

At this time, the main drive unit, a fixed part fixed to the main frame, a moving part reciprocating toward the horizontal bar from the fixed part, and the main magnetic installed in the moving part, the main magnetic is disposed between the auxiliary driving part It is preferable that the upper horizontal bar is rotated, but the position of the main magnetic is closer to the upper horizontal bar than the lower horizontal bar.

According to the substrate transfer system according to the present invention has the following effects.

First, the spacing between the stacked substrates is minimized, thereby increasing the loading efficiency of the substrate.

Second, the configuration of the transfer robot is deleted, thereby reducing the size of the entire facility.

Accordingly, the efficiency of the installation space is increased, and the economic efficiency is improved.

Third, as the cassette is lifted and moved to the substrate at random, the efficiency of the substrate transfer is increased.

Hereinafter, a substrate transfer system according to a preferred embodiment of the present invention will be described with reference to FIGS. 2 to 5.

As can be seen from the accompanying drawings, the substrate transfer system is composed of a main frame 100, a conveyor 200, a lifter 300, a cassette 400, and the main drive unit 500.

The main frame 100 provides a space in which the cassette 400 is lifted and lifted by the lifter 300, and a plurality of frames are combined to protect various devices such as the cassette 400 and the lifter 300.

Next, the conveyor 200 transfers the substrate G taken out of the cassette 400 to a processing apparatus (not shown), or transfers the substrate G on which the process is completed from the processing apparatus to the cassette 400. Doing so, is installed in one side of the main frame 100.

The conveyor 200 includes a support frame 210 supported on the ground, and a plurality of rollers 211 installed on the support frame 210.

In this case, roller bars 211a for coupling the rollers 211 are installed between the support frames 210, and a plurality of the rollers 211 are installed on the support frames 210.

At this time, the position of the roller 211 corresponds to the bottom surface of the substrate G carried out from the cassette 400.

Next, the lifter 300 lifts the cassette 400 and is installed inside the main frame 100.

The lifter 300 is a lifting shaft 310 installed vertically on both sides of the main frame 100, the lifting unit 320, which is lifted along the lifting shaft 310 and the cassette 400 is seated, and It includes a power unit 330 for elevating the lifting unit 320.

At this time, the lifting shaft 310 is installed perpendicular to the ground, the outer peripheral surface is made of a screw shape.

And, both sides of the lifting unit 320 is made to be screwed to the lifting shaft 310.

At this time, the lifting unit 320 is preferably made of a plate form so that the seating of the cassette 400 is made stable.

In addition, the power unit 330 generates power for rotating the lifting shaft 310, and is installed below the main frame 100.

At this time, the power unit 330 is connected to the motor 331, the shaft 332 is coupled to both sides of the motor 331, the shaft 332 and the lifting shaft 310, the horizontal of the shaft 332 It includes a gear unit 333 for converting the rotation to the vertical rotation of the lifting shaft (310).

Next, the cassette 400 loads a plurality of substrates and is seated on the lifting unit 320.

The cassette 400 has an upper frame 410 constituting an upper portion of the exterior, a lower frame 420 constituting a lower portion of the exterior, and a vertical frame vertically connecting the upper frame 410 and the lower frame 420. 430, a plurality of horizontal bars 440 installed across the vertical frame 430, and a plurality of rollers 450 installed on the horizontal bars 440.

At this time, the appearance of the cassette 400, the shape of the substrate (G) is made of a rectangular shape, it is preferably made of a hexahedral shape corresponding thereto.

The horizontal bars 440 are rotatably installed between the vertical frames 430 and a plurality of horizontal bars 440 are installed in the height direction of the vertical frames 430.

The roller 450 installed on the horizontal bar 440 supports the bottom surface of the substrate G, and rotates with the rotation of the horizontal bar 440.

At this time, the material of the roller 450 is preferably soft so that the surface of the substrate (G) is not damaged.

At this time, it is natural that one substrate is supported on each of the horizontal bars 440.

On the other hand, the auxiliary drive unit 441 is provided at each end of the horizontal bar 440.

The auxiliary driving unit 441 is to allow the horizontal bar 440 to rotate when it corresponds to the main driving unit described later, and includes a magnetic.

In this way, the auxiliary drive unit 441 is made of a magnetic material for forming a non-contact magnetic gear structure.

In this case, the non-contact magnetic gear structure refers to a structure that transmits and receives power by magnetic force in a state of not contacting each other.

In this case, the magnetic is referred to as an auxiliary magnetic for convenience of description.

Next, the main driving part 500 serves to rotate the horizontal bar 440, and is installed in portions of the main frame 100 corresponding to both sides of the cassette 400.

The main driver 500 includes a fixed part 510 fixed to the main frame 100, a moving part 520 reciprocating from the fixed part 510 toward the horizontal bar 440, and the moving part 520. ) And a main magnetic 540 installed on the moving part 520 and corresponding to the auxiliary magnetic 441 installed on the horizontal bar 440.

Hereinafter, the operation of the substrate transfer system having the above-described configuration will be described.

The substrates G are loaded on the horizontal bars 440 of the cassette 400.

At this time, one substrate G is mounted on the horizontal bar 440, and the bottom surface of the substrate G is supported by the roller 450.

Next, the cassette 400 is seated on the lifting part 320 of the lifter 300.

Thereafter, when the motor 331 of the power unit 330 is driven, the shafts 332 provided on both sides of the motor 331 are rotated, respectively.

In this case, the motor 331 is rotated in the forward or reverse direction by a control unit (not shown), and thus the shaft 332 also rotates forward and reverse in the horizontal direction with respect to the ground.

Thereafter, the gear unit 333 rotates the lifting shaft 310 by converting the horizontal rotation of the shaft 332 to vertical rotation.

At this time, the elevating unit 320 screwed to the elevating shaft 310 is raised or lowered together with the cassette 400 in accordance with the rotation of the elevating shaft (310).

In this case, when the position of the substrate G selected by the controller corresponds to the main driver 500 as shown in FIG. 4A, the lifting operation of the lifting unit 320 is stopped.

Thereafter, as shown in FIG. 4B, the moving part 520 of the main driving part 500 is moved toward the horizontal bar 440 on which the substrate G is mounted, and the main magnetic installed in the moving part 520. The 540 is disposed below the auxiliary magnetic 441 of the horizontal bar 440.

At this time, the position of the main magnetic 540 is preferably closer to the upper auxiliary magnetic 441 than the auxiliary magnetic 441 disposed below.

This is to rotate only the selected horizontal bar 440.

Thereafter, a magnetic force is generated between the main magnetic 540 and the auxiliary magnetic 441, and the horizontal bar 440 is rotated toward the conveyor 200 by the magnetic force.

Accordingly, the substrate G supported by the roller 450 is transferred toward the conveyor 200, and the substrate G is transferred to the processing apparatus by the conveyor 200.

Thereafter, the remaining substrates G loaded on the cassette 400 correspond to the main driver 500 randomly by the controller, and the main driver 500 transfers them to the conveyor 20.

As described so far, since the means for carrying out the substrate G from the cassette 400 is not a robot, the gap between the substrates G can be minimized.

Accordingly, the cassette 400 can increase the loading efficiency of the substrate (G).

In addition, as the lifting unit 320 is lifted by the lifter 300, the substrates G may be randomly corresponding to the main driving unit 500 and transferred to the conveyor 200 by the main driving unit 500. .

In this way, as the transfer to the substrate is made at random, the efficiency for transferring the substrate is increased.

In addition, as the configuration of the robot is deleted and the size of the entire facility is reduced, efficiency and economy of space may be improved.

1 is a perspective view showing a conventional substrate transfer system

Figure 2 is a front view showing a state in which the cassette is arranged in the main frame of the substrate transfer system according to an embodiment of the present invention

3 is an enlarged view of portion “A” of FIG. 2;

4A and 4B are enlarged views of a portion “B” of FIG. 2, showing an operation of the main driving unit.

5 is a side view showing a substrate transfer system according to a preferred embodiment of the present invention.

* Description of Major Symbols in Drawings *

100: mainframe 200: conveyor

211: roller 211a: roller bar

300: lifter 310: lifting shaft

320: lifting unit 330: power unit

331 motor 332 shaft

333: Gear 400: Cassette

410: upper frame 420: lower frame

430: vertical frame 440: horizontal bar

441: auxiliary drive unit 500: main drive unit

510: fixed part 520: moving part

530: motor 540: main magnetic

Claims (4)

Mainframe; A conveyor installed in one direction of the main frame; A lifter including elevating shafts provided on both sides of the main frame and an elevating unit which is elevated along the elevating shaft; A cassette mounted on the lifting unit and having a plurality of substrates stacked vertically on a horizontal bar; A main drive unit installed at one side of the main frame and configured to push the substrate toward the conveyor by rotating the horizontal bar when the substrate of the cassette lifted by the lifter corresponds; An auxiliary driving part corresponding to the main driving part and installed at an end of the horizontal bar; Including but not limited to: The horizontal bar is installed in the cassette horizontal to the ground, the horizontal bar is provided with a plurality of rollers for supporting the bottom of the substrate, The main drive unit, the fixed part fixed to the main frame; A moving part reciprocating from the fixed part toward the horizontal bar; And a main magnetic installed in the moving part, wherein the main magnetic is disposed between the auxiliary driving parts to rotate the horizontal bar upward, wherein the position of the main magnetic is closer to the horizontal bar upward than the horizontal bar downward. Substrate transfer apparatus, characterized in that. delete The method of claim 1, The main driving unit and the auxiliary driving unit is made of a magnetic, the substrate transfer apparatus, characterized in that the power is transmitted by the magnetic force in a non-contact state with each other. delete
KR1020080100637A 2008-10-14 2008-10-14 Glass transporting system KR100899135B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020080100637A KR100899135B1 (en) 2008-10-14 2008-10-14 Glass transporting system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080100637A KR100899135B1 (en) 2008-10-14 2008-10-14 Glass transporting system

Publications (1)

Publication Number Publication Date
KR100899135B1 true KR100899135B1 (en) 2009-05-25

Family

ID=40862424

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080100637A KR100899135B1 (en) 2008-10-14 2008-10-14 Glass transporting system

Country Status (1)

Country Link
KR (1) KR100899135B1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101432701B1 (en) * 2013-01-23 2014-08-25 태백하이텍 주식회사 Apparatus for substrate loading
KR101802973B1 (en) * 2016-07-07 2017-12-28 주식회사 제일안전유리 Loading Apparatus for Roller conveyor and Roller conveyor Apparatus using the same
CN107884964A (en) * 2017-12-21 2018-04-06 武汉华星光电技术有限公司 Substrate loading device with elevating function

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005159141A (en) 2003-11-27 2005-06-16 Ishikawajima Harima Heavy Ind Co Ltd Substrate transfer device and substrate storage and transfer device
KR20070093845A (en) * 2006-03-14 2007-09-19 도쿄 엘렉트론 가부시키가이샤 Substrate buffer device, method of buffering substrate, substrate processing apraratus and computer readable storage medium
KR20080074275A (en) * 2007-02-08 2008-08-13 박재홍 Cassette system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005159141A (en) 2003-11-27 2005-06-16 Ishikawajima Harima Heavy Ind Co Ltd Substrate transfer device and substrate storage and transfer device
KR20070093845A (en) * 2006-03-14 2007-09-19 도쿄 엘렉트론 가부시키가이샤 Substrate buffer device, method of buffering substrate, substrate processing apraratus and computer readable storage medium
KR20080074275A (en) * 2007-02-08 2008-08-13 박재홍 Cassette system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101432701B1 (en) * 2013-01-23 2014-08-25 태백하이텍 주식회사 Apparatus for substrate loading
KR101802973B1 (en) * 2016-07-07 2017-12-28 주식회사 제일안전유리 Loading Apparatus for Roller conveyor and Roller conveyor Apparatus using the same
CN107884964A (en) * 2017-12-21 2018-04-06 武汉华星光电技术有限公司 Substrate loading device with elevating function

Similar Documents

Publication Publication Date Title
TWI227212B (en) Substrate transporting system
JP5102717B2 (en) Substrate transport apparatus and substrate processing apparatus provided with the same
KR101335302B1 (en) Apparatus driving lift pins and device having it for manufacturing FPD
JP2008260605A (en) Board carrying device
KR100899135B1 (en) Glass transporting system
KR20100041453A (en) Glass transporting system
KR20140114931A (en) A Cassette Moving Vehicle for Substrates Storage Chamber
WO2006137407A1 (en) Work receiving device and work receiving method
KR100832472B1 (en) The substrate transfer
JP4192568B2 (en) Transport system
JPH1179388A (en) Glass sheet handling device
KR101000494B1 (en) Transferring apparatus
JP2009176858A (en) Substrate delivery apparatus
KR20080074275A (en) Cassette system
KR101688842B1 (en) Substrate processing apparatus
KR101427596B1 (en) Substrate conveyor
KR101000086B1 (en) Cluster device for processing substrate and method for processing substrate of cluster device
KR100588451B1 (en) A method for supply and discharge a base plate
JP5283770B2 (en) Substrate transport apparatus and substrate processing apparatus provided with the same
CN112224886A (en) Automatic glass substrate loading and unloading equipment
KR101069154B1 (en) Apparatus for processing substrate
KR100900962B1 (en) Apparatus for processing a substrate
KR20080104515A (en) Apparatus for storing substrate
JP2014038990A (en) Substrate conveyance device and substrate processing system
KR101014749B1 (en) Cassette System for Storing the Substrate

Legal Events

Date Code Title Description
A201 Request for examination
A302 Request for accelerated examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20130516

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20140516

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20150515

Year of fee payment: 7

FPAY Annual fee payment

Payment date: 20160518

Year of fee payment: 8

FPAY Annual fee payment

Payment date: 20170504

Year of fee payment: 9

FPAY Annual fee payment

Payment date: 20180508

Year of fee payment: 10

FPAY Annual fee payment

Payment date: 20190503

Year of fee payment: 11