TW201224440A - Inspection device - Google Patents

Inspection device Download PDF

Info

Publication number
TW201224440A
TW201224440A TW100131482A TW100131482A TW201224440A TW 201224440 A TW201224440 A TW 201224440A TW 100131482 A TW100131482 A TW 100131482A TW 100131482 A TW100131482 A TW 100131482A TW 201224440 A TW201224440 A TW 201224440A
Authority
TW
Taiwan
Prior art keywords
observation
transmission
inspection
holding
optical axis
Prior art date
Application number
TW100131482A
Other languages
English (en)
Chinese (zh)
Inventor
Takashi Itoh
Kenichiro Komatsu
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Publication of TW201224440A publication Critical patent/TW201224440A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW100131482A 2010-09-03 2011-09-01 Inspection device TW201224440A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010197543A JP5646922B2 (ja) 2010-09-03 2010-09-03 検査装置

Publications (1)

Publication Number Publication Date
TW201224440A true TW201224440A (en) 2012-06-16

Family

ID=45824546

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100131482A TW201224440A (en) 2010-09-03 2011-09-01 Inspection device

Country Status (4)

Country Link
JP (1) JP5646922B2 (ja)
KR (1) KR20120024466A (ja)
CN (1) CN102384918A (ja)
TW (1) TW201224440A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102944563A (zh) * 2012-09-28 2013-02-27 肇庆中导光电设备有限公司 具有透射及反射光源的照明装置、检测系统及其检测方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116990992B (zh) * 2023-08-02 2024-04-09 浙江美力凯光电科技有限公司 一种背光源贴胶检验治具及其使用方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63274941A (ja) * 1987-05-06 1988-11-11 Minoru Morita 写真用濃度測定器
NZ250042A (en) * 1992-12-21 1997-01-29 Johnson & Johnson Vision Prod Robotic inspection of ophthalmic lenses
JP2991593B2 (ja) * 1993-08-19 1999-12-20 株式会社東京精密 ダイシング装置の半導体ウェハ形状認識装置
JP3496209B2 (ja) * 1995-05-12 2004-02-09 日本精工株式会社 ベアリングの転動体欠落検査装置
US5820250A (en) * 1995-10-24 1998-10-13 Dolan-Jenner Industries, Inc. Dark field illuminator ringlight adaptor
EP1985995A3 (en) * 1996-08-16 2009-09-16 GE Healthcare Niagara Inc. A digital imaging system for assays in well plates, gels and blots
DE19819492A1 (de) * 1998-04-30 1999-11-11 Leica Microsystems Meßgerät zur Vermessung von Strukturen auf einem transparenten Substrat
JP4201532B2 (ja) * 2001-06-14 2008-12-24 株式会社トーメー 透明体の検査装置および検査方法
JP2005024386A (ja) * 2003-07-02 2005-01-27 Ushio Inc 配線パターン検査装置
JP2005083863A (ja) * 2003-09-08 2005-03-31 Kobe Steel Ltd 電気的接続検査装置
DE102004029212B4 (de) * 2004-06-16 2006-07-13 Leica Microsystems Semiconductor Gmbh Vorrichtung und Verfahren zur optischen Auf- und/oder Durchlichtinspektion von Mikrostrukturen im IR
JP2006105816A (ja) * 2004-10-06 2006-04-20 Kokusai Gijutsu Kaihatsu Co Ltd 物品検査装置、及び物品検査方法
JP2006162427A (ja) * 2004-12-07 2006-06-22 Toshiba Corp Ｌｅｄチップの検査方法及びｌｅｄチップの検査装置
JP2007033202A (ja) * 2005-07-26 2007-02-08 Dainippon Screen Mfg Co Ltd 外観検査装置および外観検査方法
JP3831744B1 (ja) * 2005-09-20 2006-10-11 株式会社モリテックス 基板検査用照明装置
JP2007093258A (ja) * 2005-09-27 2007-04-12 Tateyama Machine Kk 外観検査装置
KR100772608B1 (ko) * 2006-05-29 2007-11-02 아주하이텍(주) 자동 광학 검사 시스템
JP5307539B2 (ja) * 2006-05-31 2013-10-02 オリンパス株式会社 生体試料撮像方法および生体試料撮像装置
JP2008139794A (ja) * 2006-12-05 2008-06-19 Keyence Corp 蛍光顕微鏡、蛍光顕微鏡の操作方法、蛍光顕微鏡操作プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器
JP5038701B2 (ja) * 2006-12-15 2012-10-03 株式会社トプコン 検査装置
JP4224863B2 (ja) * 2007-02-02 2009-02-18 レーザーテック株式会社 検査装置及び検査方法、並びにパターン基板の製造方法
DE102007000980A1 (de) * 2007-11-07 2009-05-14 Vistec Semiconductor Systems Gmbh Verfahren zum Bestimmen der Kennlinie einer Kamera einer Inspektionsmaschine
JP2009175035A (ja) * 2008-01-25 2009-08-06 Topcon Corp 検査方法及び検査装置
JP2009180601A (ja) * 2008-01-30 2009-08-13 Nippon Avionics Co Ltd パターン検査方法および装置
JP2010107254A (ja) * 2008-10-28 2010-05-13 Panasonic Electric Works Co Ltd Ｌｅｄチップ検査装置、ｌｅｄチップ検査方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102944563A (zh) * 2012-09-28 2013-02-27 肇庆中导光电设备有限公司 具有透射及反射光源的照明装置、检测系统及其检测方法
CN102944563B (zh) * 2012-09-28 2016-02-24 肇庆中导光电设备有限公司 具有透射及反射光源的照明装置、检测系统及其检测方法

Also Published As

Publication number Publication date
CN102384918A (zh) 2012-03-21
KR20120024466A (ko) 2012-03-14
JP5646922B2 (ja) 2014-12-24
JP2012052991A (ja) 2012-03-15

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