TW200909798A - Appearance inspecting device for substrate - Google Patents

Appearance inspecting device for substrate Download PDF

Info

Publication number
TW200909798A
TW200909798A TW097122167A TW97122167A TW200909798A TW 200909798 A TW200909798 A TW 200909798A TW 097122167 A TW097122167 A TW 097122167A TW 97122167 A TW97122167 A TW 97122167A TW 200909798 A TW200909798 A TW 200909798A
Authority
TW
Taiwan
Prior art keywords
substrate
unit
inspection device
image
illumination
Prior art date
Application number
TW097122167A
Other languages
English (en)
Chinese (zh)
Inventor
Hiroyuki Okahira
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200909798A publication Critical patent/TW200909798A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
TW097122167A 2007-07-06 2008-06-13 Appearance inspecting device for substrate TW200909798A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007178772A JP2009014617A (ja) 2007-07-06 2007-07-06 基板外観検査装置

Publications (1)

Publication Number Publication Date
TW200909798A true TW200909798A (en) 2009-03-01

Family

ID=40213265

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097122167A TW200909798A (en) 2007-07-06 2008-06-13 Appearance inspecting device for substrate

Country Status (4)

Country Link
JP (1) JP2009014617A (ja)
KR (1) KR20090004636A (ja)
CN (1) CN101339143A (ja)
TW (1) TW200909798A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399332B (ja) * 2009-11-30 2013-06-21
TWI404571B (zh) * 2009-06-18 2013-08-11 Ulvac Inc 維修裝置及吐出裝置

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101080216B1 (ko) * 2009-02-17 2011-11-09 (주)글로벌 텍 글라스 에지 검사장치 및 그를 이용한 글라스 에지 검사방법
US8432540B2 (en) * 2010-03-31 2013-04-30 Cooper S.K. Kuo Support mechanism for inspection systems
CN102680495B (zh) * 2011-03-15 2016-09-07 上海赫立电子科技有限公司 自动光学检测装置及方法
JPWO2012153662A1 (ja) * 2011-05-10 2014-07-31 旭硝子株式会社 透光性板状体の微小欠点の検査方法および透光性板状体の微小欠点の検査装置
CN102621149B (zh) * 2012-03-21 2015-07-22 深圳市华星光电技术有限公司 基板的检测装置及方法
US20130248692A1 (en) * 2012-03-21 2013-09-26 Shenzhen China Star Optoelectronics Technology Co Ltd. Detecting apparatus and method for substrate
CN102636498B (zh) * 2012-03-22 2014-04-16 深圳市华星光电技术有限公司 玻璃基板的检测装置及检测方法
CN102866167A (zh) * 2012-10-19 2013-01-09 深圳市劲拓自动化设备股份有限公司 一种电路板离线检测系统和方法
CN104568973A (zh) * 2015-02-09 2015-04-29 京东方科技集团股份有限公司 一种基板检测装置及方法
CN105115979A (zh) * 2015-09-09 2015-12-02 苏州威盛视信息科技有限公司 基于图像拼接技术的pcb工作片aoi检测方法
JP6587211B2 (ja) * 2015-12-17 2019-10-09 日本電気硝子株式会社 ガラス板の製造方法
KR101751801B1 (ko) * 2016-05-18 2017-06-29 한국기계연구원 기판 결함 검사 장치 및 이를 이용한 검사 방법
CN107884318B (zh) * 2016-09-30 2020-04-10 上海微电子装备（集团）股份有限公司 一种平板颗粒度检测方法
CN106862097A (zh) * 2017-03-27 2017-06-20 江苏凯伦铝业有限公司 光伏组件铝边框全自动检测装置
FR3066821B1 (fr) * 2017-05-24 2019-07-12 Areva Np Dispositif de detection d'un defaut sur une surface par eclairage multidirectionnel
CN107843991A (zh) * 2017-09-05 2018-03-27 努比亚技术有限公司 屏幕漏光的检测方法、系统、终端及计算机可读存储介质
JP6795479B2 (ja) * 2017-09-25 2020-12-02 株式会社Ｓｃｒｅｅｎホールディングス 検査装置および検査方法
CN107526196A (zh) * 2017-09-27 2017-12-29 武汉华星光电技术有限公司 玻璃基板承载装置及检测设备
CN107907549A (zh) * 2017-11-13 2018-04-13 武汉华星光电半导体显示技术有限公司 基板检查设备及基板检查方法
JP2019158500A (ja) 2018-03-12 2019-09-19 オムロン株式会社 外観検査システム、画像処理装置、撮像装置および検査方法
KR102374037B1 (ko) * 2018-06-29 2022-03-11 캐논 톡키 가부시키가이샤 기판 검사 시스템, 전자 디바이스 제조 시스템, 기판 검사 방법, 및 전자 디바이스 제조 방법
CN110783223B (zh) * 2018-07-24 2024-04-16 泰克元有限公司 电子部件处理设备用拍摄装置
CN113945491A (zh) * 2021-09-01 2022-01-18 郑州旭飞光电科技有限公司 玻璃基板表面颗粒检测系统
CN114994062B (zh) * 2022-08-05 2023-03-14 深圳市倍捷锐生物医学科技有限公司 材料表面质量检测方法、系统及存储介质

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10300446A (ja) * 1997-04-30 1998-11-13 Nissan Motor Co Ltd 表面欠陥検査装置
JP2000039564A (ja) * 1998-07-24 2000-02-08 Sony Corp 拡大観察装置
JP4744665B2 (ja) * 2000-03-15 2011-08-10 オリンパス株式会社 基板検査装置及び基板検査システム
JP2003075294A (ja) * 2001-09-05 2003-03-12 Toray Ind Inc 基板の検査方法
WO2003027652A1 (fr) * 2001-09-21 2003-04-03 Olympus Corporation Dispositif d'inspection de defauts
JP2003262593A (ja) * 2002-03-08 2003-09-19 Mitsubishi Rayon Co Ltd 欠陥検出装置及び欠陥検出方法
JP4243837B2 (ja) * 2003-03-14 2009-03-25 株式会社日立ハイテクノロジーズ 透明基板の表面検査方法及び検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI404571B (zh) * 2009-06-18 2013-08-11 Ulvac Inc 維修裝置及吐出裝置
TWI399332B (ja) * 2009-11-30 2013-06-21

Also Published As

Publication number Publication date
KR20090004636A (ko) 2009-01-12
JP2009014617A (ja) 2009-01-22
CN101339143A (zh) 2009-01-07

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