TW200738397A - Stage device - Google Patents

Stage device

Info

Publication number
TW200738397A
TW200738397A TW096104843A TW96104843A TW200738397A TW 200738397 A TW200738397 A TW 200738397A TW 096104843 A TW096104843 A TW 096104843A TW 96104843 A TW96104843 A TW 96104843A TW 200738397 A TW200738397 A TW 200738397A
Authority
TW
Taiwan
Prior art keywords
stage
suction cup
surface plate
stone surface
suction
Prior art date
Application number
TW096104843A
Other languages
English (en)
Chinese (zh)
Other versions
TWI348952B (ja
Inventor
Kazuharu Uchimi
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW200738397A publication Critical patent/TW200738397A/zh
Application granted granted Critical
Publication of TWI348952B publication Critical patent/TWI348952B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/28—Means for securing sliding members in any desired position
    • B23Q1/282—Means for securing sliding members in any desired position co-operating with means to adjust the distance between the relatively slidable members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/26—Fluid-pressure drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Machine Tool Units (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Measuring And Other Instruments (AREA)
TW096104843A 2006-02-17 2007-02-09 Stage device TW200738397A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006041195A JP4545697B2 (ja) 2006-02-17 2006-02-17 ステージ装置

Publications (2)

Publication Number Publication Date
TW200738397A true TW200738397A (en) 2007-10-16
TWI348952B TWI348952B (ja) 2011-09-21

Family

ID=38494143

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096104843A TW200738397A (en) 2006-02-17 2007-02-09 Stage device

Country Status (4)

Country Link
JP (1) JP4545697B2 (ja)
KR (1) KR100852876B1 (ja)
CN (1) CN101026013B (ja)
TW (1) TW200738397A (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100885283B1 (ko) 2007-08-02 2009-02-23 세메스 주식회사 반도체 소자 제조용 진공척
JP5242218B2 (ja) * 2008-03-31 2013-07-24 住友重機械工業株式会社 Ｘｙステージ装置
JP5138443B2 (ja) * 2008-03-31 2013-02-06 住友重機械工業株式会社 Ｘｙステージ装置
JP5336815B2 (ja) * 2008-10-28 2013-11-06 トヨタ紡織株式会社 加工装置
CN101417393B (zh) * 2008-11-21 2011-05-04 深圳市大族激光科技股份有限公司 气脚支撑工作台的设计方法
EP2454049A2 (en) * 2009-07-17 2012-05-23 Robert A. Samac Automated, adjustable, machine-tool work-piece-mounting apparatus
US20120064460A1 (en) * 2010-09-07 2012-03-15 Nikon Corporation Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method
JP5886084B2 (ja) * 2012-03-05 2016-03-16 住友重機械工業株式会社 ステージ装置
JP5776812B1 (ja) * 2014-04-01 2015-09-09 日本精工株式会社 テーブル装置、及び搬送装置
CN104019332B (zh) * 2014-05-30 2015-12-02 西安交通大学 一种超长行程高加速高精密定位一维平台
CN104440344B (zh) * 2014-11-26 2017-05-10 广东工业大学 直线电机共定子多驱动宏微一体化高速精密运动二维平台
JP6624487B2 (ja) * 2015-04-30 2019-12-25 Toto株式会社 エアステージ装置
EP3570045B1 (en) * 2017-01-10 2021-12-01 Osaka University Scanner and scanning probe microscope
CN112551072A (zh) * 2020-12-03 2021-03-26 南通固邦数控机床有限公司 一种油气混合悬浮支撑装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065310B2 (ja) * 1988-12-09 1994-01-19 東京航空計器株式会社 空気浮上式テーブル
US5699621A (en) 1996-02-21 1997-12-23 Massachusetts Institute Of Technology Positioner with long travel in two dimensions
JP3634530B2 (ja) * 1996-02-29 2005-03-30 キヤノン株式会社 位置決め装置および露光装置
JP3810039B2 (ja) * 1998-05-06 2006-08-16 キヤノン株式会社 ステージ装置
JP3438131B2 (ja) 1998-11-24 2003-08-18 住友重機械工業株式会社 Ｘ−ｙステージ装置
JP2001147719A (ja) * 1999-11-24 2001-05-29 Yokogawa Electric Corp 位置決め装置とその停止方法
JP2001307983A (ja) * 2000-04-20 2001-11-02 Nikon Corp ステージ装置及び露光装置
JP3732763B2 (ja) * 2001-07-13 2006-01-11 住友重機械工業株式会社 ステージ装置
TWI260646B (en) * 2003-03-28 2006-08-21 Sumitomo Heavy Industries X-Y axis stage device
JP4335704B2 (ja) * 2003-03-28 2009-09-30 住友重機械工業株式会社 Ｘ−ｙステージ装置
JP2006020478A (ja) 2004-07-05 2006-01-19 Neomax Co Ltd ステージ装置

Also Published As

Publication number Publication date
TWI348952B (ja) 2011-09-21
CN101026013A (zh) 2007-08-29
JP4545697B2 (ja) 2010-09-15
KR20070082866A (ko) 2007-08-22
CN101026013B (zh) 2010-05-26
KR100852876B1 (ko) 2008-08-19
JP2007216349A (ja) 2007-08-30

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees