WO2009051192A1 - 静圧スライド装置及び静圧スライド装置を備えた研削装置 - Google Patents

静圧スライド装置及び静圧スライド装置を備えた研削装置 Download PDF

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Publication number
WO2009051192A1
WO2009051192A1 PCT/JP2008/068777 JP2008068777W WO2009051192A1 WO 2009051192 A1 WO2009051192 A1 WO 2009051192A1 JP 2008068777 W JP2008068777 W JP 2008068777W WO 2009051192 A1 WO2009051192 A1 WO 2009051192A1
Authority
WO
WIPO (PCT)
Prior art keywords
hydrostatic
slide device
hydrostatic slide
guide members
reference guide
Prior art date
Application number
PCT/JP2008/068777
Other languages
English (en)
French (fr)
Inventor
Isao Ando
Takayuki Yui
Takafumi Yamada
Taira Nishizawa
Tatsuya Yamazaki
Yoshinori Yokotaki
Original Assignee
Bosch Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Corporation filed Critical Bosch Corporation
Priority to EP08838588.5A priority Critical patent/EP2213891B1/en
Priority to JP2009538143A priority patent/JP5235893B2/ja
Publication of WO2009051192A1 publication Critical patent/WO2009051192A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0685—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for radial load only
    • F16C32/0688—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for radial load only with floating bearing elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

　静圧軸受けを形成する面の数を極力少なくしつつ、静圧軸受け部分の間隙を高い精度で均一に保持可能とする。 　静圧スライド装置としての第１のスライド部１０１は、第１のベースプレート１１と第１のテーブルプレート１２の間に、案内部３０と第１のリニアモータ１３が設けられ、案内部３０は、第１のベースプレート１１の水平面上に設けられた第１及び第２の基準ガイド部材３１ａ，３１ｂと、これに対向するよう第１のテーブルプレート１２に設けられた第１及び第２の可動側ガイド部材３２ａ，３２ｂとを有すると共に、第１及び第２の基準ガイド部材３１ａ，３１ｂと第１及び第２の可動側ガイド部材３２ａ，３２ｂとの間には静圧パッド４０が形成され、ここから吐出される静圧油によって第１基準ガイド部材３１ａと第１の可動側ガイド部材３２ａとの間に静圧軸受けが形成されるようなっている。
PCT/JP2008/068777 2007-10-19 2008-10-16 静圧スライド装置及び静圧スライド装置を備えた研削装置 WO2009051192A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP08838588.5A EP2213891B1 (en) 2007-10-19 2008-10-16 Hydrostatic slide device and grinding device equipped with hydrostatic slide device
JP2009538143A JP5235893B2 (ja) 2007-10-19 2008-10-16 静圧スライド装置及び静圧スライド装置を備えた研削装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-272219 2007-10-19
JP2007272219 2007-10-19

Publications (1)

Publication Number Publication Date
WO2009051192A1 true WO2009051192A1 (ja) 2009-04-23

Family

ID=40567454

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/068777 WO2009051192A1 (ja) 2007-10-19 2008-10-16 静圧スライド装置及び静圧スライド装置を備えた研削装置

Country Status (3)

Country Link
EP (1) EP2213891B1 (ja)
JP (1) JP5235893B2 (ja)
WO (1) WO2009051192A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017210996A (ja) * 2016-05-24 2017-11-30 ユニバーサル製缶株式会社 流体軸受のオリフィス着脱構造
US10119565B2 (en) 2016-04-01 2018-11-06 Mitutoyo Corporation Air bearing
US20240229863A9 (en) * 2022-10-19 2024-07-11 Toyo Nano System Corporation Air-floating guide rail

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5210322B2 (ja) * 2007-11-20 2013-06-12 ボッシュ株式会社 研削装置
EP2623259A1 (de) * 2012-02-06 2013-08-07 Schneider GmbH & Co. KG Linearantrieb mit einem Ausgleichskörper
CN102950474A (zh) * 2012-11-20 2013-03-06 昆山允可精密工业技术有限公司 液体静压运动平台
CZ201413A3 (cs) * 2014-01-10 2015-08-05 Ĺ KODA MACHINE TOOL, a. s. Zařízení pro přenos podpěrné síly
JP6779309B2 (ja) * 2016-01-12 2020-11-04 ストール マシーナリ カンパニー, エルエルシーStolle Machinery Company, LLC 缶ボディ製造機用のキャリッジアセンブリのガイドベアリングアセンブリ及び缶ボディ製造機
DE102018218482A1 (de) * 2018-10-29 2020-04-30 Otto Bihler Handels-Beteiligungs-Gmbh Linearvorschubeinrichtung und eine damit ausgerüstete objektbearbeitungseinrichtung
EP3954497A1 (en) * 2020-08-11 2022-02-16 Patrick Meunier High accuracy sliding assembly for a manufacturing machine, and manufacturing machine comprising at least one such assembly

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04256571A (ja) * 1991-01-31 1992-09-11 Ntn Corp 先端角度付き研削スピンドル
JPH06330944A (ja) * 1993-05-24 1994-11-29 Fujitsu Autom Ltd 静圧移動案内装置
JP2001179618A (ja) 1999-12-24 2001-07-03 Nippei Toyama Corp 静圧スライド装置及びそれを用いた研削装置
JP2006084355A (ja) * 2004-09-16 2006-03-30 Sumitomo Heavy Ind Ltd ステージガイド機構
JP2006205308A (ja) * 2005-01-28 2006-08-10 Seiko Instruments Inc 流体供給機構、直線移動装置および工作機械

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61209838A (ja) * 1985-03-12 1986-09-18 Omron Tateisi Electronics Co 一軸ステ−ジ
JP4335697B2 (ja) * 2004-01-06 2009-09-30 株式会社岡本工作機械製作所 油静圧直動案内装置
DE102005038346A1 (de) * 2005-08-13 2007-02-15 Schaeffler Kg Hydrostatische Profilschienenführung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04256571A (ja) * 1991-01-31 1992-09-11 Ntn Corp 先端角度付き研削スピンドル
JPH06330944A (ja) * 1993-05-24 1994-11-29 Fujitsu Autom Ltd 静圧移動案内装置
JP2001179618A (ja) 1999-12-24 2001-07-03 Nippei Toyama Corp 静圧スライド装置及びそれを用いた研削装置
JP2006084355A (ja) * 2004-09-16 2006-03-30 Sumitomo Heavy Ind Ltd ステージガイド機構
JP2006205308A (ja) * 2005-01-28 2006-08-10 Seiko Instruments Inc 流体供給機構、直線移動装置および工作機械

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2213891A4 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10119565B2 (en) 2016-04-01 2018-11-06 Mitutoyo Corporation Air bearing
JP2017210996A (ja) * 2016-05-24 2017-11-30 ユニバーサル製缶株式会社 流体軸受のオリフィス着脱構造
US20240229863A9 (en) * 2022-10-19 2024-07-11 Toyo Nano System Corporation Air-floating guide rail
US12117043B2 (en) * 2022-10-19 2024-10-15 Toyo Nano System Corporation Air-floating guide rail

Also Published As

Publication number Publication date
EP2213891A4 (en) 2012-01-04
EP2213891A1 (en) 2010-08-04
JP5235893B2 (ja) 2013-07-10
EP2213891B1 (en) 2013-05-22
JPWO2009051192A1 (ja) 2011-03-03

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