TWI348952B - - Google Patents
Info
- Publication number
- TWI348952B TWI348952B TW096104843A TW96104843A TWI348952B TW I348952 B TWI348952 B TW I348952B TW 096104843 A TW096104843 A TW 096104843A TW 96104843 A TW96104843 A TW 96104843A TW I348952 B TWI348952 B TW I348952B
- Authority
- TW
- Taiwan
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/28—Means for securing sliding members in any desired position
- B23Q1/282—Means for securing sliding members in any desired position co-operating with means to adjust the distance between the relatively slidable members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/26—Fluid-pressure drives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/28—Electric drives
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Machine Tool Units (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Measuring And Other Instruments (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006041195A JP4545697B2 (ja) | 2006-02-17 | 2006-02-17 | ステージ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200738397A TW200738397A (en) | 2007-10-16 |
TWI348952B true TWI348952B (ja) | 2011-09-21 |
Family
ID=38494143
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096104843A TW200738397A (en) | 2006-02-17 | 2007-02-09 | Stage device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4545697B2 (ja) |
KR (1) | KR100852876B1 (ja) |
CN (1) | CN101026013B (ja) |
TW (1) | TW200738397A (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100885283B1 (ko) | 2007-08-02 | 2009-02-23 | 세메스 주식회사 | 반도체 소자 제조용 진공척 |
JP5242218B2 (ja) * | 2008-03-31 | 2013-07-24 | 住友重機械工業株式会社 | Xyステージ装置 |
JP5138443B2 (ja) * | 2008-03-31 | 2013-02-06 | 住友重機械工業株式会社 | Xyステージ装置 |
JP5336815B2 (ja) * | 2008-10-28 | 2013-11-06 | トヨタ紡織株式会社 | 加工装置 |
CN101417393B (zh) * | 2008-11-21 | 2011-05-04 | 深圳市大族激光科技股份有限公司 | 气脚支撑工作台的设计方法 |
US8469345B2 (en) * | 2009-07-17 | 2013-06-25 | C D P Holdings, LLC | Automated, adjustable, machine-tool work-piece-mounting apparatus |
US20120064460A1 (en) * | 2010-09-07 | 2012-03-15 | Nikon Corporation | Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
JP5886084B2 (ja) * | 2012-03-05 | 2016-03-16 | 住友重機械工業株式会社 | ステージ装置 |
JP5776812B1 (ja) * | 2014-04-01 | 2015-09-09 | 日本精工株式会社 | テーブル装置、及び搬送装置 |
CN104019332B (zh) * | 2014-05-30 | 2015-12-02 | 西安交通大学 | 一种超长行程高加速高精密定位一维平台 |
CN104440344B (zh) * | 2014-11-26 | 2017-05-10 | 广东工业大学 | 直线电机共定子多驱动宏微一体化高速精密运动二维平台 |
JP6624487B2 (ja) * | 2015-04-30 | 2019-12-25 | Toto株式会社 | エアステージ装置 |
US10884022B2 (en) * | 2017-01-10 | 2021-01-05 | Osaka University | Scanner and scanning probe microscope |
CN112551072A (zh) * | 2020-12-03 | 2021-03-26 | 南通固邦数控机床有限公司 | 一种油气混合悬浮支撑装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH065310B2 (ja) * | 1988-12-09 | 1994-01-19 | 東京航空計器株式会社 | 空気浮上式テーブル |
US5699621A (en) | 1996-02-21 | 1997-12-23 | Massachusetts Institute Of Technology | Positioner with long travel in two dimensions |
JP3634530B2 (ja) * | 1996-02-29 | 2005-03-30 | キヤノン株式会社 | 位置決め装置および露光装置 |
JP3810039B2 (ja) * | 1998-05-06 | 2006-08-16 | キヤノン株式会社 | ステージ装置 |
JP3438131B2 (ja) | 1998-11-24 | 2003-08-18 | 住友重機械工業株式会社 | X−yステージ装置 |
JP2001147719A (ja) * | 1999-11-24 | 2001-05-29 | Yokogawa Electric Corp | 位置決め装置とその停止方法 |
JP2001307983A (ja) * | 2000-04-20 | 2001-11-02 | Nikon Corp | ステージ装置及び露光装置 |
JP3732763B2 (ja) * | 2001-07-13 | 2006-01-11 | 住友重機械工業株式会社 | ステージ装置 |
TWI260646B (en) * | 2003-03-28 | 2006-08-21 | Sumitomo Heavy Industries | X-Y axis stage device |
JP4335704B2 (ja) * | 2003-03-28 | 2009-09-30 | 住友重機械工業株式会社 | X−yステージ装置 |
JP2006020478A (ja) | 2004-07-05 | 2006-01-19 | Neomax Co Ltd | ステージ装置 |
-
2006
- 2006-02-17 JP JP2006041195A patent/JP4545697B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-09 TW TW096104843A patent/TW200738397A/zh not_active IP Right Cessation
- 2007-02-14 KR KR1020070015129A patent/KR100852876B1/ko not_active IP Right Cessation
- 2007-02-15 CN CN2007100051963A patent/CN101026013B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101026013B (zh) | 2010-05-26 |
TW200738397A (en) | 2007-10-16 |
CN101026013A (zh) | 2007-08-29 |
JP2007216349A (ja) | 2007-08-30 |
JP4545697B2 (ja) | 2010-09-15 |
KR20070082866A (ko) | 2007-08-22 |
KR100852876B1 (ko) | 2008-08-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |