TW200402126A - Semiconductor device and manufacturing method thereof - Google Patents

Semiconductor device and manufacturing method thereof Download PDF

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Publication number
TW200402126A
TW200402126A TW092114595A TW92114595A TW200402126A TW 200402126 A TW200402126 A TW 200402126A TW 092114595 A TW092114595 A TW 092114595A TW 92114595 A TW92114595 A TW 92114595A TW 200402126 A TW200402126 A TW 200402126A
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Taiwan
Prior art keywords
semiconductor
resin layer
semiconductor device
substrate
layer
Prior art date
Application number
TW092114595A
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English (en)
Other versions
TWI234253B (en
Inventor
Tetsuya Fujisawa
Hirohisa Matsuki
Osamu Igawa
Yoshitaka Aiba
Masamitsu Ikumo
Sato Mitsutaka
Original Assignee
Fujitsu Ltd
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Publication date
Priority claimed from JP2002316076A external-priority patent/JP4408015B2/ja
Priority claimed from JP2003127344A external-priority patent/JP3938759B2/ja
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of TW200402126A publication Critical patent/TW200402126A/zh
Application granted granted Critical
Publication of TWI234253B publication Critical patent/TWI234253B/zh

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Description

200402126 玫、發明說明： 【發明所屬之技術領域】 相關申請人之交互參照 本發明係以2002年5月31日所提申之第2002-158997 5號、2002年10月30日所提申之第2002-316076號以及2003年 5月2日所提申之2〇〇3_127344號等曰本優先權案為基礎，該 等申請案之整體揭示内容係被納入於此作為參考資料。 發明領域 本發明概括有關於半導體元件，更特定言之有關於一 10種具有可表面安裝構造之半導體元件及其製造方法。 【前 發明背景 近年來’半導體晶片的高度密集化已經具有顯著的進 步’且已經降低半導體晶片的尺寸，伴隨此現象，半導體 15元件在高度密集化及高度功能化方面已有進步，並已經發 展出一種將複數個半導體晶片整合併入單一半導體元件之 技術’譬如具有一種使不同類型與功能的複數個半導體晶 片互相連接且提供外部連接電極之半導體元件。 雖然具有一種多晶片模組(MCM)藉以作為用於在一包 2〇 裝體中容納複數個半導體晶片之範例，此習知的MCM並不 具有與包含一種最近研發的細微結構的半導體晶片相同之 細微結構。 曰本公開專利申請案2001-217381號揭露一種用於在一 包裝體中容納複數個半導體晶片之技術的範例，藉由此專利 200402126 文件中揭露的技術，將複數個半導體晶片配置於一安裝治具 上且銅柱形成於各半導體晶片的電極上。隨後，利用轉移成 形以一密封樹脂包封住半導體晶片及銅柱，並研磨密封樹脂 的一表面以暴露出銅柱。在銅柱露出的密封樹脂表面上形成 5配線(重組接線)之後，外部連接電極形成於重組接線上。 曰本公開專利申請案2001-332643號揭露一種與上述 專利文件揭露者相似之技術，此專利文件揭露將一保護膜 形成於各半導體晶片的一背表面上。 此外’曰本公開專利申請案7-86502號揭露一種使複數 1〇個半導體晶片容納在一基材中所形成的一凹部中且使重組 接線形成於半導體元件中然後使外部連接端子形成於重組 接線中之技術。藉由此技術，凹部深度可使得各半導體晶 片的電路形成表面與基材表面對準。 並且，日本公開專利申請案2002-110714號揭露一種將 複數個半導體晶片配置為使其電路形成表面朝下且將一樹 月曰充填在半導體晶片之間同時藉由覆蓋住半導體晶片的背 表面及側表面將半導體晶片的電路形成表面設為一平坦表 面之技術，隨後，重組接線形成於電路形成表面側上以形 成外部連接端子。 20 尚且，日本公開專利申請案5-206368號揭露一種使複數 個半導體晶片安裝在一熱傳導性基材上、一絕緣樹脂充填在 曰片之間且重組接線以鋁形成於電路形成表面上之技術。 雖然上述習知的技術係藉由將複數個半導體晶片以一 種併列狀配置安裴而構成，已經發展出其中堆積有複數個 6 200402126 半V體晶片之許多類型的堆積式半導體元件。 在揭路一堆積式半導體元件之文件的範例中係包含曰 本公開專利申請案2001-298149及2001-320015號。 藉由日本公開專利申請案2001-298149號所揭露的技 5術，將一上半導體晶片安裝在一其上堆積有上半導體晶片 之下半導體晶片上的一墊區域(周邊配置式電極）内。此外， 藉由日本公開專利申請案2001-320015號所揭露的技術，將 傳導性柱件（桿柱形金屬構件）設置在經堆積的半導體晶片 各者上之一接線層上。 10 藉由上述日本公開專利申請案2001-217381及2001-332643 號所揭露的技術，利用轉移成形以一密封樹脂包封住半導體晶 片，因此在轉移成形期間所施加的壓力可能對於半導體晶片具 有不利影響。此外，在成形之後研磨密封樹脂表面時可能亦將 大的力量施加在半導體晶片上。並且，當半導體晶片堆積時， 15可能因為密封樹脂在一安裝基材(矽晶圓）上固化時的收縮而發 生彎曲，此彎曲可能在半導體晶片堆積時具有不利影響。 公開專利申請案7-86502號中，當形成用於容納半導體晶 片之凹部時，凹部的深度需具有高精確度。特定言之，若半 導體晶片變薄，則凹部深度需要可能難以達成之更高精確度。 20 並且，藉由日本公開專利申請案2002-110714號所揭露 的技術，將一樹脂設置於半導體晶片背側上，會導致半導 體晶片的不良熱輻射特徵之問題。尚且，由於樹脂在半導 體晶片背側上固化，彎曲可能發生於半導體元件中。 尚且’根據日本公開專利申請案2002-110714及 200402126 5-206368號所揭露的技術，在半導體晶片配置在預定位置 後將一樹脂充填在半導體晶片之間，所以在安裝半導體晶 片或充填樹脂時可能具有使半導體晶片發生位移之情形， 此技術無法移除發生位移的晶片。 5 並且，對於堆積式半導體元件而言，在曰本公開專利 申請案2001-298149號所揭露的技術中，將一上半導體晶片 安裝在其上堆積有上半導體晶片之下半導體晶片的墊區域 (周邊配置式電極）内，且其中無法堆積具有相同尺寸的半導 體曰a片。尚且，藉由日本公開專利申請案2〇〇1_32〇〇15號所 10揭露的技術，半導體元件的製造成本將因為形成傳導性枉 件而增高。 在此同時，一半導體元件係由半導體晶片堆積而成， 般藉由覆盍住半導體晶片周圍以將半導體晶片穩固地固 疋至一基材。此外，在諸如多晶片模組等將複數個芈導體 15晶片安裝在-基材上之情形中，如日本公開專利申請案 2002-11G714號所揭露將—樹脂充填在半導體晶片之間，利 用此-充填的樹脂層，各半導體晶片可穩固地固定至基 材’且使半導體晶片彼此絕緣。 此充填的翻旨層可在半導體晶#安裝至基材上之前先行 2〇形成，或者獅可在半導體晶4安裝至紐上之後才充填。 當上述充填的樹脂層在半導體晶片安裝前形成時，移 除在基材上所形成之樹脂層的一部份以形成_其中可使基 =表面露出之開口，且藉由將半導體晶片放置在開口令來 安裝此半導體晶片。為此，此開口係形成有比半導體晶片 200402126 外部組態略微較大之尺寸。 此外’具有一種在安裝半導體晶片之後形成充填的樹 脂層之方法，其中一樹脂在施加至基材上之後才固化，兮 基材上安裝有半導體晶片且加以單幕。在此情形中，亦難 5以使充填的樹脂層緊密接觸半導體晶片的側表面，且—間 隙可能形成於充填的樹脂層與半導體晶片的側表面之間。 若此一間隙形成於充填的樹脂層及半導體晶片的側表 面之間，則無法藉由充填的樹脂層對於半導體晶片達成足 夠的固定效果。此外，此一間隙可能係為半導體晶片及充 10填的樹脂層上形成接線之障礙物，當一絕緣樹脂層形成於 半導體晶片上及充填的樹脂層上時，絕緣樹脂係進入間隙 且間隙在形成絕緣樹脂層的步驟中被絕緣樹脂所充填，但 絕緣樹脂無法充填整個間隙。 t發明内容2 15 發明概要 本發明之一項普通目的係提供一種可消除上述問題之 改良且有用的半導體元件。 本發明之一更特定目的係提供一種半導體元件及其製 xe方法’其巾當半導體晶#併列狀配置時可將複數個半導 20體晶片各者的電路形成表面容易地定位在平整的位準，藉 以簡化一用於形成重組接線之程序。 曰 本發明另-目的係、提供_種半導體元件及其製造方 法，其中具有相同尺寸的半導體晶片可藉由其間的一薄接 線層加以容易地堆積。 200402126 本發明另一目的係提供一種半導體元件及其製造方 法，其中一充填的樹脂層與一半導體晶片的側表面緊密地 接觸。 為了達成上述目的，根據本發明的一型態提供一種半 5 ^體元件，此半導體元件包含：複數個半導體組件，其經 由一黏劑層以二維配置安裝在一基材上；一樹脂層，其形 成於基材上且定位在半導體組件周圍，樹脂層具有與半導 體、，且件厚度大致相同的厚度；一有機絕緣層，其形成於樹 脂層的-表面及半導體組件的電路形成表面上方；一重組 10 線’其形成於有機絕緣層及半導體晶片的電極上；及外 部連接端子，其經由重組接線層中的接線而電性連接至半 導體組件的電路形成表面。 土心代穴裡千導體元件之製造万 15 法，此方法包含以下步驟：形成一樹脂層，此樹脂層具有 了所女衣的半導體纟 1件厚度相等m由部份地移除 樹脂層以在樹脂層中形口；分·半導體組件定位在 開口内且其電路形成表面朝上；在樹脂層的—表面及半導 體組件的電_成表面上謂成—有機絕緣層；在有機絕 緣層及半導體組件的電極上形成—重組接線層；及在重組 接Λ層上I成外部連接端子，外部連接端子經由重組接線 層中的接線而連接至半導體組件的電極。 根據上述的發明，因為圍繞半導體組件的樹脂層厚度 大致等於半導體組件的厚度，所以半導體組件的電路形成 表面及樹脂層的表面係大致定位在相同平面中（大致處於 20 200402126 相同位準）。因此，重組接線層可容易地形成於半導體組件 上。 此外，根據本發明另一型態提供一種堆積的半導體元 件，此半導體元件包含彼此堆積其上的複數層結構，各層 5 結構包含··一半導體組件，其經由一黏劑層配置於一基材 上；一樹脂層’其形成於基材上且圍繞半導體組件’樹脂 層具有與半導體組件厚度大致相等之厚度；一有機絕緣 層，其形成於樹脂層的一表面及半導體組件的一電路形成 表面上方；及一重組接線層，其形成於半導體組件及半導 10 體組件的電極上。 此外，根據本發明的另一型態提供一種堆積的半導體 元件之製造方法，此方法包含以下步驟：在一基材上形成 一第一樹脂層，第一樹脂層具有與所安裝的一第一半導體 組件厚度大致相等之厚度，第一樹脂層圍繞第一半導體組 15 件；在第一樹脂層中形成一第一開口，使得第一半導體組 件定位在第一開口中；將第一半導體組件定位在第一開口 中；在第一樹脂層的一表面及第一半導體組件的一電路形 成表面上方形成一第一有機絕緣層；在第一有機絕緣層及 第一半導體組件的電極上形成一第一重組接線層；在第一 20 重組接線層上形成一第二樹脂層，第二樹脂層具有與一所 安裝的第二半導體組件厚度大致相等之厚度，第二樹脂層 圍繞第二半導體組件；在第二樹脂層中形成一第二開口， 使得第二半導體組件定位在第二開口中；將第二半導體組 件定位在第二開口中；在第二樹脂層的一表面及第二半導 11 200402126 f組件的_電路形成表面上方形成—第m緣層；在 第-有機絕緣層上形成一第二重組接線層；藉由在第一重 組接線層與第二重組接線層之間形成延伸通過第一樹脂層 之料1±連接部件，來將第一重組接線層電性連接至 5重組接線層。 根據上述的發明，因為圍繞半導體組件之樹脂層的厚 度大致等於半導體組件的厚度，半導體組件的電路形成表 面及樹脂層的表面係定位在A致㈣的平面中（大致處於 相同位準）。因此，重組接線層可容易地形成於半導體組件 10上此夕卜，因為重組接線層延伸至樹脂層的表面，可藉由 諸如通道等傳導性連接部件在重組接線層之間容易地達^電 性連接。 此外，根據本發明另一型態提供一種半導體元件，此 半導體元件包含：-基材；一半導體組件，其安裝在基材 15上，及一樹脂層，其設置於半導體組件周圍且具有一上表 面此上表面係與半導體組件的一上表面大致處於相同位 準’其中樹脂層係為具有下列特徵的可半固化性樹脂··此 树脂在以半固化狀態加熱時係產生軟化且成為流體，且樹 脂層緊密地接觸半導體組件的側表面而在其間不形成間 20 隙。 此外，根據本發明另一型態提供一種半導體元件之製 造方法，此方法包含以下步驟··在一基材上形成一處於半 固化狀態的樹脂層，使得一半導體組件位於樹脂層中，樹 脂層由一可半固化性樹脂製成；藉由加熱使半固化狀態的 12 200402126 樹脂層成為流體；藉由將成為流體的樹脂層充填在間隙中 以消除半導體組件與樹脂層之間的一間隙；及藉由加熱以 完全固化樹脂層。 根據上述的發明，利用可半固化性樹脂作為樹脂層的 5 一材料，可由軟化及成為流體的樹脂層來充填半導體組件 與樹脂層之間的一間隙。因此，可容易地製造一種在半導 體組件與樹脂層之間並無間隙之半導體元件。 此外，根據本發明另一型態提供一種半導體元件之製 造方法，此方法包含以下步驟：在一基材上形成一具有一 10開口的樹脂層，及製備一設有由一可半固化性樹脂形成的 一黏劑之半導體組件；將半導體組件定位在開口中；經由 黏劑將半導體組件壓在基材上，同時藉由加熱使半固化狀 恶的黏劑成為流體；及藉由加熱來固化黏劑，同時使半導 體組件保持在令半導體組件的一上表面與樹脂層的一上表 15 面大致位居相同平面中之一位置中。 此外，根據本發明另一型態提供一種半導體元件之製 造方法，此方法包含以下步驟：在一基材上形成一具有一 開口的樹脂層，及製備一設有一黏劑之半導體組件；藉由 一結合工具的一底表面來支撐半導體組件的一上表面以將 2〇半導體組件定位在開口中；及以一種使結合工具底表面接 觸樹脂層的一上表面之狀態來固化黏劑。 根據上述的發明，可由黏劑來充填半導體組件與樹脂 層之間的-間隙，且半導體組件的上表面及樹脂層的上表 面可精確地設在大致相同的平面中。此外，因為施加適量 £ ^ i 13 200402126 黏劑且黏劑藉由半導體組件加壓而充填此間隙，故可使黏 劑緊密地接觸基材，並可防止黏劑的濕潤不足或上爬現象。 可由附圖及下文的詳細描述更清楚地得知本發明之其 他目的、特性及優點。 5 圖式簡單說明 第1圖為本發明第一實施例之一半導體元件的剖視圖； 第2圖身為第1圖所示的半導體元件之一變化方式之一 半導體元件的剖視圖； 第3圖身為第1圖所示的半導體元件之另一變化方式之 10 一半導體元件的剖視圖； 第4圖為一具有一假體晶片之半導體元件的剖視圖； 第5圖為假體晶片及相鄰的半導體晶片之平面圖； 第6圖為一在一重組接線層中形成有一電容器之半導 體元件的一部份之剖視圖； 15 第7A圖為一在一重組接線層中形成有一電感器之半導 體元件的剖視圖； 第7B圖為第7A圖所示之電感器的平面圖； 第8圖為一在一樹脂層中形成有一電容器之半導體元 件的一部份之剖視圖； 20 第9圖為一在一基材與一半導體晶片之間形成有一電 容器之半導體元件的一部份之剖視圖； 第10圖顯示半導體晶片的一安裝程序； 第11圖為一半導體元件的剖視圖，其中顯示具有不同 厚度的半導體晶片之一安裝程序； 14 200402126 第12圖為一半導體晶片的剖視圖，其具有用於定位半 導體晶片之對準圖案； 第13圖為形成於一基材上之半導體元件的剖視圖，其 具有用於辨識分割線之對準圖案； 5 第14圖為根據本發明第二實施例之一半導體元件的剖 視圖； 第15圖為身為第14圖所示的半導體元件之一變化方式 之一半導體元件的剖視圖； 第16圖為身為第14圖所示的半導體元件的另一變化方 10 式之一半導體元件的剖視圖； 第17圖為根據本發明第三實施例之一半導體元件的剖 視圖， 第18圖為在一封裝體中採用第1圖所示的半導體元件 之半導體元件的剖視圖； 15 第19A圖為根據本發明第四實施例之一半導體元件的 剖視圖且其處於製造程序的中間； 第19B圖為第19A圖所示之半導體元件的剖視圖，其中 處於一種藉由使一樹脂層成為流體來充填間隙之狀態； 第20A及20B圖為說明用於形成樹脂層之一範例的剖 20 視圖； 第21A及21B圖為說明用於形成樹脂層之另一範例的 剖視圖； 第22圖為用於說明樹脂層與一半導體組件的厚度之間 的關係之剖視圖； 15 200402126 第23A至23D圖為用於說明根據本發明第五實施例之 一半導體元件的製造程序之剖視圖； 第24圖為根據本發明第六實施例之一半導體元件的剖 視圖； 5 第25A及25B圖為顯示根據本發明第七實施例之一半 導體元件的製造程序之剖視圖； 第2 6 A至2 6 C圖係說明一種用於將一黏劑施加至一半 導體組件且將黏劑設為半固化狀態之程序；及 第27A及27B圖係為說明一種用於將一樹脂層的一上 10 表面及一半導體組件的一上表面大致設在相同平面中之方 法的剖視圖。 L實施方式】 較佳實施例之詳細說明 現在描述本發明的第一實施例。 15 第1圖為根據本發明第一實施例之一半導體元件10的 剖視圖，半導體元件10具有一種使複數個半導體晶片（或半 導體組件）安裝在一諸如碎晶圓專基材上且輸入/輸出端子 (外部連接端子)形成在半導體晶片上的接線上之結構11。 基材11不限於矽晶圓，亦可使用一種由一具有良好熱 20 傳導性的材料形成而可作為熱輻射板之基材，以促進半導 體晶片的熱輻射。 在第1圖所示的範例中，安裝在基材11上之半導體晶片 雖然係包括一邏輯晶片12及一記憶晶片13，亦可將任意數 量具有不同功能的半導體晶片安裝在基材11上，但所安裝 16 200402126 的半導體晶片較佳係為具有50微米或更小厚度的薄型半導 體晶片。 邏輯晶片12及記憶晶片13(下文可簡稱為半導體晶片 12及13)係以定位在一樹脂層14中之狀態經由一黏劑層15 5 安裝在基材11上。此處，本實施例中，形成樹脂層之後， 邏輯晶片12及記憶晶片13藉由定位在樹脂層14中所形成的 開口中而安裝於樹脂層14上。 亦即’黏劑層15首先形成於基材11上，然後樹脂層Η 形成於黏劑層15上。樹脂層14形成為具有與所安裝的半導 10體晶片12及13相同之厚度，樹脂層14由一感光樹脂形成， 且利用一光蝕刻技術形成用於容納半導體晶片12及13之開 口 14a，開口 14a具有穿透樹脂層14之深度，且黏劑層15的 一表面在開口 14a底部露出。此外，各開口 14a形成可與半 導體晶片12及13各者精密地配合之尺寸。 15 半導體晶片12及13係定位於樹脂層14之藉此形成的開 口 14a中且使其電路形成表面朝上。在半導體晶片12及13定 位於開口 14中之後，半導體晶片12及13的背表面結合至黏 劑層15，使得半導體晶片π及13固定在開口 14a中。此狀態 中，半導體晶片12及13的電路形成表面係處於一種與樹脂 20層14表面對準之狀態，亦即，半導體晶片12及13的電路形 成表面及樹脂層14的表面為平置狀。 本實施例中，將各半導體晶片12及13的厚度設為50微 米或更小，雖然半導體晶片的厚度通常包含約1〇%的可容 許公差’因為50微米的10%只有5微米所以此不平整度（亦即 17 200402126 平坦度）可能不會在後續程序中影響—重組接線層的形成 作用。因此在本發明中，務必使半導體晶片具有薄型的安 裝方式。 +導體晶片12及13安裝之後’將―諸如聚酿亞胺或環 5氧樹脂等有機絕緣膜Μ形成於平置的電路形成表面及樹脂 層14的表面上’且其上形成重組接線層17。重組接線層17 係由替代方式堆積傳導層及絕緣層以及藉由通道或類似物 在傳導層之間加以連接而形成，且可利用此領域已知的一 技術形成，因此不再贅述。 10 因此，可利用重組接線層17來連接邏輯晶片12及記憶 晶片13藉以構成一可達成完全功能的半導體元件，所以譬 如邏輯晶片12可利用記憶晶片13的資料進行計算並將結果 儲存在記憶晶片13中。形成輸入/輸出端子18作為重組接線 層17表面上的外部連接端子之後，即完成第1圖所示的半導 15 體元件。 根據本實施例的半導體元件10中，因為薄型半導體晶 片定位在具有與半導體晶片相等厚度的樹脂層14中，不需 分開進行一用於平置電路形成表面及樹脂層表面之程序’ 只藉由將半導體晶片12及13定位在樹脂層14的開口 14a中 20 即可達成形成重組接線層17所需要的平坦度。 此外，因為樹脂層Η係由光蝕刻處理來形成開口 14a ’ 可以高精確度來控制開口 14a的位置及尺寸。因此，半導體 晶片12及13的位置具有足夠精確度。尚且，因為樹脂層14 在安裝半導體晶片12及13前形成，半導體晶片12及13在安 18 200402126 裝後的位置並未由於樹脂固化時的樹脂收縮而移位。 在根據本實施例作為半導體元件1〇的基材1〇之_石夕曰 圓^形成複數個半導體元件10時，在半導體元件形成於石^ 圓之後藉由》^⑪晶圓進行切割而個別地區分出半導 5體元件K)。此情形中，將—分割卷帶施加在石夕晶圓背側，， 且從矽晶圓前側進行分割。 因此，本實施例中，在從黏劑層15至樹脂層14的-上 4中與A魏對應的-部份（亦即__分_沿其通過的 -抽）亚未先彳了形成或移除m利用分娜切割石夕 η)晶圓。此夕卜，順序性堆積在黏劑層15上所形成的樹脂層14、 有機絕緣層16及重組接線層17各者之邊緣係定位在緊接的 下層之邊緣内侧（第i圖的半導體元件10的左與右側階狀係 往内偏移）’使得這些層不會接觸到分割鋸，因此可進行有 效率的分割。 15 弟2圖為身為笫1圖所示的半導體元件1之一變化方式 之一半導體元件20的剖視圖，雖然半導體元件2〇具有與半 導體元件10相類似的結構，基材n及黏劑層15被移除且銲 球21形成為輸入/輸出端子18上之外部連接端子。 在基材11被移除之情形中，可研磨及溶解基材n使其 2〇變薄並姓刻黏劑層15或作類似處理藉以有效率地移除基材 11。應注意，在移除基材11之後，可將一熱輻射板設置在 半導體晶片12及13背表面上。 第3圖為身為第1圖所示的半導體元件1〇之一變化方式 之一半導體元件30的剖視圖，雖然半導體元件3〇具有與半 19 200402126 導體元件ίο相類似的結構，但其中使用一半導體晶片 (LSI)31而非基材π。 亦即，一絕緣層32形成於LSI31上，且黏劑層15形成於 絕緣層32上。隨後以與上述半導體元件10相同的方式進行 5 形成作用。此外，半導體晶片12及13的電路形成表面上之 電極以及LSI31的電極係藉由通道33彼此電性連接，將通道 33形成為穿透樹脂層14及黏劑層15。 根據半導體元件30，可以更高密度將複數個半導體晶 片安裝至半導體元件，且可達成一具有更高功能的半導體 10 元件。 上述實施例中，當半導體晶片之間具有大的間隔時， 半導體晶片（12及13)之間的樹脂層14具有大的長度。此情形 中，由於一樹脂層與半導體晶片及基材11之間的熱膨脹係 數差異使得應力傾向於產生在半導體元件中。則此情形 15 中，藉由將一假體晶片35配置在半導體晶片之間的一大空 間中試圖放鬆應力’而使樹脂層14的長度降低。 此外，如第5圖所示，亦可藉由將接線設置於假體晶片 中來簡化重組接線層Π的接線組態，第5圖所示的範例中， 藉由假體晶片％中的一線35a使相鄰的線36A及36B彼此相 20 交。 本發a月中，諸如電容器或電感器等被動組件可形成於 重組接線層17中’第6圖為顯示使一電容器形成於重組接線 層17中之一範例的剖視圖’第7 A圖為顯示使一^電容器形成 於重組接線層17中之一範例的剖視圖，第7B圖為電容器的 20 2〇〇4〇2l26 平面圖。 士弟图斤示’可藉由將一介電層38設置於重組接線層 17的傳導層之間而形成電容器37。此外，如第7關所示， <藉由將傳導層製作於重組接線層17中成為螺旋形式而形 5成電感為39。因此，可將電容器及電感器設置於重組接線 層17中，藉以抑制進入半導體元件内部之雜訊。 此外’在本發明中，如第8圖所示，電容器27亦可設置 於樹脂層I4中，此情形中，一介電構件38充填在樹脂層丄4 中所形成之-開口中，且傳導層4〇形成於重組接線層_ 10 各側上。 並且，如第9圖所示，電容器亦可形成於基材11與半導 體晶片12及13之間，此情形中，一絕緣層首先形成於基材 U上，且—料層41在電容器27的構成位置處形成於絕緣 層40上。隨後，一介電層42形成於傳導層“上，且傳導層 4丨及介電層做人-絕緣層43巾。接著，—傳導層料形成 於’丨電層42上，且傳導層44嵌入一絕緣層45中。因此，介 =層42，ι於傳導層41與傳導層Μ之間，㈣成電容器r。 隨後，黏劑層15形成於絕緣層45上，且以上述半導體元件 1〇相同的方絲絲铸體晶仏及丨3，卿成重組接線 20 層 17。 現在芩照第10圖描述半導體晶片12及13之一安裝程 序’第_顯示半導體晶片12及13的安裝程序。 首先，黏劑層15形成於諸如石夕晶圓等基训上黏劑 層15由-種在表面上具有黏附力之樹脂所形成。然後，樹 21 200402126 脂層14形成於黏劑層15上，樹脂層14由一感光樹脂形成並 幾乎形成於黏劑層15的整體表面上。然而，如上述，將樹 脂層14形成為使其邊緣位於底下黏劑層邊緣内側。此外， 將樹脂層厚度設為大致等於半導體晶片的厚度。 5 隨後，藉由將樹脂層14加以光蝕刻使開口 14a形成於樹 脂層14中，然後，半導體晶片12及13配置於開口 14a中。因 此，以一種使半導體晶片12及13的電路形成表面及樹脂層 14表面處於相同位準之狀態將半導體晶片12及13安裝在基 材11上。 10 此處，當半導體晶片12及半導體晶片13的厚度極為不 同時，首先將一具有與厚度差相對應的厚度之樹脂層14A 形成於基材11上，然後在其上施加一黏劑層15A。隨後，一 樹脂層14B進一步形成於黏劑層15A上。隨後形成其中配置 有較大厚度的半導體晶片之開口 14a使得基材11露出，且形 15 成其中配置有較小厚度的半導體晶片之開口 14a使得黏劑 層15A露出。尚且，將一黏劑層15B形成於其中配置有較大 厚度的半導體晶片之開口 14a中。因此，可將具有不同厚度 的半導體晶片安裝在基材11上，使得電路形成表面大致處 於相同位準。 20 本實施例中，需要將半導體晶片12及13以足夠精確度 定位在樹脂層14的開口 14a中。為了利於此定位方式，如第 12圖所示，較佳形成用於將半導體晶片定位在基材11上之 對準圖案50。 可藉由將與矽具有良好黏附力的鈦（Ti)或鉻(Cr)以一 22 200402126 歲鑛方法沉積在基材11上而形成對準，以對準圖案 5曰0為基礎決定出樹脂層14的開叫a位置。然後，在半導體 晶片12及13安裝在_基材n上之情料藉由對準圖案5〇 及影像辨識精確地偵測開口 14的位置並將半導體晶片定位 在所偵測的位置。 此外’如第U®所示，較佳形於分割之對準圖案 51而非用於定位半導體晶片之對準圖案。亦即，對準圖案 51以與對準圖案5G相同的方式沿著分割線形成，且在進行 分割時係辨識對準圖案51的影像以決定出分割線。尚且仃 H)亦可依據對準圖案51進行包括樹脂層14或形成於基材^上 的重組接線層17等各層之定位及處理作用。 現在參照第丨4圖描述本發明的第二實施例，第14圖為 根據本發明第二實施例之一半導體元件_剖視圖，第Μ 圖所不的半導體元件6〇係為一種以堆積方式安装複數個半 15導體晶片之所謂堆積式半導體元件。 首先，一樹脂層61Α形成於諸如矽晶圓等基材丨丨上，且 一開口形成於樹脂層61A中。樹脂層61A由一種與上述第— 實施例的樹脂層14材料相同的材料所形成，且此開口亦以 與上述開π 14a相同的方式形成。形成開口之後，—絕緣黏 20劑層62A形成於開口中，且一半導體晶片63A配置於開口 中。 此狀態中，藉由絕緣的黏劑層62A固定住半導體晶片 63A ’且丨導體晶片63A的電路形成表面與樹脂層61a的表 面對準。類似上述第一實施例，半導體晶片63A的厚度較佳 23 200402126 為50微米。然後，一有機絕緣膜(層）64A形成於半導體晶片 的電路形成表面及樹脂層61A表面上，然後，一傳導層65A 形成於絕緣層64A上。傳導層65A作為一重組接線層並形成 為將半導體晶片63A的電極引到半導體晶片63A外部。
5 接下來，一樹脂層61B形成於傳導層65A及樹脂層61A 上’樹脂層61B亦由與上述樹脂層14相同的材料形成，且以 頒似方式形成一開口。因為半導體晶片65A上的傳導層65A 在開口中露出，一絕緣黏劑層62B形成於開口中。然後，一 半導體晶片63B配置於樹脂層61B的開口中，藉由絕緣黏劑 1〇層62B固定住半導體晶片63B，半導體晶片63B及樹脂層61B 之表面幾乎處於相同位準。 接下來，一有機絕緣層64B形成於半導體晶片的電路形 成表面及樹脂層61B的表面中，且一傳導層65B形成於有機 絕緣層64B上。傳導層65B作為一重組接線層並形成為使半 15 導體晶片63B的電極引到半導體晶片63B外部。此外，通孔 可形成於樹脂層61B中，且當傳導層65形成時，傳導層亦形 成於通孔内（形成所謂通道）以將傳導層65B電性連接至傳 導層65A。 類似於上述方法，形成一樹脂層61C及一絕緣黏劑層 20 62C，一半導體晶片63C配置於一開口中，且一有機絕緣層 64C及一傳導層65C形成於半導體晶片63C上，傳導層65C 電性連接至傳導層65B的一預定部份。 並且，以相同方式形成一樹脂層61D並在一開口中形成 一絕緣黏劑層62D之後，以堆積狀態安裝一半導體晶片
24 200402126 63D此處第14圖所不的範例中，半導體晶片63A、㈣、 63C具有相同尺寸，且半導體晶片仙小於半導體晶片 63八、綱、63(：’各半導體晶片63八-6刺厚度較佳為50 微米或更小。 5 —有制、緣層_及-料層65D形成於半導體晶片 63D上’輸入/輸出端子形成為傳導層65〇上的外部連接端 子。諸如銲球等凸塊可形成於輸入/輸出端子上 ，或輸入/ 輸出端子可由銲線連接至—外部電路。 在具有上述結構的半導體元件60中，經由有機絕緣層 1〇 64A-64D、傳導層65Α.及絕緣黏劑層獻柳來堆積半 導體晶片63A-63D。此結構中不需要形成諸如半導體晶片之 間的金屬柱件等桿柱形傳導構件，且可使半導體晶片之間 的距離變小。因此可容易地形成具有減小厚度的堆積式半 導體元件。此外，因為半導體晶片上的電極藉由傳導層 15 65A-65D引到半導體晶片外部且傳導層經由通道加以電^ 連接，一半導體晶片可堆積在一配置有電極的區域上，亦 即可將相同尺寸的半導體晶片堆積在彼此上。 雖然在第14圖所示的範例中，堆積了相同尺寸的半導 體晶片63A、63B、63C以及較小的半導體晶片63D，但堆積 20的半導體晶片數並不受限制且可堆積任意數量的半導體晶 片。此外，對於半導體晶片尺寸尤其並無限制，半導體晶 片無論具有相同尺寸或不同尺寸均可堆積。 第15圖為身為第14圖所示的半導體元件6〇之—變化方 式之一半導體元件70的剖視圖，第15圖中與第14圖所示元 25 200402126 件相同者係具有相同的編號而不加以贊述。雖然第15圖所 不的半導體兀件70具有基本上與半導體元件6〇相同之結 構，但基材11被一半導體晶片71取代。 亦即，一有機絕緣膜(層）72形成於半導體晶片71上，且 5 一上樹脂層61A形成於有機絕緣層72上以在其上堆積一半 導體晶片63A。半導體晶片71具有比半導體晶片63A更大的 尺寸，且半$體晶片63D配置於半導體晶片71的電極配置區 域内。然後，經由樹脂層61A及延伸通過有機絕緣層π的通 迢將半導體晶片63A上所形成的傳導層65A及半導體晶片 1〇 71上的電極加以電性連接。 如上述，根據第15圖所示的半導體元件7〇，可以比半 導體元件60更高的密度來安裝半導體晶片。 第16圖是身為第14圖所示的半導體元件6〇之另一變化 方式之一半導體元件8〇的剖視圖，第16圖中，雖然半導體 15元件80具有與半導體元件6〇基本上相同之結構，差異在於 半導體晶片63B以面朝下狀態連接至半導體晶片63A。根據 半導體元件80，可省略在重組接線層中形成一層，尚且可 以安裝相同尺寸的晶片。 現在參照第17圖描述根據本發明第三實施例的一半導 20體元件。第17圖為根據本發明第三實施例之半導體元件的 剖視圖。第17圖所示的半導體元件80係為一種以堆積狀態 文裝複數個半導體晶片之所謂的堆積型半導體元件，其中 將下階半導體晶片81A及81B併列狀安裝在一基材u上且 將一上階半導體晶片82堆積在半導體晶片81A及81B上。 26 200402126 亦即，此半導體元件中，類似於第10圖所示的半導體 元件10，半導體晶片81A及81B經由一黏劑層Μ安裳在基材 11上，且將一酚醛清漆基樹脂層14設置於半導體晶片81A 及81B周圍。一酚醛清漆基有機絕緣膜(有機絕緣層）83係設 5置於半導體晶片81A及81B的電路形成表面及樹脂層14的 一上表面上。一傳導層84係形成於有機絕緣膜“上，其中 此傳導層84係形成了連接至半導體晶片81A及81B的電極 之圖案接線。 半導體晶片82經由-黏劑層85安裝在傳導層及有機絕 10緣膜上，且將一酚醛清漆基樹脂層86設置於半導體晶片82 周圍。然後，將一酚醛清漆基有機絕緣層87設置於半導體 晶片82的電路形成表面及樹脂層86的一上表面上，且將一 重組接線層17形成於有機絕緣層87上。一傳導層料形成於 有機絕緣膜83上。重組接線層17及傳導層討藉由延伸通過 15樹脂層86之通道88予以電性連接。此外，銲球可如第2圖所 不设置於重組接線層17上所形成之輸入/輸出端子18上，以 形成一球栅陣列(BGA)型半導體元件。雖然本發明中使用酚 酸清漆基樹脂及有機絕緣膜，本發明不限於使用祕清漆 基材料且譬如可使用環氧樹脂或聚醯亞胺基材料。 2〇 應注意，可將根據上述第一至第三實施例中任一項之 半導體裝置視為-半導體晶片以包含在一封裝體内。第18 圖為藉由將-類似於第i圖所示的半導體元件1〇之結構包 含在一封裝體内所形成之一半導體元件9〇的剖視圖。 第18圖中，半導體元件11〇的輸入/輸出端扣係配置 27 200402126 於半導體元件ho的上表面之一周邊上。半導體元件no經 由黏劑層15安裝在一基材91上，且半導體元件110的輸入端 子18及基材91的端子（未圖示）係由銲線92彼此電性連接。半 導體元件11〇及銲線92係由基材91上的一密封樹脂93予以 5包封。作為外部連接端子之銲球94係設置於基材91的背側 上0 在上述第一至第三實施例中，形成於半導體晶片的電 路形成表面上之絕緣層係為有機絕緣膜16、64A-64D、72、 83、87。使用有機絕緣膜而非無機絕緣膜將具有以下優點： 10 丨）容易將一有機絕緣層的一表面製成平坦狀。 當一無機絕緣層形成於一電路形成表面上時，因為無 機絕緣層藉由一種可提供等向性膜成長之氣相沉積方法所 形成，由於電路形成表面上存在圖案接線所導致之不平坦 係將反映在無機絕緣層的表面中。為此，使用無機絕緣層 15時將難以獲得平坦的表面。另一方面，因為有機絕緣層並 非由電路形成表面上的材料成長所形成，所以容易形成一 具有一平坦表面之有機絕緣層。 2) 可減少程序數。 形成一無機絕緣膜時係需要一用於圖案化之蝕刻程 20序。可以一種使用一感光有機絕緣膜之光微影法來進行圖 案化’藉以省略此餘刻程序。 3) 有機絕緣膜係具有放鬆應力之功能。 因為無機絕緣膜一般具有脆性，當使用無機絕緣犋來 形成一堆積型半導體元件時，無法期待具有應力放鬆之敦 28 200402126 果。另一方面，有機絕緣膜一般具有特定程度的繞性，而 在一種使有機絕緣膜喪夾在半導體晶片之間的狀態中提供 了應力放鬆的效果。 下文描述一種用於將一半導體晶片的高度設定為大致 5 等於一圍繞半導體晶片之樹脂層的高度之特定方法。 現在參照第19A及19B圖描述本發明的第四實施例。 第19A及19B圖說明根據本發明第四實施例之一半導 體元件的製造程序，第19A圖為顯示此製造程序中間部份之 剖視圖，其中一間隙形成於一樹脂層與一半導體組件之 10 間。第19B圖為半導體元件的剖視圖，且其中具有一種使樹 脂層成為流體藉以充填間隙之狀態。 如第19B圖所示，根據本發明第四實施例的半導體元件 具有一種將一半導體組件102安裝在一基材1〇1上之結構， 半導體組件102由一黏劑103固定至基材1〇1，樹脂層1〇4形 15 成於半導體組件1〇2周圍，使樹脂層1〇4緊密地接觸半導體 組件102的側表面且在其間不形成間隙。 在一種形成樹脂層104且半導體組件丨〇2安裝在基材 101上之狀態中’如第19A圖所示，一間隙形成於樹脂層1()4 與半導體組件102的側表面l〇2a之間。為了充填間隙，本實 20施例中使用所謂B階段樹脂作為用於形成樹脂層1〇4之樹 脂，B階段樹脂一般係為環氧樹脂且可在從液體化樹脂狀態 到完全固化狀態的程序中間停止樹脂的固化，b階段樹脂稱 為可半固化性樹脂，且中間停止固化之狀態係稱為半固化 狀態，半固化狀態的固化速率約為5〇〇/0。 29 200402126 B階段樹脂在半固化狀態時雖然為固體狀態，其卻會因 加熱而軟化並表現出流體性，亦即，B階段樹脂具有使樹脂 軟化且在半固化狀態中藉由加熱增高流體性之特徵。此 外，B階段樹脂可藉由進一步加熱而完全固化，其後以半固 5 化狀態加熱以增高流體性並且進一步加熱。 本實施例中，使用上述B階段樹脂作為一種形成樹脂層 104之材料。在一種使半固化狀態的樹脂層104形成於基材 101上且半導體組件102安裝在基材1〇1上之狀態（第19A圖 所示的狀態）中，藉由加熱樹脂層104且使其成為流體而令 10 樹脂層1〇4流入半導體組件1〇2的側表面l〇2a與樹脂層1〇4 之間的間隙，藉以如第19B圖所示充填間隙。隨後，藉由進 一步加熱樹脂層104而使樹脂層104完全固化。故使樹脂層 104緊密地接觸半導體組件1 〇2的側表面，並從側表面支撐 半導體組件102 ’且可更可靠地固定住半導體組件ι〇2。 15 此處，可如第20A及20B圖所示在樹脂層104安裝在基 材101上之後，以半固化狀態形成樹脂層1〇4;或者如第1〇3 圖所示樹脂層104先行以半固化狀態形成於基材1〇1上，且 可如弟21A及21B圖所不使半導體組件1〇2定位在_開口 104a中藉以將半導體組件1〇2安裝在基材1〇1上。此外，可 20利用一已知壓印方法將半固化狀態的樹脂層104轉移至基 材101上。 雖然半固化狀悲的樹脂層1 〇4之流體性因為加熱而增 咼’樹脂層104不以液體狀自由流動，因此若一間隙寬度(G) 增至大於半$體組件102的厚度（晶片厚度Tc)，則即便樹脂 30 200402126 層104成為流體亦無法完全充填間隙。為了使半固化狀態的 樹脂層4成為流體以完全消除半導體組件1〇2之間的間隙， 如第20圖所示，半導體組件1〇2的厚度（晶片厚度Tc)較佳大 於間隙寬度(G)，亦即Tc>G。 5 對於用來構成樹脂層104之B階段樹脂而言，在半固化 狀態中出現流體性之溫度（軟化溫度μ交佳係為⑼它或更 高，這是因為若軟化溫度低於6〇。(：，樹脂層1〇4可能在室溫 或製程期間的溫度產生流動。 考里到位於基材之間固定住半導體組件1〇2且使樹脂 10層104在完全固化後的高度與半導體組件1〇2的高度大致處 於相同位準之黏劑103的厚度時，半固化狀態之樹脂層1〇4 的厚度較佳比半導體組件102厚度更大5微米至2〇微米。 雖然上述實施例中使用Β階段環氧樹脂作為樹脂層，譬 如酚醛清漆樹脂或酚醛樹脂或者類似物若能表現出相同特 15 徵則亦可使用。 現在參照第23Α至23D圖描述根據本發明第五實施例 之一半導體元件，第23Α圖至23D圖為說明根據本發明第五 實施例之半導體兀件的製造方法之剖視圖，在根據本發明 第五實施例的半導體元件中，樹脂層1〇4的一上表面1〇牝及 20半導體組件102的一上表面10沘係位居大致相同的平面中。 首先，類似於上述第三實施例，半固化狀態的樹脂層 104形成於基材101上，且半導體組件1〇2安裝在基材ι〇ι 上。此處，一後續程序中所使用之諸如通道孔等通孔1〇牝 係以半固化狀態形成於樹脂層1〇4中。接下來，如第23A圖 31 200402126 所不，一感光膜105施加至樹脂層1〇4及半導體組件1〇2上 方。本實施例中，為了在樹脂層104中形成通孔1〇4c，樹脂 層1〇4較佳不在設有通孔l〇4c之部份中流動。因此，如第23B 圖所示，感光膜105覆蓋住通孔104c之部份係暴光且加以移 5除，亦即藉由感光膜105顯露出樹脂層104未必成為流體之 一部份。 然後，如第23C圖所示，半固化狀態的樹脂層1〇4受到 加熱而成為流體。為此，藉由成為流體的樹脂層1〇4來充填 感光膜105所覆蓋的間隙並且消除間隙。另一方面，在未被 1〇感光膜1〇5覆蓋之通孔104c部份中，樹脂層1〇4幾乎不流動 且通孔104c(諸如用於連接第25圖所示傳導層65B及65C之 通孔）未關閉，亦即可用一卷帶或膜覆蓋住樹脂層1〇4藉以 促進樹脂層104成為流體的作用。 隨後，如第23D圖所示，樹脂層1〇4完全固化且剝下感 5光膜105加以移除，此狀態中，在半導體組件102與樹脂層 104之間並無間隙，且半導體組件1〇2的上表面⑺沘及樹脂 層104的上表面l〇4b係位居相同平面。此外，以半固化狀態 形成於樹脂層104中之通孔l〇4c保持不變。 應注意經實驗發現’樹脂層1〇4並未在未被感光膜1〇5 2〇覆蓋之部份中流動，而且尚不明瞭此現象的特定原因。但 可充分複製此現象且可實地進行而無問題。 此外’雖然利用感光膜105在與上述實施例中樹脂層未 必成為流體的部份相對應之位置（通孔104c)提供開口，若不 需要感光膜則亦可使用並非感光膜之一膜或卷帶。譬如， 32 200402126 可將一分割卷帶施加至樹脂層104上。 現在參照第24圖描述根據本發明第六實施例之一半導 體元件，第24圖為根據本發明第四實施例之半導體元件的 剖視圖。 5 根據本發明第六實施例之半導體元件係為一具有複數 個半導體組件（第24圖顯示兩個半導體組件A及102B)之 多晶片模組，以令電路形成表面朝上的狀態利用黏劑1〇3將 各半導體組件102A及102B安裝在基材101上。 樹脂層104設置於半導體組件i〇2a及丨〇2B之間及周 ίο圍，且樹脂層1〇4的上表面以及各半導體組件102A&102B 的上表面（電路形成表面）大致位居相同的平面中。樹脂層4 係由與上述第二實施例所描述的相同材料形成並且緊密地 接觸各半導體組件102A及102B的側表面。尚且，一個由絕 緣層及傳導層堆積而成之接線層1〇6係形成於半導體組件 15 ι〇2Α及102B的電路形成表面上方，且樹脂層1〇4的上表面 及作為外部連接端子的銲球1〇7係設置於接線層1〇6的一上 表面上。設置於各半導體組件1〇2A&1〇2B的電路形成表面 上之電極係經由接線層106中的接線電性連接至對應的銲 球107,應注意可利用已知的半導體製造技術來形成接線層 20 且不加以贅述。 半導體組件102A及102B的厚度約為50微米，黏劑1〇3 的厚度約為5彳政米至約20微米。因此，可將樹脂層1〇4形成 有50微米+(5+20)微米的厚度藉以使半導體組件1〇2八及 102B的上表面（電路形成表面）以及樹脂層1〇4的上表面大 33 200402126 致處於相同平面中，因為黏劑103厚度並非取決於半導體魬 件的厚度，可將樹脂層104厚度設為（半導體組件厚度)+(5 至20微米）藉以使得半導體組件的上表面（電路形成表面）及 樹脂層104的上表面大致位居相同平面中（大致處於相同位 5準 應注意在上述實施例中，提供黏劑以固定住半導體組 件102A及102B的背表面而且不施加至電路形成表面，基於 此理由，黏劑103不需特殊特徵且可由與樹脂層1〇4相同的 材料製成，此情形中，在使樹脂層1〇4成為流體的程序中， 10亦可使黏劑1〇3成為流體而進一步改善黏劑103與樹脂層 104之間的緊密接觸。 現在參照第25A及25B圖描述根據本發明第七實施例 之一半導體元件，根據本發明第七實施例之半導體元件係 使用一種具有與上述第五實施例相似的半固化特徵之樹脂 15作為用於將一半導體組件固定在一基材上之黏劑。 首先，如第23A圖所示，將一開口 108a形成於在基材ι〇ι 上構成之一樹脂層108中，且半導體組件1〇2定位在開口 108a中。不同於上述的實施例，樹脂層1〇8係處於完全固化 狀態，先行將一種具有與上述樹脂層104相同材料的黏劑 20 l〇3A施加至半導體組件102背表面並使其設為半固化狀態。 接下來，在如第25B圖所示藉由加熱使黏劑1〇3A成為 流體的同時將—結合卫具丨難下移動，此條件下黏劑 103Α雙到半導體組件1〇2壓抵並流動而進入半導體組件I。] 與樹腸層1G8的侧表面廳之間。因為成為流體的樹脂層 乂: G i 34 200402126 108對於基材101具有增高的黏附力，半導體組件1〇2可結合 至基材1(Π。接下來，結合工具110係在一使結合工具11〇下 表面接觸到樹脂層108上表面108c之位置停止往下移動，且 此狀態中，黏劑103A以200°C或更高溫度加熱以使黏劑 5 103A幾乎完全固化(90%或以上）。 根據上述方法’可由黏劑103A充填半導體組件1〇2與樹 脂層108之間的一間隙，且半導體組件1〇2的上表面與樹脂 層108的上表面l〇8c可精確地定位在大致相同平面中。 此外，因為結合工具110的下表面係緊密地接觸樹脂層 10 1〇8上表面藉以壓抵住樹脂層108，可防止半導體組件102在 固化時因為黏劑103A收縮而變形。並且，黏劑ι〇3Α的施加 量係可以填滿間隙並藉由半導體組件1〇2的壓抵力來充填 間隙，黏劑103A緊密地接觸基材101而防止黏劑的濕潤不足 或上爬現象。 15 現在參照第26A至26C圖描述一種用於將黏劑103 A施 加至第25A及25B圖所示的半導體組件102並將黏劑設為半 固化狀態之程序。 首先，如第26A圖所示，將電路形成於一晶圓109上以 在晶圓109上形成複數個半導體組件，接下來，如第26B圖 20 所示，黏劑103A施加至與電路形成表面相對的晶圓109背表 面上，且黏劑103A在低於100。(：的溫度固化以將黏劑設為半 固化狀態。藉由在低於100°C的溫度使黏劑103A固化，可以 將根據本實施例的方法施用至一種使用約有5 0微米厚度的 薄晶圓之半導體組件。然後，如第24C圖所示，將晶圓1〇9 35 200402126 個別區分以分成在其背表面上具有黏劑103A之半導體組件 102,此狀態係與第25A圖所示的結合工具110所支撐之半導 體組件102相對應。 應注意即便是並非半固化狀態的黏劑，亦可施用如上 5 述將黏劑固化同時使結合工具110的底表面緊密接觸樹脂 層108的上表面108c之方法。亦即，即便用於將半導體組件 102固定至基材101之黏劑不是b階段樹脂而是正常的樹 脂，仍可獲得將半導體組件102的上表面及樹脂層1〇8的上 表面108c精確地定位在大致相同平面中之效果。 10 首先，將一開口 l〇8a形成於在基材101上構成之樹脂層 108中，且半導體組件1〇2配置於開口 i〇8a中。樹脂層1〇8處 於完全固化的狀態，將一正常的黏劑103B先行施加至半導 體組件102的背表面，接下來如第27A圖所示，結合工具110 往下移動且在一使結合工具11〇的底表面接觸到樹脂層1〇8 15的上表面108c之位置停下來，此狀態中，黏劑103B受到加 熱以完全固化。當黏劑103B固化之後，結合工具11〇從樹脂 層108上表面i〇8c分開時，如第27B圖所示，樹脂層1〇8的上 表面108c及半導體組件1〇2的上表面係精確地定位在大致 相同平面中（大致處於相同位準）。 本發明不限於特別揭露的實施例 ，可作出變更與修改 而不脫離本發明的範圍。 【圖式簡單說明】 第1圖為本發明第一實施例之一半導體元件的剖視圖； 第2圖身為第1圖所示的半導體元件之一變化方式之一 36 200402126 半導體元件的剖視圖； 第3圖身為第1圖所示的半導體元件之另一變化方式之 一半導體元件的剖視圖； 第4圖為-具有-假體晶片之半導體元件的剖視圖； _ 第5圖為假體晶片及相鄰的半導體晶片之平面圖·， _ 第6圖為一在一重組接線層中形成有一電容器之半導 體元件的一部份之剖視圖； 第7A圖為-在一重組接線層中形成有一電感器之半導 體元件的剖視圖； · 第7B圖為第7A圖所示之電感器的平面圖； 第8圖為一在一樹脂層中形成有一電容器之半導體元 件的一部份之剖視圖； ^第9圖為一在一基材與一半導體晶片之間形成有一電 谷器之半導體元件的一部份之剖視圖； 第10圖顯示半導體晶片的一安裝程序； 第11圖為-半導體元件的剖視圖，其中顯示具有不同 尽度的半導體晶片之一安裝程序； 鲁 第12圖為-半導體晶片的剖視圖，其具有用於定位半 導體晶片之對準圖案； 第13圖為形成於一基材上之半導體元件的剖視圖，其 具有用於辨識分割線之對準圖案； 第14圖為根據本發明第二實施例之一半導體元件的剖 視圖； 第15圖為身為第14圖所示的半導體元件之一變化方式 37 200402126 之一半導體元件的剖視圖； 第16圖為身為第14圖所示的半導體元件的另一變化方 式之一半導體元件的剖視圖； 第17圖為根據本發明第三實施例之一半導體元件的剖 5 視圖； 第18圖為在一封裝體中採用第1圖所示的半導體元件 之半導體元件的剖視圖； 第19A圖為根據本發明第四實施例之一半導體元件的 剖視圖且其處於製造程序的中間； 10 第19B圖為第19A圖所示之半導體元件的剖視圖，其中 處於一種藉由使一樹脂層成為流體來充填間隙之狀態； 第20A及20B圖為說明用於形成樹脂層之一範例的剖 視圖； 第21A及21B圖為說明用於形成樹脂層之另一範例的 15 剖視圖； 第22圖為用於說明樹脂層與一半導體組件的厚度之間 的關係之剖視圖， 第23A至23D圖為用於說明根據本發明第五實施例之 一半導體元件的製造程序之剖視圖； 20 第24圖為根據本發明第六實施例之一半導體元件的剖 視圖， 第25A及25B圖為顯示根據本發明第七實施例之一半 導體元件的製造程序之剖視圖； 第26A至26C圖係說明一種用於將一黏劑施加至一半 38 200402126 導體組件且將黏劑設為半固化狀態之程序；及 第27A及27B圖係為說明一種用於將一樹脂層的一上 表面及一半導體組件的一上表面大致設在相同平面中之方 法的剖視圖。 5 【圖式之主要元件代表符號表】 (G)…間隙寬度 35a，36A，36B …線 Tc…晶片厚度 38…介電構件 10观0,60,70,80,90“.半_元件 39…電感器 11，91，101"«基材 41，44,65,65A，65B，65C，65D，84 12…邏輯晶片 …傳導層 13…記憶晶片 42…介電層 14，14AJ4B，61B，61C，61D· · ·樹脂層 50,51…對準圖案 14a，104a，108a…開口 61A…上樹脂層 15，15A，15B，85…黏劑層 62八，628,62(：，620—絕緣黏劑層 16,64A，64B，64C，64D，72,83，87 63人63丑，63<：，630,71 …半 fit 晶片 …有機絕緣膜 81人8瓜，82…半導體晶片 17…重組接線層 83,87…有機絕緣膜 18…輸入/輸出端子 84···#導層 21，94，107"*銲球 85···黏劑層 27…電容器 86…盼酸清漆基樹脂層 31，81人81B，82···半導體晶片(LSI) 88· · ·通道 32,40,43,45〜絕緣層 90…半導體元件 33,88···通道 91…紐 35…假體晶片 92…鲜線 200402126 93…密封樹脂 94"銲球 1〇2，1〇2Α，1〇2Β…半導體組件 102a…側表面 102b…半導體組件1〇2的上表面 103,103A…黏劑 104···樹脂層 104b…樹脂層1〇4的上表面 104c…通孔 105…感光膜 106···接線層 108···樹脂層 108b…樹脂層108的側表面 l〇8c…樹脂層1〇8的上表面 109…晶圓 110…結合工具
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Claims (1)

  1. 200402126 拾、申請專利範圍： 1. 一種半導體元件，其具有經由一黏劑層以二維配置安裝 在一基材上之複數個半導體組件，其特徵為： 一樹脂層形成於該基材上且定位在該等半導體組 5 件周圍，該樹脂層具有與該等半導體組件厚度大致相同 之厚度； 一有機絕緣層形成於該樹脂層的一表面以及該等 半導體組件的電路形成表面上方； 一重組接線層形成於該有機絕緣層及該等半導體 10 晶片的電極上，及 外部連接端子係經由該重組接線層中的接線而電 性連接至該等半導體組件之電路形成表面。 2. 如申請專利範圍第1項之半導體元件，其中該等半導體 組件的厚度為50微米或更小。 15 3.如申請專利範圍第1項之半導體元件，其中該樹脂層由 一感光樹脂材料形成。 4. 如申請專利範圍第1項之半導體元件，其中該等銲球形 成於該等外部連接端子上。 5. 如申請專利範圍第1項之半導體元件，其中移除該基材 20 及該黏劑層藉以露出該等半導體組件的背表面。 6. 如申請專利範圍第1項之半導體元件，其中移除該基材 及該黏劑層，且一熱輻射板設置於該等半導體晶片的背 表面上。 7. 如申請專利範圍第1項之半導體元件，其中該基材由一 41 200402126 供該基材使用之一半導體組件所取代，且該等複數個半 導體組件經由一有機絕緣層安裝在該供基材使用之半 導體組件的一電路形成表面上。 8·如申請專利範圍第1項之半導體元件，其中一假體晶片 5 定位在相鄰的該等複數個半導體組件之間，該假體晶片 具有與該等半導體組件大致相同的厚度並由與該等半 導體組件相同的材料所形成。 9·如申晴專利範圍第8項之半導體元件，其中該假體晶片 中具有接線’且該重組接線層中的接線之一部份係連接 10 至該假體晶片中的接線。 1〇·如申3月專利範圍第1項之半導體元件，其中至少-個被 動組件形成於該重組接線層中。 11·如申印專利範圍第1〇項之半導體元件，其中該被動組件 為一電容器或一電感器的其中一者。 15 12·如中μ專利圍第旧之半導體元件，其中一電容器形 成於該樹脂層中。 13·如申明專利範圍第1項之半導體元件，其中一電容器形 成於該基材與一個該等半導體組件之間。 R如申請專利範圍第1項之半導體元件，其中用於位置辨 2〇 識之對準圖案係形成於該基材上。 15·如申W專利㈣第1項之半導體元件，其中藉由個別區 刀一日日圓而形成該基材，堆積在該基材上的各層邊緣係 從該基材的側表面依序往内偏移。 16·如申請專利範圍第1項之半導體元件，其中該等複數個
    42 200402126 半導體組件包括具有不同厚度的半導體組件；一個具有 最大厚度的該等半導體組件係定位在該黏劑層上；且該 具有最大厚度的半導體組件除外之各該等半導體組件 係經由一樹脂層安裝在該基材上，該樹脂層係具有和各 5 該等半導體組件與該一個具有最大厚度的半導體組件 之間的厚度差相對應之厚度。 17. —種封裝複數個半導體組件之半導體元件的製造方 法，其特徵為以下步驟： 形成一樹脂層，該樹脂層係具有與所安裝的該等半 10 導體組件厚度相等之厚度； 藉由部份地移除該樹脂層以在該樹脂層中形成開 π ； 將該等半導體組件分別定位在該等開口内且使電 路形成表面向上； 15 在該樹脂層的一表面以及該等半導體組件的電路 形成表面上方形成一有機絕緣層； 在該有機絕緣層及該等半導體組件的電極上形成 一重組接線層；及 在該重組接線層上形成外部連接端子，該等外部連 20 接端子經由該重組接線層中的接線連接至該等半導體 組件的電極。 18. 如申請專利範圍第17項之半導體元件的製造方法，其中 該等半導體組件的厚度設為50微米或更小。 19. 如申請專利範圍第17項之半導體元件的製造方法，其中 43 200402126 該基材為矽晶圓且複數個半導體元件形成於該矽晶圓 上，並沿著該矽晶圓的分割線移除該矽晶圓的某些部 ，份。 • 20.如申請專利範圍第17項之半導體元件的製造方法，其中 5 該樹脂層由一感光樹脂形成，且利用一光蝕刻技術形成 該開口。 21.如申請專利範圍第17項之半導體元件的製造方法，其中 在形成該重組接線層之後，藉由移除該基材以露出該等 半導體組件的背表面。 10 22.如申請專利範圍第17項之半導體元件的製造方法，進一 步包含以下步驟： 在該基材上形成對準圖案用以定位該等半導體組 件；及 依據該等對準圖案的一影像辨識結果在該樹脂層 15 中形成該等開口，以分別將該等半導體組件定位在該等 開口中。 23.如申請專利範圍第17項之半導體元件的製造方法，進一 步包含一用於在該重組接線層中形成至少一被動組件 之步驟。 20 24.如申請專利範圍第23項之半導體元件的製造方法，其中 該被動組件包括一電容器及一電感器的其中一者。 25. 如申請專利範圍第17項之半導體元件的製造方法，進一 步包含一用於在該樹脂層中形成一電容器之步驟。 26. 如申請專利範圍第17項之半導體元件的製造方法，進一 44 200402126 步包含一用於在該基材與一個該等半導體組件之間形 成一電容器之步驟。 27. 一種堆積式半導體元件，其包含堆積在彼此上之複數層 結構，各該等層結構的特徵係為： 5 一半導體組件，其經由一黏劑層配置於一基材上； 一樹脂層，其形成於該基材及周遭的該半導體組件 上’該樹脂層具有與該半導體組件的厚度大致相等之厚 度； 一有機絕緣層，其形成於該樹脂層的一表面及該半 10 導體組件的一電路形成表面上方；及 一重組接線層，其形成於該半導體組件及該半導體 組件的電極上。 28·如申請專利範圍第27項之堆積式半導體元件，其中該半 導體組件具有50微米或更小的厚度。 15 29·如申請專利範圍第27項之堆積式半導體元件，其中至少 一被動組件形成於該重組接線層中。 3〇·如申請專利範圍第29項之堆積式半導體元件，其中該被 動組件包括一電容器及一電感器的其中一者。 31·如申5月專利|巳圍第27項之堆積式半導體元件，其中一電 !0 容器形成於該樹脂層中。 32. 如申請專利範圍第27項之堆積式半導體元件其令一電 容器形成於該基材與該半導體纽件之間。 33. 如申請專利範圍第27項之堆積式半導體元件，其中用於 位置辨識之對準®案係形成於該基材上。 45 200402126 34·如申請專利範圍第27項之堆積式半導體元件，其中藉由 個別區分一晶圓而形成該基材，堆積在該基材上的各層 邊緣係從該基材的側表面依序往内偏移。 35·如申請專利範圍第27項之堆積式半導體元件，其中該基 材由一供基材使用之半導體組件所取代，且該供基材使 用之半導體組件的一電路形成表面上之電極係經由延 伸通過該樹脂層的傳導性連接部件電性連接至該重組 接線層。 36· /種堆積式半導體元件之製造方法，其特徵為以下步 驟： 在一基材上形成一第一樹脂層，該第一樹脂層具有 與所安裝的一第一半導體組件厚度大致相等之一厚 度，該第一樹脂層圍繞該第一半導體組件； 在該第一樹脂層中形成一第一開口，使得該第一半 導體組件定位在該第一開口中； 將該第一半導體組件定位在該第一開口中； 在該第一樹脂層的一表面及該第一半導體組件的 /電路形成表面上方形成一第一有機絕緣層； 在該第一有機絕緣層及該第一半導體組件的電極 上形成一第一重組接線層； 在該第一重組接線層上形成一第二樹脂層，該第二 樹脂層具有與所安裝的一第二半導體組件厚度大致相 等之一厚度，該第二樹脂層圍繞該第二半導體組件； 在该第二樹脂層中形成一第二開口，使得該第二半 46 200402126 導體組件定位在該第二開口中； 將該第二半導體組件定位在該第二開口中； 在該第二樹脂層的一表面及該第二半導體組件的 一電路形成表面上方形成一第二有機絕緣層；及 5 在該第二有機絕緣層上形成一第二重組接線層； 藉由在該第一重組接線層與該第二重組接線層之 間形成延伸通過該第一樹脂層的傳導性連接部件以使 該第一重組接線層電性連接至該第二重組接線層。 37.如申請專利範圍第36項之堆積式半導體元件之製造方 10 法，進一步包含以下步驟： 藉由與該等第二半導體組件相同的方式以一堆積 狀態安裝任意數量的半導體組件；及 在一最上方的重組接線層上形成外部連接電極。 38. 如申請專利範圍第36項之堆積式半導體元件之製造方 15 法，其中該基材由一第三半導體組件所取代，且該製造 方法進一步包含以下步驟： 在一電路形成表面上形成一有機絕緣層； 在該絕緣層上形成該第一樹脂層； 經由延伸通過該第一樹脂層的傳導性連接部件將 20 該第三半導體組件的電路形成表面上之電極電性連接 至該第一重組接線層。 39. —種半導體元件，其具有一基材及一安裝在該基材上之 半導體組件， 其特徵為一樹脂層設置於該半導體組件周圍並具 47 200402126 有一與該半導體組件的一上表面處於相同位準之上表 面，且其中該樹脂層係為一可半固化性樹脂且具有一種 使該樹脂在一半固化狀態加熱時軟化及成為流體之特 徵，且該樹脂層緊密地接觸該半導體組件的表面而在其 5 間並無間隙。 40. 如申請專利範圍第39項之半導體元件，其中該以半固化 狀態形成該樹脂層之可半固化性樹脂的一軟化點係等 於或大於60°C。 41. 如申請專利範圍第39項之半導體元件，其中該用於形成 10 該樹脂層之可半固化性樹脂係為一 B階段環氧樹脂。 42. 如申請專利範圍第39項之半導體元件，其中利用一由該 可半固化性樹脂形成的黏劑將該半導體組件固定至該 基材。 43. 如申請專利範圍第39項之半導體元件，其中該半導體組 15 件的厚度等於或小於50微米。 44. 如申請專利範圍第39項之半導體元件，其中該等複數個 半導體組件安裝在該基材上，且該樹脂層設置於該等半 導體組件之間。 45. —種半導體元件的製造方法，其特徵為以下步驟： 20 在一基材上形成一半固化狀態的樹脂層，使得一半 導體組件位於該樹脂層中，該樹脂層由一可半固化性樹 脂所製成； 藉由加熱使該半固化狀態的樹脂層成為流體； 藉由充填該間隙中成為流體的樹脂層以消除該半 48 200402126 導體組件與該樹脂層之間的一間隙； 藉由加熱完全固化該樹脂層。 46. 如申請專利範圍第45項之半導體元件的製造方法，其中 在該半導體組件安裝在該基材上之後’該半固化狀悲的 5 樹脂層形成於該半導體組件的周圍。 47. 如申請專利範圍第45項之半導體元件的製造方法，其中 在該半導體組件安裝在該基材上之前，該具有一用於定 位該半導體組件的開口之半固化狀態的樹脂層係形成 於該基材上。 10 48.如申請專利範圍第45項之半導體元件的製造方法，其中 該半固化狀態的樹脂層利用一壓印方法轉移至該基材 上。 49. 如申請專利範圍第45項之半導體元件的製造方法，其中 該半固化狀態的樹脂層係形成於該基材上，使得該樹脂 15 層的一側表面與該半導體組件的一側表面之間的距離 小於該半導體組件的厚度。 50. 如申請專利範圍第45項之半導體元件的製造方法，其中 在該半固化狀態的樹脂層藉由加熱成為流體之前，將一 膜施加至該樹脂層及該半導體組件上方。 20 51.如申請專利範圍第50項之半導體元件的製造方法，其中 在該成為流體的步驟之前，將與不需成為流體的該樹脂 層的一部份相對應之該膜的一部份加以移除。 52.如申請專利範圍第51項之半導體元件的製造方法，其中 該膜為一感光膜，且該膜的部份係藉由將該膜的部份暴 49 200402126 光而移除。 53.如申請專利範圍第45項之半導體元件的製造方法，其中 該半固化狀態的樹脂層係藉由以等於或高於100°C的溫 度加熱而成為流體。 5 54.如申請專利範圍第45項之半導體元件的製造方法，其中 將該半固化狀態的樹脂層形成為使得該半固化狀態的 樹脂層之厚度大於該半導體組件的厚度。 55. 如申請專利範圍第45項之半導體元件的製造方法，其中 將一黏劑以5微米至20微米厚度施加至該半導體組件上 10 以糟由該黏劑將該半導體組件固定至該基材。 56. 如申請專利範圍第55項之半導體元件的製造方法，其中 對於該黏劑使用該可半固化性樹脂。 57. 如申請專利範圍第56項之半導體元件的製造方法，其中 利用等於或高於100°C的溫度加熱該黏劑藉以將該黏劑 15 設為該半固化狀態。 58. 如申請專利範圍第45項之半導體元件的製造方法，其中 該半導體組件具有等於或小於50微米的厚度。 59. —種半導體元件的製造方法，其特徵為以下步驟： 在一基材上形成一具有一開口之樹脂層，且製備一 20 設有一由一可半固化性樹脂形成的黏劑之半導體組件； 將該半導體組件定位在該開口中； 經由該黏劑將該半導體組件壓抵在該基材上’同時 藉由加熱使該半固化狀態的黏劑成為流體；及 藉由加熱來固化該黏劑，同時將該半導體組件保持 50 200402126 在一使該半導體組件的一上表面與該樹脂層的一上表 面位居相同平面中之位置。 60. 如申請專利範圍第59項之半導體元件的製造方法，其中 該半導體組件的上表面係由一結合工具的一底表面所 5 支撐，且以一種使該結合工具的底表面接觸該樹脂層的 上表面之狀態來固化該黏劑。 61. —種半導體元件的製造方法，其特徵為以下步驟： 在一基材上形成一具有一開口之樹脂層，及製備一 設有一黏劑之半導體組件； 10 利用一結合工具的一底表面來支撐該半導體組件 的一上表面，藉以將該半導體組件定位在該開口中；及 以一種使該結合工具的底表面接觸該樹脂層的一 上表面之狀態來固化該黏劑。
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US20030227095A1 (en) 2003-12-11
CN100435334C (zh) 2008-11-19
US6836025B2 (en) 2004-12-28
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