TR200001348T2 - Sürtünmeli yataklarda vakumlu kaplama için tertibat - Google Patents
Sürtünmeli yataklarda vakumlu kaplama için tertibatInfo
- Publication number
- TR200001348T2 TR200001348T2 TR2000/01348T TR200001348T TR200001348T2 TR 200001348 T2 TR200001348 T2 TR 200001348T2 TR 2000/01348 T TR2000/01348 T TR 2000/01348T TR 200001348 T TR200001348 T TR 200001348T TR 200001348 T2 TR200001348 T2 TR 200001348T2
- Authority
- TR
- Turkey
- Prior art keywords
- coating
- several
- conveyance
- chambers
- slide bearings
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/14—Special methods of manufacture; Running-in
Abstract
Sürekli veya gurup tesislerindeki çesitli biçimlerde vakumlu kaplama maddeleri için mevcut cihazlar bir kaplama ameliyesinden sonra birkaç kaplama yapilacak sekilde donatilmistir. Birkaç kat kaplanacak kayar yataklar ve kullanilan kaplama malzemesi ve bunlara iliskin kosullar birçok kaplama yönteminden yararlanmasini gerektirir. Bu digerleri meyaninda tasima parametreleri ile de ilgilidir. Mevcut tesisler bu istekleri karsilayamaz. Bulusa göre, bu tür bir cihaz siralanmis birçok islem hücresi içerir. Pozitif ve pozitif olmayanlarla birlikte temperli gövdelere yerlestirilen kayar yataklar bu isleme adapte edilen bir tasima sistemi ve ön islem, atomizasyon ve buharlastirma hücreleri yoluyla yer degistirir. Tasiyici gövdeleri için bir temperleme cihazi kaplama ray hattindan gelen kaynak yönüne baglidir. Karsit giris ve çikis kanallari havadan havaya nakil imkanina sahiptir.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19753656A DE19753656C1 (de) | 1997-12-03 | 1997-12-03 | Einrichtung zur Vakuumbeschichtung von Gleitlagern |
Publications (1)
Publication Number | Publication Date |
---|---|
TR200001348T2 true TR200001348T2 (tr) | 2000-11-21 |
Family
ID=7850630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TR2000/01348T TR200001348T2 (tr) | 1997-12-03 | 1998-11-19 | Sürtünmeli yataklarda vakumlu kaplama için tertibat |
Country Status (16)
Country | Link |
---|---|
US (1) | US6444086B1 (tr) |
EP (1) | EP1036212B1 (tr) |
JP (1) | JP2001525490A (tr) |
KR (1) | KR100532031B1 (tr) |
CN (1) | CN1177950C (tr) |
AT (2) | ATE202160T1 (tr) |
BR (1) | BR9814771A (tr) |
CZ (1) | CZ293929B6 (tr) |
DE (2) | DE19753656C1 (tr) |
ES (1) | ES2158704T3 (tr) |
PL (1) | PL187394B1 (tr) |
PT (1) | PT1036212E (tr) |
RU (1) | RU2221080C2 (tr) |
SK (1) | SK285253B6 (tr) |
TR (1) | TR200001348T2 (tr) |
WO (1) | WO1999028523A1 (tr) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10065709B4 (de) * | 2000-12-29 | 2005-10-27 | Sturm Jun., Wilhelm | Beschichtungsanlage |
DE10205168A1 (de) * | 2002-02-07 | 2003-08-21 | Ardenne Anlagentech Gmbh | Verfahren zur Zwischenbehandlung von Substraten in einer In-Line-Vakuumbeschichtungsanlage |
DE10324570A1 (de) * | 2003-05-30 | 2004-12-23 | Daimlerchrysler Ag | Vorrichtung und Verfahren zur Oberflächenbehandlung einer metallischen Laufbahn einer Maschine mittels Plasmatechnologie |
CN1304628C (zh) * | 2004-08-31 | 2007-03-14 | 成建波 | 真空线源蒸发镀膜方法及其装置 |
RU2401881C2 (ru) * | 2005-03-18 | 2010-10-20 | Улвак, Инк. | Способ и устройство нанесения покрытия, постоянный магнит и способ его изготовления |
AT501722B1 (de) | 2005-07-12 | 2006-11-15 | Miba Gleitlager Gmbh | Beschichtungsverfahren |
CN100595320C (zh) * | 2005-11-16 | 2010-03-24 | 比亚迪股份有限公司 | 一种真空镀膜方法和系统 |
CN1970828B (zh) * | 2005-11-26 | 2010-05-26 | 鸿富锦精密工业(深圳)有限公司 | 在模具上形成多层镀膜的方法 |
CN101144149B (zh) * | 2006-09-11 | 2010-12-22 | 柏腾科技股份有限公司 | 无时间延迟的连续式真空制程设备及真空加工方法 |
JP5069956B2 (ja) * | 2007-06-25 | 2012-11-07 | 株式会社神戸製鋼所 | 成膜装置 |
DE102007049669A1 (de) * | 2007-10-17 | 2009-04-23 | Sms Demag Ag | Schleusenvorrichtung und Verfahren zum Öffnen der Schleusenvorrichtung |
CN101608301B (zh) * | 2009-06-24 | 2011-12-07 | 江苏常松机械集团有限公司 | 连续真空等离子蒸发金属复合材料生产线 |
JP5244723B2 (ja) * | 2009-07-10 | 2013-07-24 | 株式会社日立ハイテクノロジーズ | 成膜装置 |
CN102703867A (zh) * | 2012-01-13 | 2012-10-03 | 东莞宏威数码机械有限公司 | 电子轰击镀膜机 |
CN103866255B (zh) * | 2014-03-10 | 2016-04-27 | 江西沃格光电股份有限公司 | 磁控溅射镀膜系统 |
US10371244B2 (en) | 2015-04-09 | 2019-08-06 | United Technologies Corporation | Additive manufactured gear for a geared architecture gas turbine engine |
TWM557347U (zh) * | 2017-07-21 | 2018-03-21 | Guay Guay Trading Co Ltd | 彈匣氣體加熱結構 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4072985A (en) * | 1977-05-04 | 1978-02-07 | Rca Corporation | Video disc with a dielectric layer formed from styrene and nitrogen |
JPH06105742B2 (ja) * | 1983-11-28 | 1994-12-21 | 株式会社日立製作所 | 真空処理方法及び装置 |
JPS60141869A (ja) * | 1983-12-29 | 1985-07-26 | Nissin Electric Co Ltd | 膜形成方法および膜形成装置 |
JPS61105853A (ja) * | 1984-10-30 | 1986-05-23 | Anelva Corp | オ−トロ−ダ− |
JPS61106768A (ja) * | 1984-10-31 | 1986-05-24 | Anelva Corp | 基体処理装置 |
DE3606529A1 (de) | 1986-02-28 | 1987-09-03 | Glyco Metall Werke | Verfahren zur herstellung von schichtwerkstoff oder schichtwerkstuecken durch aufdampfen mindestens eines metallischen werkstoffes auf ein metallisches substrat |
DE3717712A1 (de) * | 1987-05-26 | 1988-12-15 | Leybold Ag | Vorrichtung zur halterung von werkstuecken |
US4904362A (en) | 1987-07-24 | 1990-02-27 | Miba Gleitlager Aktiengesellschaft | Bar-shaped magnetron or sputter cathode arrangement |
AT392291B (de) * | 1987-09-01 | 1991-02-25 | Miba Gleitlager Ag | Stabfoermige sowie magnetron- bzw. sputterkathodenanordnung, sputterverfahren, und vorrichtung zur durchfuehrung des verfahrens |
US4911810A (en) * | 1988-06-21 | 1990-03-27 | Brown University | Modular sputtering apparatus |
JPH07110991B2 (ja) * | 1989-10-02 | 1995-11-29 | 株式会社日立製作所 | プラズマ処理装置およびプラズマ処理方法 |
SU1751506A1 (ru) * | 1990-04-04 | 1992-07-30 | Харьковский авиационный институт им.Н.Е.Жуковского | Узел трени скольжени |
US5236509A (en) * | 1992-02-06 | 1993-08-17 | Spire Corporation | Modular ibad apparatus for continuous coating |
TW276353B (tr) * | 1993-07-15 | 1996-05-21 | Hitachi Seisakusyo Kk | |
US5377816A (en) * | 1993-07-15 | 1995-01-03 | Materials Research Corp. | Spiral magnetic linear translating mechanism |
JP3732250B2 (ja) * | 1995-03-30 | 2006-01-05 | キヤノンアネルバ株式会社 | インライン式成膜装置 |
DE19514836C2 (de) * | 1995-04-21 | 2000-06-08 | Fraunhofer Ges Forschung | Lagerschale |
US5958134A (en) * | 1995-06-07 | 1999-09-28 | Tokyo Electron Limited | Process equipment with simultaneous or sequential deposition and etching capabilities |
DE19537092C1 (de) * | 1995-10-05 | 1996-07-11 | Ardenne Anlagentech Gmbh | Elektronenstrahl-Bedampfungsanlage im Durchlaufbetrieb für thermisch hoch belastete Substrate |
-
1997
- 1997-12-03 DE DE19753656A patent/DE19753656C1/de not_active Expired - Fee Related
-
1998
- 1998-11-19 ES ES98963374T patent/ES2158704T3/es not_active Expired - Lifetime
- 1998-11-19 PL PL98340722A patent/PL187394B1/pl not_active IP Right Cessation
- 1998-11-19 CZ CZ20001932A patent/CZ293929B6/cs not_active IP Right Cessation
- 1998-11-19 CN CNB988113120A patent/CN1177950C/zh not_active Expired - Fee Related
- 1998-11-19 KR KR10-2000-7005948A patent/KR100532031B1/ko not_active IP Right Cessation
- 1998-11-19 RU RU2000117466/02A patent/RU2221080C2/ru not_active IP Right Cessation
- 1998-11-19 DE DE59800874T patent/DE59800874D1/de not_active Expired - Lifetime
- 1998-11-19 SK SK830-2000A patent/SK285253B6/sk unknown
- 1998-11-19 BR BR9814771-4A patent/BR9814771A/pt not_active IP Right Cessation
- 1998-11-19 AT AT98963374T patent/ATE202160T1/de not_active IP Right Cessation
- 1998-11-19 WO PCT/DE1998/003455 patent/WO1999028523A1/de active IP Right Grant
- 1998-11-19 AT AT0912298A patent/AT407995B/de not_active IP Right Cessation
- 1998-11-19 EP EP98963374A patent/EP1036212B1/de not_active Expired - Lifetime
- 1998-11-19 TR TR2000/01348T patent/TR200001348T2/tr unknown
- 1998-11-19 JP JP2000523393A patent/JP2001525490A/ja active Pending
- 1998-11-19 PT PT81101988T patent/PT1036212E/pt unknown
- 1998-11-19 US US09/555,905 patent/US6444086B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CZ293929B6 (cs) | 2004-08-18 |
SK8302000A3 (en) | 2001-01-18 |
RU2221080C2 (ru) | 2004-01-10 |
WO1999028523A1 (de) | 1999-06-10 |
AT407995B (de) | 2001-07-25 |
DE19753656C1 (de) | 1998-12-03 |
EP1036212A1 (de) | 2000-09-20 |
SK285253B6 (sk) | 2006-09-07 |
US6444086B1 (en) | 2002-09-03 |
PT1036212E (pt) | 2001-11-30 |
PL187394B1 (pl) | 2004-06-30 |
ATA912298A (de) | 2000-12-15 |
PL340722A1 (en) | 2001-02-26 |
KR20010032666A (ko) | 2001-04-25 |
KR100532031B1 (ko) | 2005-11-29 |
ES2158704T3 (es) | 2001-09-01 |
CN1279728A (zh) | 2001-01-10 |
CZ20001932A3 (cs) | 2000-09-13 |
CN1177950C (zh) | 2004-12-01 |
ATE202160T1 (de) | 2001-06-15 |
JP2001525490A (ja) | 2001-12-11 |
DE59800874D1 (de) | 2001-07-19 |
EP1036212B1 (de) | 2001-06-13 |
BR9814771A (pt) | 2000-10-03 |
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