ES2036956B1 - Procedimiento y dispositivo de recubrimiento de substratos. - Google Patents
Procedimiento y dispositivo de recubrimiento de substratos.Info
- Publication number
- ES2036956B1 ES2036956B1 ES9200529A ES9200529A ES2036956B1 ES 2036956 B1 ES2036956 B1 ES 2036956B1 ES 9200529 A ES9200529 A ES 9200529A ES 9200529 A ES9200529 A ES 9200529A ES 2036956 B1 ES2036956 B1 ES 2036956B1
- Authority
- ES
- Spain
- Prior art keywords
- substrates
- spraying chamber
- spraying
- chamber
- substrate coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title abstract 7
- 239000011248 coating agent Substances 0.000 title abstract 2
- 238000000576 coating method Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 238000005507 spraying Methods 0.000 abstract 5
- 239000000969 carrier Substances 0.000 abstract 1
- 230000009977 dual effect Effects 0.000 abstract 1
- 238000009434 installation Methods 0.000 abstract 1
- 239000007921 spray Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Abstract
PROCEDIMIENTO Y DISPOSITIVO PARA EL RECUBRIMIENTO DE SUBSTRATOS (1, 1'', ...) PREFERIBLEMENTE MEDIANTE PULVERIZADO CATODICO EN UNA INSTALACION DE VACIO QUE SE COMPONE DE POR LO MENOS UNA CAMARA (6) DE PULVERIZADO, EN LA QUE SE PUEDEN APLICAR DIFERENTES SISTEMAS DE CAPAS A LOS SUBSTRATOS (1, 1'', ...) PREFERIBLEMENTE CURVADOS A SER RECUBIERTOS, LOS SUBSTRATOS (1, 1'', ...) SE PUEDEN MOVER EN UN SENTIDO (B) DE LA MARCHA A TRAVES DE LA CAMARA (6) DE PULVERIZADO Y RECORREN LA CAMARA (6) DE PULVERIZADO EN EL SENTIDO (B) DE LA MARCHA ASI COMO EN EL SENTIDO OPUESTO VARIAS VECES A LA MANERA LLAMADA DE MULTIPASO, DONDE LOS SUBSTRATOS (1, 1'', ...) A SER RECUBIERTOS SE REUNEN A LA ENTRADA DE LA CAMARA (6) DE PULVERIZADO EN GRUPOS DE VARIOS, PREFERIBLEMENTE DE DOS SUBSTRATOS (1, 1'', ...) POR GRUPO, O BIEN DE CARRIERS (12, 12'', ...) QUE LLEVAN A LOS SUBSTRATOS, Y RECORREN LA CAMARA (6) DE PULVERIZADO SIMULTANEAMENTEA LA MANERA LLAMADA DE MULTIPASO DUAL.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4111384A DE4111384C2 (de) | 1991-04-09 | 1991-04-09 | Vorrichtung zur Beschichtung von Substraten |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2036956A1 ES2036956A1 (es) | 1993-06-01 |
ES2036956B1 true ES2036956B1 (es) | 1994-04-01 |
Family
ID=6429096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES9200529A Expired - Fee Related ES2036956B1 (es) | 1991-04-09 | 1992-03-10 | Procedimiento y dispositivo de recubrimiento de substratos. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5340454A (es) |
JP (1) | JPH05106034A (es) |
DE (1) | DE4111384C2 (es) |
ES (1) | ES2036956B1 (es) |
LU (1) | LU88067A1 (es) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4325011A1 (de) * | 1993-07-28 | 1995-03-02 | Herlitz Michael | Erweiterung von Entspiegelung wie bei Brillengläsern üblich auf Autoglasscheiben sowie weitere Kraftfahrzeuge und Verkehrsmittel, sowie alle anderen Silikat- und Kunststoffscheiben |
DE4407909C3 (de) * | 1994-03-09 | 2003-05-15 | Unaxis Deutschland Holding | Verfahren und Vorrichtung zum kontinuierlichen oder quasi-kontinuierlichen Beschichten von Brillengläsern |
DE19500964A1 (de) * | 1995-01-14 | 1996-07-18 | Leybold Ag | Vorrichtung zum Beschichten |
JP3403550B2 (ja) * | 1995-06-29 | 2003-05-06 | 松下電器産業株式会社 | スパッタリング装置とスパッタリング方法 |
ES2279517T3 (es) * | 1995-10-27 | 2007-08-16 | APPLIED MATERIALS GMBH & CO. KG | Dispositivo para recubrir un sustrato. |
WO1997028290A1 (en) * | 1996-01-31 | 1997-08-07 | Optical Coating Laboratory, Inc. | Multi-chamber continuous sputter coating system |
TW320687B (es) * | 1996-04-01 | 1997-11-21 | Toray Industries | |
DE19651378A1 (de) * | 1996-12-11 | 1998-06-18 | Leybold Systems Gmbh | Vorrichtung zum Aufstäuben von dünnen Schichten auf flache Substrate |
EP0995812A1 (en) * | 1998-10-13 | 2000-04-26 | Vacumetal B.V. | Apparatus for flow-line treatment of articles in an artificial medium |
US6309516B1 (en) * | 1999-05-07 | 2001-10-30 | Seagate Technology Llc | Method and apparatus for metal allot sputtering |
US6264804B1 (en) | 2000-04-12 | 2001-07-24 | Ske Technology Corp. | System and method for handling and masking a substrate in a sputter deposition system |
US6881269B2 (en) * | 2000-08-17 | 2005-04-19 | Novartis Ag | Lens plasma coating system |
PT1326718E (pt) * | 2000-10-04 | 2004-04-30 | Dow Corning Ireland Ltd | Metodo e aparelho para formar um revestimento |
DE10205168A1 (de) * | 2002-02-07 | 2003-08-21 | Ardenne Anlagentech Gmbh | Verfahren zur Zwischenbehandlung von Substraten in einer In-Line-Vakuumbeschichtungsanlage |
GB0208261D0 (en) * | 2002-04-10 | 2002-05-22 | Dow Corning | An atmospheric pressure plasma assembly |
TW200409669A (en) * | 2002-04-10 | 2004-06-16 | Dow Corning Ireland Ltd | Protective coating composition |
TW200308187A (en) * | 2002-04-10 | 2003-12-16 | Dow Corning Ireland Ltd | An atmospheric pressure plasma assembly |
US9206500B2 (en) * | 2003-08-11 | 2015-12-08 | Boris Druz | Method and apparatus for surface processing of a substrate using an energetic particle beam |
US7879201B2 (en) * | 2003-08-11 | 2011-02-01 | Veeco Instruments Inc. | Method and apparatus for surface processing of a substrate |
GB0323295D0 (en) * | 2003-10-04 | 2003-11-05 | Dow Corning | Deposition of thin films |
US9051211B2 (en) * | 2004-04-27 | 2015-06-09 | Ppg Industries Ohio, Inc. | Effects of methods of manufacturing sputtering targets on characteristics of coatings |
CN102355789B (zh) * | 2004-11-05 | 2014-06-11 | 陶氏康宁爱尔兰有限公司 | 用于等离子体处理表面的工艺 |
EP1698715A1 (de) * | 2005-03-03 | 2006-09-06 | Applied Films GmbH & Co. KG | Anlage zum Beschichten eines Substrats und Einschubelement |
GB0509648D0 (en) * | 2005-05-12 | 2005-06-15 | Dow Corning Ireland Ltd | Plasma system to deposit adhesion primer layers |
US20130206583A1 (en) * | 2007-09-18 | 2013-08-15 | Veeco Instruments, Inc. | Method and Apparatus for Surface Processing of a Substrate Using an Energetic Particle Beam |
KR20100100958A (ko) * | 2007-12-27 | 2010-09-15 | 엑사테크 엘.엘.씨. | 멀티-패스 진공 코팅 시스템 |
DE102008024372B4 (de) * | 2008-05-20 | 2013-08-22 | Von Ardenne Anlagentechnik Gmbh | Verfahren zum Transport von Substraten in Vakuumbeschichtungseinrichtungen |
US8749053B2 (en) | 2009-06-23 | 2014-06-10 | Intevac, Inc. | Plasma grid implant system for use in solar cell fabrications |
SG10201508582WA (en) * | 2011-11-08 | 2015-11-27 | Intevac Inc | Substrate processing system and method |
WO2013101851A1 (en) * | 2011-12-27 | 2013-07-04 | Intevac, Inc. | System architecture for combined static and pass-by processing |
MY178951A (en) | 2012-12-19 | 2020-10-23 | Intevac Inc | Grid for plasma ion implant |
DE102021134254A1 (de) * | 2021-12-22 | 2023-06-22 | Rainer Cremer | Inline-Anlage zum Beschichtenvon einzelnen oder von Gruppen von Substraten und Verfahren zum Beschichten einzelner Substrate oder Substratgruppen in einer Inline-Beschichtungsanlage |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3584847A (en) * | 1968-05-31 | 1971-06-15 | Western Electric Co | Advancing workpieces through a sputtering chamber |
GB1365492A (en) * | 1971-02-05 | 1974-09-04 | Triplex Safety Glass Co | Metal oxide films |
US3793167A (en) * | 1972-06-01 | 1974-02-19 | Globe Amerada Glass Co | Apparatus for manufacturing metal-coated glass |
US3945903A (en) * | 1974-08-28 | 1976-03-23 | Shatterproof Glass Corporation | Sputter-coating of glass sheets or other substrates |
DE2844491C2 (de) * | 1978-10-12 | 1983-04-14 | Leybold-Heraeus GmbH, 5000 Köln | Vakuum-Beschichtungsanlage mit einer Einrichtung zum kontinuierlichen Substrattransport |
US4274936A (en) * | 1979-04-30 | 1981-06-23 | Advanced Coating Technology, Inc. | Vacuum deposition system and method |
NL8203318A (nl) * | 1982-08-24 | 1984-03-16 | Integrated Automation | Inrichting voor processing van substraten. |
DE3400843A1 (de) * | 1983-10-29 | 1985-07-18 | VEGLA Vereinigte Glaswerke GmbH, 5100 Aachen | Verfahren zum herstellen von autoglasscheiben mit streifenfoermigen blendschutzfiltern durch bedampfen oder sputtern, und vorrichtung zur durchfuehrung des verfahrens |
AU572375B2 (en) * | 1985-01-31 | 1988-05-05 | Boc Group, Inc., The | Transporting of workpiece to and from vacuum coating apparatus |
US4851095A (en) * | 1988-02-08 | 1989-07-25 | Optical Coating Laboratory, Inc. | Magnetron sputtering apparatus and process |
-
1991
- 1991-04-09 DE DE4111384A patent/DE4111384C2/de not_active Expired - Fee Related
-
1992
- 1992-02-06 LU LU88067A patent/LU88067A1/de unknown
- 1992-03-10 ES ES9200529A patent/ES2036956B1/es not_active Expired - Fee Related
- 1992-04-06 JP JP4083859A patent/JPH05106034A/ja active Pending
-
1993
- 1993-07-28 US US08/098,751 patent/US5340454A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ES2036956A1 (es) | 1993-06-01 |
DE4111384C2 (de) | 1999-11-04 |
JPH05106034A (ja) | 1993-04-27 |
DE4111384A1 (de) | 1992-10-15 |
US5340454A (en) | 1994-08-23 |
LU88067A1 (de) | 1992-08-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC2A | Transfer of patent | ||
FD1A | Patent lapsed |
Effective date: 20041102 |