ES2158704T3 - Dispositivo para el recubrimiento a vacio de cojinetes de friccion. - Google Patents

Dispositivo para el recubrimiento a vacio de cojinetes de friccion.

Info

Publication number
ES2158704T3
ES2158704T3 ES98963374T ES98963374T ES2158704T3 ES 2158704 T3 ES2158704 T3 ES 2158704T3 ES 98963374 T ES98963374 T ES 98963374T ES 98963374 T ES98963374 T ES 98963374T ES 2158704 T3 ES2158704 T3 ES 2158704T3
Authority
ES
Spain
Prior art keywords
coating
several
conveyance
chambers
slide bearings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES98963374T
Other languages
English (en)
Inventor
Gerd Andler
Wolfgang Wixwat-Ernst
Christoph Metzner
Jens-Peter Heinss
Klaus Goedicke
Siegfried Schiller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Federal Mogul Wiesbaden GmbH
Original Assignee
Federal Mogul Wiesbaden GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Federal Mogul Wiesbaden GmbH filed Critical Federal Mogul Wiesbaden GmbH
Application granted granted Critical
Publication of ES2158704T3 publication Critical patent/ES2158704T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/14—Special methods of manufacture; Running-in

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Sliding-Contact Bearings (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Compressor (AREA)
  • Spray Control Apparatus (AREA)

Abstract

Dispositivo para el recubrimiento a vacío de cojinetes de fricción con al menos una capa intermedia y al menos una capa de fricción, que consta de una serie de cámaras de vacío, que están yuxtapuestas y que están separadas por válvulas de vacío o etapas de presión, donde al menos una cámara de vacío sirve como cámara de esclusas para la introducción de los cojinetes de fricción no recubiertos y/o para la descarga de los cojinetes de fricción recubiertos al y desde el vacío, respectivamente, donde al menos otra cámara de vacío sirve para el tratamiento previo de los cojinetes de fricción no recubiertos a través de un proceso de plasma y al menos una cámara de vacío, respectivamente, para la aplicación de la capa intermedia y de la capa de fricción, de bombas de vacío que están conectadas con las cámaras de vacío, de dispositivos de alimentación de corriente y dispositivos de control para la realización de los procesos de recubrimiento, así como de medios para el transporte de varios cojinetes de fricción sobre una cinta transportadora que se extiende a través del dispositivo, caracterizado porque los cojinetes de fricción (3) están retenidos en unión positiva en cuerpos de soporte (2), estos cuerpos de soporte (2) son atemperables, los cojinetes de fricción (3) se pueden presionar con una fuerza ajustable en los cuerpos de soporte, en la dirección de transporte están dispuestos de forma sucesiva al menos la cámara de esclusas (5), una cámara de tratamiento previo (7), una primera cámara de recubrimiento (9), una segunda cámara de recubrimiento (11) y una cámara de esclusas (19), el dispositivo de control está configurado de tal forma que los cuerpos de soporte (2) se pueden mover a una velocidad de transporte adaptable al proceso parcial que se desarrolla en cada cámara de vacío, enlacámara de tratamiento previo (7) está dispuesto un dispositivo de decapado químico (8) para el decapado estacionario con plasma, asistido por campo magnético, de los cojinetes de fricción (3), enla primera cámara de recubrimiento (9), una fuente de atomización de magnetrones (10), en la que se atomiza al menos un objetivo, está dispuesta debajo de los cojinetes de fricción a una distancia adaptada a la geometría de los cojinetes de fricción (3), en la segunda cámara de recubrimiento (11) está dispuesto un evaporador de haz de electrones con un crisol de evaporador (16) a una distancia adaptada a la geometría de los cojinetes de fricción (3), delante y detrás de la zona, en la que los cojinetes de fricción (3) son recubiertos por medio de evaporación por haz de electrones, están dispuestas zonas intermedias (12; 18).
ES98963374T 1997-12-03 1998-11-19 Dispositivo para el recubrimiento a vacio de cojinetes de friccion. Expired - Lifetime ES2158704T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19753656A DE19753656C1 (de) 1997-12-03 1997-12-03 Einrichtung zur Vakuumbeschichtung von Gleitlagern

Publications (1)

Publication Number Publication Date
ES2158704T3 true ES2158704T3 (es) 2001-09-01

Family

ID=7850630

Family Applications (1)

Application Number Title Priority Date Filing Date
ES98963374T Expired - Lifetime ES2158704T3 (es) 1997-12-03 1998-11-19 Dispositivo para el recubrimiento a vacio de cojinetes de friccion.

Country Status (16)

Country Link
US (1) US6444086B1 (es)
EP (1) EP1036212B1 (es)
JP (1) JP2001525490A (es)
KR (1) KR100532031B1 (es)
CN (1) CN1177950C (es)
AT (2) ATE202160T1 (es)
BR (1) BR9814771A (es)
CZ (1) CZ293929B6 (es)
DE (2) DE19753656C1 (es)
ES (1) ES2158704T3 (es)
PL (1) PL187394B1 (es)
PT (1) PT1036212E (es)
RU (1) RU2221080C2 (es)
SK (1) SK285253B6 (es)
TR (1) TR200001348T2 (es)
WO (1) WO1999028523A1 (es)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10065709B4 (de) * 2000-12-29 2005-10-27 Sturm Jun., Wilhelm Beschichtungsanlage
DE10205168A1 (de) * 2002-02-07 2003-08-21 Ardenne Anlagentech Gmbh Verfahren zur Zwischenbehandlung von Substraten in einer In-Line-Vakuumbeschichtungsanlage
DE10324570A1 (de) * 2003-05-30 2004-12-23 Daimlerchrysler Ag Vorrichtung und Verfahren zur Oberflächenbehandlung einer metallischen Laufbahn einer Maschine mittels Plasmatechnologie
CN1304628C (zh) * 2004-08-31 2007-03-14 成建波 真空线源蒸发镀膜方法及其装置
WO2006100968A1 (ja) 2005-03-18 2006-09-28 Ulvac, Inc. 成膜方法及び成膜装置並びに永久磁石及び永久磁石の製造方法
AT501722B1 (de) 2005-07-12 2006-11-15 Miba Gleitlager Gmbh Beschichtungsverfahren
CN100595320C (zh) * 2005-11-16 2010-03-24 比亚迪股份有限公司 一种真空镀膜方法和系统
CN1970828B (zh) * 2005-11-26 2010-05-26 鸿富锦精密工业（深圳）有限公司 在模具上形成多层镀膜的方法
CN101144149B (zh) * 2006-09-11 2010-12-22 柏腾科技股份有限公司 无时间延迟的连续式真空制程设备及真空加工方法
JP5069956B2 (ja) * 2007-06-25 2012-11-07 株式会社神戸製鋼所 成膜装置
DE102007049669A1 (de) * 2007-10-17 2009-04-23 Sms Demag Ag Schleusenvorrichtung und Verfahren zum Öffnen der Schleusenvorrichtung
CN101608301B (zh) * 2009-06-24 2011-12-07 江苏常松机械集团有限公司 连续真空等离子蒸发金属复合材料生产线
JP5244723B2 (ja) * 2009-07-10 2013-07-24 株式会社日立ハイテクノロジーズ 成膜装置
CN102703867A (zh) * 2012-01-13 2012-10-03 东莞宏威数码机械有限公司 电子轰击镀膜机
CN103866255B (zh) * 2014-03-10 2016-04-27 江西沃格光电股份有限公司 磁控溅射镀膜系统
US10371244B2 (en) 2015-04-09 2019-08-06 United Technologies Corporation Additive manufactured gear for a geared architecture gas turbine engine
TWM557347U (zh) * 2017-07-21 2018-03-21 Guay Guay Trading Co Ltd 彈匣氣體加熱結構
CN117966103B (zh) * 2024-02-04 2024-06-18 浙江晟霖益嘉科技有限公司 一种蒸发真空设备生产线

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4072985A (en) * 1977-05-04 1978-02-07 Rca Corporation Video disc with a dielectric layer formed from styrene and nitrogen
JPH06105742B2 (ja) * 1983-11-28 1994-12-21 株式会社日立製作所 真空処理方法及び装置
JPS60141869A (ja) * 1983-12-29 1985-07-26 Nissin Electric Co Ltd 膜形成方法および膜形成装置
JPS61105853A (ja) * 1984-10-30 1986-05-23 Anelva Corp オ−トロ−ダ−
JPS61106768A (ja) * 1984-10-31 1986-05-24 Anelva Corp 基体処理装置
DE3606529A1 (de) 1986-02-28 1987-09-03 Glyco Metall Werke Verfahren zur herstellung von schichtwerkstoff oder schichtwerkstuecken durch aufdampfen mindestens eines metallischen werkstoffes auf ein metallisches substrat
DE3717712A1 (de) * 1987-05-26 1988-12-15 Leybold Ag Vorrichtung zur halterung von werkstuecken
US4904362A (en) 1987-07-24 1990-02-27 Miba Gleitlager Aktiengesellschaft Bar-shaped magnetron or sputter cathode arrangement
AT392291B (de) * 1987-09-01 1991-02-25 Miba Gleitlager Ag Stabfoermige sowie magnetron- bzw. sputterkathodenanordnung, sputterverfahren, und vorrichtung zur durchfuehrung des verfahrens
US4911810A (en) * 1988-06-21 1990-03-27 Brown University Modular sputtering apparatus
JPH07110991B2 (ja) * 1989-10-02 1995-11-29 株式会社日立製作所 プラズマ処理装置およびプラズマ処理方法
SU1751506A1 (ru) * 1990-04-04 1992-07-30 Харьковский авиационный институт им.Н.Е.Жуковского Узел трени скольжени
US5236509A (en) * 1992-02-06 1993-08-17 Spire Corporation Modular ibad apparatus for continuous coating
JP3654597B2 (ja) * 1993-07-15 2005-06-02 株式会社ルネサステクノロジ 製造システムおよび製造方法
US5377816A (en) * 1993-07-15 1995-01-03 Materials Research Corp. Spiral magnetic linear translating mechanism
JP3732250B2 (ja) * 1995-03-30 2006-01-05 キヤノンアネルバ株式会社 インライン式成膜装置
DE19514836C2 (de) * 1995-04-21 2000-06-08 Fraunhofer Ges Forschung Lagerschale
US5958134A (en) * 1995-06-07 1999-09-28 Tokyo Electron Limited Process equipment with simultaneous or sequential deposition and etching capabilities
DE19537092C1 (de) * 1995-10-05 1996-07-11 Ardenne Anlagentech Gmbh Elektronenstrahl-Bedampfungsanlage im Durchlaufbetrieb für thermisch hoch belastete Substrate

Also Published As

Publication number Publication date
CN1177950C (zh) 2004-12-01
JP2001525490A (ja) 2001-12-11
RU2221080C2 (ru) 2004-01-10
CZ293929B6 (cs) 2004-08-18
DE59800874D1 (de) 2001-07-19
ATA912298A (de) 2000-12-15
SK8302000A3 (en) 2001-01-18
AT407995B (de) 2001-07-25
EP1036212A1 (de) 2000-09-20
KR20010032666A (ko) 2001-04-25
PT1036212E (pt) 2001-11-30
KR100532031B1 (ko) 2005-11-29
SK285253B6 (sk) 2006-09-07
DE19753656C1 (de) 1998-12-03
TR200001348T2 (tr) 2000-11-21
ATE202160T1 (de) 2001-06-15
WO1999028523A1 (de) 1999-06-10
US6444086B1 (en) 2002-09-03
BR9814771A (pt) 2000-10-03
PL340722A1 (en) 2001-02-26
CN1279728A (zh) 2001-01-10
CZ20001932A3 (cs) 2000-09-13
EP1036212B1 (de) 2001-06-13
PL187394B1 (pl) 2004-06-30

Similar Documents

Publication Publication Date Title
ES2158704T3 (es) Dispositivo para el recubrimiento a vacio de cojinetes de friccion.
BR9812801A (pt) Método e aparelho para depositar revestimentos pirolìticos sobre uma zona de desvanecimento e uso destes
BR0013294A (pt) Composições de revestimento tendo resistência a arranhamento aperfeiçoada, substratos revestidos e métodos relacionados a eles
CA2225096A1 (en) Method of applying drug-release coatings
KR950007959A (ko) 도장장치
ES2036956B1 (es) Procedimiento y dispositivo de recubrimiento de substratos.
PE43195A1 (es) Cobertura resistente a la corrosion para superficies
CN101535156A (zh) 用于输送要涂漆工件的工件承载架
EP0802250A3 (en) Method for applying a coating material to sheets
TW363075B (en) Fluoride polymer compound painting and coating method thereof
DE2960567D1 (en) Plasma spray coating composition, method of coating articles and articles coated with the composition.
PT1204484E (pt) Processo em etapas multiplas para o revestimento de substratos com um revestimento base liquido e um revestimento de cobertura em po
EP0914873A3 (en) Method for water repellent coating and coating apparatus for the same
EP0364143A3 (en) Method and apparatus for powder coating and masking substrates
EP0202869A3 (en) Apparatus and method for drying and curing coated substrates
ES2159133T3 (es) Procedimiento para el revestimiento de recipientes de vidrio y recipientes de vidrio revestidos.
SE8704589D0 (sv) Release process
EP0372957A3 (en) Process for treating plated steel sheet
WO1991016137A3 (en) Powder coating system
WO1990008599A3 (en) Article coating system
EP0861695A3 (en) Coating method and coating apparatus
ES2181906T3 (es) Instalacion para el acabado de superficies de piezas.
EP2946025A1 (en) Processes and systems for depositing coating systems, and components coated therewith
Hada Present and Future Trends of Coated Steel Sheet for Automotive Use
JPS6144197A (ja) 電着塗装における前処理用乾燥炉

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 1036212

Country of ref document: ES