AU572375B2 - Transporting of workpiece to and from vacuum coating apparatus - Google Patents

Transporting of workpiece to and from vacuum coating apparatus

Info

Publication number
AU572375B2
AU572375B2 AU52537/86A AU5253786A AU572375B2 AU 572375 B2 AU572375 B2 AU 572375B2 AU 52537/86 A AU52537/86 A AU 52537/86A AU 5253786 A AU5253786 A AU 5253786A AU 572375 B2 AU572375 B2 AU 572375B2
Authority
AU
Australia
Prior art keywords
workpiece
transporting
coating apparatus
vacuum coating
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU52537/86A
Other versions
AU5253786A (en
Inventor
Alex Boozenny
Albany D. Grubb
Walter G. Overacker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Messer LLC
Original Assignee
BOC Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Inc filed Critical BOC Group Inc
Publication of AU5253786A publication Critical patent/AU5253786A/en
Application granted granted Critical
Publication of AU572375B2 publication Critical patent/AU572375B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G5/00—Storing fluids in natural or artificial cavities or chambers in the earth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Physical Vapour Deposition (AREA)
AU52537/86A 1985-01-31 1986-01-21 Transporting of workpiece to and from vacuum coating apparatus Ceased AU572375B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69683685A 1985-01-31 1985-01-31
US696836 1985-01-31

Publications (2)

Publication Number Publication Date
AU5253786A AU5253786A (en) 1986-08-28
AU572375B2 true AU572375B2 (en) 1988-05-05

Family

ID=24798750

Family Applications (1)

Application Number Title Priority Date Filing Date
AU52537/86A Ceased AU572375B2 (en) 1985-01-31 1986-01-21 Transporting of workpiece to and from vacuum coating apparatus

Country Status (5)

Country Link
JP (1) JPS61206722A (en)
KR (1) KR950003597B1 (en)
AU (1) AU572375B2 (en)
CA (1) CA1307759C (en)
GB (1) GB2171119B (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4676884A (en) * 1986-07-23 1987-06-30 The Boc Group, Inc. Wafer processing machine with evacuated wafer transporting and storage system
DE3827343A1 (en) * 1988-08-12 1990-02-15 Leybold Ag DEVICE ACCORDING TO THE CAROUSEL PRINCIPLE FOR COATING SUBSTRATES
DE3731444A1 (en) * 1987-09-18 1989-03-30 Leybold Ag DEVICE FOR COATING SUBSTRATES
DE4111384C2 (en) * 1991-04-09 1999-11-04 Leybold Ag Device for coating substrates
US5215420A (en) * 1991-09-20 1993-06-01 Intevac, Inc. Substrate handling and processing system
US5275709A (en) * 1991-11-07 1994-01-04 Leybold Aktiengesellschaft Apparatus for coating substrates, preferably flat, more or less plate-like substrates
DE4303462C2 (en) * 1992-03-30 1994-03-31 Leybold Ag Multi-chamber coating system
DE19500964A1 (en) * 1995-01-14 1996-07-18 Leybold Ag Cathode sputtering appts. for coating flat substrates, esp. optical components
KR100269097B1 (en) * 1996-08-05 2000-12-01 엔도 마코토 Wafer process apparatus
US6053687A (en) * 1997-09-05 2000-04-25 Applied Materials, Inc. Cost effective modular-linear wafer processing
US6235634B1 (en) 1997-10-08 2001-05-22 Applied Komatsu Technology, Inc. Modular substrate processing system
US6000905A (en) * 1998-03-13 1999-12-14 Toro-Lira; Guillermo L. High speed in-vacuum flat panel display handler
US6517303B1 (en) 1998-05-20 2003-02-11 Applied Komatsu Technology, Inc. Substrate transfer shuttle
US6213704B1 (en) * 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Method and apparatus for substrate transfer and processing
US6206176B1 (en) 1998-05-20 2001-03-27 Applied Komatsu Technology, Inc. Substrate transfer shuttle having a magnetic drive
US6217272B1 (en) * 1998-10-01 2001-04-17 Applied Science And Technology, Inc. In-line sputter deposition system
EP1296352A4 (en) 2000-06-27 2007-04-18 Ebara Corp Charged particle beam inspection apparatus and method for fabricating device using that inspection apparatus
US6682288B2 (en) 2000-07-27 2004-01-27 Nexx Systems Packaging, Llc Substrate processing pallet and related substrate processing method and machine
US6821912B2 (en) 2000-07-27 2004-11-23 Nexx Systems Packaging, Llc Substrate processing pallet and related substrate processing method and machine
US6530733B2 (en) 2000-07-27 2003-03-11 Nexx Systems Packaging, Llc Substrate processing pallet and related substrate processing method and machine
EP1339100A1 (en) 2000-12-01 2003-08-27 Ebara Corporation Inspection method and apparatus using electron beam, and device production method using it
ATE412789T1 (en) * 2004-03-31 2008-11-15 Applied Materials Gmbh & Co Kg LOCK ARRANGEMENT FOR A VACUUM TREATMENT SYSTEM AND METHOD FOR OPERATING THE SAME
EP1870487B1 (en) * 2006-06-22 2009-07-29 Applied Materials GmbH & Co. KG Vaccum coating apparatus
EP1956111B1 (en) 2007-02-09 2010-09-08 Applied Materials, Inc. Apparatus with a transport device for processing substrates
EP1973154B1 (en) 2007-03-13 2012-04-25 Applied Materials, Inc. Device for moving a carrier in a vacuum chamber
DE102007058052B4 (en) * 2007-11-30 2013-12-05 Von Ardenne Anlagentechnik Gmbh Vacuum coating system
CN102152031A (en) * 2011-01-26 2011-08-17 阮俊康 Automatic welding production line of lighter
CN111477582A (en) * 2020-05-28 2020-07-31 深圳市捷佳伟创新能源装备股份有限公司 Silicon wafer process cavity, silicon wafer processing equipment and silicon wafer processing method
CN113584453B (en) * 2021-07-22 2023-01-17 深圳天成真空技术有限公司 Magnetic force driven vacuum coating conveying device and conveying method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3945903A (en) * 1974-08-28 1976-03-23 Shatterproof Glass Corporation Sputter-coating of glass sheets or other substrates
GB1594525A (en) * 1977-06-16 1981-07-30 Allen Group Apparatus and methods for automatically transferring articles from a continuously movable conveyor to a work station
US4405435A (en) * 1980-08-27 1983-09-20 Hitachi, Ltd. Apparatus for performing continuous treatment in vacuum

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4047624A (en) * 1975-10-21 1977-09-13 Airco, Inc. Workpiece handling system for vacuum processing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3945903A (en) * 1974-08-28 1976-03-23 Shatterproof Glass Corporation Sputter-coating of glass sheets or other substrates
GB1594525A (en) * 1977-06-16 1981-07-30 Allen Group Apparatus and methods for automatically transferring articles from a continuously movable conveyor to a work station
US4405435A (en) * 1980-08-27 1983-09-20 Hitachi, Ltd. Apparatus for performing continuous treatment in vacuum

Also Published As

Publication number Publication date
GB8601905D0 (en) 1986-03-05
JPS61206722A (en) 1986-09-13
GB2171119B (en) 1989-01-18
GB2171119A (en) 1986-08-20
AU5253786A (en) 1986-08-28
KR950003597B1 (en) 1995-04-14
KR860005739A (en) 1986-08-11
CA1307759C (en) 1992-09-22
JPH0336735B2 (en) 1991-06-03

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