JPS61206722A - Vacuum treater - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method and apparatus for transporting workpieces into and out of a vacuum processing apparatus.

The time required to transport the workpiece into and out of the vacuum system and the time required to pump it to the appropriate pressure are often the limiting factors in the speed at which the workpiece can be processed. This is especially true in high speed deposition methods where the coating time of an individual substrate is sometimes short compared to the time required to sufficiently evacuate the coating chamber.

Coating equipment has been developed in which the workpiece or substrate passes through separate vacuum lock chambers on its way into and out of the coating or processing chamber. In this case, the volume of the lock chamber can be minimized and the treatment can be continued for one substrate after another without bringing the treatment chamber to atmospheric pressure.
In order to increase production rates, U.S. Pat. and a roller conveyor for passing the device.

In these situations, the expense of a complete double-ended device with vacuum lock chambers at both the inlet and outlet of the coating chamber is not justified. An alternative is to provide a single lock chamber and reversible conveyor, allowing workpieces to enter and exit the processing chamber through the lock chamber diameter. Such devices are called single-ended coating devices. U.S. Pat. No. 4,405,435 (Tateishi et al.) discloses a single-ended vacuum coating apparatus that includes a multi-lever workpiece cassette and a lock chamber and a sputter coating chamber between the lock chamber and the sputter coating chamber. Both intermediate rooms have cassette elevators.

q amount per plate! The present invention is a method and apparatus for loading and unloading workpieces into a single-ended vacuum processing apparatus.

The apparatus has a processing chamber and a second chamber, the second chamber housing a workpiece transport device that includes two conveyors supported on a common frame and a workpiece conveyor in both directions through the second chamber. and a frame and a device for aligning each conveyor. The second chamber may be an end-to-end chamber with an exit/exit to the outside, or an intermediate lock or holding chamber between the processing chamber and the end-to-end chamber;
Preferably, the conveyor includes two sets of parallel horizontal rollers and an elevator for selectively aligning each set of rollers with the transfer line to move the workpieces along the transfer line between the end picking chamber and the holding chamber. and transport between the holding chamber and the processing chamber.

Figure 1 shows a single-ended vacuum processing apparatus that includes a processing chamber 10, a holding chamber 16, and a locking chamber 18. Vacuum processing is a coating process in which the workpiece is transported from an inlet buffer 12 past multiple sputter coating sources 11 within the processing chamber and into an overrun buffer 14. Workpieces may be transported back and forth through the processing chamber 10 if desired. The processing area of the device is the first internal gate valve 2
0 from the holding chamber 16 and this gate valve 20
can be opened and closed as desired by actuator 22. The holding chamber 16 and the locking chamber 18 are interconnected by a second internal gate valve 24, which
4 is actuated by an actuator 26. Access to and from the lock chamber 18 from the workpiece unloading area 19 is provided by an external gate valve 28 which can be actuated by an actuator 29. The gate valve and actuator may be of any conventional design suitable for transferring workpieces of desired size and shape. One such gate valve is shown in US Pat. No. 4.065.097 (Timin).

Each of the chambers of the processing apparatus can be evacuated separately by conventional equipment. Lock chamber 18 can be evacuated by a blower or other mechanical pump 32. In the case of sputtering or electron beam heating coating method, holding chamber 1
6 and the processing chamber 1° can preferably be evacuated by means of a diffusion pump 30. Processing chamber 10 may include a source 34 of the desired sputtering gas.

Each chamber of the vacuum processing apparatus is equipped with a conveyor that supports and transports the workpiece. For glass sheets and substrates larger than lWf, each conveyor preferably comprises a series of parallel horizontal rollers 42 mounted on a frame 44 and driven by a reversible motor 46. Preferably, the separate chamber conveyors are aligned to move substrates into and out of the apparatus along transfer line 48.

In the preferred device, the holding chamber 16 is equipped with a vertically moving multi-lever transport device 50, which has two horizontal conveyors 52, 54 mounted one above the other on a common frame 60. As shown in FIGS. 2, 3a and 3b, the frame 60 comprises two parallel upper longitudinal members 62 interconnected by a number of transverse members 63 and an equal number of said transverse members. two parallel longitudinal lower members 64 interconnected by transverse members 65 and aligned directly below the upper member.

When the frame 60 is in its lower position (as shown in FIGS. 2 and 3b), it rests on legs 68, which ensure that the frame is level above the bottom wall 17 of the holding chamber 16. It can be adjusted as necessary to position it. Further legs and cross members may be provided between the side members as required depending on the length of the workpiece transport device.

2, 3a and 3b, upper conveyor 52 of apparatus 50 is aligned with transfer line 48. In FIGS. An elevator is provided to raise frame 60 so that lower conveyor 54 is on the transfer line. As shown, this elevator has four ball screw jacks 70.
These jacks 70 extend outwardly of the chamber 16 through a vacuum seal assembly 71 in the bottom wall 17. Each jack includes a lubricant 75 for lubricating the seal assembly. Alternatively, the elevator may be equipped with hydraulic or pneumatic cylinders.

The vertical movement of the conveying device 50 is achieved by means of four lateral guide wheels 7.
2, two of these wheels are attached to the outer surface of each lower longitudinal member. These wheels are rotated along an upper bar track 73 and a lower bar track 74 provided on both side walls of the chamber 16. Movement of the device 50 is also guided by a longitudinal guide wheel 76 mounted on an axis 77 perpendicular to one of the lower longitudinal members 64.

The wheel 76 rolls between two upper passages 78 and two lower passages 79 provided on one side wall portion 15 of the chamber 16. The upper and lower passages for the guide wheels 72, 76 are aligned so that the device 50 is properly aligned in its raised and lowered positions, respectively.

The support blocks 82 aligned along the side rails 62 include
A number of rollers 80 are rotatably provided (block 82 is omitted from FIG. 2), each roller having two pulleys 84, 85 attached to one end of its shaft 83.

As shown in Figure 3a, the boots of adjacent rollers are interconnected by belts 86 which cause the rollers to rotate simultaneously in the same direction.

Whichever conveyor is in the transfer line, the axis of one roller of that conveyor is connected by a magnetic device 90.92 to a shaft 94 which is connected to the side wall 15.
extending through the rotating seal. This rotating shaft is driven by a reversible motor 95 outside the chamber 16.

FIG. 4 illustrates the method of the invention. Each part of this figure shows a processing chamber 100, a holding chamber 16, and a lock chamber 18. The processing chamber is preferably equipped with an input robot sofa and an overrun buffer. The processing chamber 100 and the holding chamber 16 are interconnected by a first gate valve 20. The processing chamber 16 and the lock chamber 18 are interconnected by a second gate valve 24 . The work piece is moved in and out of the lock chamber 18 by a third gate valve 28. The processing chamber 100 houses a first conveyor 101, and the lock chamber 18 houses a second conveyor 102.

As mentioned above, the holding chamber 16 houses a workpiece transport system 50 having two conveyors on a lower level 52 and an upper level 54 and each conveyor being connected to a workpiece transport system 50 for transport through the vacuum processing equipment. It has an elevator aligned with line 48.

In FIG. 4a, valve 20.24 is closed. One workpiece 110 is undergoing processing in chamber 100 and an unprocessed workpiece 112 is transferred to holding chamber 16 on conveyor 5 at the lower level of the transport device.
Waiting on top of 4. Since valves 20.24 are closed, chamber 16 is evacuated by a loudspeaker pump and the pressure within process chamber 100 is separately set, if desired. The valve 28 is open and the second raw work piece 114 is conveyed from the conveyor 104 in the unloading area onto the conveyor 102 in the lock chamber as shown in 4b.Then the valve 28 is closed and the second raw work piece 114 is conveyed from the conveyor 104 in the unloading area onto the conveyor 102 in the lock chamber. 18 is evacuated using a roughing pump.

Transfer device 5 such that an empty conveyor 52 is in the transfer line
Align 0. When processing of the work piece 110 is completed,
The valve 20 is opened and the work piece 110 is conveyed onto the empty upper conveyor 52. The transport device 50 then moves upwards so that the lower conveyor 54 is located in the transfer line and transports the unprocessed workpiece 112 onto the conveyor 101 within the processing chamber, as shown in FIG. 4C. When the valve 20 is closed, the work piece 11
Process 2 proceeds. The valves 24,28 remain closed and rough pumping of the lock chamber 18 continues.

As shown in FIG. 4d, the valve 24 is opened and the unprocessed piece 1 is opened.
14 into the holding chamber 16 onto the lower conveyor 54 of the device 50. The apparatus 50 is then moved downwardly so that the lower conveyor 52 is aligned with the transfer line as shown in FIG.
4 onto the conveyor 102 in the lock chamber 18. Valve 20 remains closed, so processing of workpiece 112 continues in chamber 100. When the lock chamber J8 is ventilated and the gate valve 28 is opened, the processed work piece 110 is transferred to the lock chamber 1.
8 onto a conveyor 104. Close valves 24.20 and pump action of holding chamber 16 and chamber 1.
Continue processing at 00. The treated workpiece 110 is removed from the conveyor and replaced with an untreated workpiece, and the cycle continues and begins again in FIG. 4a.

The use of the holding chamber reduces the injection of gas into the processing chamber when opening the boolean 1-20, and
Place the workpiece through gate 2 as indicated in Figures a and 4f.
8, allowing pumping of the lock chamber 18. Figures 4b and 4
As indicated in Figure C, processing continues except for the short time required to transport the workpiece between the processing chamber 100 and the holding chamber 16, resulting in efficient utilization of the processing chamber. It will be destroyed.

To explain this in conjunction with FIG. 4, processed pieces are placed on the upper conveyor 52, and unprocessed pieces are placed on the lower conveyor 54. If falling debris is a problem, it is preferable to modify the method so that the treated workpieces are loaded onto the lower conveyor 54 below the untreated workpieces.

Various other modifications may be made to the method and apparatus without departing from the spirit of the invention.

[Brief explanation of the drawing]

FIG. 1 is a schematic side view of a vacuum coating device incorporating the present invention;
FIG. 2 is a partial cross-sectional side view of a holding chamber incorporating a two-level workpiece transfer device according to the invention; FIG. 3a is a plan view of the holding chamber and workpiece transfer device of FIG. 2; FIG. Partial cross-sectional end view of the holding chamber and workpiece conveyance device in Figure 2; 4th
The figure is a schematic diagram of a vacuum processing apparatus comprising a processing chamber, a holding chamber and a vacuum lock chamber, illustrating the method according to the invention. lO...processing chamber, 16...holding chamber, 18...lock chamber, 20.24.28...gate valve, 26.29.
...Actuator, 30...Diffusion pump, 42...
・Roller, 44... Frame, 48... Transfer line, 50... Conveying device, 52.54... Conveyor, 6
0...Frame, 72...Wheel, 80...Roller. There is no change in the contents of the opening) FIG, 1 FIG, 4 Procedural amendment (method) Mr. Michibe Uga, Commissioner of the Patent Office (Shi 1
, Incident Indication 1986 Patent Application No. 17685 2
, Title of the invention Vacuum processing apparatus 3, Relationship to the case of the person making the amendment Applicant name The POC Group, Inc. 4, Agent 6, Subject of amendment All drawings

Claims (1)

[Claims] 1. A first gate valve that interconnects the first chamber and the second chamber; a second gate valve that allows entry and exit into the second chamber; a second workpiece conveyor on the outside; a workpiece transport device in a second chamber comprising a third workpiece conveyor and a fourth workpiece conveyor supported on a common frame; and a second chamber, and between the second chamber and the second conveyor when the second gate valve is open, the frame and each of the third and fourth conveyors are selected. 1. A vacuum processing apparatus comprising: 2. The vacuum processing apparatus according to claim 1, further comprising a third chamber that can be evacuated, and the second gate valve interconnects the second chamber and the third chamber. 3. The vacuum processing apparatus according to claim 1, wherein the third conveyor and the fourth conveyor are parallel. 4. A vacuum processing apparatus according to claim 3, wherein each conveyor comprises a number of parallel, substantially horizontal rollers and means for rotating the rollers simultaneously. 5. The vacuum processing apparatus according to claim 4, wherein the third conveyor and the fourth conveyor are supported above and below each other, and the conveyor alignment device comprises an elevator that moves the frame in a vertical direction. 6. The vacuum processing apparatus according to claim 5, wherein the workpiece conveyance device further includes a wheel provided on the frame for guiding movement of the frame. 7. A method for carrying workpieces into and out of a vacuum processing device, including processing the workpieces; transporting the processed workpieces from a first conveyor in a first chamber to a first level of a multi-lever conveyor in a second chamber; conveying; aligning the second level of the multi-lever conveyor with the first conveyor; conveying the first unprocessed piece from the second level onto the first conveyor and then the first chamber relative to the second chamber; sealing; transporting the second unprocessed workpiece from the second conveyor outside the second chamber to the second level; aligning the first level and the second conveyor; transporting the processed workpiece from the first level to the second level; A method characterized in that the second chamber is sealed. 8. A second conveyor is in a third sealable chamber, and transports each processed workpiece out of the apparatus from the second conveyor; transports each unprocessed workpiece from outside the apparatus into the third chamber; 8. The method of claim 7, further comprising conveying on two conveyors; sealing and evacuating a third chamber.