SG11201908764WA - Mask-integrated surface protective tape with release liner - Google Patents
Mask-integrated surface protective tape with release linerInfo
- Publication number
- SG11201908764WA SG11201908764WA SG11201908764WA SG11201908764WA SG 11201908764W A SG11201908764W A SG 11201908764WA SG 11201908764W A SG11201908764W A SG 11201908764WA SG 11201908764W A SG11201908764W A SG 11201908764WA
- Authority
- SG
- Singapore
- Prior art keywords
- mask
- release liner
- release
- surface protective
- protective tape
- Prior art date
Links
- 230000001681 protective effect Effects 0.000 title abstract 3
- 239000010410 layer Substances 0.000 abstract 4
- 239000000463 material Substances 0.000 abstract 4
- 239000012790 adhesive layer Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/12—Esters of monohydric alcohols or phenols
- C08F220/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
- C08F220/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
- C08F220/1808—C8-(meth)acrylate, e.g. isooctyl (meth)acrylate or 2-ethylhexyl (meth)acrylate
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/40—Adhesives in the form of films or foils characterised by release liners
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3081—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their composition, e.g. multilayer masks, materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/50—Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/79—Apparatus for Tape Automated Bonding [TAB]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/86—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using tape automated bonding [TAB]
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/14—Layer or component removable to expose adhesive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/14—Layer or component removable to expose adhesive
- Y10T428/1476—Release layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2809—Web or sheet containing structurally defined element or component and having an adhesive outermost layer including irradiated or wave energy treated component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2848—Three or more layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
- Y10T428/2878—Adhesive compositions including addition polymer from unsaturated monomer
- Y10T428/2891—Adhesive compositions including addition polymer from unsaturated monomer including addition polymer from alpha-beta unsaturated carboxylic acid [e.g., acrylic acid, methacrylic acid, etc.] Or derivative thereof
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Adhesive Tapes (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017071253A JP6582013B2 (ja) | 2017-03-31 | 2017-03-31 | 剥離ライナー付マスク一体型表面保護テープ |
PCT/JP2018/012764 WO2018181475A1 (ja) | 2017-03-31 | 2018-03-28 | 剥離ライナー付マスク一体型表面保護テープ |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201908764WA true SG11201908764WA (en) | 2019-10-30 |
Family
ID=63676266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201908764W SG11201908764WA (en) | 2017-03-31 | 2018-03-28 | Mask-integrated surface protective tape with release liner |
Country Status (8)
Country | Link |
---|---|
US (1) | US11282736B2 (ja) |
EP (1) | EP3605586A4 (ja) |
JP (1) | JP6582013B2 (ja) |
KR (1) | KR102306372B1 (ja) |
CN (1) | CN110226215B (ja) |
SG (1) | SG11201908764WA (ja) |
TW (1) | TWI686853B (ja) |
WO (1) | WO2018181475A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7475923B2 (ja) | 2020-03-27 | 2024-04-30 | リンテック株式会社 | 半導体装置製造用シート及び半導体装置製造用シートの製造方法。 |
JPWO2023058577A1 (ja) * | 2021-10-05 | 2023-04-13 | ||
JP7323734B1 (ja) * | 2022-01-12 | 2023-08-08 | リンテック株式会社 | 第1保護膜形成用シート、半導体装置の製造方法、及びシートの使用 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6007920A (en) * | 1996-01-22 | 1999-12-28 | Texas Instruments Japan, Ltd. | Wafer dicing/bonding sheet and process for producing semiconductor device |
JP4804625B2 (ja) * | 2000-12-28 | 2011-11-02 | 日東電工株式会社 | 半導体ウエハ加工用保護シートおよび半導体ウエハの加工方法 |
JP3901490B2 (ja) * | 2001-10-23 | 2007-04-04 | 日東電工株式会社 | 剥離ライナー及びそれを用いた感圧性接着テープ又はシート |
WO2005057644A1 (ja) * | 2003-12-15 | 2005-06-23 | The Furukawa Electric Co., Ltd. | ウェハ加工用テープおよびその製造方法 |
JP4776188B2 (ja) * | 2004-08-03 | 2011-09-21 | 古河電気工業株式会社 | 半導体装置製造方法およびウエハ加工用テープ |
TWI333672B (en) * | 2005-03-29 | 2010-11-21 | Furukawa Electric Co Ltd | Wafer-dicing adhesive tape and method of producing chips using the same |
JP4333649B2 (ja) | 2005-07-11 | 2009-09-16 | パナソニック株式会社 | 半導体チップの製造方法 |
TW200935506A (en) * | 2007-11-16 | 2009-08-16 | Panasonic Corp | Plasma dicing apparatus and semiconductor chip manufacturing method |
JP2010263041A (ja) * | 2009-05-01 | 2010-11-18 | Nitto Denko Corp | ダイアタッチフィルム付きダイシングテープおよび半導体装置の製造方法 |
JP5759729B2 (ja) * | 2011-01-20 | 2015-08-05 | 日東電工株式会社 | 半導体部品の表面保護用粘着テープ |
KR101919547B1 (ko) * | 2011-12-26 | 2018-11-16 | 린텍 코포레이션 | 보호막 형성층을 갖는 다이싱 시트 및 칩의 제조 방법 |
JP2014192204A (ja) | 2013-03-26 | 2014-10-06 | Furukawa Electric Co Ltd:The | 半導体ウエハ表面保護用粘着テープ及び半導体ウエハの加工方法 |
PT2980835T (pt) * | 2013-03-27 | 2021-01-27 | Lintec Corp | Folha compósita para formar película protetora |
JP6109220B2 (ja) * | 2015-03-06 | 2017-04-05 | 古河電気工業株式会社 | 半導体ウエハ表面保護用粘着テープ |
JP6738591B2 (ja) * | 2015-03-13 | 2020-08-12 | 古河電気工業株式会社 | 半導体ウェハの処理方法、半導体チップおよび表面保護テープ |
JP6522998B2 (ja) * | 2015-03-13 | 2019-05-29 | 古河電気工業株式会社 | 半導体ウェハの処理方法、半導体チップおよび半導体ウェハ処理用表面保護テープ。 |
KR20170004301A (ko) | 2015-07-02 | 2017-01-11 | 김대엽 | 고분자 폴리에스터 흡음재 패널 및 그 제조 방법 |
JP6500230B2 (ja) * | 2015-09-03 | 2019-04-17 | パナソニックIpマネジメント株式会社 | マスクパターンの形成方法および基板の加工方法ならびに素子チップの製造方法 |
JP6507978B2 (ja) | 2015-10-06 | 2019-05-08 | トヨタ自動車株式会社 | 電池パックの固定構造 |
KR20170122185A (ko) * | 2015-11-09 | 2017-11-03 | 후루카와 덴키 고교 가부시키가이샤 | 반도체 칩의 제조방법 및 이것에 이용하는 마스크 일체형 표면 보호 테이프 |
EP3376527A4 (en) * | 2015-11-09 | 2019-05-08 | Furukawa Electric Co., Ltd. | INTEGRATED MASK SURFACE PROTECTION FILM |
JP6647267B2 (ja) * | 2017-11-09 | 2020-02-14 | 古河電気工業株式会社 | 半導体チップの製造方法 |
-
2017
- 2017-03-31 JP JP2017071253A patent/JP6582013B2/ja active Active
-
2018
- 2018-03-28 WO PCT/JP2018/012764 patent/WO2018181475A1/ja unknown
- 2018-03-28 CN CN201880008728.5A patent/CN110226215B/zh active Active
- 2018-03-28 EP EP18775865.1A patent/EP3605586A4/en active Pending
- 2018-03-28 SG SG11201908764W patent/SG11201908764WA/en unknown
- 2018-03-28 KR KR1020197022149A patent/KR102306372B1/ko active IP Right Grant
- 2018-03-30 TW TW107111134A patent/TWI686853B/zh active
-
2019
- 2019-09-26 US US16/584,422 patent/US11282736B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2018181475A1 (ja) | 2018-10-04 |
CN110226215B (zh) | 2023-09-19 |
EP3605586A4 (en) | 2020-11-18 |
EP3605586A1 (en) | 2020-02-05 |
JP6582013B2 (ja) | 2019-09-25 |
KR20190098247A (ko) | 2019-08-21 |
US20200017728A1 (en) | 2020-01-16 |
CN110226215A (zh) | 2019-09-10 |
TW201842560A (zh) | 2018-12-01 |
JP2018174220A (ja) | 2018-11-08 |
TWI686853B (zh) | 2020-03-01 |
KR102306372B1 (ko) | 2021-09-30 |
US11282736B2 (en) | 2022-03-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
MY192250A (en) | Tape for semiconductor processing | |
SG11201908764WA (en) | Mask-integrated surface protective tape with release liner | |
PH12018500670A1 (en) | Sheet for semiconductor processing | |
SG11201807052WA (en) | Surface protective film | |
PH12017500284A1 (en) | Protective coating-forming sheet and method for manufacturing semiconductor chip provided with protective coating | |
MY196313A (en) | Substrate For Magnetic Disks, and Magnetic Disk | |
CA3023528C (en) | Zoned insulation garment | |
GB2543194A (en) | Thin film coating on mechanical face seals | |
SG11201902647VA (en) | Thin film affixing device | |
PH12018502253B1 (en) | Pressure-sensitive adhesive tape for semiconductor substrate fabrication | |
SG11201910104UA (en) | Temporary protective film for semiconductor sealing molding | |
SG10201403298XA (en) | Lightweight two-sided adhesive tape | |
WO2018110830A3 (ko) | 윈도우 필름, 이의 제조방법 및 이를 포함하는 디스플레이 장치 | |
SG11201908015QA (en) | Non-magnetic substrate for magnetic disk, and magnetic disk | |
MX2018003227A (es) | Producto manufacturado para recubrir superficies y procedimientos relacionados de realizacion y colocacion. | |
MY183013A (en) | Sheet for semiconductor processing | |
TW201612010A (en) | Surface-protective film and optical component attached with the same | |
SG11201808291YA (en) | Semiconductor processing sheet | |
EP4056369A4 (en) | FILM AND SUBSTRATE WITH A SURFACE COVERED THEREWITH | |
SG11201909484UA (en) | Wafer-retaining elastic film of cmp device | |
SG11201908493VA (en) | Pressure-sensitive adhesive tape set and pressure-sensitive adhesive tape for semiconductor element transport | |
MX2018011943A (es) | Parche adhesivo para piel. | |
MX2019001914A (es) | Etiqueta adhesiva y rollo. | |
MY183653A (en) | Masking tape | |
MX2017003910A (es) | Adhesivo sensible a presion. |