SG11201910104UA - Temporary protective film for semiconductor sealing molding - Google Patents

Temporary protective film for semiconductor sealing molding

Info

Publication number
SG11201910104UA
SG11201910104UA SG11201910104UA SG11201910104UA SG 11201910104U A SG11201910104U A SG 11201910104UA SG 11201910104U A SG11201910104U A SG 11201910104UA SG 11201910104U A SG11201910104U A SG 11201910104UA
Authority
SG
Singapore
Prior art keywords
protective film
semiconductor sealing
temporary protective
sealing molding
film
Prior art date
Application number
Inventor
Naoki Tomori
Tomohiro Nagoya
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Publication of SG11201910104UA publication Critical patent/SG11201910104UA/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L23/00—Details of semiconductor or other solid state devices
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    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293—Organic, e.g. plastic
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    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568—Temporary substrate used as encapsulation process aid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B25/00—Layered products comprising a layer of natural or synthetic rubber
    • B32B25/04—Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B25/08—Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
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    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/34—Layered products comprising a layer of synthetic resin comprising polyamides
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
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    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
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    • H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
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    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Adhesive Tapes (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Laminated Bodies (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

Disclosed is a temporary protective film for semiconductor sealing molding including a support film 1; and an adhesive layer 2 provided on the support film 1 and containing an acrylic rubber. A 5 solid shear modulus at 200°C of the temporary protective film for semiconductor sealing molding 10 may be 5.0 M:Pa or higher. 45
SG11201910104U 2017-05-10 2018-01-25 Temporary protective film for semiconductor sealing molding SG11201910104UA (en)

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JP2017094157 2017-05-10
PCT/JP2018/002313 WO2018207408A1 (en) 2017-05-10 2018-01-25 Temporary protective film for semiconductor sealing molding

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JP (1) JP7143845B2 (en)
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JP6747621B2 (en) * 2018-03-12 2020-08-26 日立化成株式会社 Method for manufacturing temporary protective film for semiconductor encapsulation molding, lead frame with temporary protective film, encapsulation molded article with temporary protective film, and semiconductor device
KR20220022113A (en) * 2019-06-19 2022-02-24 쇼와덴코머티리얼즈가부시끼가이샤 Temporary protective film for semiconductor encapsulation molding, lead frame with temporary protective film, encapsulation molded article with temporary protective film, and method for manufacturing semiconductor device
JP6744004B1 (en) * 2019-09-17 2020-08-19 日立化成株式会社 Method of manufacturing temporary protective film, reel body, package, package, temporary protective body, and semiconductor device
US20230178385A1 (en) * 2020-04-06 2023-06-08 Showa Denko Materials Co., Ltd. Temporary protection film for semiconductor encapsulation, production method therefor, lead frame with temporary protection film, temporarily protected encapsulation object, and method for producing semiconductor package
US20230174828A1 (en) * 2020-04-06 2023-06-08 Showa Denko Materials Co., Ltd. Temporary protective film for semiconductor encapsulation molding, lead frame provided with temporary protective film, encapsulation molded body, and method for manufacturing semiconductor package
JP7447647B2 (en) * 2020-04-06 2024-03-12 株式会社レゾナック Temporary protective film for semiconductor encapsulation molding and its manufacturing method, lead frame with temporary protective film, encapsulating molded body, and method for manufacturing a semiconductor package
KR20220094011A (en) * 2020-12-28 2022-07-05 (주)이녹스첨단소재 Mask sheet for qfn semiconductor package

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ATE316560T1 (en) * 1999-06-18 2006-02-15 Hitachi Chemical Co Ltd ADHESIVE, ADHESIVE ARTICLE, CIRCUIT SUBSTRATE FOR SEMICONDUCTOR MOUNTING HAVING AN ADHESIVE AND A SEMICONDUCTOR ASSEMBLY CONTAINING THE SAME
JP3501692B2 (en) 1999-07-15 2004-03-02 Ｎｅｃアクセステクニカ株式会社 Battery pack lock structure, battery pack removing method, and mobile terminal
US6700185B1 (en) 1999-11-10 2004-03-02 Hitachi Chemical Co., Ltd. Adhesive film for semiconductor, lead frame and semiconductor device using the same, and method for manufacturing semiconductor device
JP2003086614A (en) 2001-09-12 2003-03-20 Hitachi Chem Co Ltd Method of manufacturing semiconductor device, semiconductor bonding/peeling film, lead frame using the same semiconductor device
JP2005116919A (en) 2003-10-10 2005-04-28 Nitto Denko Corp Method for manufacturing semiconductor device and adhesive tape or sheet for manufacturing semiconductor device
JP4343943B2 (en) * 2006-11-24 2009-10-14 日東電工株式会社 Heat-resistant adhesive tape for semiconductor device manufacturing
JP2009044010A (en) 2007-08-09 2009-02-26 Nitto Denko Corp Manufacturing method of semiconductor device
JP2011224853A (en) * 2010-04-19 2011-11-10 Nitto Denko Corp Film, and adhesive/bonding sheet
US9048222B2 (en) * 2013-03-06 2015-06-02 Taiwan Semiconductor Manufacturing Company, Ltd. Method of fabricating interconnect structure for package-on-package devices

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JPWO2018207408A1 (en) 2020-03-19
US11195728B2 (en) 2021-12-07
MY193912A (en) 2022-11-01
PH12019502491A1 (en) 2020-07-13
TWI793101B (en) 2023-02-21
US20200118841A1 (en) 2020-04-16
JP7143845B2 (en) 2022-09-29
KR20200006966A (en) 2020-01-21
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CN110603624A (en) 2019-12-20
WO2018207408A1 (en) 2018-11-15

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