SG106569A1 - Pressure sensitive adhesive sheet for use in semiconductor wafer working - Google Patents

Pressure sensitive adhesive sheet for use in semiconductor wafer working

Info

Publication number
SG106569A1
SG106569A1 SG9905481A SG1999005481A SG106569A1 SG 106569 A1 SG106569 A1 SG 106569A1 SG 9905481 A SG9905481 A SG 9905481A SG 1999005481 A SG1999005481 A SG 1999005481A SG 106569 A1 SG106569 A1 SG 106569A1
Authority
SG
Singapore
Prior art keywords
sensitive adhesive
semiconductor wafer
adhesive sheet
pressure sensitive
wafer working
Prior art date
Application number
SG9905481A
Other languages
English (en)
Inventor
Kondo Takeshi
Takahashi Kazuhiro
Mineura Yoshihisa
Original Assignee
Linted Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=18072811&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SG106569(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Linted Corp filed Critical Linted Corp
Publication of SG106569A1 publication Critical patent/SG106569A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22—Plastics; Metallised plastics
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38—Pressure-sensitive adhesives [PSA]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00—Additional features of adhesives in the form of films or foils
    • C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
    • C09J2301/302—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive being pressure-sensitive, i.e. tacky at temperatures inferior to 30°C
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2433/00—Presence of (meth)acrylic polymer
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2433/00—Presence of (meth)acrylic polymer
    • C09J2433/006—Presence of (meth)acrylic polymer in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2475/00—Presence of polyurethane
    • C09J2475/006—Presence of polyurethane in the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Dicing (AREA)
SG9905481A 1998-11-06 1999-11-05 Pressure sensitive adhesive sheet for use in semiconductor wafer working SG106569A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31605998A JP3383227B2 (ja) 1998-11-06 1998-11-06 半導体ウエハの裏面研削方法

Publications (1)

Publication Number Publication Date
SG106569A1 true SG106569A1 (en) 2004-10-29

Family

ID=18072811

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9905481A SG106569A1 (en) 1998-11-06 1999-11-05 Pressure sensitive adhesive sheet for use in semiconductor wafer working

Country Status (7)

Country Link
EP (1) EP0999250B1 (fr)
JP (1) JP3383227B2 (fr)
KR (1) KR100824870B1 (fr)
CN (1) CN1255522A (fr)
DE (1) DE69915978T2 (fr)
SG (1) SG106569A1 (fr)
TW (1) TW429461B (fr)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4230080B2 (ja) * 2000-02-18 2009-02-25 リンテック株式会社 ウエハ貼着用粘着シート
JP4597323B2 (ja) * 2000-07-07 2010-12-15 リンテック株式会社 紫外線硬化型粘着剤組成物および紫外線硬化性粘着シート
US6759121B2 (en) * 2000-07-13 2004-07-06 3M Innovative Properties Company Clear adhesive sheet
JP4707809B2 (ja) * 2000-09-01 2011-06-22 日本合成化学工業株式会社 再剥離型粘着剤組成物
JP2002141306A (ja) * 2000-11-02 2002-05-17 Lintec Corp ダイシングシート
JP2002203828A (ja) * 2000-12-28 2002-07-19 Lintec Corp ウエハの裏面研削方法
JP2002203827A (ja) * 2000-12-28 2002-07-19 Lintec Corp 半導体ウエハの裏面研削方法
JP2002220571A (ja) * 2001-01-24 2002-08-09 Nitto Denko Corp 半導体ウエハ加工用保護シート
JP3945565B2 (ja) * 2001-10-26 2007-07-18 リンテック株式会社 半導体ウエハの加工方法
JP2003147300A (ja) * 2001-11-12 2003-05-21 Lintec Corp ウエハ裏面研削時の表面保護シートおよび半導体チップの製造方法
TW578222B (en) 2002-01-11 2004-03-01 Mitsui Chemicals Inc Semiconductor wafer surface protective adhesive tape and backside process method of semiconductor wafer using the same
JP4565804B2 (ja) 2002-06-03 2010-10-20 スリーエム イノベイティブ プロパティズ カンパニー 被研削基材を含む積層体、その製造方法並びに積層体を用いた極薄基材の製造方法及びそのための装置
US7534498B2 (en) 2002-06-03 2009-05-19 3M Innovative Properties Company Laminate body, method, and apparatus for manufacturing ultrathin substrate using the laminate body
JP2009135509A (ja) * 2002-08-28 2009-06-18 Lintec Corp 半導体ウエハの保護構造、半導体ウエハの保護方法、これらに用いる積層保護シートおよび半導体ウエハの加工方法
JP4307825B2 (ja) * 2002-08-28 2009-08-05 リンテック株式会社 半導体ウエハの保護構造、半導体ウエハの保護方法、これらに用いる積層保護シートおよび半導体ウエハの加工方法
US6921719B2 (en) * 2002-10-31 2005-07-26 Strasbaugh, A California Corporation Method of preparing whole semiconductor wafer for analysis
TWI310230B (en) * 2003-01-22 2009-05-21 Lintec Corp Adhesive sheet, method for protecting surface of semiconductor wafer and method for processing work
JP4707936B2 (ja) * 2003-02-24 2011-06-22 三井化学株式会社 半導体ウエハの表面保護用粘着フィルム、及び該粘着フィルムを用いる半導体ウエハの保護方法
JP4841802B2 (ja) * 2003-05-02 2011-12-21 リンテック株式会社 粘着シートおよびその使用方法
JP2005150235A (ja) 2003-11-12 2005-06-09 Three M Innovative Properties Co 半導体表面保護シート及び方法
JP4405246B2 (ja) 2003-11-27 2010-01-27 スリーエム イノベイティブ プロパティズ カンパニー 半導体チップの製造方法
JP2005272498A (ja) * 2004-03-23 2005-10-06 Jsr Corp 液状硬化性樹脂組成物
DE102004058456A1 (de) * 2004-12-03 2006-06-08 Disco Hi-Tec Europe Gmbh Verfahren zur Formkorrektur eines mit einer Schicht und/oder einer Klebefolie versehenen, dünngeschliffenen Wafers
JP4592535B2 (ja) 2005-02-23 2010-12-01 日東電工株式会社 多層シートとその製造方法及びこの多層シートを用いた粘着シート
JP4721834B2 (ja) 2005-09-06 2011-07-13 日東電工株式会社 粘着シート及びこの粘着シートを用いた製品の加工方法
JP2007070432A (ja) 2005-09-06 2007-03-22 Nitto Denko Corp 粘着シート及びこの粘着シートを用いた製品の加工方法
JP2008047558A (ja) * 2006-08-10 2008-02-28 Nitto Denko Corp 反り抑制ウエハ研削用粘着シート
US8282754B2 (en) 2007-04-05 2012-10-09 Avery Dennison Corporation Pressure sensitive shrink label
CN101679818A (zh) 2007-04-05 2010-03-24 艾利丹尼森公司 压敏收缩标签
JP5379377B2 (ja) * 2007-12-10 2013-12-25 リンテック株式会社 表面保護用シートおよび半導体ウエハの研削方法
JP6176432B2 (ja) * 2008-04-21 2017-08-09 エルジー・ケム・リミテッド 粘着フィルム及びこれを使用したバックグラインディング方法
JP5504412B2 (ja) * 2008-05-09 2014-05-28 株式会社ディスコ ウェーハの製造方法及び製造装置、並びに硬化性樹脂組成物
JP2010050321A (ja) * 2008-08-22 2010-03-04 Nitto Denko Corp 半導体ウエハ保護用粘着シートの貼り合わせ方法
JP5491049B2 (ja) 2009-03-11 2014-05-14 日東電工株式会社 半導体ウエハ保護用基材レス粘着シート、その粘着シートを用いた半導体ウエハ裏面研削方法及びその粘着シートの製造方法
CN102421830A (zh) * 2009-05-13 2012-04-18 日东电工株式会社 复合薄膜及其制造方法
JP2011023396A (ja) * 2009-07-13 2011-02-03 Nitto Denko Corp 表面保護シート
JP5313837B2 (ja) * 2009-10-23 2013-10-09 日東電工株式会社 再剥離性粘着シート
KR20120116008A (ko) 2010-01-28 2012-10-19 애버리 데니슨 코포레이션 라벨 부착기 벨트 시스템
DE102010028184A1 (de) * 2010-04-26 2011-10-27 Tesa Se Doppelseitig selbstklebende Produkte mit hoher optischer Qualtität
JP2012054432A (ja) * 2010-09-01 2012-03-15 Nitto Denko Corp 半導体ウエハ保護用粘着シート
JP5572487B2 (ja) * 2010-09-01 2014-08-13 日東電工株式会社 粘弾性体及びその製造方法
JP2012054431A (ja) * 2010-09-01 2012-03-15 Nitto Denko Corp 半導体ウエハ保護用粘着シート
CN107611065B (zh) * 2010-11-15 2021-02-26 应用材料公司 附着材料和半导体腔室部件
JP5951207B2 (ja) * 2011-09-14 2016-07-13 リンテック株式会社 ダイシング・ダイボンディングシート
JP5785489B2 (ja) * 2011-12-27 2015-09-30 旭化成イーマテリアルズ株式会社 ペリクル
CN103254815A (zh) * 2012-02-15 2013-08-21 日东电工株式会社 表面保护片
JP6035325B2 (ja) * 2012-03-23 2016-11-30 リンテック株式会社 ワーク加工用シート基材およびワーク加工用シート
JP5480415B1 (ja) * 2012-10-11 2014-04-23 古河電気工業株式会社 半導体ウェハ加工用粘着テープ
WO2015076127A1 (fr) * 2013-11-22 2015-05-28 リンテック株式会社 Film de base de feuille de découpage en dés et procédé de fabrication de film de base
JP2015185691A (ja) * 2014-03-24 2015-10-22 古河電気工業株式会社 半導体ウェハ加工用粘着テープ、該粘着テープの製造方法および半導体ウェハの加工方法
JP5697061B1 (ja) * 2014-03-24 2015-04-08 古河電気工業株式会社 半導体ウェハ加工用粘着テープおよび半導体ウェハの加工方法
US10224230B2 (en) 2014-10-23 2019-03-05 Lintec Corporation Surface protective sheet
JP6623639B2 (ja) * 2015-09-18 2019-12-25 住友ベークライト株式会社 仮固定用テープ
JP7041475B2 (ja) * 2017-07-04 2022-03-24 日東電工株式会社 ダイシングテープ、ダイシングダイボンドフィルム、及び半導体装置の製造方法

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Publication number Priority date Publication date Assignee Title
JPS62127376A (ja) * 1985-11-27 1987-06-09 Nitto Electric Ind Co Ltd 表面保護フイルム
JPH0745557A (ja) * 1993-07-27 1995-02-14 Lintec Corp ウェハ貼着用粘着シート
EP0798355A2 (fr) * 1996-03-15 1997-10-01 LINTEC Corporation Matériau de base pour ruban adhésif

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JP2701020B2 (ja) * 1995-10-11 1998-01-21 関西ペイント株式会社 自動車塗膜保護用シート
JPH09221639A (ja) * 1996-02-19 1997-08-26 Sekisui Chem Co Ltd 難燃性粘着フィルムおよびテープ
JP4256481B2 (ja) * 1997-02-14 2009-04-22 リンテック株式会社 粘着剤組成物およびその利用方法

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JPS62127376A (ja) * 1985-11-27 1987-06-09 Nitto Electric Ind Co Ltd 表面保護フイルム
JPH0745557A (ja) * 1993-07-27 1995-02-14 Lintec Corp ウェハ貼着用粘着シート
EP0798355A2 (fr) * 1996-03-15 1997-10-01 LINTEC Corporation Matériau de base pour ruban adhésif

Also Published As

Publication number Publication date
JP3383227B2 (ja) 2003-03-04
KR20000035230A (ko) 2000-06-26
DE69915978D1 (de) 2004-05-06
KR100824870B1 (ko) 2008-04-23
EP0999250B1 (fr) 2004-03-31
JP2000150432A (ja) 2000-05-30
CN1255522A (zh) 2000-06-07
EP0999250A3 (fr) 2000-10-04
TW429461B (en) 2001-04-11
EP0999250A2 (fr) 2000-05-10
DE69915978T2 (de) 2005-01-20

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