DE69832311D1 - Drucksensitive Klebmittel zum Rückseitenpolieren von Siliziumscheiben - Google Patents

Drucksensitive Klebmittel zum Rückseitenpolieren von Siliziumscheiben

Info

Publication number
DE69832311D1
DE69832311D1 DE69832311T DE69832311T DE69832311D1 DE 69832311 D1 DE69832311 D1 DE 69832311D1 DE 69832311 T DE69832311 T DE 69832311T DE 69832311 T DE69832311 T DE 69832311T DE 69832311 D1 DE69832311 D1 DE 69832311D1
Authority
DE
Germany
Prior art keywords
pressure
silicon wafers
sensitive adhesives
polishing silicon
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69832311T
Other languages
English (en)
Other versions
DE69832311T2 (de
Inventor
Kiichiro Kato
Takeshi Kondoh
Kazuhiro Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lintec Corp
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Publication of DE69832311D1 publication Critical patent/DE69832311D1/de
Application granted granted Critical
Publication of DE69832311T2 publication Critical patent/DE69832311T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04—Homopolymers or copolymers of esters
    • C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C09J133/062—Copolymers with monomers not covered by C09J133/06
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02—Non-macromolecular additives
    • C09J11/06—Non-macromolecular additives organic
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04—Homopolymers or copolymers of esters
    • C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C09J133/062—Copolymers with monomers not covered by C09J133/06
    • C09J133/064—Copolymers with monomers not covered by C09J133/06 containing anhydride, COOH or COOM groups, with M being metal or onium-cation
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2666/00—Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
    • C08L2666/02—Organic macromolecular compounds, natural resins, waxes or and bituminous materials
    • C08L2666/14—Macromolecular compounds according to C08L59/00 - C08L87/00; Derivatives thereof
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
    • C08L61/20—Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31855—Of addition polymer from unsaturated monomers
DE1998632311 1997-02-14 1998-02-13 Drucksensitive Klebmittel zum Rückseitenpolieren von Siliziumscheiben Expired - Lifetime DE69832311T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP03017297A JP4256481B2 (ja) 1997-02-14 1997-02-14 粘着剤組成物およびその利用方法
JP3017297 1997-02-14

Publications (2)

Publication Number Publication Date
DE69832311D1 true DE69832311D1 (de) 2005-12-22
DE69832311T2 DE69832311T2 (de) 2006-06-08

Family

ID=12296342

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1998632311 Expired - Lifetime DE69832311T2 (de) 1997-02-14 1998-02-13 Drucksensitive Klebmittel zum Rückseitenpolieren von Siliziumscheiben

Country Status (9)

Country Link
US (2) US6180742B1 (de)
EP (1) EP0859403B9 (de)
JP (1) JP4256481B2 (de)
KR (1) KR100568039B1 (de)
CN (1) CN1098902C (de)
DE (1) DE69832311T2 (de)
HK (1) HK1014975A1 (de)
SG (1) SG66431A1 (de)
TW (1) TW498100B (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4053656B2 (ja) * 1998-05-22 2008-02-27 リンテック株式会社 エネルギー線硬化型親水性粘着剤組成物およびその利用方法
JP3383227B2 (ja) * 1998-11-06 2003-03-04 リンテック株式会社 半導体ウエハの裏面研削方法
KR20020015891A (ko) * 2000-08-23 2002-03-02 강정희 점착제 제조방법
JP4404468B2 (ja) * 2000-09-29 2010-01-27 テルモ株式会社 血液フィルターおよびその製造方法
JP4716604B2 (ja) * 2001-05-30 2011-07-06 日東電工株式会社 強接着性粘着剤組成物及び強接着用粘着シート
JP4716603B2 (ja) * 2001-05-30 2011-07-06 日東電工株式会社 再剥離性粘着剤組成物及び再剥離用粘着シート
JP2003003132A (ja) * 2001-06-19 2003-01-08 Lintec Corp 粘着シートおよび貼着体
JP2003013014A (ja) * 2001-06-27 2003-01-15 Lintec Corp 粘着シートおよび貼着体
DE10256515A1 (de) * 2002-12-04 2004-07-29 Tesa Ag Antistatisches Haftklebeband
JP2004300231A (ja) * 2003-03-31 2004-10-28 Nitto Denko Corp 熱剥離性両面粘着シート、被着体の加工方法および電子部品
KR100694445B1 (ko) * 2004-08-24 2007-03-12 주식회사 엘지화학 대전 방지 성능을 갖는 아크릴계 점착제 조성물
US20060188714A1 (en) * 2005-02-24 2006-08-24 Lintec Corporation Adhesive sheet
JP4800778B2 (ja) * 2005-05-16 2011-10-26 日東電工株式会社 ダイシング用粘着シート及びそれを用いた被加工物の加工方法
JP4970863B2 (ja) * 2006-07-13 2012-07-11 日東電工株式会社 被加工物の加工方法
WO2008143010A1 (ja) * 2007-05-11 2008-11-27 The Nippon Synthetic Chemical Industry Co., Ltd. 粘着剤、粘着シートおよび粘着シートの製造方法、活性エネルギー線硬化用樹脂組成物
JP5010416B2 (ja) * 2007-09-28 2012-08-29 富士フイルム株式会社 成膜装置および成膜方法
WO2010050527A1 (ja) * 2008-10-31 2010-05-06 日本合成化学工業株式会社 光学部材用粘着剤、それを用いて得られる粘着剤層付き光学部材、および活性エネルギー線および／または熱硬化型光学部材用粘着剤組成物
JP5443917B2 (ja) * 2009-09-18 2014-03-19 日東電工株式会社 絶縁テープ
JP5351127B2 (ja) * 2009-12-07 2013-11-27 ダウ・ヨーロッパ・ゲーエムベーハー 架橋性ラテックス
JP5554735B2 (ja) * 2010-08-24 2014-07-23 綜研化学株式会社 偏光板用粘着剤およびこれを利用した粘着剤付偏光板
KR101522231B1 (ko) * 2011-09-20 2015-05-21 디아이씨 가부시끼가이샤 금속면 첩부용 점착 시트
JP5376345B2 (ja) * 2011-10-11 2013-12-25 綜研化学株式会社 光重合性粘着剤組成物及びこれを使用した粘着シート
JP5376346B2 (ja) * 2011-10-18 2013-12-25 綜研化学株式会社 光重合性粘着剤組成物及びこれを利用した粘着シート
SG11201708789VA (en) * 2015-04-29 2017-11-29 3M Innovative Properties Co Swellable film forming compositions and methods of nanoimprint lithography employing same
JP6921571B2 (ja) * 2017-03-23 2021-08-18 綜研化学株式会社 粘着剤組成物および粘着シート
CN107446516B (zh) * 2017-09-01 2020-10-23 安徽明讯新材料科技股份有限公司 一种基材可回收的保护膜及其制备方法
CN107488417A (zh) * 2017-09-08 2017-12-19 安徽明讯新材料科技股份有限公司 基材可回收型触控屏用水溶胶光学保护膜及其制作方法
CN107556936A (zh) * 2017-09-08 2018-01-09 安徽明讯新材料科技股份有限公司 一种用于触控玻璃屏的环境友好型保护膜及其制作方法
JP6647267B2 (ja) 2017-11-09 2020-02-14 古河電気工業株式会社 半導体チップの製造方法
DE102019220303A1 (de) * 2019-12-19 2021-06-24 Tesa Se Haftklebmasse für Papierverklebungen
JP2021123602A (ja) * 2020-01-31 2021-08-30 リンテック株式会社 粘着シート
CN112391131B (zh) * 2020-11-16 2022-10-28 中山市皇冠胶粘制品有限公司 环保水溶性丙烯酸酯压敏胶、胶粘带及其制备方法和应用
WO2023120049A1 (ja) * 2021-12-24 2023-06-29 株式会社レゾナック 粘着剤組成物、マスキングテープ、表面保護方法、及び共重合体分散液

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0811788B2 (ja) 1985-10-30 1996-02-07 日東電工株式会社 半導体ウエハの保護部材
DE3787680T2 (de) 1986-07-09 1994-03-10 Lintec Corp Klebestreifen zum Kleben von Plättchen.
KR930006846A (ko) 1991-09-02 1993-04-22 사와무라 하루오 반도체 웨이퍼의 이면 연삭방법 및 그 방법에 이용하는 점착 테이프
JPH05198542A (ja) * 1991-09-02 1993-08-06 Mitsui Toatsu Chem Inc 半導体ウエハの裏面研削方法および該方法に用いる粘着テープ
JP3292528B2 (ja) * 1992-12-21 2002-06-17 綜研化学株式会社 アルカリ可溶性粘着剤組成物
US5508107A (en) 1993-07-28 1996-04-16 Minnesota Mining And Manufacturing Company Pressure-sensitive adhesive tapes for electronics applications
JPH07173445A (ja) * 1993-10-29 1995-07-11 Nitto Denko Corp 水膨潤性の感圧接着剤組成物
JPH0936069A (ja) * 1995-07-17 1997-02-07 Mitsui Toatsu Chem Inc 半導体ウエハ裏面研削用粘着フィルム

Also Published As

Publication number Publication date
JP4256481B2 (ja) 2009-04-22
KR19980071367A (ko) 1998-10-26
CN1190665A (zh) 1998-08-19
EP0859403B9 (de) 2006-03-22
HK1014975A1 (en) 1999-10-08
US6255423B1 (en) 2001-07-03
JPH10226776A (ja) 1998-08-25
DE69832311T2 (de) 2006-06-08
SG66431A1 (en) 1999-07-20
US6180742B1 (en) 2001-01-30
EP0859403B1 (de) 2005-11-16
EP0859403A1 (de) 1998-08-19
KR100568039B1 (ko) 2006-06-23
CN1098902C (zh) 2003-01-15
TW498100B (en) 2002-08-11

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