SE9403218D0 - Metod och komponent gasdetektion - Google Patents
Metod och komponent gasdetektionInfo
- Publication number
- SE9403218D0 SE9403218D0 SE9403218A SE9403218A SE9403218D0 SE 9403218 D0 SE9403218 D0 SE 9403218D0 SE 9403218 A SE9403218 A SE 9403218A SE 9403218 A SE9403218 A SE 9403218A SE 9403218 D0 SE9403218 D0 SE 9403218D0
- Authority
- SE
- Sweden
- Prior art keywords
- gas sensing
- layer
- pct
- sensing device
- intermediate layer
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000001514 detection method Methods 0.000 title 1
- 230000003197 catalytic effect Effects 0.000 abstract 3
- 239000012212 insulator Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000002485 combustion reaction Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/005—H2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
- G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Molecular Biology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9403218A SE503265C2 (sv) | 1994-09-23 | 1994-09-23 | Förfarande och anordning för gasdetektion |
JP51082396A JP3744539B2 (ja) | 1994-09-23 | 1995-09-22 | ガス検知の方法および装置 |
AU36235/95A AU3623595A (en) | 1994-09-23 | 1995-09-22 | Method and device for gas sensing |
PCT/SE1995/001084 WO1996009534A1 (en) | 1994-09-23 | 1995-09-22 | Method and device for gas sensing |
US08/809,905 US6109094A (en) | 1994-09-23 | 1995-09-22 | Method and device for gas sensing |
EP95933689A EP0783686A1 (en) | 1994-09-23 | 1995-09-22 | Method and device for gas sensing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9403218A SE503265C2 (sv) | 1994-09-23 | 1994-09-23 | Förfarande och anordning för gasdetektion |
Publications (3)
Publication Number | Publication Date |
---|---|
SE9403218D0 true SE9403218D0 (sv) | 1994-09-23 |
SE9403218L SE9403218L (sv) | 1996-03-24 |
SE503265C2 SE503265C2 (sv) | 1996-04-29 |
Family
ID=20395360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9403218A SE503265C2 (sv) | 1994-09-23 | 1994-09-23 | Förfarande och anordning för gasdetektion |
Country Status (6)
Country | Link |
---|---|
US (1) | US6109094A (sv) |
EP (1) | EP0783686A1 (sv) |
JP (1) | JP3744539B2 (sv) |
AU (1) | AU3623595A (sv) |
SE (1) | SE503265C2 (sv) |
WO (1) | WO1996009534A1 (sv) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL119514A0 (en) * | 1996-10-29 | 1997-01-10 | Yeda Res & Dev | Molecular controlled semiconductor resistor (MOCSER) as a light and chemical sensor |
DE19708166C2 (de) * | 1997-02-28 | 1999-08-12 | Forschungszentrum Juelich Gmbh | Sensoranordnung zum Nachweis von Substanzen in einem Probenanalyten |
SE9703754L (sv) | 1997-10-12 | 1998-09-07 | Mecel Ab | Sensor och förfarande för reglering av bränsle-luft blandning till en flercylindrig förbränningsmotor |
US6298710B1 (en) | 1998-02-20 | 2001-10-09 | Ford Global Technologies, Inc. | Combustible gas diode sensor |
SE514042C2 (sv) * | 1998-05-08 | 2000-12-18 | Nordic Sensor Technologies Ab | Sensoranordning |
US6027954A (en) * | 1998-05-29 | 2000-02-22 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Gas sensing diode and method of manufacturing |
US6596236B2 (en) | 1999-01-15 | 2003-07-22 | Advanced Technology Materials, Inc. | Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same |
SE523918C2 (sv) | 1999-01-25 | 2004-06-01 | Appliedsensor Sweden Ab | Förfarande för framställning av integrerade sensorgrupper på ett gemensamt substrat samt en mask för användning vid förfarandet |
SE9901440A0 (en) * | 1999-04-22 | 2000-10-23 | Ind Mikroelektronik Centrum Ab | A field effect transistor of SiC for high temperature application, use of such a transistor and a method for production thereof |
EP1052501A1 (en) * | 1999-05-11 | 2000-11-15 | Ford Global Technologies, Inc. | A combustible gas diode sensor |
WO2001069228A2 (en) * | 2000-03-17 | 2001-09-20 | Wayne State University | Mis hydrogen sensors |
US6330516B1 (en) * | 2000-03-27 | 2001-12-11 | Power Distribution, Inc. | Branch circuit monitor |
JP2002122560A (ja) * | 2000-08-10 | 2002-04-26 | Ngk Spark Plug Co Ltd | ガスセンサ |
US7254986B2 (en) * | 2002-12-13 | 2007-08-14 | General Electric Company | Sensor device for detection of dissolved hydrocarbon gases in oil filled high-voltage electrical equipment |
US6763699B1 (en) | 2003-02-06 | 2004-07-20 | The United States Of America As Represented By The Administrator Of Natural Aeronautics And Space Administration | Gas sensors using SiC semiconductors and method of fabrication thereof |
DE10346071A1 (de) * | 2003-10-04 | 2005-04-28 | Daimler Chrysler Ag | Abgassensor und sensorbasiertes Abgasreinigungsverfahren |
GB0323802D0 (en) * | 2003-10-10 | 2003-11-12 | Univ Cambridge Tech | Detection of molecular interactions using a metal-insulator-semiconductor diode structure |
US7053425B2 (en) * | 2003-11-12 | 2006-05-30 | General Electric Company | Gas sensor device |
DE102004034192A1 (de) * | 2004-07-14 | 2006-02-09 | Heraeus Sensor Technology Gmbh | Hochtemperaturstabiler Sensor |
US7453267B2 (en) * | 2005-01-14 | 2008-11-18 | Power Measurement Ltd. | Branch circuit monitor system |
US20090163384A1 (en) * | 2007-12-22 | 2009-06-25 | Lucent Technologies, Inc. | Detection apparatus for biological materials and methods of making and using the same |
US20060270053A1 (en) * | 2005-05-26 | 2006-11-30 | General Electric Company | Apparatus, methods, and systems having gas sensor with catalytic gate and variable bias |
ATE380341T1 (de) * | 2005-09-21 | 2007-12-15 | Adixen Sensistor Ab | Wasserstoffgassensitiver halbleitersensor |
US7389675B1 (en) | 2006-05-12 | 2008-06-24 | The United States Of America As Represented By The National Aeronautics And Space Administration | Miniaturized metal (metal alloy)/ PdOx/SiC hydrogen and hydrocarbon gas sensors |
US20080302672A1 (en) * | 2007-06-05 | 2008-12-11 | General Electric Company | Systems and methods for sensing |
DE102009029621A1 (de) * | 2009-09-21 | 2011-03-24 | Robert Bosch Gmbh | Detektionsvorrichtung und Verfahren zur Detektion eines Gases |
KR101495627B1 (ko) * | 2013-02-26 | 2015-02-25 | 서울대학교산학협력단 | 수평형 플로팅 게이트를 갖는 3차원 핀펫형 가스 감지소자 |
JP6806100B2 (ja) * | 2018-01-31 | 2021-01-06 | 日立金属株式会社 | ガスセンサ |
JP7290243B2 (ja) * | 2019-03-29 | 2023-06-13 | Tianma Japan株式会社 | ガス検知装置 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5010678B1 (sv) * | 1970-07-21 | 1975-04-23 | ||
US4244918A (en) * | 1975-12-23 | 1981-01-13 | Nippon Soken, Inc. | Gas component detection apparatus |
US4337476A (en) * | 1980-08-18 | 1982-06-29 | Bell Telephone Laboratories, Incorporated | Silicon rich refractory silicides as gate metal |
CH665908A5 (de) * | 1983-08-30 | 1988-06-15 | Cerberus Ag | Vorrichtung zum selektiven detektieren der gasfoermigen bestandteile von gasgemischen in luft mittels eines gassensors. |
JPS60253958A (ja) * | 1984-05-31 | 1985-12-14 | Sharp Corp | センサ |
GB8606045D0 (en) * | 1986-03-12 | 1986-04-16 | Emi Plc Thorn | Gas sensitive device |
KR960016712B1 (ko) * | 1986-11-05 | 1996-12-20 | 오오니시 마사후미 | 가스센서 및 그의 제조방법 |
US4911892A (en) * | 1987-02-24 | 1990-03-27 | American Intell-Sensors Corporation | Apparatus for simultaneous detection of target gases |
JPH0695082B2 (ja) * | 1987-10-08 | 1994-11-24 | 新コスモス電機株式会社 | 吸引式オゾンガス検知器 |
US4875083A (en) * | 1987-10-26 | 1989-10-17 | North Carolina State University | Metal-insulator-semiconductor capacitor formed on silicon carbide |
US5250170A (en) * | 1990-03-15 | 1993-10-05 | Ricoh Company, Ltd. | Gas sensor having metal-oxide semiconductor layer |
JPH04212048A (ja) * | 1990-06-11 | 1992-08-03 | Ricoh Co Ltd | ガスセンサ |
JPH0572163A (ja) * | 1990-11-30 | 1993-03-23 | Mitsui Mining Co Ltd | 半導体式ガスセンサー |
US5251470A (en) * | 1991-03-12 | 1993-10-12 | Siemens Aktiengesellschaft | Housing for fast exhaust gas sensors for a cylinder-selective lambda measurement in an internal combustion engine |
DE4223432C2 (de) * | 1991-08-14 | 1995-07-20 | Siemens Ag | Gassensor mit einem Temperaturfühler |
US5154514A (en) * | 1991-08-29 | 1992-10-13 | International Business Machines Corporation | On-chip temperature sensor utilizing a Schottky barrier diode structure |
US5273779A (en) * | 1991-12-09 | 1993-12-28 | Industrial Technology Research Institute | Method of fabricating a gas sensor and the product fabricated thereby |
US5401470A (en) * | 1992-04-24 | 1995-03-28 | Mine Safety Appliances Company | Combustible gas sensor |
US5285084A (en) * | 1992-09-02 | 1994-02-08 | Kobe Steel Usa | Diamond schottky diodes and gas sensors fabricated therefrom |
US5323022A (en) * | 1992-09-10 | 1994-06-21 | North Carolina State University | Platinum ohmic contact to p-type silicon carbide |
US5384470A (en) * | 1992-11-02 | 1995-01-24 | Kobe Steel, Usa, Inc. | High temperature rectifying contact including polycrystalline diamond and method for making same |
SE510091C2 (sv) * | 1993-05-19 | 1999-04-19 | Volvo Ab | Förfarande och anordning för detektering av oxiderbara ämnen i ett avgasutlopp |
DE4324659C1 (de) * | 1993-07-22 | 1995-04-06 | Siemens Ag | Sensor mit einem in einem Gehäuse angeordneten Sensorelement |
-
1994
- 1994-09-23 SE SE9403218A patent/SE503265C2/sv not_active IP Right Cessation
-
1995
- 1995-09-22 EP EP95933689A patent/EP0783686A1/en not_active Withdrawn
- 1995-09-22 AU AU36235/95A patent/AU3623595A/en not_active Abandoned
- 1995-09-22 US US08/809,905 patent/US6109094A/en not_active Expired - Lifetime
- 1995-09-22 JP JP51082396A patent/JP3744539B2/ja not_active Expired - Fee Related
- 1995-09-22 WO PCT/SE1995/001084 patent/WO1996009534A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JPH10505911A (ja) | 1998-06-09 |
US6109094A (en) | 2000-08-29 |
JP3744539B2 (ja) | 2006-02-15 |
EP0783686A1 (en) | 1997-07-16 |
SE9403218L (sv) | 1996-03-24 |
WO1996009534A1 (en) | 1996-03-28 |
AU3623595A (en) | 1996-04-09 |
SE503265C2 (sv) | 1996-04-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |