RU2276159C2 - Фторированный ароматический полимер и его применение - Google Patents
Фторированный ароматический полимер и его применение Download PDFInfo
- Publication number
- RU2276159C2 RU2276159C2 RU2004103979/04A RU2004103979A RU2276159C2 RU 2276159 C2 RU2276159 C2 RU 2276159C2 RU 2004103979/04 A RU2004103979/04 A RU 2004103979/04A RU 2004103979 A RU2004103979 A RU 2004103979A RU 2276159 C2 RU2276159 C2 RU 2276159C2
- Authority
- RU
- Russia
- Prior art keywords
- compound
- fap
- fluorinated aromatic
- formula
- aromatic compound
- Prior art date
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- 125000003118 aryl group Chemical group 0.000 title claims abstract description 25
- 229920000642 polymer Polymers 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 claims abstract description 104
- 150000001875 compounds Chemical class 0.000 claims abstract description 85
- 150000001491 aromatic compounds Chemical class 0.000 claims abstract description 70
- 125000000524 functional group Chemical group 0.000 claims abstract description 44
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims abstract description 34
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 33
- 238000006482 condensation reaction Methods 0.000 claims abstract description 23
- 150000007514 bases Chemical class 0.000 claims abstract description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 22
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 22
- -1 perfluoro Chemical group 0.000 claims description 14
- 239000011148 porous material Substances 0.000 claims description 10
- 125000001424 substituent group Chemical group 0.000 claims description 5
- UVJSKKCWUVDYOA-UHFFFAOYSA-N 1,2,3,4,5-pentafluoro-6-[2,4,6-trifluoro-3,5-bis(2,3,4,5,6-pentafluorophenyl)phenyl]benzene Chemical compound FC1=C(F)C(F)=C(F)C(F)=C1C1=C(F)C(C=2C(=C(F)C(F)=C(F)C=2F)F)=C(F)C(C=2C(=C(F)C(F)=C(F)C=2F)F)=C1F UVJSKKCWUVDYOA-UHFFFAOYSA-N 0.000 claims description 4
- 238000004132 cross linking Methods 0.000 abstract description 17
- 239000000126 substance Substances 0.000 abstract description 14
- 230000000694 effects Effects 0.000 abstract description 3
- 230000035515 penetration Effects 0.000 abstract description 2
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- 239000011248 coating agent Substances 0.000 description 47
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- 239000000463 material Substances 0.000 description 18
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 18
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- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 9
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- JPYHHZQJCSQRJY-UHFFFAOYSA-N Phloroglucinol Natural products CCC=CCC=CCC=CCC=CCCCCC(=O)C1=C(O)C=C(O)C=C1O JPYHHZQJCSQRJY-UHFFFAOYSA-N 0.000 description 4
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- NKNDPYCGAZPOFS-UHFFFAOYSA-M copper(i) bromide Chemical compound Br[Cu] NKNDPYCGAZPOFS-UHFFFAOYSA-M 0.000 description 3
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- HIXDQWDOVZUNNA-UHFFFAOYSA-N 2-(3,4-dimethoxyphenyl)-5-hydroxy-7-methoxychromen-4-one Chemical compound C=1C(OC)=CC(O)=C(C(C=2)=O)C=1OC=2C1=CC=C(OC)C(OC)=C1 HIXDQWDOVZUNNA-UHFFFAOYSA-N 0.000 description 2
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- NVUNTCDLAQYNFR-UHFFFAOYSA-N 4-(2-phenylethynyl)phenol Chemical compound C1=CC(O)=CC=C1C#CC1=CC=CC=C1 NVUNTCDLAQYNFR-UHFFFAOYSA-N 0.000 description 2
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- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
- C08G65/34—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives
- C08G65/38—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives derived from phenols
- C08G65/40—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives derived from phenols from phenols (I) and other compounds (II), e.g. OH-Ar-OH + X-Ar-X, where X is halogen atom, i.e. leaving group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/7682—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing the dielectric comprising air gaps
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
- C08G61/10—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aromatic carbon atoms, e.g. polyphenylenes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
- H01L21/0212—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC the material being fluoro carbon compounds, e.g.(CFx) n, (CHxFy) n or polytetrafluoroethylene
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/312—Organic layers, e.g. photoresist
- H01L21/3127—Layers comprising fluoro (hydro)carbon compounds, e.g. polytetrafluoroethylene
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/10—Applying interconnections to be used for carrying current between separate components within a device
- H01L2221/1005—Formation and after-treatment of dielectrics
- H01L2221/1042—Formation and after-treatment of dielectrics the dielectric comprising air gaps
- H01L2221/1047—Formation and after-treatment of dielectrics the dielectric comprising air gaps the air gaps being formed by pores in the dielectric
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
- H01L23/49894—Materials of the insulating layers or coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/5329—Insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/032—Organic insulating material consisting of one material
- H05K1/034—Organic insulating material consisting of one material containing halogen
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4673—Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
- H05K3/4676—Single layer compositions
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Formation Of Insulating Films (AREA)
- Paints Or Removers (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Organic Insulating Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001212379 | 2001-07-12 | ||
JP2001-212379 | 2001-07-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2004103979A RU2004103979A (ru) | 2005-04-10 |
RU2276159C2 true RU2276159C2 (ru) | 2006-05-10 |
Family
ID=19047547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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RU2004103979/04A RU2276159C2 (ru) | 2001-07-12 | 2002-06-28 | Фторированный ароматический полимер и его применение |
Country Status (8)
Country | Link |
---|---|
US (1) | US6881811B2 (fr) |
JP (1) | JP4206925B2 (fr) |
KR (1) | KR100870225B1 (fr) |
CN (1) | CN100519623C (fr) |
DE (1) | DE10297034B4 (fr) |
RU (1) | RU2276159C2 (fr) |
TW (1) | TWI237039B (fr) |
WO (1) | WO2003008483A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2526683C2 (ru) * | 2009-06-26 | 2014-08-27 | ТАЙКО ЭЛЕКТРОНИКС Ю-КЕЙ ЛТД, Великобритания | Высокоэффективная, высокотемпературная легкая пленка, лента или кожух для изоляции проводов |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004356582A (ja) * | 2003-05-30 | 2004-12-16 | Asahi Glass Co Ltd | 積層体 |
JP4501391B2 (ja) * | 2003-09-30 | 2010-07-14 | 旭硝子株式会社 | 架橋性含フッ素芳香族プレポリマー及びその用途 |
CN101203546B (zh) * | 2005-06-24 | 2012-02-01 | 旭硝子株式会社 | 交联性含氟芳香族预聚物及其用途 |
JP4730436B2 (ja) * | 2006-03-16 | 2011-07-20 | 旭硝子株式会社 | ネガ型感光性含フッ素芳香族系樹脂組成物 |
ATE518901T1 (de) | 2006-06-02 | 2011-08-15 | Asahi Glass Co Ltd | Vernetzbares prepolymer, herstellungsverfahren dafür und verwendung davon |
JP5181444B2 (ja) * | 2006-08-31 | 2013-04-10 | 旭硝子株式会社 | 架橋性含フッ素芳香族プレポリマーおよびその硬化物 |
JP2009026810A (ja) * | 2007-07-17 | 2009-02-05 | Asahi Glass Co Ltd | パターン形成方法 |
JP5245378B2 (ja) * | 2007-11-30 | 2013-07-24 | 旭硝子株式会社 | 架橋性プレポリマー、その製造方法および用途 |
WO2009154254A1 (fr) | 2008-06-19 | 2009-12-23 | 旭硝子株式会社 | Composition durcissable et film durci l’utilisant |
US8492507B2 (en) * | 2008-09-23 | 2013-07-23 | Nexam Chemical Ab | Acetylenic polyamide |
KR101558536B1 (ko) * | 2008-12-16 | 2015-10-08 | 삼성전자주식회사 | 하이퍼브랜치 폴리머, 이를 포함하는 연료전지용 전극, 이를 포함하는 연료전지용 전해질막 및 이를 채용한 연료전지 |
CN102301264A (zh) | 2009-03-18 | 2011-12-28 | 旭硝子株式会社 | 光波导 |
EP2473538B1 (fr) | 2009-08-31 | 2017-07-26 | Dow Global Technologies LLC | Catalyseur et procédé de polymérisation d'une oléfine et polyoléfine préparée grâce à ce procédé |
CN102892800B (zh) | 2010-05-14 | 2015-05-13 | 聂克斯姆化学有限公司 | 交联催化 |
CN102947359B (zh) | 2010-06-23 | 2014-12-24 | 旭硝子株式会社 | 固化性组合物和固化膜的制造方法 |
CN103946326A (zh) * | 2011-11-18 | 2014-07-23 | 旭硝子株式会社 | 固化性组合物、涂布用组合物、固化膜、激光加工方法及多层布线结构体的制造方法 |
RU2497319C1 (ru) * | 2012-02-28 | 2013-10-27 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "Высшая школа экономики" | Печатная плата для бортовой радиоэлектронной аппаратуры космических аппаратов |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5114780A (en) * | 1990-04-17 | 1992-05-19 | Raychem Corporation | Electronic articles containing a fluorinated poly(arylene ether) dielectric |
US5155175A (en) * | 1989-12-08 | 1992-10-13 | Intellectual Property Law Dept. | Crosslinkable fluorinated polyarylene ether composition |
US5115082A (en) * | 1990-04-17 | 1992-05-19 | Raychem Corporation | Fluorinated poly(arylene ether) |
US5959157A (en) * | 1995-06-26 | 1999-09-28 | Alliedsignal, Inc. | Process for making hydroxy-substituted ethynylated biphenyl compounds |
US5874516A (en) * | 1995-07-13 | 1999-02-23 | Air Products And Chemicals, Inc. | Nonfunctionalized poly(arylene ethers) |
JP3969779B2 (ja) * | 1997-03-05 | 2007-09-05 | 沖電気工業株式会社 | 有機絶縁膜材料の製造方法 |
KR19990024596A (ko) * | 1997-09-04 | 1999-04-06 | 윤종용 | 광통신용 폴리아릴렌에테르 |
JP3716732B2 (ja) * | 1999-12-27 | 2005-11-16 | 株式会社豊田中央研究所 | 有機化合物及びそれを用いた素子 |
JP2001247496A (ja) | 2000-03-09 | 2001-09-11 | Nippon Shokubai Co Ltd | 含ハロゲン芳香族化合物 |
JP4682394B2 (ja) * | 2000-04-26 | 2011-05-11 | 旭硝子株式会社 | 光学樹脂組成物およびその用途 |
JP4092901B2 (ja) * | 2000-10-30 | 2008-05-28 | 株式会社豊田中央研究所 | 有機電界発光素子 |
-
2002
- 2002-06-28 WO PCT/JP2002/006589 patent/WO2003008483A1/fr active Application Filing
- 2002-06-28 CN CNB028139305A patent/CN100519623C/zh not_active Expired - Fee Related
- 2002-06-28 JP JP2003514037A patent/JP4206925B2/ja not_active Expired - Fee Related
- 2002-06-28 RU RU2004103979/04A patent/RU2276159C2/ru not_active IP Right Cessation
- 2002-06-28 KR KR1020037016369A patent/KR100870225B1/ko not_active IP Right Cessation
- 2002-06-28 DE DE10297034.3T patent/DE10297034B4/de not_active Expired - Fee Related
- 2002-07-11 TW TW091115442A patent/TWI237039B/zh not_active IP Right Cessation
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2004
- 2004-01-12 US US10/754,601 patent/US6881811B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2526683C2 (ru) * | 2009-06-26 | 2014-08-27 | ТАЙКО ЭЛЕКТРОНИКС Ю-КЕЙ ЛТД, Великобритания | Высокоэффективная, высокотемпературная легкая пленка, лента или кожух для изоляции проводов |
Also Published As
Publication number | Publication date |
---|---|
RU2004103979A (ru) | 2005-04-10 |
WO2003008483A1 (fr) | 2003-01-30 |
US20040147710A1 (en) | 2004-07-29 |
TWI237039B (en) | 2005-08-01 |
CN100519623C (zh) | 2009-07-29 |
CN1525988A (zh) | 2004-09-01 |
JPWO2003008483A1 (ja) | 2004-11-11 |
KR100870225B1 (ko) | 2008-11-24 |
KR20040027518A (ko) | 2004-04-01 |
DE10297034T5 (de) | 2004-07-29 |
US6881811B2 (en) | 2005-04-19 |
JP4206925B2 (ja) | 2009-01-14 |
DE10297034B4 (de) | 2015-05-21 |
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