NO300171B1 - Substrat av forglassingsmateriale med et flerlagsbelegg og fremgangsmåte for fremstilling derav - Google Patents
Substrat av forglassingsmateriale med et flerlagsbelegg og fremgangsmåte for fremstilling derav Download PDFInfo
- Publication number
- NO300171B1 NO300171B1 NO894865A NO894865A NO300171B1 NO 300171 B1 NO300171 B1 NO 300171B1 NO 894865 A NO894865 A NO 894865A NO 894865 A NO894865 A NO 894865A NO 300171 B1 NO300171 B1 NO 300171B1
- Authority
- NO
- Norway
- Prior art keywords
- layer
- oxide
- metal
- thickness
- substrate according
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims description 51
- 239000000758 substrate Substances 0.000 title claims description 50
- 239000000463 material Substances 0.000 title claims description 46
- 239000011248 coating agent Substances 0.000 title claims description 43
- 238000004017 vitrification Methods 0.000 title claims description 18
- 238000000034 method Methods 0.000 title claims description 13
- 230000008569 process Effects 0.000 title description 2
- 238000002360 preparation method Methods 0.000 title 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 90
- 229910052751 metal Inorganic materials 0.000 claims description 59
- 239000002184 metal Substances 0.000 claims description 59
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 45
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 45
- 239000011787 zinc oxide Substances 0.000 claims description 45
- 229910052709 silver Inorganic materials 0.000 claims description 43
- 239000004332 silver Substances 0.000 claims description 43
- 229910044991 metal oxide Inorganic materials 0.000 claims description 34
- 150000004706 metal oxides Chemical class 0.000 claims description 34
- 229910001887 tin oxide Inorganic materials 0.000 claims description 30
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 29
- 239000004408 titanium dioxide Substances 0.000 claims description 22
- 238000000151 deposition Methods 0.000 claims description 19
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 18
- 229910052719 titanium Inorganic materials 0.000 claims description 18
- 239000010936 titanium Substances 0.000 claims description 18
- 238000001465 metallisation Methods 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 15
- 230000008021 deposition Effects 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 claims description 11
- 230000001070 adhesive effect Effects 0.000 claims description 11
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 10
- 239000011135 tin Substances 0.000 claims description 10
- 229910052718 tin Inorganic materials 0.000 claims description 9
- 229910000416 bismuth oxide Inorganic materials 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 5
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 claims description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052797 bismuth Inorganic materials 0.000 claims description 4
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 162
- 230000005540 biological transmission Effects 0.000 description 24
- 230000003287 optical effect Effects 0.000 description 18
- 239000011521 glass Substances 0.000 description 15
- 239000010408 film Substances 0.000 description 10
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 239000000047 product Substances 0.000 description 9
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 7
- 229910052725 zinc Inorganic materials 0.000 description 7
- 239000011701 zinc Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000005299 abrasion Methods 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 230000003667 anti-reflective effect Effects 0.000 description 5
- 239000011247 coating layer Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 230000000704 physical effect Effects 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 239000005329 float glass Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910001923 silver oxide Inorganic materials 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Substances [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- -1 "indium tin oxide" Chemical compound 0.000 description 1
- 229910000619 316 stainless steel Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910001297 Zn alloy Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 239000012799 electrically-conductive coating Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002650 laminated plastic Substances 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- GZCWPZJOEIAXRU-UHFFFAOYSA-N tin zinc Chemical compound [Zn].[Sn] GZCWPZJOEIAXRU-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000009333 weeding Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/085—Oxides of iron group metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/66—Units comprising two or more parallel glass or like panes permanently secured together
- E06B3/67—Units comprising two or more parallel glass or like panes permanently secured together characterised by additional arrangements or devices for heat or sound insulation or for controlled passage of light
- E06B3/6715—Units comprising two or more parallel glass or like panes permanently secured together characterised by additional arrangements or devices for heat or sound insulation or for controlled passage of light specially adapted for increased thermal insulation or for controlled passage of light
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
- Materials For Medical Uses (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB898900165A GB8900165D0 (en) | 1989-01-05 | 1989-01-05 | Glass coating |
Publications (3)
Publication Number | Publication Date |
---|---|
NO894865D0 NO894865D0 (no) | 1989-12-05 |
NO894865L NO894865L (no) | 1990-07-06 |
NO300171B1 true NO300171B1 (no) | 1997-04-21 |
Family
ID=10649618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO894865A NO300171B1 (no) | 1989-01-05 | 1989-12-05 | Substrat av forglassingsmateriale med et flerlagsbelegg og fremgangsmåte for fremstilling derav |
Country Status (13)
Country | Link |
---|---|
US (1) | US5153054A (fr) |
JP (1) | JP2835532B2 (fr) |
BE (1) | BE1002968A5 (fr) |
CH (1) | CH679579A5 (fr) |
DE (1) | DE3941026C2 (fr) |
DK (1) | DK172762B1 (fr) |
FR (1) | FR2641272B1 (fr) |
GB (2) | GB8900165D0 (fr) |
LU (1) | LU87645A1 (fr) |
NL (1) | NL194913C (fr) |
NO (1) | NO300171B1 (fr) |
SE (1) | SE469522B (fr) |
TW (1) | TW200443B (fr) |
Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
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GB2267509B (en) * | 1990-02-16 | 1994-07-20 | Asahi Optical Co Ltd | Surface reflector |
US5216551A (en) * | 1990-02-16 | 1993-06-01 | Asahi Kogaku Kogyo K.K. | Surface reflector |
DE4109708C1 (fr) * | 1991-03-23 | 1992-11-12 | Vegla Vereinigte Glaswerke Gmbh, 5100 Aachen, De | |
GB2261079B (en) * | 1991-10-31 | 1995-06-14 | Asahi Optical Co Ltd | Surface reflecting mirror |
US5296302A (en) * | 1992-03-27 | 1994-03-22 | Cardinal Ig Company | Abrasion-resistant overcoat for coated substrates |
GB2268509B (en) * | 1992-07-11 | 1996-01-31 | Pilkington Uk Ltd | Coatings on glass |
CH684643A5 (de) * | 1992-10-20 | 1994-11-15 | Troesch Glas Ag | Verfahren zur Herstellung von Fensterscheiben mit hoher Strahlungstransmission im sichtbaren Spektralbereich und hoher Strahlungsreflexion im Wärmestrahlungsbereich. |
US5589280A (en) * | 1993-02-05 | 1996-12-31 | Southwall Technologies Inc. | Metal on plastic films with adhesion-promoting layer |
GB9313416D0 (en) * | 1993-06-29 | 1993-08-11 | Glaverbel | Transaparent solar control glazing panels |
DE4324576C1 (de) | 1993-07-22 | 1995-01-26 | Ver Glaswerke Gmbh | Verfahren zur Herstellung einer mit einer Mehrfachschicht versehenen Glasscheibe |
CA2129488C (fr) * | 1993-08-12 | 2004-11-23 | Olivier Guiselin | Substrats transparents munis d'un empilement de couches minces, application aux vitrages d'isolation thermique et/ou de protection solaire |
GB9400319D0 (en) * | 1994-01-10 | 1994-03-09 | Pilkington Glass Ltd | Coatings on glass |
GB9400320D0 (en) * | 1994-01-10 | 1994-03-09 | Pilkington Glass Ltd | Coating on glass |
GB9400323D0 (en) * | 1994-01-10 | 1994-03-09 | Pilkington Glass Ltd | Coatings on glass |
DE4407502A1 (de) * | 1994-03-07 | 1995-09-14 | Leybold Ag | Mehrlagige Beschichtung |
US6673438B1 (en) | 1994-05-03 | 2004-01-06 | Cardinal Cg Company | Transparent article having protective silicon nitride film |
FR2728559B1 (fr) † | 1994-12-23 | 1997-01-31 | Saint Gobain Vitrage | Substrats en verre revetus d'un empilement de couches minces a proprietes de reflexion dans l'infrarouge et/ou dans le domaine du rayonnement solaire |
DE19520843A1 (de) * | 1995-06-08 | 1996-12-12 | Leybold Ag | Scheibe aus durchscheinendem Werkstoff sowie Verfahren zu ihrer Herstellung |
GB2311791A (en) * | 1996-04-02 | 1997-10-08 | Glaverbel | Gold-tinted glazing panels |
IT1293394B1 (it) * | 1996-07-25 | 1999-03-01 | Glaverbel | Substrati rivestiti di metallo |
DE29615243U1 (de) * | 1996-09-03 | 1996-10-10 | Vegla Vereinigte Glaswerke Gmbh, 52066 Aachen | Wärmedämmende Isolierglasscheibe mit drei Einzelglasscheiben |
DE19640800C2 (de) * | 1996-10-02 | 2002-01-17 | Fraunhofer Ges Forschung | Wärmedämmendes Schichtsystem für transparente Substrate |
FR2755962B1 (fr) * | 1996-11-21 | 1998-12-24 | Saint Gobain Vitrage | Vitrage comprenant un substrat muni d'un empilement de couches minces pour la protection solaire et/ou l'isolation thermique |
US20050096288A1 (en) * | 1997-06-13 | 2005-05-05 | Aragene, Inc. | Lipoproteins as nucleic acid vectors |
DE19726966C1 (de) | 1997-06-25 | 1999-01-28 | Flachglas Ag | Verfahren zur Herstellung einer transparenten Silberschicht mit hoher spezifischer elektrischer Leitfähigkeit , Glasscheibe mit einem Dünnschichtsystem mit einer solchen Silberschicht und deren Verwendung |
JP3592596B2 (ja) | 1998-12-18 | 2004-11-24 | 日本板硝子株式会社 | 親水性鏡及びその製造方法 |
US6490091B1 (en) * | 1999-01-21 | 2002-12-03 | Viratec Thin Films, Inc. | Display panel filter and method of making the same |
JP3477148B2 (ja) * | 1999-12-02 | 2003-12-10 | カーディナル・シージー・カンパニー | 耐曇り性透明フィルム積層体 |
EP1123906B1 (fr) | 2000-02-02 | 2004-08-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Méthode pour la déposition des couches réfléchissantes la chaleur sur des substrats transparents et couches ainsi produites |
DE10046810C5 (de) * | 2000-02-02 | 2005-10-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung eines wärmereflektierenden Schichtsystems für transparente Substrate und danach hergestelltes Schichtsystem |
US7462398B2 (en) * | 2004-02-27 | 2008-12-09 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Coated article with zinc oxide over IR reflecting layer and corresponding method |
US7879448B2 (en) * | 2000-07-11 | 2011-02-01 | Guardian Industires Corp. | Coated article with low-E coating including IR reflecting layer(s) and corresponding method |
DE10042194B4 (de) * | 2000-08-28 | 2008-07-24 | Arcon Flachglas-Veredlung Gmbh & Co.Kg | Wärmereflektierendes Schichtsystem für transparente Substrate und Verfahren zur Herstellung |
DE10131932C2 (de) * | 2000-09-21 | 2003-09-18 | Fraunhofer Ges Forschung | Verfahren zur Herstellung eines wärmereflektierenden Schichtsystems für transparente Substrate und danach hergestelltes Schichtsystem |
CA2424746C (fr) * | 2000-09-29 | 2011-03-29 | Nippon Sheet Glass Co., Ltd. | Stratifie transparent a faible pouvoir emissif |
US6869644B2 (en) * | 2000-10-24 | 2005-03-22 | Ppg Industries Ohio, Inc. | Method of making coated articles and coated articles made thereby |
US7311961B2 (en) * | 2000-10-24 | 2007-12-25 | Ppg Industries Ohio, Inc. | Method of making coated articles and coated articles made thereby |
US20030228476A1 (en) * | 2001-10-22 | 2003-12-11 | Harry Buhay | Methods of changing the visible light transmittance of coated articles and coated articles made thereby |
US6971948B2 (en) * | 2001-02-08 | 2005-12-06 | Cardinal Cg Company | Method and apparatus for removing coatings applied to surfaces of a substrate |
EP1273558A1 (fr) | 2001-07-02 | 2003-01-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Méthode pour la fabrication d'un système multicouche réfléchissant la chaleur sur un substrat transparent et systeme multicouche ainsi obtenu |
US6936347B2 (en) * | 2001-10-17 | 2005-08-30 | Guardian Industries Corp. | Coated article with high visible transmission and low emissivity |
US6942923B2 (en) | 2001-12-21 | 2005-09-13 | Guardian Industries Corp. | Low-e coating with high visible transmission |
US7232615B2 (en) * | 2001-10-22 | 2007-06-19 | Ppg Industries Ohio, Inc. | Coating stack comprising a layer of barrier coating |
US6830817B2 (en) | 2001-12-21 | 2004-12-14 | Guardian Industries Corp. | Low-e coating with high visible transmission |
US6919133B2 (en) | 2002-03-01 | 2005-07-19 | Cardinal Cg Company | Thin film coating having transparent base layer |
ATE344217T1 (de) * | 2002-03-01 | 2006-11-15 | Cardinal Cg Co | Dünnfilmbeschichtung mit einer transparenten grundierungsschicht |
DE10252101A1 (de) * | 2002-11-08 | 2004-05-27 | Interpane Entwicklungs- Und Beratungsgesellschaft Mbh & Co.Kg | Mit einer Wärmeschutzschicht beschichtetes Substrat und Verfahren zum Aufbringen der Wärmeschutzschicht |
ES2627415T3 (es) * | 2003-03-28 | 2017-07-28 | Vitro, S.A.B. De C.V. | Sustratos recubiertos con mezclas de materiales de titanio y aluminio |
JP4138558B2 (ja) * | 2003-04-03 | 2008-08-27 | ジーイー・メディカル・システムズ・グローバル・テクノロジー・カンパニー・エルエルシー | 画像再構成装置、画像再構成方法および放射線断層像撮影装置 |
JP4009564B2 (ja) * | 2003-06-27 | 2007-11-14 | 株式会社神戸製鋼所 | リフレクター用Ag合金反射膜、及び、このAg合金反射膜を用いたリフレクター、並びに、このAg合金反射膜のAg合金薄膜の形成用のAg合金スパッタリングターゲット |
EP1498397A1 (fr) * | 2003-07-16 | 2005-01-19 | Glaverbel | Substrat revêtu à très faible facteur solaire |
FR2865420B1 (fr) | 2004-01-28 | 2007-09-14 | Saint Gobain | Procede de nettoyage d'un substrat |
US7081302B2 (en) * | 2004-02-27 | 2006-07-25 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Coated article with low-E coating including tin oxide interlayer |
US7393584B2 (en) * | 2005-01-14 | 2008-07-01 | Solutia Incorporated | Multiple layer laminate with moisture barrier |
BE1016553A3 (fr) * | 2005-03-17 | 2007-01-09 | Glaverbel | Vitrage a faible emissivite. |
ATE460271T1 (de) * | 2005-03-31 | 2010-03-15 | Cardinal Cg Co | Gegen anlaufen beständige beschichtungen mit geringem emissionsvermögen |
GB0512077D0 (en) * | 2005-06-14 | 2005-07-20 | Pilkington Plc | Glazing |
FR2893024B1 (fr) * | 2005-11-08 | 2008-02-29 | Saint Gobain | Substrat muni d'un empilement a proprietes thermiques |
ATE551307T1 (de) * | 2006-05-31 | 2012-04-15 | Agc Glass Europe | Low-e-verglasung |
GB201106788D0 (en) * | 2011-04-21 | 2011-06-01 | Pilkington Group Ltd | Heat treatable coated glass pane |
RU2013158346A (ru) * | 2011-05-30 | 2015-07-10 | Асахи Гласс Компани, Лимитед | Низкоэмиссионное многослойное покрытие и двойное оконное стекло |
US8747959B2 (en) * | 2011-06-30 | 2014-06-10 | Guardian Industries Corp. | Planar patterned transparent contact, devices with planar patterned transparent contacts, and/or methods of making the same |
US20130005139A1 (en) * | 2011-06-30 | 2013-01-03 | Guardian Industries Corp. | Techniques for manufacturing planar patterned transparent contact and/or electronic devices including same |
US9405046B2 (en) * | 2013-03-13 | 2016-08-02 | Intermolecular, Inc. | High solar gain low-e panel and method for forming the same |
US20140309099A1 (en) | 2013-04-15 | 2014-10-16 | Ppg Industries Ohio, Inc. | Low iron, high redox ratio, and high iron, high redox ratio, soda-lime-silica glasses and methods of making same |
US11261122B2 (en) | 2013-04-15 | 2022-03-01 | Vitro Flat Glass Llc | Low iron, high redox ratio, and high iron, high redox ratio, soda-lime-silica glasses and methods of making same |
DE102016219924A1 (de) * | 2016-10-13 | 2018-04-19 | Zf Friedrichshafen Ag | Verfahren zum Herstellen eines Lichtelements, Lichtelement, Beleuchtungselement und Bedienelement für ein Fahrzeug |
US11148228B2 (en) | 2017-07-10 | 2021-10-19 | Guardian Glass, LLC | Method of making insulated glass window units |
US10987902B2 (en) | 2017-07-10 | 2021-04-27 | Guardian Glass, LLC | Techniques for laser ablation/scribing of coatings in pre- and post-laminated assemblies, and/or associated methods |
DE102018118964A1 (de) * | 2018-08-03 | 2020-02-06 | Flachglas Wernberg Gmbh | Verfahren zur Herstellung von zumindest einer teilflächigen keramischen Bedruckung auf einem mit einer vorspannbaren Funktionsbeschichtung versehenen Floatglasssubstrat |
FR3095523B1 (fr) * | 2019-04-25 | 2022-09-09 | Centre Nat Rech Scient | Miroir pour cellule photovoltaïque, cellule et module photovoltaïques |
CN112777946A (zh) * | 2019-11-07 | 2021-05-11 | 中国南玻集团股份有限公司 | 三银玻璃 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1184877A (fr) * | 1982-05-12 | 1985-04-02 | James B. Webb | Methode et dispositif pour deposer un oxyde conducteur sur un substrat |
NO157212C (no) * | 1982-09-21 | 1988-02-10 | Pilkington Brothers Plc | Fremgangsmaate for fremstilling av belegg med lav emisjonsevne. |
AU561315B2 (en) * | 1984-10-29 | 1987-05-07 | Ppg Industries Ohio, Inc. | Sputtering films of metal alloy oxide |
US4716086A (en) * | 1984-12-19 | 1987-12-29 | Ppg Industries, Inc. | Protective overcoat for low emissivity coated article |
US4828346A (en) * | 1985-10-08 | 1989-05-09 | The Boc Group, Inc. | Transparent article having high visible transmittance |
AU585426B2 (en) * | 1986-01-29 | 1989-06-15 | Pilkington Brothers Plc | Coated glass |
CA1331867C (fr) * | 1986-12-29 | 1994-09-06 | James Joseph Finley | Pellicule a faible pouvoir emissif pour traitement a haute temperature |
US4790922A (en) * | 1987-07-13 | 1988-12-13 | Viracon, Inc. | Temperable low emissivity and reflective windows |
AU631777B2 (en) * | 1987-08-18 | 1992-12-10 | Boc Technologies Limited | Metal oxide films having barrier properties |
-
1989
- 1989-01-05 GB GB898900165A patent/GB8900165D0/en active Pending
- 1989-12-05 NO NO894865A patent/NO300171B1/no not_active IP Right Cessation
- 1989-12-12 DE DE3941026A patent/DE3941026C2/de not_active Expired - Lifetime
- 1989-12-14 TW TW078109695A patent/TW200443B/zh active
- 1989-12-15 DK DK198906356A patent/DK172762B1/da not_active IP Right Cessation
- 1989-12-15 SE SE8904230A patent/SE469522B/sv not_active IP Right Cessation
- 1989-12-18 BE BE8901353A patent/BE1002968A5/fr not_active IP Right Cessation
- 1989-12-18 FR FR898916866A patent/FR2641272B1/fr not_active Expired - Lifetime
- 1989-12-20 LU LU87645A patent/LU87645A1/fr unknown
- 1989-12-22 CH CH4611/89A patent/CH679579A5/fr not_active IP Right Cessation
- 1989-12-22 NL NL8903148A patent/NL194913C/nl not_active IP Right Cessation
- 1989-12-27 JP JP1345057A patent/JP2835532B2/ja not_active Expired - Lifetime
- 1989-12-28 US US07/458,385 patent/US5153054A/en not_active Expired - Lifetime
-
1990
- 1990-01-05 GB GB9000218A patent/GB2229738B/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
SE8904230D0 (sv) | 1989-12-14 |
DK172762B1 (da) | 1999-06-28 |
JP2835532B2 (ja) | 1998-12-14 |
SE469522B (sv) | 1993-07-19 |
FR2641272B1 (fr) | 1993-01-08 |
NL194913B (nl) | 2003-03-03 |
CH679579A5 (fr) | 1992-03-13 |
NO894865L (no) | 1990-07-06 |
NL8903148A (nl) | 1990-08-01 |
DK635689A (da) | 1990-07-06 |
BE1002968A5 (fr) | 1991-10-08 |
GB8900165D0 (en) | 1989-03-01 |
TW200443B (fr) | 1993-02-21 |
DK635689D0 (da) | 1989-12-15 |
JPH02239135A (ja) | 1990-09-21 |
GB2229738A (en) | 1990-10-03 |
US5153054A (en) | 1992-10-06 |
DE3941026C2 (de) | 2000-01-13 |
NL194913C (nl) | 2003-07-04 |
GB2229738B (en) | 1993-09-01 |
DE3941026A1 (de) | 1990-07-12 |
SE8904230L (sv) | 1990-07-06 |
LU87645A1 (fr) | 1990-07-10 |
FR2641272A1 (fr) | 1990-07-06 |
NO894865D0 (no) | 1989-12-05 |
GB9000218D0 (en) | 1990-03-07 |
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