NL8701251A - Halfgeleiderinrichting en werkwijze ter vervaardiging daarvan. - Google Patents
Halfgeleiderinrichting en werkwijze ter vervaardiging daarvan. Download PDFInfo
- Publication number
- NL8701251A NL8701251A NL8701251A NL8701251A NL8701251A NL 8701251 A NL8701251 A NL 8701251A NL 8701251 A NL8701251 A NL 8701251A NL 8701251 A NL8701251 A NL 8701251A NL 8701251 A NL8701251 A NL 8701251A
- Authority
- NL
- Netherlands
- Prior art keywords
- layer
- silicon layer
- contact zone
- masking
- silicon
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 93
- 238000000034 method Methods 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 114
- 229910052710 silicon Inorganic materials 0.000 claims description 114
- 239000010703 silicon Substances 0.000 claims description 114
- 230000000873 masking effect Effects 0.000 claims description 62
- 239000000758 substrate Substances 0.000 claims description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 33
- 230000005669 field effect Effects 0.000 claims description 31
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 31
- 238000002513 implantation Methods 0.000 claims description 17
- 229920002120 photoresistant polymer Polymers 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- -1 boron ions Chemical class 0.000 description 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 7
- 230000003071 parasitic effect Effects 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000007704 transition Effects 0.000 description 6
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000002800 charge carrier Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910052785 arsenic Inorganic materials 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/743—Making of internal connections, substrate contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/107—Substrate region of field-effect devices
- H01L29/1075—Substrate region of field-effect devices of field-effect transistors
- H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
- H01L29/1087—Substrate region of field-effect devices of field-effect transistors with insulated gate characterised by the contact structure of the substrate region, e.g. for controlling or preventing bipolar effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78609—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing leakage current
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/901—MOSFET substrate bias
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Element Separation (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8701251A NL8701251A (nl) | 1987-05-26 | 1987-05-26 | Halfgeleiderinrichting en werkwijze ter vervaardiging daarvan. |
| US07/194,765 US4864377A (en) | 1987-05-26 | 1988-05-17 | Silicon on insulator (SOI) semiconductor device |
| EP88201023A EP0294868A1 (fr) | 1987-05-26 | 1988-05-20 | Dispositif semi-conducteur du type SOI et procédé pour sa fabrication |
| JP63125623A JPS63306667A (ja) | 1987-05-26 | 1988-05-23 | 半導体装置及びその製造方法 |
| KR1019880006152A KR880014649A (ko) | 1987-05-06 | 1988-05-26 | 반도체 장치 및 그 제조방법 |
| US07/592,040 US5034335A (en) | 1987-05-26 | 1990-10-03 | Method of manufacturing a silicon on insulator (SOI) semiconductor device |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8701251A NL8701251A (nl) | 1987-05-26 | 1987-05-26 | Halfgeleiderinrichting en werkwijze ter vervaardiging daarvan. |
| NL8701251 | 1987-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL8701251A true NL8701251A (nl) | 1988-12-16 |
Family
ID=19850067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL8701251A NL8701251A (nl) | 1987-05-06 | 1987-05-26 | Halfgeleiderinrichting en werkwijze ter vervaardiging daarvan. |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US4864377A (fr) |
| EP (1) | EP0294868A1 (fr) |
| JP (1) | JPS63306667A (fr) |
| KR (1) | KR880014649A (fr) |
| NL (1) | NL8701251A (fr) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5231045A (en) * | 1988-12-08 | 1993-07-27 | Fujitsu Limited | Method of producing semiconductor-on-insulator structure by besol process with charged insulating layers |
| EP0378906A1 (fr) * | 1988-12-08 | 1990-07-25 | Fujitsu Limited | Procédé de production d'une structure semi-conductrice-sur-isolant et élément semi-conducteur ayant la structure semi-conductrice-sur-isolant |
| US5238857A (en) * | 1989-05-20 | 1993-08-24 | Fujitsu Limited | Method of fabricating a metal-oxide-semiconductor device having a semiconductor on insulator (SOI) structure |
| US5449953A (en) * | 1990-09-14 | 1995-09-12 | Westinghouse Electric Corporation | Monolithic microwave integrated circuit on high resistivity silicon |
| US5621239A (en) * | 1990-11-05 | 1997-04-15 | Fujitsu Limited | SOI device having a buried layer of reduced resistivity |
| USH1435H (en) * | 1991-10-21 | 1995-05-02 | Cherne Richard D | SOI CMOS device having body extension for providing sidewall channel stop and bodytie |
| GB9315798D0 (en) * | 1993-07-30 | 1993-09-15 | Philips Electronics Uk Ltd | Manufacture of electronic devices comprising thin-film transistors |
| US5360752A (en) * | 1993-10-28 | 1994-11-01 | Loral Federal Systems Company | Method to radiation harden the buried oxide in silicon-on-insulator structures |
| JPH08115985A (ja) * | 1994-10-17 | 1996-05-07 | Nec Corp | 低雑音の半導体集積回路 |
| JP3399119B2 (ja) * | 1994-11-10 | 2003-04-21 | 富士電機株式会社 | 半導体装置およびその製造方法 |
| DE4441901C2 (de) * | 1994-11-24 | 1998-07-02 | Siemens Ag | MOSFET auf SOI-Substrat und Verfahren zu dessen Herstellung |
| US5608253A (en) * | 1995-03-22 | 1997-03-04 | Advanced Micro Devices Inc. | Advanced transistor structures with optimum short channel controls for high density/high performance integrated circuits |
| US5619053A (en) * | 1995-05-31 | 1997-04-08 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device having an SOI structure |
| JP2728070B2 (ja) * | 1995-11-30 | 1998-03-18 | 日本電気株式会社 | 電界効果トランジスタ |
| JPH09248912A (ja) * | 1996-01-11 | 1997-09-22 | Canon Inc | インクジェットヘッド及びヘッド用基体、インクジェットカートリッジ、並びにインクジェット装置 |
| US5770881A (en) * | 1996-09-12 | 1998-06-23 | International Business Machines Coproration | SOI FET design to reduce transient bipolar current |
| KR100248200B1 (ko) * | 1996-12-30 | 2000-03-15 | 김영환 | Soi 반도체 소자 및 그의 제조방법 |
| US5916627A (en) * | 1997-12-31 | 1999-06-29 | Kemet Electronics Corp. | Conductive polymer using self-regenerating oxidant |
| DE19844531B4 (de) | 1998-09-29 | 2017-12-14 | Prema Semiconductor Gmbh | Verfahren zur Herstellung von Transistoren |
| EP1035566A3 (fr) * | 1999-03-03 | 2000-10-04 | Infineon Technologies North America Corp. | Méthode de formation d'une couche dopée profonde avec des éléments de connection dans un composant semiconducteur |
| DE60041863D1 (de) * | 1999-07-02 | 2009-05-07 | Mitsubishi Material Silicon | Herstellungsverfahren eines soi substrats |
| US8981490B2 (en) * | 2013-03-14 | 2015-03-17 | Texas Instruments Incorporated | Transistor with deep Nwell implanted through the gate |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3925120A (en) * | 1969-10-27 | 1975-12-09 | Hitachi Ltd | A method for manufacturing a semiconductor device having a buried epitaxial layer |
| US3879745A (en) * | 1969-11-11 | 1975-04-22 | Philips Corp | Semiconductor device |
| DE2641302A1 (de) * | 1976-09-14 | 1978-03-16 | Siemens Ag | N-kanal mis-fet in esfi-technik |
| US4202002A (en) * | 1977-01-19 | 1980-05-06 | International Business Machines Corporation | Ion-implanted layers with abrupt edges |
| US4454524A (en) * | 1978-03-06 | 1984-06-12 | Ncr Corporation | Device having implantation for controlling gate parasitic action |
| JPS54162980A (en) * | 1978-06-14 | 1979-12-25 | Fujitsu Ltd | Manufacture of semiconductor device |
| US4199773A (en) * | 1978-08-29 | 1980-04-22 | Rca Corporation | Insulated gate field effect silicon-on-sapphire transistor and method of making same |
| JPS6040710B2 (ja) * | 1978-11-14 | 1985-09-12 | 富士通株式会社 | 半導体記憶装置 |
| JPS55113359A (en) * | 1979-02-22 | 1980-09-01 | Fujitsu Ltd | Semiconductor integrated circuit device |
| JPS5627942A (en) * | 1979-08-15 | 1981-03-18 | Hitachi Ltd | Semiconductor device and its manufacturing method |
| JPS5687340A (en) * | 1979-12-19 | 1981-07-15 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
| JPS5687359A (en) * | 1979-12-19 | 1981-07-15 | Fujitsu Ltd | Manufacture of one transistor type memory cell |
| JPS5824018B2 (ja) * | 1979-12-21 | 1983-05-18 | 富士通株式会社 | バイポ−ラｉｃの製造方法 |
| JPS5724548A (en) * | 1980-07-22 | 1982-02-09 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of semiconductor device |
| JPS5727069A (en) * | 1980-07-25 | 1982-02-13 | Toshiba Corp | Mos type simiconductor device |
| JPS5745947A (en) * | 1980-09-03 | 1982-03-16 | Toshiba Corp | Mos type semiconductor integrated circuit |
| JPS59937A (ja) * | 1982-06-25 | 1984-01-06 | Nec Corp | 半導体装置の製造方法 |
| US4923820A (en) * | 1985-09-18 | 1990-05-08 | Harris Corporation | IC which eliminates support bias influence on dielectrically isolated components |
| JPH0748516B2 (ja) * | 1986-09-26 | 1995-05-24 | アメリカン テレフォン アンド テレグラフ カムパニー | 埋没導電層を有する誘電的に分離されたデバイスの製造方法 |
-
1987
- 1987-05-26 NL NL8701251A patent/NL8701251A/nl not_active Application Discontinuation
-
1988
- 1988-05-17 US US07/194,765 patent/US4864377A/en not_active Expired - Fee Related
- 1988-05-20 EP EP88201023A patent/EP0294868A1/fr not_active Withdrawn
- 1988-05-23 JP JP63125623A patent/JPS63306667A/ja active Pending
- 1988-05-26 KR KR1019880006152A patent/KR880014649A/ko not_active Application Discontinuation
-
1990
- 1990-10-03 US US07/592,040 patent/US5034335A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR880014649A (ko) | 1988-12-24 |
| US5034335A (en) | 1991-07-23 |
| EP0294868A1 (fr) | 1988-12-14 |
| JPS63306667A (ja) | 1988-12-14 |
| US4864377A (en) | 1989-09-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A1B | A search report has been drawn up | ||
| BV | The patent application has lapsed |