NL1002666C2 - Werkwijze voor het vervaardigen van een ferro-elektrische dunne-filmcondensator. - Google Patents
Werkwijze voor het vervaardigen van een ferro-elektrische dunne-filmcondensator. Download PDFInfo
- Publication number
- NL1002666C2 NL1002666C2 NL1002666A NL1002666A NL1002666C2 NL 1002666 C2 NL1002666 C2 NL 1002666C2 NL 1002666 A NL1002666 A NL 1002666A NL 1002666 A NL1002666 A NL 1002666A NL 1002666 C2 NL1002666 C2 NL 1002666C2
- Authority
- NL
- Netherlands
- Prior art keywords
- electrode
- thin film
- chamber
- ferroelectric
- substrate
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title claims description 52
- 239000003990 capacitor Substances 0.000 title claims description 28
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000005530 etching Methods 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 41
- 239000007789 gas Substances 0.000 claims description 31
- 239000010410 layer Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 23
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims description 21
- 239000011241 protective layer Substances 0.000 claims description 12
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 10
- 238000001020 plasma etching Methods 0.000 claims description 9
- 230000001681 protective effect Effects 0.000 claims description 8
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 2
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 claims description 2
- 229910019897 RuOx Inorganic materials 0.000 claims description 2
- 229910052801 chlorine Inorganic materials 0.000 claims description 2
- 239000000460 chlorine Substances 0.000 claims description 2
- 238000009616 inductively coupled plasma Methods 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 229910003910 SiCl4 Inorganic materials 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 claims 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 39
- 230000007423 decrease Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
- Non-Volatile Memory (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950005784A KR100322695B1 (ko) | 1995-03-20 | 1995-03-20 | 강유전성캐패시터의제조방법 |
KR19950005784 | 1995-03-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
NL1002666A1 NL1002666A1 (nl) | 1996-09-24 |
NL1002666C2 true NL1002666C2 (nl) | 1998-10-01 |
Family
ID=19410117
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL1002666A NL1002666C2 (nl) | 1995-03-20 | 1996-03-20 | Werkwijze voor het vervaardigen van een ferro-elektrische dunne-filmcondensator. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5658820A (ko) |
JP (1) | JP3954667B2 (ko) |
KR (1) | KR100322695B1 (ko) |
NL (1) | NL1002666C2 (ko) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4386210B2 (ja) * | 1996-04-19 | 2009-12-16 | パナソニック株式会社 | 半導体装置 |
US6048435A (en) * | 1996-07-03 | 2000-04-11 | Tegal Corporation | Plasma etch reactor and method for emerging films |
KR100224730B1 (ko) * | 1996-12-17 | 1999-10-15 | 윤종용 | 반도체장치의 패턴 형성방법 및 이를 이용한 커패시터 제조방법 |
EP0865079A3 (en) * | 1997-03-13 | 1999-10-20 | Applied Materials, Inc. | A method for removing redeposited veils from etched platinum surfaces |
JP3257587B2 (ja) | 1997-05-23 | 2002-02-18 | 日本電気株式会社 | 誘電体膜を用いた半導体装置の製造方法 |
KR100445059B1 (ko) * | 1997-06-30 | 2004-11-16 | 주식회사 하이닉스반도체 | 반도체장치의캐패시터제조방법 |
US20010050267A1 (en) * | 1997-08-26 | 2001-12-13 | Hwang Jeng H. | Method for allowing a stable power transmission into a plasma processing chamber |
JPH11167037A (ja) * | 1997-10-02 | 1999-06-22 | Samsung Electron Co Ltd | 誘導結合プラズマ装置を利用する光導波路素子製造方法 |
KR100468698B1 (ko) * | 1997-12-16 | 2005-03-16 | 삼성전자주식회사 | 강유전체막용식각가스및이를이용한강유전체커패시터의제조방법 |
US6069035A (en) * | 1997-12-19 | 2000-05-30 | Lam Researh Corporation | Techniques for etching a transition metal-containing layer |
WO1999036956A1 (en) * | 1998-01-13 | 1999-07-22 | Applied Materials, Inc. | Etching methods for anisotropic platinum profile |
US6919168B2 (en) | 1998-01-13 | 2005-07-19 | Applied Materials, Inc. | Masking methods and etching sequences for patterning electrodes of high density RAM capacitors |
US6323132B1 (en) * | 1998-01-13 | 2001-11-27 | Applied Materials, Inc. | Etching methods for anisotropic platinum profile |
US6265318B1 (en) | 1998-01-13 | 2001-07-24 | Applied Materials, Inc. | Iridium etchant methods for anisotropic profile |
KR100269323B1 (ko) * | 1998-01-16 | 2000-10-16 | 윤종용 | 반도체장치의백금막식각방법 |
US6277760B1 (en) * | 1998-06-26 | 2001-08-21 | Lg Electronics Inc. | Method for fabricating ferroelectric capacitor |
JP2000200779A (ja) * | 1998-10-30 | 2000-07-18 | Toshiba Corp | エッチング方法,化学気相成長装置,化学気相成長装置のクリ―ニング方法,及び化学気相成長装置用の石英部材 |
US6255122B1 (en) | 1999-04-27 | 2001-07-03 | International Business Machines Corporation | Amorphous dielectric capacitors on silicon |
US6388285B1 (en) | 1999-06-04 | 2002-05-14 | International Business Machines Corporation | Feram cell with internal oxygen source and method of oxygen release |
KR100321728B1 (ko) * | 1999-06-30 | 2002-01-26 | 박종섭 | 플라즈마 펄스를 이용한 강유전체 메모리 소자 제조 방법 |
KR100333641B1 (ko) * | 1999-06-30 | 2002-04-24 | 박종섭 | 하부전극 손상을 방지할 수 있는 강유전체 메모리 소자의 캐패시터 형성 방법 |
US6436838B1 (en) | 2000-04-21 | 2002-08-20 | Applied Materials, Inc. | Method of patterning lead zirconium titanate and barium strontium titanate |
JP2001347499A (ja) * | 2000-06-05 | 2001-12-18 | Sony Corp | 微細装置の製造方法 |
KR20020002687A (ko) * | 2000-06-30 | 2002-01-10 | 박종섭 | 캐패시터 형성 방법 |
JP3733021B2 (ja) * | 2000-12-15 | 2006-01-11 | シャープ株式会社 | プラズマプロセス方法 |
US20030143853A1 (en) * | 2002-01-31 | 2003-07-31 | Celii Francis G. | FeRAM capacitor stack etch |
US20030176073A1 (en) * | 2002-03-12 | 2003-09-18 | Chentsau Ying | Plasma etching of Ir and PZT using a hard mask and C12/N2/O2 and C12/CHF3/O2 chemistry |
US6943039B2 (en) * | 2003-02-11 | 2005-09-13 | Applied Materials Inc. | Method of etching ferroelectric layers |
US20040226911A1 (en) * | 2003-04-24 | 2004-11-18 | David Dutton | Low-temperature etching environment |
JP2006313833A (ja) * | 2005-05-09 | 2006-11-16 | Seiko Epson Corp | 強誘電体キャパシタの形成方法、強誘電体キャパシタおよび電子デバイス |
US9299574B2 (en) | 2013-01-25 | 2016-03-29 | Applied Materials, Inc. | Silicon dioxide-polysilicon multi-layered stack etching with plasma etch chamber employing non-corrosive etchants |
US9129911B2 (en) | 2013-01-31 | 2015-09-08 | Applied Materials, Inc. | Boron-doped carbon-based hardmask etch processing |
JP6327295B2 (ja) | 2015-08-12 | 2018-05-23 | セントラル硝子株式会社 | ドライエッチング方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0363982A2 (en) * | 1988-10-14 | 1990-04-18 | Hitachi, Ltd. | Dry etching method |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4759823A (en) * | 1987-06-02 | 1988-07-26 | Krysalis Corporation | Method for patterning PLZT thin films |
US5046043A (en) * | 1987-10-08 | 1991-09-03 | National Semiconductor Corporation | Ferroelectric capacitor and memory cell including barrier and isolation layers |
US5081559A (en) * | 1991-02-28 | 1992-01-14 | Micron Technology, Inc. | Enclosed ferroelectric stacked capacitor |
-
1995
- 1995-03-20 KR KR1019950005784A patent/KR100322695B1/ko not_active IP Right Cessation
-
1996
- 1996-03-18 JP JP06141596A patent/JP3954667B2/ja not_active Expired - Fee Related
- 1996-03-19 US US08/616,491 patent/US5658820A/en not_active Expired - Fee Related
- 1996-03-20 NL NL1002666A patent/NL1002666C2/nl not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0363982A2 (en) * | 1988-10-14 | 1990-04-18 | Hitachi, Ltd. | Dry etching method |
Non-Patent Citations (1)
Title |
---|
CHARLET B ET AL: "DRY ETCHING OF PZT FILMS IN AN ECR PLASMA", PROCEEDINGS OF THE INTERNATIONAL COLLOQUIUM ON PLASMA PROCESSES, ANTIBES, JUAN LES PINS, JUNE 6 - 11, 1993, no. COLLOQUE 9, 6 June 1993 (1993-06-06), SOCIETE FRANCAISE DU VIDE, pages 334 - 339, XP000399274 * |
Also Published As
Publication number | Publication date |
---|---|
NL1002666A1 (nl) | 1996-09-24 |
JPH08264734A (ja) | 1996-10-11 |
US5658820A (en) | 1997-08-19 |
KR960036048A (ko) | 1996-10-28 |
JP3954667B2 (ja) | 2007-08-08 |
KR100322695B1 (ko) | 2002-05-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AD1A | A request for search or an international type search has been filed | ||
RD2N | Patents in respect of which a decision has been taken or a report has been made (novelty report) |
Effective date: 19980525 |
|
PD2B | A search report has been drawn up | ||
VD1 | Lapsed due to non-payment of the annual fee |
Effective date: 20091001 |