MY126717A - Cmp composition containing silane modified abrasive particles. - Google Patents

Cmp composition containing silane modified abrasive particles.

Info

Publication number
MY126717A
MY126717A MYPI20003110A MY126717A MY 126717 A MY126717 A MY 126717A MY PI20003110 A MYPI20003110 A MY PI20003110A MY 126717 A MY126717 A MY 126717A
Authority
MY
Malaysia
Prior art keywords
abrasive particles
composition containing
silane modified
containing silane
modified abrasive
Prior art date
Application number
Other languages
English (en)
Inventor
Wang Shumin
K Grumbine Steven
C Streinz Christopher
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Publication of MY126717A publication Critical patent/MY126717A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • H10P52/403—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Composite Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Pigments, Carbon Blacks, Or Wood Stains (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Disintegrating Or Milling (AREA)
MYPI20003110 1999-07-07 2000-07-07 Cmp composition containing silane modified abrasive particles. MY126717A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14270699P 1999-07-07 1999-07-07

Publications (1)

Publication Number Publication Date
MY126717A true MY126717A (en) 2006-10-31

Family

ID=22500954

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20003110 MY126717A (en) 1999-07-07 2000-07-07 Cmp composition containing silane modified abrasive particles.

Country Status (14)

Country Link
US (2) US6582623B1 (enExample)
EP (1) EP1200532B1 (enExample)
JP (2) JP2003520283A (enExample)
KR (1) KR100590665B1 (enExample)
CN (1) CN1209429C (enExample)
AT (1) ATE338100T1 (enExample)
AU (1) AU5785700A (enExample)
CA (1) CA2378492A1 (enExample)
DE (1) DE60030444T2 (enExample)
HK (1) HK1046151A1 (enExample)
IL (1) IL147039A0 (enExample)
MY (1) MY126717A (enExample)
TW (1) TW538110B (enExample)
WO (1) WO2001004226A2 (enExample)

Families Citing this family (115)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6592776B1 (en) * 1997-07-28 2003-07-15 Cabot Microelectronics Corporation Polishing composition for metal CMP
KR100590665B1 (ko) * 1999-07-07 2006-06-19 캐보트 마이크로일렉트로닉스 코포레이션 실란으로 개질된 연마제 입자를 함유하는 ｃｍｐ 조성물
EP1263906A1 (en) 2000-02-02 2002-12-11 Rodel Holdings, Inc. Polishing composition
US6646348B1 (en) * 2000-07-05 2003-11-11 Cabot Microelectronics Corporation Silane containing polishing composition for CMP
WO2002061810A1 (en) * 2001-01-16 2002-08-08 Cabot Microelectronics Corporation Ammonium oxalate-containing polishing system and method
US6656241B1 (en) * 2001-06-14 2003-12-02 Ppg Industries Ohio, Inc. Silica-based slurry
US6953389B2 (en) * 2001-08-09 2005-10-11 Cheil Industries, Inc. Metal CMP slurry compositions that favor mechanical removal of oxides with reduced susceptibility to micro-scratching
TW591089B (en) * 2001-08-09 2004-06-11 Cheil Ind Inc Slurry composition for use in chemical mechanical polishing of metal wiring
DE60215095T2 (de) 2001-09-19 2007-05-10 Parker-Hannifin Corp., Cleveland Motorantrieb und System
JPWO2003038883A1 (ja) * 2001-10-31 2005-02-24 日立化成工業株式会社 研磨液及び研磨方法
JP2003277731A (ja) * 2002-03-26 2003-10-02 Catalysts & Chem Ind Co Ltd 研磨用粒子および研磨材
US6716771B2 (en) * 2002-04-09 2004-04-06 Intel Corporation Method for post-CMP conversion of a hydrophobic surface of a low-k dielectric layer to a hydrophilic surface
US6833186B2 (en) 2002-04-10 2004-12-21 Ppg Industries Ohio, Inc. Mineral-filled coatings having enhanced abrasion resistance and wear clarity and methods for using the same
JP4554142B2 (ja) * 2002-04-30 2010-09-29 日揮触媒化成株式会社 基板洗浄用粒子および該基板洗浄用粒子を含む洗浄材、基材の洗浄方法
US6706398B1 (en) * 2002-09-13 2004-03-16 Dow Corning Corporation Organosilicon compounds and blends for treating silica
KR100442549B1 (ko) * 2002-10-16 2004-07-30 제일모직주식회사 연마성능이 우수하고 안정성이 향상된, 금속 연마를 위한ｃｍｐ용 슬러리 조성물 및 그 제조방법
US6893476B2 (en) 2002-12-09 2005-05-17 Dupont Air Products Nanomaterials Llc Composition and associated methods for chemical mechanical planarization having high selectivity for metal removal
US7044836B2 (en) 2003-04-21 2006-05-16 Cabot Microelectronics Corporation Coated metal oxide particles for CMP
US20070015448A1 (en) * 2003-08-07 2007-01-18 Ppg Industries Ohio, Inc. Polishing pad having edge surface treatment
IL157681A0 (en) 2003-09-01 2004-03-28 J G Systems Inc Improved abrasives for chemical-mechanical polishing applications
US7247567B2 (en) * 2004-06-16 2007-07-24 Cabot Microelectronics Corporation Method of polishing a tungsten-containing substrate
FR2872823B1 (fr) * 2004-07-08 2006-10-06 Kemesys Composition de polissage mecano chimique, procede de preparation, et utilisation
US20060089095A1 (en) 2004-10-27 2006-04-27 Swisher Robert G Polyurethane urea polishing pad
US20060096179A1 (en) * 2004-11-05 2006-05-11 Cabot Microelectronics Corporation CMP composition containing surface-modified abrasive particles
KR100704831B1 (ko) * 2005-06-01 2007-04-09 주식회사 아이너스기술 3차원 스캐너를 이용한 실시간 검사 안내 시스템 및 방법
US7294049B2 (en) * 2005-09-01 2007-11-13 Micron Technology, Inc. Method and apparatus for removing material from microfeature workpieces
US9074118B2 (en) 2006-07-12 2015-07-07 Cabot Microelectronics Corporation CMP method for metal-containing substrates
US7691287B2 (en) * 2007-01-31 2010-04-06 Dupont Air Products Nanomaterials Llc Method for immobilizing ligands and organometallic compounds on silica surface, and their application in chemical mechanical planarization
CN101338082A (zh) * 2007-07-06 2009-01-07 安集微电子（上海）有限公司 改性二氧化硅溶胶及其制备方法和应用
CN101802116B (zh) * 2007-09-21 2014-03-12 卡伯特微电子公司 利用经氨基硅烷处理的研磨剂颗粒的抛光组合物和方法
JP5519507B2 (ja) * 2007-09-21 2014-06-11 キャボット マイクロエレクトロニクス コーポレイション アミノシランを用いて処理した研磨剤粒子を利用する研磨組成物および研磨方法
UA100413C2 (en) 2008-04-18 2012-12-25 Saint Gobain Abrasives Inc Hydrophilic and hydrophobic silane surface modification of abrasive grains
EP2389417B1 (en) 2009-01-20 2017-03-15 Cabot Corporation Compositons comprising silane modified metal oxides
CN102762684A (zh) * 2010-02-24 2012-10-31 巴斯夫欧洲公司 研磨制品，其制备方法及其应用方法
KR101243331B1 (ko) * 2010-12-17 2013-03-13 솔브레인 주식회사 화학 기계적 연마 슬러리 조성물 및 이를 이용하는 반도체 소자의 제조 방법
BR112013016734A2 (pt) 2010-12-31 2019-09-24 Saint Gobain Ceramics partículas abrasivas com formas particulares e métodos de deformação de tais partículas
CN103764349B (zh) 2011-06-30 2017-06-09 圣戈本陶瓷及塑料股份有限公司 液相烧结碳化硅研磨颗粒
WO2013003830A2 (en) 2011-06-30 2013-01-03 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particles of silicon nitride
KR101704411B1 (ko) 2011-09-26 2017-02-08 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 연마 미립자 소재를 포함하는 연마 물품, 연마 미립자 소재를 이용하는 코팅 연마제 및 형성 방법
KR20140106713A (ko) 2011-12-30 2014-09-03 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자 및 이의 형성방법
KR101736755B1 (ko) 2011-12-30 2017-05-17 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 복합 형상화 연마입자들 및 이의 형성방법
WO2013102176A1 (en) 2011-12-30 2013-07-04 Saint-Gobain Ceramics & Plastics, Inc. Forming shaped abrasive particles
US8840696B2 (en) 2012-01-10 2014-09-23 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
CA3170246A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having complex shapes and methods of forming same
WO2013149209A1 (en) 2012-03-30 2013-10-03 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
US8778212B2 (en) * 2012-05-22 2014-07-15 Cabot Microelectronics Corporation CMP composition containing zirconia particles and method of use
IN2014DN10170A (enExample) 2012-05-23 2015-08-21 Saint Gobain Ceramics
KR20150023034A (ko) 2012-06-29 2015-03-04 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 특정 형상을 가지는 연마입자들 및 이러한 입자들 형성방법
BR112015008144B1 (pt) 2012-10-15 2022-01-04 Saint-Gobain Abrasives, Inc. Partículas abrasivas tendo formatos particulares e métodos para a formação de tais partículas
JP6057706B2 (ja) * 2012-12-28 2017-01-11 株式会社フジミインコーポレーテッド 研磨用組成物
WO2014106173A1 (en) 2012-12-31 2014-07-03 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
KR101427883B1 (ko) * 2013-02-08 2014-08-07 주식회사 케이씨텍 표면 개질된 연마입자, 그의 제조 방법 및 그를 포함하는 슬러리 조성물
EP2978566B1 (en) 2013-03-29 2024-04-24 Saint-Gobain Abrasives, Inc. Abrasive particles having particular shapes and methods of forming such particles
US10005171B2 (en) 2013-06-24 2018-06-26 3M Innovative Properties Company Abrasive particles, method of making abrasive particles, and abrasive articles
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
CN104371553B (zh) * 2013-08-14 2017-10-13 安集微电子（上海）有限公司 一种化学机械抛光液以及应用
CN104371551B (zh) * 2013-08-14 2018-01-12 安集微电子（上海）有限公司 一种碱性阻挡层化学机械抛光液
KR20160057397A (ko) * 2013-09-20 2016-05-23 가부시키가이샤 후지미인코퍼레이티드 연마용 조성물
CA2924738C (en) 2013-09-30 2022-06-07 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and methods of forming same
JPWO2015087771A1 (ja) * 2013-12-13 2017-03-16 株式会社フジミインコーポレーテッド 金属酸化物膜付き物品
CN104745087B (zh) * 2013-12-25 2018-07-24 安集微电子（上海）有限公司 一种化学机械抛光液以及抛光方法
CN104745083B (zh) * 2013-12-25 2018-09-14 安集微电子（上海）有限公司 一种化学机械抛光液以及抛光方法
BR112016015029B1 (pt) 2013-12-31 2021-12-14 Saint-Gobain Abrasifs Artigo abrasivo incluindo partículas abrasivas moldadas
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
US9303188B2 (en) 2014-03-11 2016-04-05 Cabot Microelectronics Corporation Composition for tungsten CMP
US9238754B2 (en) 2014-03-11 2016-01-19 Cabot Microelectronics Corporation Composition for tungsten CMP
US9303189B2 (en) 2014-03-11 2016-04-05 Cabot Microelectronics Corporation Composition for tungsten CMP
US9309442B2 (en) 2014-03-21 2016-04-12 Cabot Microelectronics Corporation Composition for tungsten buffing
US9127187B1 (en) 2014-03-24 2015-09-08 Cabot Microelectronics Corporation Mixed abrasive tungsten CMP composition
US9303190B2 (en) 2014-03-24 2016-04-05 Cabot Microelectronics Corporation Mixed abrasive tungsten CMP composition
KR101884178B1 (ko) 2014-04-14 2018-08-02 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마 입자들을 포함하는 연마 물품
ES2972193T3 (es) 2014-04-14 2024-06-11 Saint Gobain Ceramics Artículo abrasivo que incluye partículas abrasivas conformadas
US9902045B2 (en) 2014-05-30 2018-02-27 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
CN106661431B (zh) 2014-06-25 2019-06-28 嘉柏微电子材料股份公司 铜阻挡物的化学机械抛光组合物
WO2015200679A1 (en) * 2014-06-25 2015-12-30 Cabot Microelectronics Corporation Tungsten chemical-mechanical polishing composition
KR102464630B1 (ko) 2014-06-25 2022-11-08 씨엠씨 머티리얼즈, 인코포레이티드 콜로이드성 실리카 화학적-기계적 연마 조성물
CN104263248B (zh) * 2014-09-26 2016-06-29 深圳市力合材料有限公司 一种适用于低下压力的弱酸性铜抛光液
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
CN105985522B (zh) * 2014-12-24 2019-06-28 财团法人工业技术研究院 高分支聚硅氧烷与混成材料及其形成方法
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
WO2016161157A1 (en) 2015-03-31 2016-10-06 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
KR102006615B1 (ko) 2015-06-11 2019-08-02 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마 입자들을 포함하는 연마 물품
JP6408453B2 (ja) * 2015-11-16 2018-10-17 信越化学工業株式会社 研磨組成物及び研磨方法
EP4071224A3 (en) 2016-05-10 2023-01-04 Saint-Gobain Ceramics and Plastics, Inc. Methods of forming abrasive articles
CN121249321A (zh) 2016-05-10 2026-01-02 圣戈本陶瓷及塑料股份有限公司 磨料颗粒及其形成方法
US11152208B2 (en) * 2016-09-15 2021-10-19 Flosfia Inc. Semiconductor film, method of forming semiconductor film, complex compound for doping, and method of doping
EP4349896A3 (en) 2016-09-29 2024-06-12 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
US9803108B1 (en) 2016-10-19 2017-10-31 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Aqueous compositions of stabilized aminosilane group containing silica particles
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
WO2018236989A1 (en) 2017-06-21 2018-12-27 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
WO2019012388A1 (en) * 2017-07-11 2019-01-17 3M Innovative Properties Company ABRASIVE ARTICLES COMPRISING CONFORMABLE COATINGS AND POLISHING SYSTEM COMPRISING THE SAME
JP7031485B2 (ja) * 2018-05-11 2022-03-08 昭和電工マテリアルズ株式会社 Ｃｍｐ研磨剤及びその製造方法、並びにｃｍｐ研磨方法
US12030781B2 (en) * 2019-03-29 2024-07-09 The Coretec Group Inc. Method of preparing cyclosilane
KR102525287B1 (ko) * 2019-10-18 2023-04-24 삼성에스디아이 주식회사 구리 막 연마용 ｃｍｐ 슬러리 조성물 및 이를 이용한 구리 막 연마 방법
CN111087930A (zh) * 2019-12-23 2020-05-01 长江存储科技有限责任公司 一种化学机械抛光研磨剂的制备方法及化学机械抛光方法
WO2021133876A1 (en) 2019-12-27 2021-07-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
WO2021133888A1 (en) 2019-12-27 2021-07-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
CN119238386A (zh) 2019-12-27 2025-01-03 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
KR102589505B1 (ko) * 2020-03-03 2023-10-13 삼성에스디아이 주식회사 구리 연마용 ｃｍｐ 슬러리 조성물 및 이를 이용한 구리 막 연마 방법
KR102619857B1 (ko) * 2020-05-20 2023-12-29 삼성에스디아이 주식회사 텅스텐 연마용 cmp 슬러리 조성물 및 이를 이용한 텅스텐 연마 방법
KR102415203B1 (ko) * 2020-08-24 2022-06-30 에스케이씨솔믹스 주식회사 연마패드 및 이를 이용한 반도체 소자의 제조방법
KR102577164B1 (ko) * 2020-12-29 2023-09-08 에스케이엔펄스 주식회사 반도체 공정용 연마 조성물 및 연마 조성물을 적용한 기판의 연마방법
CN112680187A (zh) * 2021-01-04 2021-04-20 上海晖研材料科技有限公司 一种表面改性的二氧化硅及含其的磨料组合物
KR20220131152A (ko) * 2021-03-19 2022-09-27 가부시키가이샤 후지미인코퍼레이티드 연마용 조성물, 연마 방법, 및 반도체 기판의 제조 방법
KR20230055586A (ko) * 2021-10-19 2023-04-26 에스케이하이닉스 주식회사 보론 실리콘 화합물 연마용 cmp 슬러리 조성물과 이를 이용한 cmp 방법 및 반도체 소자의 제조 방법
KR102765056B1 (ko) * 2021-10-21 2025-02-06 한남대학교 산학협력단 화학-기계적 연마 슬러리용 무기산화물 입자의 산화제 기능화를 위한 실란 링커의 제조방법
US12496686B2 (en) 2021-12-30 2025-12-16 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming same
EP4457055A4 (en) 2021-12-30 2025-12-24 Saint Gobain Abrasives Inc ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
MX2024007593A (es) 2021-12-30 2024-08-20 Saint Gobain Abrasives Inc Artículos abrasivos y métodos de formación de los mismos.
KR20230106938A (ko) * 2022-01-07 2023-07-14 삼성에스디아이 주식회사 텅스텐 패턴 웨이퍼 연마용 ｃｍｐ 슬러리 조성물 및 이를 이용한 텅스텐 패턴 웨이퍼의 연마 방법
WO2025111218A1 (en) 2023-11-20 2025-05-30 Versum Materials Us, Llc Cmp formulations and methods for polishing polysilicon films
WO2025231281A1 (en) 2024-05-03 2025-11-06 Versum Materials Us, Llc Cmp formulations and methods for polishing ruthenium films

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4563483A (en) 1983-07-06 1986-01-07 Creative Products Resource Ltd. Concrete cleaning composition
US5226930A (en) * 1988-06-03 1993-07-13 Monsanto Japan, Ltd. Method for preventing agglomeration of colloidal silica and silicon wafer polishing composition using the same
JP3303544B2 (ja) 1994-07-27 2002-07-22 ソニー株式会社 半導体装置の製造方法および配線層表面研磨用のスラリーおよび配線層表面研磨用のスラリーの製造方法
US5645736A (en) 1995-12-29 1997-07-08 Symbios Logic Inc. Method for polishing a wafer
JP3927270B2 (ja) * 1996-12-27 2007-06-06 富士通株式会社 研磨剤、研磨方法および半導体装置の製造方法
US6299659B1 (en) * 1998-08-05 2001-10-09 Showa Denko K.K. Polishing material composition and polishing method for polishing LSI devices
US6372648B1 (en) 1998-11-16 2002-04-16 Texas Instruments Incorporated Integrated circuit planarization method
KR100590665B1 (ko) * 1999-07-07 2006-06-19 캐보트 마이크로일렉트로닉스 코포레이션 실란으로 개질된 연마제 입자를 함유하는 ｃｍｐ 조성물

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ATE338100T1 (de) 2006-09-15
CN1367809A (zh) 2002-09-04
WO2001004226A3 (en) 2002-10-03
KR100590665B1 (ko) 2006-06-19
KR20020026940A (ko) 2002-04-12
EP1200532B1 (en) 2006-08-30
IL147039A0 (en) 2002-08-14
JP2003520283A (ja) 2003-07-02
US20030209522A1 (en) 2003-11-13
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AU5785700A (en) 2001-01-30
US6582623B1 (en) 2003-06-24
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CN1209429C (zh) 2005-07-06
WO2001004226A2 (en) 2001-01-18

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