KR970705458A - 다이아몬드 같은 코팅층을 구비한 연마 제품 및 그 제조 방법(abrasive article having a diamond-like coating layer and method) - Google Patents

다이아몬드 같은 코팅층을 구비한 연마 제품 및 그 제조 방법(abrasive article having a diamond-like coating layer and method) Download PDF

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KR970705458A
KR970705458A KR1019970701118A KR19970701118A KR970705458A KR 970705458 A KR970705458 A KR 970705458A KR 1019970701118 A KR1019970701118 A KR 1019970701118A KR 19970701118 A KR19970701118 A KR 19970701118A KR 970705458 A KR970705458 A KR 970705458A
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South Korea
Prior art keywords
abrasive
coating
substrate
diamond
layer
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KR1019970701118A
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English (en)
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마틴 로렌스 엘
지. 오닐 데이빗
엠. 데이빗 모제스
Original Assignee
워랜 리차드 보비
미네소타 마이닝 앤드 매뉴팩츄어링 컴패니
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Publication of KR970705458A publication Critical patent/KR970705458A/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
    • B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
    • B24D3/004—Flexible supporting members, e.g. paper, woven, plastic materials with special coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

연마 제품은, 하나 이상의 주표면을 갖는 시트 같은 기질과; 기질의 하나 이상의 주평면에 고착되어 있으며 다수의 연마 입자들과, 유기 접합 매체를 포함하는 연마 코팅과; 다이아몬드 같은 탄소 필름을 포함하는 단단면 탄소 코팅층을 구비한다. 코팅된 연마 제품 내의 단단한 탄소 코팅층은 탑 코트로서 제공될 수 있고 또는 선택적으로 연마 코팅과, 유기 접찹층을 기초로 하는 덮개층 사이에 위치할 수 있다. 본 발명은 또한 이러한 연마 제품을 제공하는 방법에 관한 것이다.

Description

다이아몬드 같은 코팅층을 구비한 연마 제품 및 그 제조 방법(ABRASIVE ARTICLE HAVING A DIAMOND-LIKE COATING LAYER AND METHOD)
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 연마 제품 일부의 확대 단면도, 제2도는 본 발명에 따른 연마 제품의 또 다른 실시예의 확대 단면 부분도, 제3도는 본 발명에 따른 연마 제품의 또 다른 실시예의 확대 단면 부분도, 제4도는 본 발명에 따른 연마 제품의 또 다른 실시예의 확대 단면 부분도.

Claims (10)

  1. (a) 하나 이상의 주표면을 갖는 시트 같은 구조를 구비한 기질과; (b) 상기 기질의 하나 이상의 주표면에 고착되어 있으며, 다수의 연마 입자들 및 유기 접합 매체를 포함하는 연마 코팅과; (c) 다이아몬드 같은 탄소 필름을 포함하는 단단한 탄소 코팅층을 포함하는 것을 특징으로 하는 연마 제품.
  2. 제1항에 있어서, 상기 연마 코팅은 비평면의 외측 표면과, 대향 내측 표면을 포함하며, 상기 내측 표면은 상기 비평면의 외측 표면보다 상기 기질의 상기 주표면에 더 가깝게 위치하고 있으며, 상기 내측 표면은 상기 기질의 상기 주표면에 접착성있게 부착되어 있으며, 상기 비평면의 외측 표면은 상기 주표면으로부터 돌출하여 3차원적으로 연장하는 것을 특징으로 하는 연마 제품.
  3. 제1항에 있어서, 상기 연마 코팅은 상기 기질에 부착되어 있는 다수의 정밀한 형태의 3차원 연마 복합물을 포함하며, 상기 연마 복합물은 각각 유기 접합제에 분산된 다수의 연마 입자들을 포함하는 것을 특징으로 하는 연마 제품.
  4. 제1항에 있어서, 상기 연마 제품은 상기 단단한 탄소 코팅층 위로 고착된 유기 접합 매체를 포함하는 제1사이즈 코트 층을 추가로 포함하며, 상기 단단한 탄소 코팅층은 상기 연마 코팅과 상기 제1사이즈 코트층 사이에 위치하고 있는 것을 특징으로 하는 연마 제품.
  5. 제4항에 있어서, 상기 연마 코팅과 상기 단단한 탄소 코팅층 사이에 위치한 유기 접합 매체를 포함하는 제2사이즈 코트 층을 추가로 포함하는 것을 특징으로 하는 연마 제품.
  6. 제5항 또는 제8항에 있어서, 상기 단단한 탄소 코팅층은 평균 50㎛ 미만의 두께를 포함하는 것을 특징으로 하는 연마 제품.
  7. 제5항 또는 제8항에 있어서, 상기 다이아몬드 같은 탄소 필름은 26eV 이상의 플라스몬 에너지를 포함하는 것을 특징으로 하는 연마 제품.
  8. (a) 유기 접합 매체와 다수의 연마 입자들을 포함하며, 노출된 연마 표면을 구비하는 연마층을 제공하는 단계와; (b) 상기 연마 표면 위로 다이아몬드 같은 탄소 코팅을 가하는 단계를 포함하는 것을 특징으로 하는, 선행항들 중 어느 한 항에 따른 연마 제품을 제조하는 방법.
  9. 제8항에 있어서, 상기 연마층을 제공하는 (a) 단계는, (ⅰ) 하나 이상의 주표면을 갖는 시트 같은 구조를 구비한 기질을 제공하는 단계와; (ⅱ) 상기 기질의 상기 하나 이상의 주표면 상에 다수의 연마 입자들과 유기 접합 매체를 포함하는 연마 코팅을 형성시키는 단계를 포함하며, 그리고 상기 다이아몬드 같은 탄소 코팅을 가하는 (b) 단계는, (ⅰ) 음극을 형성하는 탄소 성분들의 플라즈마를 발생시키기 위하여 상기 탄소질의 음극에 충분한 전류를 가하는 단가와; (ⅱ) 상기 플라즈마가 양극을 통하는 경로로 향하도록 하는 단계와; (ⅱ) 상기 연마 코팅 상에 다이아몬드 같은 탄소 필름을 형성하기 위하여, 상기 유기 접합 매체의 실질적인 분해를 효과적으로 방지하기에 충분히 낮은 온도에서 상기 경로 안쪽에 상기 연마 코팅을 유지하는 단계와; (ⅳ) 약 100A 이상의 평균 두께의 상기 다이아몬드 같은 탄소 필름이 달성된 후에 (b) (ⅰ), (b) (ⅱ) 및 (b) (ⅲ) 단계를 중단시키는 단계를 포함하는 것을 특징으로 하는 제조 방법.
  10. 제9항에 있어서, (a) (ⅱ) 단계 후에 그리고 (b) (ⅰ) 단계 이전에, 상기 연마 입자들로부터 잔해를 제거하는 방식으로 그리고 제거하기에 효과적인 시간 동안 상기 연마 코팅의 상기 연마 입자들 부근에 Ar 플라즈마를 형성시키는 단계를 추가로 포함하는 것을 특징으로 하는 제조 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970701118A 1994-08-24 1995-08-08 다이아몬드 같은 코팅층을 구비한 연마 제품 및 그 제조 방법(abrasive article having a diamond-like coating layer and method) KR970705458A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/294,919 1994-08-24
US08/294,919 US5551959A (en) 1994-08-24 1994-08-24 Abrasive article having a diamond-like coating layer and method for making same
PCT/US1995/010125 WO1996005942A1 (en) 1994-08-24 1995-08-08 Abrasive article having a diamond-like coating layer and method

Publications (1)

Publication Number Publication Date
KR970705458A true KR970705458A (ko) 1997-10-09

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KR1019970701118A KR970705458A (ko) 1994-08-24 1995-08-08 다이아몬드 같은 코팅층을 구비한 연마 제품 및 그 제조 방법(abrasive article having a diamond-like coating layer and method)

Country Status (7)

Country Link
US (2) US5551959A (ko)
EP (1) EP0777552A1 (ko)
JP (1) JPH10504495A (ko)
KR (1) KR970705458A (ko)
BR (1) BR9508627A (ko)
CA (1) CA2196674A1 (ko)
WO (1) WO1996005942A1 (ko)

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CA2196674A1 (en) 1996-02-29
US5707409A (en) 1998-01-13
BR9508627A (pt) 1997-09-30
US5551959A (en) 1996-09-03
WO1996005942A1 (en) 1996-02-29
EP0777552A1 (en) 1997-06-11

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