KR970705458A - 다이아몬드 같은 코팅층을 구비한 연마 제품 및 그 제조 방법(abrasive article having a diamond-like coating layer and method) - Google Patents

다이아몬드 같은 코팅층을 구비한 연마 제품 및 그 제조 방법(abrasive article having a diamond-like coating layer and method) Download PDF

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KR970705458A
KR970705458A KR1019970701118A KR19970701118A KR970705458A KR 970705458 A KR970705458 A KR 970705458A KR 1019970701118 A KR1019970701118 A KR 1019970701118A KR 19970701118 A KR19970701118 A KR 19970701118A KR 970705458 A KR970705458 A KR 970705458A
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South Korea
Prior art keywords
abrasive
coating
substrate
diamond
layer
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KR1019970701118A
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English (en)
Inventor
마틴 로렌스 엘
지. 오닐 데이빗
엠. 데이빗 모제스
Original Assignee
워랜 리차드 보비
미네소타 마이닝 앤드 매뉴팩츄어링 컴패니
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Publication of KR970705458A publication Critical patent/KR970705458A/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
    • B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
    • B24D3/004—Flexible supporting members, e.g. paper, woven, plastic materials with special coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

연마 제품은, 하나 이상의 주표면을 갖는 시트 같은 기질과; 기질의 하나 이상의 주평면에 고착되어 있으며 다수의 연마 입자들과, 유기 접합 매체를 포함하는 연마 코팅과; 다이아몬드 같은 탄소 필름을 포함하는 단단면 탄소 코팅층을 구비한다. 코팅된 연마 제품 내의 단단한 탄소 코팅층은 탑 코트로서 제공될 수 있고 또는 선택적으로 연마 코팅과, 유기 접찹층을 기초로 하는 덮개층 사이에 위치할 수 있다. 본 발명은 또한 이러한 연마 제품을 제공하는 방법에 관한 것이다.

Description

다이아몬드 같은 코팅층을 구비한 연마 제품 및 그 제조 방법(ABRASIVE ARTICLE HAVING A DIAMOND-LIKE COATING LAYER AND METHOD)
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 연마 제품 일부의 확대 단면도, 제2도는 본 발명에 따른 연마 제품의 또 다른 실시예의 확대 단면 부분도, 제3도는 본 발명에 따른 연마 제품의 또 다른 실시예의 확대 단면 부분도, 제4도는 본 발명에 따른 연마 제품의 또 다른 실시예의 확대 단면 부분도.

Claims (10)

  1. (a) 하나 이상의 주표면을 갖는 시트 같은 구조를 구비한 기질과; (b) 상기 기질의 하나 이상의 주표면에 고착되어 있으며, 다수의 연마 입자들 및 유기 접합 매체를 포함하는 연마 코팅과; (c) 다이아몬드 같은 탄소 필름을 포함하는 단단한 탄소 코팅층을 포함하는 것을 특징으로 하는 연마 제품.
  2. 제1항에 있어서, 상기 연마 코팅은 비평면의 외측 표면과, 대향 내측 표면을 포함하며, 상기 내측 표면은 상기 비평면의 외측 표면보다 상기 기질의 상기 주표면에 더 가깝게 위치하고 있으며, 상기 내측 표면은 상기 기질의 상기 주표면에 접착성있게 부착되어 있으며, 상기 비평면의 외측 표면은 상기 주표면으로부터 돌출하여 3차원적으로 연장하는 것을 특징으로 하는 연마 제품.
  3. 제1항에 있어서, 상기 연마 코팅은 상기 기질에 부착되어 있는 다수의 정밀한 형태의 3차원 연마 복합물을 포함하며, 상기 연마 복합물은 각각 유기 접합제에 분산된 다수의 연마 입자들을 포함하는 것을 특징으로 하는 연마 제품.
  4. 제1항에 있어서, 상기 연마 제품은 상기 단단한 탄소 코팅층 위로 고착된 유기 접합 매체를 포함하는 제1사이즈 코트 층을 추가로 포함하며, 상기 단단한 탄소 코팅층은 상기 연마 코팅과 상기 제1사이즈 코트층 사이에 위치하고 있는 것을 특징으로 하는 연마 제품.
  5. 제4항에 있어서, 상기 연마 코팅과 상기 단단한 탄소 코팅층 사이에 위치한 유기 접합 매체를 포함하는 제2사이즈 코트 층을 추가로 포함하는 것을 특징으로 하는 연마 제품.
  6. 제5항 또는 제8항에 있어서, 상기 단단한 탄소 코팅층은 평균 50㎛ 미만의 두께를 포함하는 것을 특징으로 하는 연마 제품.
  7. 제5항 또는 제8항에 있어서, 상기 다이아몬드 같은 탄소 필름은 26eV 이상의 플라스몬 에너지를 포함하는 것을 특징으로 하는 연마 제품.
  8. (a) 유기 접합 매체와 다수의 연마 입자들을 포함하며, 노출된 연마 표면을 구비하는 연마층을 제공하는 단계와; (b) 상기 연마 표면 위로 다이아몬드 같은 탄소 코팅을 가하는 단계를 포함하는 것을 특징으로 하는, 선행항들 중 어느 한 항에 따른 연마 제품을 제조하는 방법.
  9. 제8항에 있어서, 상기 연마층을 제공하는 (a) 단계는, (ⅰ) 하나 이상의 주표면을 갖는 시트 같은 구조를 구비한 기질을 제공하는 단계와; (ⅱ) 상기 기질의 상기 하나 이상의 주표면 상에 다수의 연마 입자들과 유기 접합 매체를 포함하는 연마 코팅을 형성시키는 단계를 포함하며, 그리고 상기 다이아몬드 같은 탄소 코팅을 가하는 (b) 단계는, (ⅰ) 음극을 형성하는 탄소 성분들의 플라즈마를 발생시키기 위하여 상기 탄소질의 음극에 충분한 전류를 가하는 단가와; (ⅱ) 상기 플라즈마가 양극을 통하는 경로로 향하도록 하는 단계와; (ⅱ) 상기 연마 코팅 상에 다이아몬드 같은 탄소 필름을 형성하기 위하여, 상기 유기 접합 매체의 실질적인 분해를 효과적으로 방지하기에 충분히 낮은 온도에서 상기 경로 안쪽에 상기 연마 코팅을 유지하는 단계와; (ⅳ) 약 100A 이상의 평균 두께의 상기 다이아몬드 같은 탄소 필름이 달성된 후에 (b) (ⅰ), (b) (ⅱ) 및 (b) (ⅲ) 단계를 중단시키는 단계를 포함하는 것을 특징으로 하는 제조 방법.
  10. 제9항에 있어서, (a) (ⅱ) 단계 후에 그리고 (b) (ⅰ) 단계 이전에, 상기 연마 입자들로부터 잔해를 제거하는 방식으로 그리고 제거하기에 효과적인 시간 동안 상기 연마 코팅의 상기 연마 입자들 부근에 Ar 플라즈마를 형성시키는 단계를 추가로 포함하는 것을 특징으로 하는 제조 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970701118A 1994-08-24 1995-08-08 다이아몬드 같은 코팅층을 구비한 연마 제품 및 그 제조 방법(abrasive article having a diamond-like coating layer and method) KR970705458A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/294,919 1994-08-24
US08/294,919 US5551959A (en) 1994-08-24 1994-08-24 Abrasive article having a diamond-like coating layer and method for making same
PCT/US1995/010125 WO1996005942A1 (en) 1994-08-24 1995-08-08 Abrasive article having a diamond-like coating layer and method

Publications (1)

Publication Number Publication Date
KR970705458A true KR970705458A (ko) 1997-10-09

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KR1019970701118A KR970705458A (ko) 1994-08-24 1995-08-08 다이아몬드 같은 코팅층을 구비한 연마 제품 및 그 제조 방법(abrasive article having a diamond-like coating layer and method)

Country Status (7)

Country Link
US (2) US5551959A (ko)
EP (1) EP0777552A1 (ko)
JP (1) JPH10504495A (ko)
KR (1) KR970705458A (ko)
BR (1) BR9508627A (ko)
CA (1) CA2196674A1 (ko)
WO (1) WO1996005942A1 (ko)

Families Citing this family (112)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5681612A (en) * 1993-06-17 1997-10-28 Minnesota Mining And Manufacturing Company Coated abrasives and methods of preparation
US5551959A (en) * 1994-08-24 1996-09-03 Minnesota Mining And Manufacturing Company Abrasive article having a diamond-like coating layer and method for making same
AU5346596A (en) * 1995-04-24 1996-11-18 Toyo Kohan Co. Ltd. Articles with diamond coating formed thereon by vapor-phase synthesis
AT1239U1 (de) * 1996-03-27 1997-01-27 Plansee Ag Verfahren zur herstellung eines verbundwerkstoffes
WO1998016347A1 (fr) * 1996-10-15 1998-04-23 Nippon Steel Corporation Appareil ebarbeur pour tampon de polissage de substrat semi-conducteur, son procede de fabrication et procede de polissage chimico-mecanique au moyen dudit appareil ebarbeur
US6517532B1 (en) 1997-05-15 2003-02-11 Palomar Medical Technologies, Inc. Light energy delivery head
US5879775A (en) * 1996-12-12 1999-03-09 Eastman Kodak Compnay Protective inorganic and DLC coatings for plastic media such as plastic cards
US6231629B1 (en) * 1997-03-07 2001-05-15 3M Innovative Properties Company Abrasive article for providing a clear surface finish on glass
US9409280B2 (en) 1997-04-04 2016-08-09 Chien-Min Sung Brazed diamond tools and methods for making the same
US9199357B2 (en) 1997-04-04 2015-12-01 Chien-Min Sung Brazed diamond tools and methods for making the same
US9868100B2 (en) 1997-04-04 2018-01-16 Chien-Min Sung Brazed diamond tools and methods for making the same
US9463552B2 (en) 1997-04-04 2016-10-11 Chien-Min Sung Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods
US9238207B2 (en) 1997-04-04 2016-01-19 Chien-Min Sung Brazed diamond tools and methods for making the same
US9221154B2 (en) 1997-04-04 2015-12-29 Chien-Min Sung Diamond tools and methods for making the same
US5921856A (en) * 1997-07-10 1999-07-13 Sp3, Inc. CVD diamond coated substrate for polishing pad conditioning head and method for making same
US5997388A (en) * 1997-08-11 1999-12-07 Micron Electronics, Inc. Apparatus for removing marks from integrated circuit devices
US5938508A (en) * 1997-08-11 1999-08-17 Micron Electronics, Inc. Method for removing marks from integrated circuit devices and devices so processed
JP2001523171A (ja) * 1998-02-27 2001-11-20 ポラスキイ，アンソニー 研磨材及びその製造方法
US6183346B1 (en) * 1998-08-05 2001-02-06 3M Innovative Properties Company Abrasive article with embossed isolation layer and methods of making and using
US6299508B1 (en) * 1998-08-05 2001-10-09 3M Innovative Properties Company Abrasive article with integrally molded front surface protrusions containing a grinding aid and methods of making and using
US6206759B1 (en) * 1998-11-30 2001-03-27 Micron Technology, Inc. Polishing pads and planarizing machines for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods for making and using such pads and machines
US6464571B2 (en) * 1998-12-01 2002-10-15 Nutool, Inc. Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
US6468139B1 (en) * 1998-12-01 2002-10-22 Nutool, Inc. Polishing apparatus and method with a refreshing polishing belt and loadable housing
US6589105B2 (en) 1998-12-01 2003-07-08 Nutool, Inc. Pad tensioning method and system in a bi-directional linear polisher
US7425250B2 (en) * 1998-12-01 2008-09-16 Novellus Systems, Inc. Electrochemical mechanical processing apparatus
JP2000246512A (ja) * 1998-12-28 2000-09-12 Ngk Spark Plug Co Ltd ダイヤモンド類被覆切削工具
JP3555844B2 (ja) 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
US6475573B1 (en) * 1999-05-03 2002-11-05 Guardian Industries Corp. Method of depositing DLC inclusive coating on substrate
US6277480B1 (en) * 1999-05-03 2001-08-21 Guardian Industries Corporation Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method
US6545809B1 (en) * 1999-10-20 2003-04-08 Flex Products, Inc. Color shifting carbon-containing interference pigments
US6749813B1 (en) 2000-03-05 2004-06-15 3M Innovative Properties Company Fluid handling devices with diamond-like films
US6795636B1 (en) 2000-03-05 2004-09-21 3M Innovative Properties Company Radiation-transmissive films on glass articles
US6316734B1 (en) 2000-03-07 2001-11-13 3M Innovative Properties Company Flexible circuits with static discharge protection and process for manufacture
US6776699B2 (en) * 2000-08-14 2004-08-17 3M Innovative Properties Company Abrasive pad for CMP
MXPA03001954A (es) 2000-09-08 2003-09-10 3M Innovative Properties Co Hoja abrasiva, metodo de manufactura de la misma y metodo de abrasion de un conector de fibra optica.
US6821189B1 (en) * 2000-10-13 2004-11-23 3M Innovative Properties Company Abrasive article comprising a structured diamond-like carbon coating and method of using same to mechanically treat a substrate
US6595506B1 (en) * 2000-11-17 2003-07-22 Epion Corporation Apparatus and method for reduced particulate generation during workpiece handling
US6902773B1 (en) * 2000-11-21 2005-06-07 Hitachi Global Storage Technologies Netherlands, B.V. Energy gradient ion beam deposition of carbon overcoats on rigid disk media for magnetic recordings
US6776917B2 (en) * 2001-01-03 2004-08-17 International Business Machines Corporation Chemical mechanical polishing thickness control in magnetic head fabrication
JP3911154B2 (ja) * 2001-03-16 2007-05-09 日本碍子株式会社 接着体及びその製造方法
US6815620B2 (en) * 2001-03-29 2004-11-09 3M Innovative Properties Company Flexible circuit with electrostatic damage limiting feature
US6459043B1 (en) 2001-03-29 2002-10-01 3M Innovative Properties Company Flexible circuit with electrostatic damage limiting feature and method of manufacture
US6514302B2 (en) * 2001-05-15 2003-02-04 Saint-Gobain Abrasives, Inc. Methods for producing granular molding materials for abrasive articles
US6995954B1 (en) 2001-07-13 2006-02-07 Magnecomp Corporation ESD protected suspension interconnect
US7106939B2 (en) 2001-09-19 2006-09-12 3M Innovative Properties Company Optical and optoelectronic articles
DE10147998A1 (de) * 2001-09-28 2003-04-10 Unaxis Balzers Ag Verfahren und Vorrichtung zur Erzeugung eines Plasmas
US7169685B2 (en) 2002-02-25 2007-01-30 Micron Technology, Inc. Wafer back side coating to balance stress from passivation layer on front of wafer and be used as die attach adhesive
US6939203B2 (en) * 2002-04-18 2005-09-06 Asm Nutool, Inc. Fluid bearing slide assembly for workpiece polishing
US7938997B2 (en) * 2002-07-05 2011-05-10 Los Alamos National Security, Llc Preparation of bulk superhard B-C-N nanocomposite compact
JP2004138128A (ja) 2002-10-16 2004-05-13 Nissan Motor Co Ltd 自動車エンジン用摺動部材
US6969198B2 (en) 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US8555921B2 (en) * 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US7866342B2 (en) * 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
JP3891433B2 (ja) 2003-04-15 2007-03-14 日産自動車株式会社 燃料噴射弁
US6802878B1 (en) 2003-04-17 2004-10-12 3M Innovative Properties Company Abrasive particles, abrasive articles, and methods of making and using the same
EP1479946B1 (en) 2003-05-23 2012-12-19 Nissan Motor Co., Ltd. Piston for internal combustion engine
EP1482190B1 (en) 2003-05-27 2012-12-05 Nissan Motor Company Limited Rolling element
JP2005008851A (ja) * 2003-05-29 2005-01-13 Nissan Motor Co Ltd 硬質炭素薄膜付き機械加工工具用切削油及び硬質炭素薄膜付き機械加工工具
JP2004360649A (ja) 2003-06-06 2004-12-24 Nissan Motor Co Ltd エンジン用ピストンピン
US20050025973A1 (en) * 2003-07-25 2005-02-03 Slutz David E. CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
JP4863152B2 (ja) 2003-07-31 2012-01-25 日産自動車株式会社 歯車
WO2005014761A2 (ja) 2003-08-06 2005-02-17 Nissan Motor Co., Ltd. 低摩擦摺動機構、低摩擦剤組成物及び摩擦低減方法
JP2005054617A (ja) 2003-08-08 2005-03-03 Nissan Motor Co Ltd 動弁機構
JP4973971B2 (ja) 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
EP1507088B1 (en) 2003-08-13 2007-08-29 Nissan Motor Company, Limited Structure for connecting piston to crankshaft
JP4117553B2 (ja) 2003-08-13 2008-07-16 日産自動車株式会社 チェーン駆動装置
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
JP4539205B2 (ja) 2003-08-21 2010-09-08 日産自動車株式会社 冷媒圧縮機
EP1508611B1 (en) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Transmission comprising low-friction sliding members and transmission oil therefor
US7489493B2 (en) * 2003-12-01 2009-02-10 Magnecomp Corporation Method to form electrostatic discharge protection on flexible circuits using a diamond-like carbon material
US7648622B2 (en) * 2004-02-27 2010-01-19 Novellus Systems, Inc. System and method for electrochemical mechanical polishing
US20060059688A1 (en) * 2004-09-22 2006-03-23 Tseng Shao C Method for producing a dynamic fluid bearing with high rotation precision and high hardness
WO2006047611A2 (en) * 2004-10-26 2006-05-04 Jayant Neogi Apparatus and method for polishing gemstones and the like
US8678878B2 (en) 2009-09-29 2014-03-25 Chien-Min Sung System for evaluating and/or improving performance of a CMP pad dresser
US9138862B2 (en) 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8398466B2 (en) 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US8974270B2 (en) 2011-05-23 2015-03-10 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8622787B2 (en) 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US9724802B2 (en) 2005-05-16 2017-08-08 Chien-Min Sung CMP pad dressers having leveled tips and associated methods
WO2006128960A1 (en) * 2005-06-03 2006-12-07 M-Real Oyj Method and apparatus for mechanical defibration of wood
US8346347B2 (en) 2005-09-15 2013-01-01 Palomar Medical Technologies, Inc. Skin optical characterization device
JP4710774B2 (ja) * 2005-11-09 2011-06-29 株式会社日立製作所 研磨定盤の製造方法
JP4854445B2 (ja) * 2006-09-25 2012-01-18 三菱マテリアル株式会社 Ｃｍｐコンディショナおよびその製造方法
WO2008047728A1 (fr) * 2006-10-13 2008-04-24 National Institute Of Advanced Industrial Science And Technology Stratifié, matériaux de meulage et abrasif réalisés à l'aide de celui-ci, et procédé pour la formation du stratifié
JP5182852B2 (ja) * 2007-10-12 2013-04-17 独立行政法人産業技術総合研究所 炭化珪素の研磨剤、及びそれを用いた炭化珪素の研磨方法
US9011563B2 (en) 2007-12-06 2015-04-21 Chien-Min Sung Methods for orienting superabrasive particles on a surface and associated tools
US8080073B2 (en) * 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
US8286715B2 (en) * 2008-08-20 2012-10-16 Exxonmobil Research And Engineering Company Coated sleeved oil and gas well production devices
US8220563B2 (en) * 2008-08-20 2012-07-17 Exxonmobil Research And Engineering Company Ultra-low friction coatings for drill stem assemblies
US8602113B2 (en) * 2008-08-20 2013-12-10 Exxonmobil Research And Engineering Company Coated oil and gas well production devices
JP5351967B2 (ja) * 2008-08-28 2013-11-27 スリーエム イノベイティブ プロパティズ カンパニー 構造化研磨物品、その製造方法、及びウエハの平坦化における使用
WO2010092616A1 (ja) * 2009-02-10 2010-08-19 国立大学法人広島大学 インプラント用材料及びその製造方法
JP5351948B2 (ja) * 2009-06-04 2013-11-27 東京エレクトロン株式会社 アモルファスカーボン膜の形成方法および形成装置
KR20110048659A (ko) * 2009-11-03 2011-05-12 일진다이아몬드(주) 와이어 쏘 및 와이어 쏘의 제조방법
US8590627B2 (en) * 2010-02-22 2013-11-26 Exxonmobil Research And Engineering Company Coated sleeved oil and gas well production devices
US8531026B2 (en) 2010-09-21 2013-09-10 Ritedia Corporation Diamond particle mololayer heat spreaders and associated methods
IT1404101B1 (it) * 2010-09-30 2013-11-08 Napoleon Abrasives S P A Abrasivo flessibile con un supporto combinato
CN115625629A (zh) * 2012-08-02 2023-01-20 3M创新有限公司 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法
US9598973B2 (en) 2012-11-28 2017-03-21 General Electric Company Seal systems for use in turbomachines and methods of fabricating the same
JP6398333B2 (ja) * 2014-06-03 2018-10-03 株式会社ジェイテクト ビトリファイドボンド砥石の製造方法
US11607776B2 (en) 2016-07-20 2023-03-21 3M Innovative Properties Company Shaped vitrified abrasive agglomerate, abrasive articles, and method of abrading
WO2018081246A1 (en) * 2016-10-25 2018-05-03 3M Innovative Properties Company Shaped vitrified abrasive agglomerate with shaped abrasive particles, abrasive articles, and related methods
KR102458318B1 (ko) 2016-12-23 2022-10-24 쓰리엠 이노베이티브 프로퍼티즈 캄파니 중합체 접합제 연마 물품 및 그의 제조 방법
US10247157B2 (en) * 2017-02-01 2019-04-02 GM Global Technology Operations LLC Diamond like carbon (DLC) coating for ethanol-blended fuel injector applications
US11684963B2 (en) * 2017-10-12 2023-06-27 Nippon Steel Corporation Method and apparatus for producing outer panel having character line
CN111936270A (zh) * 2018-03-30 2020-11-13 圣戈班磨料磨具有限公司 包括涂层的磨料制品
US10933508B2 (en) 2018-03-30 2021-03-02 Saint-Gobain Abrasives, Inc./Saint-Gobain Abrasifs Bonded abrasive article including a coating
JP7335426B2 (ja) 2019-09-05 2023-08-29 サンーゴバン アブレイシブズ，インコーポレイティド 改善されたスーパーサイズコートを有する被覆研磨剤
CN114481079A (zh) * 2021-12-22 2022-05-13 昆山浦元真空技术工程有限公司 仿钻真空镀膜工艺及其所用的仿钻真空镀膜机

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3351543A (en) * 1964-05-28 1967-11-07 Gen Electric Process of coating diamond with an adherent metal coating using cathode sputtering
US3508890A (en) * 1968-01-02 1970-04-28 Gen Electric Coated abrasive articles having plural metal coatings
US3992178A (en) * 1973-04-17 1976-11-16 Fabrika Ab Eka Flexible coated abrasive with graphite outer layer
US3874900A (en) * 1973-08-13 1975-04-01 Materials Technology Corp Article coated with titanium carbide and titanium nitride
DE2438601A1 (de) * 1974-08-10 1976-02-26 Winter & Sohn Ernst Rotierendes trennwerkzeug
US4115959A (en) * 1977-01-31 1978-09-26 Ramsey Corporation Method for increasing the life of silicon carbide grinding wheels
US4486286A (en) * 1982-09-28 1984-12-04 Nerken Research Corp. Method of depositing a carbon film on a substrate and products obtained thereby
US4505720A (en) * 1983-06-29 1985-03-19 Minnesota Mining And Manufacturing Company Granular silicon carbide abrasive grain coated with refractory material, method of making the same and articles made therewith
JPS60238481A (ja) * 1984-05-14 1985-11-27 Sumitomo Electric Ind Ltd 多重層被覆超硬合金
JPS6243861A (ja) * 1985-08-21 1987-02-25 Hitachi Ltd 回転磁気シ−ト装置
JPS62218071A (ja) * 1986-03-19 1987-09-25 Showa Denko Kk ダイヤモンド研摩シ−ト
JPS6313724A (ja) * 1986-07-04 1988-01-21 Nec Home Electronics Ltd プラスチツク成形品の成形年月表示方法
US5225275A (en) * 1986-07-11 1993-07-06 Kyocera Corporation Method of producing diamond films
JPS63210099A (ja) * 1987-02-26 1988-08-31 Nissin Electric Co Ltd ダイヤモンド膜の作製方法
DE3706340A1 (de) * 1987-02-27 1988-09-08 Winter & Sohn Ernst Verfahren zum auftragen einer verschleissschutzschicht und danach hergestelltes erzeugnis
US4859493A (en) * 1987-03-31 1989-08-22 Lemelson Jerome H Methods of forming synthetic diamond coatings on particles using microwaves
JPS63262468A (ja) * 1987-04-21 1988-10-28 Matsushita Electric Ind Co Ltd 研摩材の製造方法
JPH0788502B2 (ja) * 1987-05-15 1995-09-27 三菱マテリアル株式会社 切断および研削用硬質複合粉末砥粒
JPH0629401B2 (ja) * 1987-07-21 1994-04-20 日本プラスチック製砥株式会社 超硬物質をコーティングした砥粒
US4778730A (en) * 1987-09-09 1988-10-18 Remgrit Corporation Method of applying non-slip coating to tools and resulting product
JPH01139753A (ja) * 1987-11-25 1989-06-01 Namiki Precision Jewel Co Ltd ダイヤモンド被覆工具
US4974373A (en) * 1988-03-14 1990-12-04 Tokyo Magnetic Printing Co., Ltd. Abrasive tools
US5370912A (en) * 1988-10-31 1994-12-06 Norton Company Diamond film deposition with a microwave plasma
US4992082A (en) * 1989-01-12 1991-02-12 Ford Motor Company Method of toughening diamond coated tools
US4981717A (en) * 1989-02-24 1991-01-01 Mcdonnell Douglas Corporation Diamond like coating and method of forming
JP2829522B2 (ja) * 1989-03-03 1998-11-25 株式会社石塚研究所 被覆ダイヤモンド砥粒およびその製法
JPH02269790A (ja) * 1989-04-11 1990-11-05 Noritake Co Ltd 被覆高硬質砥粒，その製造方法及びその砥粒を含有する砥石
DE69013852T2 (de) * 1989-06-15 1995-06-08 Idemitsu Petrochemical Co Mit diamant beschichtetes element.
DE3941202A1 (de) * 1989-12-14 1990-06-07 Krupp Gmbh Verfahren zur erzeugung von schichten aus harten kohlenstoffmodifikationen und vorrichtung zur durchfuehrung des verfahrens
US5085671A (en) * 1990-05-02 1992-02-04 Minnesota Mining And Manufacturing Company Method of coating alumina particles with refractory material, abrasive particles made by the method and abrasive products containing the same
JPH0419076A (ja) * 1990-05-11 1992-01-23 Mitsubishi Materials Corp ダイヤモンドラッピングテープ
CA2044543C (en) * 1990-08-10 1999-12-14 Louis Kimball Bigelow Multi-layer superhard film structure
US5190807A (en) * 1990-10-18 1993-03-02 Diamonex, Incorporated Abrasion wear resistant polymeric substrate product
US5127924A (en) * 1991-07-01 1992-07-07 Russell Jeffrey D Hard particle coated grinding wheel
US5250086A (en) * 1992-03-25 1993-10-05 General Electric Company Multi-layer metal coated diamond abrasives for sintered metal bonded tools
JP3247729B2 (ja) * 1992-07-10 2002-01-21 沖電気工業株式会社 半導体装置の製造方法
US5286541A (en) * 1992-09-10 1994-02-15 Norton Company Coated abrasive having combination backing member
US5474816A (en) * 1993-04-16 1995-12-12 The Regents Of The University Of California Fabrication of amorphous diamond films
US5401543A (en) * 1993-11-09 1995-03-28 Minnesota Mining And Manufacturing Company Method for forming macroparticle-free DLC films by cathodic arc discharge
WO1995014553A1 (en) * 1993-11-23 1995-06-01 Plasmoteg Engineering Center An abrasive material for precision surface treatment and a method for the manufacturing thereof
US5551959A (en) * 1994-08-24 1996-09-03 Minnesota Mining And Manufacturing Company Abrasive article having a diamond-like coating layer and method for making same

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WO1996005942A1 (en) 1996-02-29
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US5707409A (en) 1998-01-13
JPH10504495A (ja) 1998-05-06
US5551959A (en) 1996-09-03

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